In-Situ Grazing Incidence Small-Angle X-ray Scattering Studies on Nanopore Evolution in Low-k Organosilicate Dielectric Thin Films

Real-time observation of nucleation and growth of Au on CdSe quantum dot templates

Semiconductor quantum dot (QD) arrays can be useful for optical devices such as lasers, solar cells and light-emitting diodes. As the size distribution influences the band-gap, it is worthwhile to investigate QDs prepared using different solvents because each of them could influence the overall morphology differently, depending on the ligand network around individual QDs. Here, we follow the nucleation and growth of gold (Au) on CdSe QD arrays to investigate the influence of surface ligands and thereby realized interparticle distance between QDs on Au growth behaviour. We particularly emphasize on the monolayer stage as the Au decoration on individual QDs is expected at this stage. Therefore, we sputter-deposit Au on each QD array to investigate the morphological evolution in real-time using time-resolved grazing-incidence small-angle X-ray scattering (GISAXS). The growth kinetics - independent of the template - signifies that the observed template-mediated nucleation is limited only to the very first few monolayers. Delicate changes in the Au growth morphology are seen in the immediate steps following the initial replicated decoration of the QD arrays. This is followed by a subsequent clustering and finally a complete Au coverage of the QD arrays.

Seventeen-Armed Star Polystyrenes in Various Molecular Weights: Structural Details and Chain Characteristics

Star-shaped polymers are very attractive because of their potential application ability in various technological areas due to their unique molecular topology. Thus, information on the molecular structure and chain characteristics of star polymers is essential for gaining insights into their properties and finding better applications. In this study, we report molecular structure details and chain characteristics of 17-armed polystyrenes in various molecular weights: 17-Arm(2k)-PS, 17-Arm(6k)-PS, 17-Arm(10k)-PS, and 17-Arm(20k)-PS. Quantitative X-ray scattering analysis using synchrotron radiation sources was conducted for this series of star polymers in two different solvents (cyclohexane and tetrahydrofuran), providing a comprehensive set of three-dimensional structure parameters, including radial density profiles and chain characteristics. Some of the structural parameters were crosschecked by qualitative scattering analysis and dynamic light scattering. They all were found to have ellipsoidal shapes consisting of a core and a fuzzy shell; such ellipse nature is originated from the dendritic core. In particular, the fraction of the fuzzy shell part enabling to store desired chemicals or agents was confirmed to be exceptionally high in cyclohexane, ranging from 74 to 81%; higher-molecular-weight star polymer gives a larger fraction of the fuzzy shell. The largest fraction (81%) of the fuzzy shell was significantly reduced to 52% in tetrahydrofuran; in contrast, the lowest fraction (19%) of core was increased to 48%. These selective shell contraction and core expansion can be useful as a key mechanism in various applications. Overall, the 17-armed polystyrenes of this study are suitable for applications in various technological fields including smart deliveries of drugs, genes, biomedical imaging agents, and other desired chemicals.

Solvent Effect on the Self-Assembly of a Thin Film Consisting of Y-Shaped Copolymer

The self-assembly of an amphiphilic Y-shaped copolymer consisting of two hydrophilic branches and one hydrophobic branch in a thin film is investigated under different conditions by virtue of mesoscopic computer modelling, accompanied by doping with a single solvent, doping with a binary solvent, and those solvent environments together with the introduction of confinement defined by various acting distances and influencing regions. A cylindrical micellar structure is maintained, as it is in the thin film with the doping of either 10% hydrophobic solvent or 10% hydrophilic solvent, whose structure consists of the hydrophobic core and hydrophilic shell. Attributed to the hydrophobicity/hydrophilia nature of the solvents, different solvents play an obvious role on the self-assembled structure, i.e., the hydrophobic solvent presents as a swelling effect, conversely, the hydrophilic solvent presents as a shrinking effect. Further, the synergistic effect of the binary solvents on the self-assembly produces the lowest values in both the average volumetric size and free energy density when the quantity of hydrophobic solvent and hydrophilic solvent is equivalent. Interestingly, the solvent effect becomes more pronounced under the existent of a confinement. When a lateral-oriented confinement is introduced, a periodically fluctuating change in the cylindrical size occurs in two near-wall regions, but the further addition of either hydrophobic or hydrophilic solvent can effectively eliminate such resulting hierarchical-sized cylinders and generate uniform small-sized cylinders. However, with the introduction of a horizontal-orientated confinement, the copolymers self-assemble into the spherical micellar structure. Moreover, the further addition of hydrophobic solvent leads to a decrease in the average size of micelles via coalescence mechanism, in contrast, the further addition of hydrophilic solvent causes an increase in the average size of micelles via splitting mechanism. These findings enrich our knowledge of the potential for the solvent effect on the self-assembly of amphiphilic copolymer system, and then provide theoretical supports on improving and regulating the mesoscopic structure of nanomaterials.

Unwarping GISAXS data

Grazing-incidence small-angle X-ray scattering (GISAXS) is a powerful technique for measuring the nanostructure of coatings and thin films. However, GISAXS data are plagued by distortions that complicate data analysis. The detector image is a warped representation of reciprocal space because of refraction, and overlapping scattering patterns appear because of reflection. A method is presented to unwarp GISAXS data, recovering an estimate of the true undistorted scattering pattern. The method consists of first generating a guess for the structure of the reciprocal-space scattering by solving for a mutually consistent prediction from the transmission and reflection sub-components. This initial guess is then iteratively refined by fitting experimental GISAXS images at multiple incident angles, using the distorted-wave Born approximation (DWBA) to convert between reciprocal space and detector space. This method converges to a high-quality reconstruction for the undistorted scattering, as validated by comparing with grazing-transmission scattering data. This new method for unwarping GISAXS images will broaden the applicability of grazing-incidence techniques, allowing experimenters to inspect undistorted visualizations of their data and allowing a broader range of analysis methods to be applied to GI data.

Sequential Infiltration Synthesis for the Design of Low Refractive Index Surface Coatings with Controllable Thickness

Control over refractive index and thickness of surface coatings is central to the design of low refraction films used in applications ranging from optical computing to antireflective coatings. Here, we introduce gas-phase sequential infiltration synthesis (SIS) as a robust, powerful, and efficient approach to deposit conformal coatings with very low refractive indices. We demonstrate that the refractive indices of inorganic coatings can be efficiently tuned by the number of cycles used in the SIS process, composition, and selective swelling of the of the polymer template. We show that the refractive index of Al₂O₃ can be lowered from 1.76 down to 1.1 using this method. The thickness of the Al₂O₃ coating can be efficiently controlled by the swelling of the block copolymer template in ethanol at elevated temperature, thereby enabling deposition of both single-layer and graded-index broadband antireflective coatings. Using this technique, Fresnel reflections of glass can be reduced to as low as 0.1% under normal illumination over a broad spectral range.

Small Angle X-ray Scattering for Nanoparticle Research

X-ray scattering is a structural characterization tool that has impacted diverse fields of study. It is unique in its ability to examine materials in real time and under realistic sample environments, enabling researchers to understand morphology at nanometer and angstrom length scales using complementary small and wide angle X-ray scattering (SAXS, WAXS), respectively. Herein, we focus on the use of SAXS to examine nanoscale particulate systems. We provide a theoretical foundation for X-ray scattering, considering both form factor and structure factor, as well as the use of correlation functions, which may be used to determine a particle's size, size distribution, shape, and organization into hierarchical structures. The theory is expanded upon with contemporary use cases. Both transmission and reflection (grazing incidence) geometries are addressed, as well as the combination of SAXS with other X-ray and non-X-ray characterization tools. We conclude with an examination of several key areas of research where X-ray scattering has played a pivotal role, including in situ nanoparticle synthesis, nanoparticle assembly, and operando studies of catalysts and energy storage materials. Throughout this review we highlight the unique capabilities of X-ray scattering for structural characterization of materials in their native environment.

Structural reliability evaluation of low-k nanoporous dielectric interlayers integrated into microelectronic devices

Structural reliability assessment on the integration of low-k nanoporous dielectrics into a multilayer structure, involving capping, chemical mechanical polishing, post-cleaning, and thermal annealing processes, was successfully demonstrated in a nondestructive manner.

Atomic layer deposition-based tuning of the pore size in mesoporous thin films studied by in situ grazing incidence small angle X-ray scattering

Atomic layer deposition (ALD) enables the conformal coating of porous materials, making the technique suitable for pore size tuning at the atomic level, e.g., for applications in catalysis, gas separation and sensing. It is, however, not straightforward to obtain information about the conformality of ALD coatings deposited in pores with diameters in the low mesoporous regime (<10 nm). In this work, it is demonstrated that in situ synchrotron based grazing incidence small angle X-ray scattering (GISAXS) can provide valuable information on the change in density and internal surface area during ALD of TiO(2) in a porous titania film with small mesopores (3-8 nm). The results are shown to be in good agreement with in situ X-ray fluorescence data representing the evolution of the amount of Ti atoms deposited in the porous film. Analysis of both datasets indicates that the minimum pore diameter that can be achieved by ALD is determined by the size of the Ti-precursor molecule.

Pathways of cylindrical orientations in PS-b-P4VP diblock copolymer thin films upon solvent vapor annealing

The orientation changes of perpendicular cylindrical microdomains in polystyrene-block-poly(4-vinylpyridine) (PS-b-P4VP) thin films upon annealing in different solvent vapors were investigated by in situ grazing incidence small-angle X-ray scattering (GISAXS) and ex situ scanning force microscopy (SFM). The swelling of P4VP perpendicular cylinders (C⊥) in chloroform, a non-selective solvent vapor, leads to the reorientation to in-plane cylinders through a disordered state in a particular kinetic pathway in the phase diagram upon drying. On the other hand, the swelling of the P4VP perpendicular cylinders in a selective solvent vapor (i.e., 1,4-dioxane) induces a morphological transition from cylindrical to ellipsoidal as a transient structure to spherical microdomains; subsequent solvent evaporation resulted in shrinkage of the matrix in the vertical direction, merging the ellipsoidal domains into the perpendicularly aligned cylinders. In this paper, we have discussed the mechanism based on the selectivity of the solvent to the constituting blocks that is mainly responsible for the orientation changes.

Probing the self-assembled nanostructures of functional polymers with synchrotron grazing incidence X-ray scattering

For advanced functional polymers such as biopolymers, biomimic polymers, brush polymers, star polymers, dendritic polymers, and block copolymers, information about their surface structures, morphologies, and atomic structures is essential for understanding their properties and investigating their potential applications. Grazing incidence X-ray scattering (GIXS) is established for the last 15 years as the most powerful, versatile, and nondestructive tool for determining these structural details when performed with the aid of an advanced third-generation synchrotron radiation source with high flux, high energy resolution, energy tunability, and small beam size. One particular merit of this technique is that GIXS data can be obtained facilely for material specimens of any size, type, or shape. However, GIXS data analysis requires an understanding of GIXS theory and of refraction and reflection effects, and for any given material specimen, the best methods for extracting the form factor and the structure factor from the data need to be established. GIXS theory is reviewed here from the perspective of practical GIXS measurements and quantitative data analysis. In addition, schemes are discussed for the detailed analysis of GIXS data for the various self-assembled nanostructures of functional homopolymers, brush, star, and dendritic polymers, and block copolymers. Moreover, enhancements to the GIXS technique are discussed that can significantly improve its structure analysis by using the new synchrotron radiation sources such as third-generation X-ray sources with picosecond pulses and partial coherence and fourth-generation X-ray laser sources with femtosecond pulses and full coherence.

Complex Self-Assembled Morphologies of Thin Films of an Asymmetric A3B3C3 Star Polymer

An asymmetric nine-arm star polymer, (polystyrene)₃-(poly(4-methoxystyrene))₃-(polyisoprene)₃ (PS₃-PMOS₃-PI₃) was synthesized, and the details of the structures of its thin films were successfully investigated for the first time by using in situ grazing incidence X-ray scattering (GIXS) with a synchrotron radiation source. Our quantitative GIXS analysis showed that thin films of the star polymer molecules have very complex but highly ordered and preferentially in-plane oriented hexagonal (HEX) structures consisting of truncated PS cylinders and PMOS triangular prisms in a PI matrix. This HEX structure undergoes a partial rotational transformation process at temperatures above 190 °C that produces a 30°-rotated HEX structure; this structural isomer forms with a volume fraction of 23% during heating up to 220 °C and persists during subsequent cooling. These interesting and complex self-assembled nanostructures are discussed in terms of phase separation, arm number, volume ratio, and confinement effects.

Comprehensive synchrotron grazing-incidence X-ray scattering analysis of nanostructures in porous polymethylsilsesquioxane dielectric thin films

A complete grazing-incidence X-ray scattering (GIXS) formula has been derived for nanopores buried in a polymer dielectric thin film supported by a substrate. Using the full power of the scattering formula, GIXS data from nanoporous polymethylsilsesquioxane dielectric thin films, a model nanoporous system, have successfully been analysed. The nanopores were found to be spherical and to have a certain degree of size distribution but were randomly dispersed in the film. In the film, GIXS was confirmed to arise predominantlyviathe first scattering process in which the incident X-ray beam scatters without reflection; the other scattering processes and their contributions were significantly dependent on the grazing angle. This study also confirmed that GIXS scattering can be analysed using only independent scattering terms, but this simple approach can only provide structural parameters. The cross terms were found to make a relatively small contribution to the intensity of the overall scattering but were required for the complete characterization of the measured two-dimensional scattering data, in particular the extracted out-of-plane scattering data, and their inclusion in the analysis enabled film properties such as film thickness, critical angle (i.e.electron density), refractive index and the absorption term to be determined.

The dedicated high-resolution grazing-incidence X-ray scattering beamline 8-ID-E at the Advanced Photon Source

As an increasingly important structural-characterization technique, grazing-incidence X-ray scattering (GIXS) has found wide applications for in situ and real-time studies of nanostructures and nanocomposites at surfaces and interfaces. A dedicated beamline has been designed, constructed and optimized at beamline 8-ID-E at the Advanced Photon Source for high-resolution and coherent GIXS experiments. The effectiveness and applicability of the beamline and the scattering techniques have been demonstrated by a host of experiments including reflectivity, grazing-incidence static and kinetic scattering, and coherent surface X-ray photon correlation spectroscopy. The applicable systems that can be studied at 8-ID-E include liquid surfaces and nanostructured thin films.

Molecular layer-by-layer self-assembly and mercury sensing characteristics of novel brush polymers bearing thymine moieties

Two new brush polyoxyethylenes bearing thymine moieties at the bristle ends have been synthesized as model polymers in which the chemical loading of the thymine functional group into the polymer is maximized: poly(oxy(11-thyminoacetyloxyundecylthiomethyl)ethylene) (PECH(S)-T) and poly(oxy(11-thyminoacetyloxyundecylsulfonylmethyl)ethylene) (PECH(SO(2))-T). These brush polymers are thermally stable up to around 225 °C, and their glass transitions occur in the range 23-27 °C, but they have significantly different properties despite the similarity of their chemical structures. In particular, PECH(SO(2))-T films exhibit better performance in sensing mercury ions than PECH(S)-T films. These differences were found to originate in the differences between their morphological structures. The PECH(SO(2))-T film has a multi-bilayer structure without interdigitation, in which the layers stack along the out-of-plane of the film and provide a thymine-rich surface. In contrast, the PECH(S)-T film is amorphous with a relatively low population of thymine moieties at the surface. This study demonstrated that a thymine-rich surface is required for recyclable thymine-based polymers to provide highly improved sensitivity and selectivity as well as full reversibility in the sensing of mercury ions. A thymine-rich surface can be achieved with a brush polymer bearing thymine moieties that can self-assemble into a multi-bilayer structure. Because of the thymine-rich surface, the PECH(SO(2))-T thin films even in only 6 nm thickness demonstrate the detection of mercury ions in aqueous solutions with a detection limit of 10(-6) M.

pH-dependent structures of ferritin and apoferritin in solution: disassembly and reassembly

The pH-dependent structures of the ferritin shell (apoferritin, 24-mer) and the ferrihydrite core, under physiological conditions that permit enzymatic activity, were investigated by synchrotron small-angle X-ray scattering (SAXS). The solution structure of apoferritin was found to be nearly identical to the crystal structure. The shell thickness and hollow core volumes were estimated. The intact hollow spherical apoferritin was stable over a wide pH range, 3.40-10.0, and the ferrihydrite core was stable over the pH range 2.10-10.0. The apoferritin subunits underwent aggregation below pH 0.80, whereas the ferrihydrite cores aggregated below pH 2.10 as a result of the disassembly of the ferritin shell under the strongly acidic conditions. As the pH decreased from 3.40 to 0.80, apoferritin underwent stepwise disassembly by first forming a hollow sphere with two holes, then a headset-shaped structure, and, finally, rodlike oligomers. As the pH was increased from pH 1.96, the disassembled rodlike oligomers recovered only to the headset-shaped structure, and the disassembled headset-shaped intermediates recovered only to the hollow spherical structure with two hole defects. The apoferritin hole defects that formed during the disassembly process did not heal as the pH was increased to neutral or slightly basic conditions. The pH-induced apoferritin disassembly and reassembly processes were not fully reversible, although they were pseudoreversible over a limited pH range, between 10.0 and 2.66.

Debye–Scherrer rings from block copolymer films with powder-like order

The powder-like orientation of lamellar domains in thin films of the diblock copolymer polystyrene-block-poly(methyl methacrylate) is investigated using grazing-incidence small-angle X-ray scattering (GISAXS) and grazing-incidence small-angle neutron scattering (GISANS). Conventional monochromatic GISANS and GISAXS measurements are compared with neutron time-of-flight GISANS. For angles of incidence and exit larger than the critical angle of total external reflection of the polymer, Debye–Scherrer rings are observed. The position of the Debye–Scherrer rings is described quantitatively based on a reduced version of the distorted-wave Born approximation. A strong distortion of the ring shape is caused by refraction and reflections from the film interfaces. Close to the critical angle, the ring shape collapses into a banana shape.

A grazing incidence small-angle x-ray scattering analysis on capped Ge nanodots in layer structures

The grazing incidence small-angle x-ray scattering (GISAXS) intensity from buried Ge nanodots is examined both by GISAXS/reflectivity measurements and by simulations with distorted wave Born approximation (DWBA). The validity and the condition of using the Born approximation (BA) are discussed using simulations based on the layer structures modeled from a reflectivity analysis. As expected in the previous kinematic analysis, use of the BA is reasonable in determining the size and the shape of very small or thin nanodots. Several effects of layer structures on the GISAXS analysis are discussed.

Film thickness dependence of phase separation and dewetting behaviors in PMMA/SAN blend films

Film thickness dependence of complex behaviors coupled by phase separation and dewetting in blend [poly(methyl methacrylate) (PMMA) and poly(styrene-ran-acrylonitrile) (SAN)] films on silicon oxide substrate at 175 °C was investigated by grazing incidence ultrasmall-angle X-ray scattering (GIUSAX) and in situ atomic force microscopy (AFM). It was found that the dewetting pathway was under the control of the parameter U(q0)/E, which described the initial amplitude of the surface undulation and original thickness of film, respectively. Furthermore, our results showed that interplay between phase separation and dewetting depended crucially on film thickness. Three mechanisms including dewetting-phase separation/wetting, dewetting/wetting-phase separation, and phase separation/wetting-pseudodewetting were discussed in detail. In conclusion, it is relative rates of phase separation and dewetting that dominate the interplay between them.

Effect of C(60) fullerene on the duplex formation of i-motif DNA with complementary DNA in solution

The structural effects of fullerene on i-motif DNA were investigated by characterizing the structures of fullerene-free and fullerene-bound i-motif DNA, in the presence of cDNA and in solutions of varying pH, using circular dichroism and synchrotron small-angle X-ray scattering. To facilitate a direct structural comparison between the i-motif and duplex structures in response to pH stimulus, we developed atomic scale structural models for the duplex and i-motif DNA structures, and for the C(60)/i-motif DNA hybrid associated with the cDNA strand, assuming that the DNA strands are present in an ideal right-handed helical conformation. We found that fullerene shifted the pH-induced conformational transition between the i-motif and the duplex structure, possibly due to the hydrophobic interactions between the terminal fullerenes and between the terminal fullerenes and an internal TAA loop in the DNA strand. The hybrid structure showed a dramatic reduction in cyclic hysteresis.

On the thermal stability of surface-assembled viral-metal nanoparticle complexes

Biological supramolecules offer attractive templates for nanoparticle synthesis and nanodevice fabrication because of their precise size and shape. Viruses in particular have gained significant attention in nanodevice fabrication for applications such as nanoelectronics, batteries, catalysis, and sensing. However, the performance range of these viral-nanoparticle complexes is not well known because of the lack of fundamental studies on their properties. In this work, we employ in situ grazing incidence small-angle X-ray scattering (GISAXS) to examine the thermal stability of viral-nanoparticle complexes composed of tobacco mosaic virus (TMV) and palladium nanoparticles. Specifically, we show that the stability of the Pd nanoparticles on TMV is significantly enhanced as compared to that of particles on the solid substrate surface. Furthermore, we show that the agglomeration of Pd nanoparticles and the degradation of the TMV templates are coupled and occur simultaneously. These results demonstrate a potent methodology toward the in situ analysis of subtle changes in viral-nanoparticle complexes in dynamic environments. We envision that the results and methodology demonstrated in this study could be applied to better understand the properties and dynamic behaviors of organic-inorganic hybrid materials and nanodevices in various applications.

Reversible Morphology Control in Block Copolymer Films via Solvent Vapor Processing: An In Situ GISAXS study

The real time changes occurring within films of cylinder-forming poly(α-methylstyrene-block-4-hydroxystyrene) (PαMS-b-PHOST) were monitored as they were swollen in tetrahydrofuran (THF) and acetone solvent vapors. In situ information was obtained by combining grazing incidence small angle X-ray scattering (GISAXS) with film thickness monitoring of the solvent vapor swollen films. We show that for self assembly to occur, the polymer thin film must surpass a swollen thickness ratio of 212% of its original thickness when swollen in THF vapors and a ratio of 268% for acetone vapor annealing. As the polymer becomes plasticized by solvent vapor uptake, the polymer chains must become sufficiently mobile to self assemble, or reorganize, at room temperature. Using vapors of a solvent selective to one of the blocks, in our case PHOST-selective acetone, an order-order transition occured driven by the shift in volume fraction. The BCC spherical phase assumed in the highly swollen state can be quenched by rapid drying. Upon treatment with vapor of a non-selective solvent, THF, the film maintained the cylindrical morphology suggested by its dry-state volume fraction. In situ studies indicate that self-assembly occurs spontaneously upon attaining the threshold swelling ratios.