Reconfigurable photonic metamaterials

Thermally Reconfigurable, 3D Chiral Optical Metamaterials: Building with Colloidal Nanoparticle Assemblies

The three-dimensional, geometric handedness of chiral optical metamaterials allows for the rotation of linearly polarized light and creates a differential interaction with right and left circularly polarized light, known as circular dichroism. These three-dimensional metamaterials enable polarization control of optical and spin excitation and detection, and their stimuli-responsive, dynamic switching widens applications in chiral molecular sensing and imaging and spintronics; however, there are few reconfigurable solid-state implementations. Here, we report all-solid-state, thermally reconfigurable chiroptical metamaterials composed of arrays of three-dimensional nanoparticle/metal bilayer heterostructures fabricated from coassemblies of phase change VO2 and metallic Au colloidal nanoparticles and thin films of Ni. These metamaterials show dynamic switching in the mid-infrared as VO2 is thermally cycled through an insulator-metal phase transition. The spectral range of operation is tailored in breadth by controlling the periodicity of the arrays and thus the hybridization of optical modes and in position through the mixing of VO2 and Au nanoparticles.

Terahertz Metasurfaces Exploiting the Phase Transition of Vanadium Dioxide

Artificially designed modulators that enable a wealth of freedom in manipulating the terahertz (THz) waves at will are an essential component in THz sources and their widespread applications. Dynamically controlled metasurfaces, being multifunctional, ultrafast, integrable, broadband, high contrasting, and scalable on the operating wavelength, are critical in developing state-of-the-art THz modulators. Recently, external stimuli-triggered THz metasurfaces integrated with functional media have been extensively explored. The vanadium dioxide (VO2)-based hybrid metasurfaces, as a unique path toward active meta-devices, feature an insulator-metal phase transition under the excitation of heat, electricity, and light, etc. During the phase transition, the optical and electrical properties of the VO2 film undergo a massive modification with either a boosted or dropped conductivity by more than four orders of magnitude. Being benefited from the phase transition effect, the electromagnetic response of the VO2-based metasufaces can be actively controlled by applying external excitation. In this review, we present recent advances in dynamically controlled THz metasurfaces exploiting the VO2 phase transition categorized according to the external stimuli. THz time-domain spectroscopy is introduced as an indispensable platform in the studies of functional VO2 films. In each type of external excitation, four design strategies are employed to realize external stimuli-triggered VO2-based THz metasurfaces, including switching the transreflective operation mode, controlling the dielectric environment of metallic microstructures, tailoring the equivalent resonant microstructures, and modifying the electromagnetic properties of the VO2 unit cells. The microstructures' design and electromagnetic responses of the resulting active metasurfaces have been systematically demonstrated, with a particular focus on the critical role of the VO2 films in the dynamic modulation processes.

Hybrid dual-mode tunable polarization conversion metasurface based on graphene and vanadium dioxide

We present and numerically verify a functionally hybrid dual-mode tunable polarization conversion metasurface based on graphene and vanadium dioxide (VO₂). The tunable polarization converter consists of two patterned graphene layers separated by grating which is composed of gold and VO₂. Due to the existence of phase change material VO₂, the polarization conversion mode can be switched flexibly between the transmission and reflection modes. Theoretical calculations show the proposed polarization conversion metasurface can obtain giant asymmetric transmission (AT) at 0.42 and 0.77 THz when VO₂ is in the insulating state. Conversely, when VO₂ is in the metallic state, the converter switches to the reflection mode, demonstrating broadband polarization conversion for both forward and backward incidences. Furthermore, the conductivity of graphene can be modulated by changing the gate voltage, which allows dynamic control polarization conversion bandwidth of the reflection mode as well as the AT of the transmission mode. The robustness of the metasurface has also been verified, the high polarization conversion efficiency and AT can be maintained over wide incidence angles up to 65° for both the xoz plane and yoz plane. These advantages make the proposed hybrid tunable polarization conversion metasurface a promising candidate for THz radiation switching and modulation.

Recent Advances in Metaphotonic Biosensors

Metaphotonic devices, which enable light manipulation at a subwavelength scale and enhance light-matter interactions, have been emerging as a critical pillar in biosensing. Researchers have been attracted to metaphotonic biosensors, as they solve the limitations of the existing bioanalytical techniques, including the sensitivity, selectivity, and detection limit. Here, we briefly introduce types of metasurfaces utilized in various metaphotonic biomolecular sensing domains such as refractometry, surface-enhanced fluorescence, vibrational spectroscopy, and chiral sensing. Further, we list the prevalent working mechanisms of those metaphotonic bio-detection schemes. Furthermore, we summarize the recent progress in chip integration for metaphotonic biosensing to enable innovative point-of-care devices in healthcare. Finally, we discuss the impediments in metaphotonic biosensing, such as its cost effectiveness and treatment for intricate biospecimens, and present a prospect for potential directions for materializing these device strategies, significantly influencing clinical diagnostics in health and safety.

Integrated Reconfigurable Photon-Pair Source Based on High-Q Nonlinear Chalcogenide Glass Microring Resonators

Chalcogenide glasses (ChGs) have recently emerged as enabling materials for building reconfigurable nanophotonic devices by employing their refractive index changes associated with photosensitive effects. In particular, the availability of low-loss thin-film ChGs and the realization of high-Q microresonators provide exciting opportunities for integrated photonics. So far, the ChG photonic devices are predominately operated in the classical optics regime. In this work, we present the realization on-chip bright photon-pair quantum light sources via spontaneous four-wave mixing in a high-Q microring resonator fabricated on the newly developed ChG Ge₂₅Sb₁₀S₆₅ platform. The emission wavelength of the photon-pair source can be continuously tuned across a double-free spectral range in a reconfigurable manner. Our work serves as a starting point to fully unleash the potential of exploiting ChGs for developing reconfigurable integrated quantum photonic devices.

Design of optically transparent metasurfaces based on CVD graphene for mmWave applications

We propose and numerically investigate a smart, optically transparent digital metasurface reflective in the mmWave range, based on CVD graphene programmable elements. For both TM and TE polarizations, we detail the optimization of the unit cells, designed to exhibit two distinct states that correspond to those of binary encoding. The whole metasurface encoding can be customized to provide different electromagnetic functions, such as wide-band beam splitting at a controlled angle and reduction of the Radar Cross Section. Optically transparent metasurfaces could be integrated and exploited in windows and transparent surfaces in future Beyond-5G and 6G ecosystems.

Optimization of metamaterials and metamaterial-microcavity based on deep neural networks

Computational inverse-design and forward prediction approaches provide promising pathways for on-demand nanophotonics. Here, we use a deep-learning method to optimize the design of split-ring metamaterials and metamaterial-microcavities. Once the deep neural network is trained, it can predict the optical response of the split-ring metamaterial in a second which is much faster than conventional simulation methods. The pretrained neural network can also be used for the inverse design of split-ring metamaterials and metamaterial-microcavities. We use this method for the design of the metamaterial-microcavity with the absorptance peak at 1310 nm. Experimental results verified that the deep-learning method is a fast, robust, and accurate method for designing metamaterials with complex nanostructures.

Rechargeable Metasurfaces for Dynamic Color Display Based on a Compositional and Mechanical Dual-Altered Mechanism

Dynamic color display can be realized by tunable optical metasurfaces based on the compositional or structural control. However, it is still a challenge to realize the efficient modulation by a single-field method. Here, we report a novel compositional and mechanical dual-altered rechargeable metasurface for reversible and broadband optical reconfiguration in both visible and near-infrared wavelength regions. By employing a simple fabrication and integration strategy, the continuous optical reconfiguration is manipulated through an electro-chemo-mechanical coupled process in a lithium ion battery, where lithiation and delithiation processes occur dynamically under a low electric voltage (≤1.5 V). By controlling the phase transformation from Si to Li xSi, both structural morphology and optical scattering could be rapidly and dramatically tailored within 30 s, exhibiting high-contrast colorization and decolorization in a large-area nanofilm and showing long cyclic stability. Significant wide-angle reconfiguration of high-resolution structural colors in bowtie metasurfaces is demonstrated from anomalous reflection. The results provide a multifield mechanism for reconfigurable photonic devices, and the new platform can be introduced to the multidimensional information encryption and storage.

Electro-Optical Modulation in High Q Metasurface Enhanced with Liquid Crystal Integration

Electro-optical tuning metasurfaces are particularly attractive since they open up routes for dynamic reconfiguration. The electro-optic (EO) modulation strength essentially depends on the sensitivity to the EO-induced refractive index changes. In this paper, lithium niobate (LiNbO₃) metasurfaces integrated with liquid crystals (LCs) are theoretically investigated. Cylinder arrays are proposed to support quasi-bound states in the continuum (quasi-BICs). The quasi-BIC resonances can significantly enhance the lifetime of photons and the local field, contributing to the EO-refractive index changes. By integrating metasurfaces with LCs, the combined influence of the LC reorientation and the Pockels electro-optic effect of LiNbO₃ is leveraged to tune the transmitted wavelength and phase spectrum around the quasi-BIC wavelength, resulting in an outstanding tuning sensitivity up to Δλ/ΔV ≈ 0.6 nm/V and relieving the need of high voltage. Furthermore, the proposed structure can alleviate the negative influence of sidewall tilt on device performance. The results presented in this work can foster wide application and prospects for the implementation of tunable displays, light detection and ranging (LiDAR), and spatial light modulators (SLMs).

Light-driven single-cell rotational adhesion frequency assay

The interaction between cell surface receptors and extracellular ligands is highly related to many physiological processes in living systems. Many techniques have been developed to measure the ligand-receptor binding kinetics at the single-cell level. However, few techniques can measure the physiologically relevant shear binding affinity over a single cell in the clinical environment. Here, we develop a new optical technique, termed single-cell rotational adhesion frequency assay (scRAFA), that mimics in vivo cell adhesion to achieve label-free determination of both homogeneous and heterogeneous binding kinetics of targeted cells at the subcellular level. Moreover, the scRAFA is also applicable to analyze the binding affinities on a single cell in native human biofluids. With its superior performance and general applicability, scRAFA is expected to find applications in study of the spatial organization of cell surface receptors and diagnosis of infectious diseases.

SUPPLEMENTARY INFORMATION

The online version contains supplementary material available at 10.1186/s43593-022-00020-4.

Enabling Active Nanotechnologies by Phase Transition: From Electronics, Photonics to Thermotics

Phase transitions can occur in certain materials such as transition metal oxides (TMOs) and chalcogenides when there is a change in external conditions such as temperature and pressure. Along with phase transitions in these phase change materials (PCMs) come dramatic contrasts in various physical properties, which can be engineered to manipulate electrons, photons, polaritons, and phonons at the nanoscale, offering new opportunities for reconfigurable, active nanodevices. In this review, we particularly discuss phase-transition-enabled active nanotechnologies in nonvolatile electrical memory, tunable metamaterials, and metasurfaces for manipulation of both free-space photons and in-plane polaritons, and multifunctional emissivity control in the infrared (IR) spectrum. The fundamentals of PCMs are first introduced to explain the origins and principles of phase transitions. Thereafter, we discuss multiphysical nanodevices for electronic, photonic, and thermal management, attesting to the broad applications and exciting promises of PCMs. Emerging trends and valuable applications in all-optical neuromorphic devices, thermal data storage, and encryption are outlined in the end.

Spin-State Modulation in FeII -Based Hofmann-Type Coordination Polymers: From Molecules to Materials

Spin crossover complexes that reversibly interconvert between two stable states imitate a binary state of 0 and 1, delivering a promising possibility to address the data processing concept in smart materials. Thus, a comprehensive understanding of the modulation of magnetic transition between high spin and low spin and the factors responsible for stabilizing the spin states is an essential theme in modern materials design. In this context, the present review attempts to provide a concise outline of the design strategy employed at the molecular level for fine-tuning the spin-state switching in Fe^II -based Hofmann-type coordination polymers and their effects on the optical and magnetic response. In addition, development towards the nanoscale architectures of HCPs, i. e., in terms of nanoparticles and thin films, are emphasized to bridge the gap between the laboratory and reality.

Metamaterials and Metasurfaces: A Review from the Perspectives of Materials, Mechanisms and Advanced Metadevices

Throughout human history, the control of light, electricity and heat has evolved to become the cornerstone of various innovations and developments in electrical and electromagnetic technologies. Wireless communications, laser and computer technologies have all been achieved by altering the way light and other energy forms act naturally and how to manage them in a controlled manner. At the nanoscale, to control light and heat, matured nanostructure fabrication techniques have been developed in the last two decades, and a wide range of groundbreaking processes have been achieved. Photonic crystals, nanolithography, plasmonics phenomena and nanoparticle manipulation are the main areas where these techniques have been applied successfully and led to an emergent material sciences branch known as metamaterials. Metamaterials and functional material development strategies are focused on the structures of the matter itself, which has led to unconventional and unique electromagnetic properties through the manipulation of light-and in a more general picture the electromagnetic waves-in widespread manner. Metamaterial's nanostructures have precise shape, geometry, size, direction and arrangement. Such configurations are impacting the electromagnetic light waves to generate novel properties that are difficult or even impossible to obtain with natural materials. This review discusses these metamaterials and metasurfaces from the perspectives of materials, mechanisms and advanced metadevices in depth, with the aim to serve as a solid reference for future works in this exciting and rapidly emerging topic.

Active optical metasurfaces: comprehensive review on physics, mechanisms, and prospective applications

Optical metasurfaces with subwavelength thickness hold considerable promise for future advances in fundamental optics and novel optical applications due to their unprecedented ability to control the phase, amplitude, and polarization of transmitted, reflected, and diffracted light. Introducing active functionalities to optical metasurfaces is an essential step to the development of next-generation flat optical components and devices. During the last few years, many attempts have been made to develop tunable optical metasurfaces with dynamic control of optical properties (e.g., amplitude, phase, polarization, spatial/spectral/temporal responses) and early-stage device functions (e.g., beam steering, tunable focusing, tunable color filters/absorber, dynamic hologram, etc) based on a variety of novel active materials and tunable mechanisms. These recently-developed active metasurfaces show significant promise for practical applications, but significant challenges still remain. In this review, a comprehensive overview of recently-reported tunable metasurfaces is provided which focuses on the ten major tunable metasurface mechanisms. For each type of mechanism, the performance metrics on the reported tunable metasurface are outlined, and the capabilities/limitations of each mechanism and its potential for various photonic applications are compared and summarized. This review concludes with discussion of several prospective applications, emerging technologies, and research directions based on the use of tunable optical metasurfaces. We anticipate significant new advances when the tunable mechanisms are further developed in the coming years.

Actively MEMS-Based Tunable Metamaterials for Advanced and Emerging Applications

In recent years, tunable metamaterials have attracted intensive research interest due to their outstanding characteristics, which are dependent on the geometrical dimensions rather than the material composition of the nanostructure. Among tuning approaches, micro-electro-mechanical systems (MEMS) is a well-known technology that mechanically reconfigures the metamaterial unit cells. In this study, the development of MEMS-based metamaterial is reviewed and analyzed based on several types of actuators, including electrothermal, electrostatic, electromagnetic, and stretching actuation mechanisms. The moveable displacement and driving power are the key factors in evaluating the performance of actuators. Therefore, a comparison of actuating methods is offered as a basic guideline for selecting micro-actuators integrated with metamaterial. Additionally, by exploiting electro-mechanical inputs, MEMS-based metamaterials make possible the manipulation of incident electromagnetic waves, including amplitude, frequency, phase, and the polarization state, which enables many implementations of potential applications in optics. In particular, two typical applications of MEMS-based tunable metamaterials are reviewed, i.e., logic operation and sensing. These integrations of MEMS with metamaterial provide a novel route for the enhancement of conventional optical devices and exhibit great potentials in innovative applications, such as intelligent optical networks, invisibility cloaks, photonic signal processing, and so on.

Far-Infrared Near-Field Optical Imaging and Kelvin Probe Force Microscopy of Laser-Crystallized and -Amorphized Phase Change Material Ge3Sb2Te6

Chalcogenide phase change materials reversibly switch between non-volatile states with vastly different optical properties, enabling novel active nanophotonic devices. However, a fundamental understanding of their laser-switching behavior is lacking and the resulting local optical properties are unclear at the nanoscale. Here, we combine infrared scattering-type scanning near-field optical microscopy (SNOM) and Kelvin probe force microscopy (KPFM) to investigate four states of laser-switched Ge₃Sb₂Te₆ (as-deposited amorphous, crystallized, reamorphized, and recrystallized) with nanometer lateral resolution. We find SNOM to be especially sensitive to differences between crystalline and amorphous states, while KPFM has higher sensitivity to changes introduced by melt-quenching. Using illumination from a free-electron laser, we use the higher sensitivity to free charge carriers of far-infrared (THz) SNOM compared to mid-infrared SNOM and find evidence that the local conductivity of crystalline states depends on the switching process. This insight into the local switching of optical properties is essential for developing active nanophotonic devices.

Programmable Multistable Perforated Shellular

Developing bistable metamaterials has recently offered a new design paradigm for deployable structures and reusable dampers. While most bistable mechanisms possess inclined/curved struts, a new 3D multistable shellular metamaterial is developed by introducing delicate perforations on the surface of Schwarz's Primitive shellular, integrating the unique properties of shellular materials such as high surface area, stiffness, and energy absorption with the multistability concept. Denoting the fundamental snapping part by motif, certain shellular motifs with elliptical perforations exhibit mechanical bistability. To bring the concept of multistability to a single motif, multistable shellular motifs are developed by introducing multilayer staggered perforations that form hinges and facilitate local instability. Adopting an n-layer staggered perforation (n hinges) design leads to a maximum 2^n-1 stable states within one shellular motif during loading and unloading. Three-directional multistable shellulars are attained by extending the perforation design in three orthogonal directions. Harnessing snap-through and snap-back behaviors and self-contact, the introduced multistable perforated shellulars exhibit strong rigidity both in loading and unloading, and enhanced energy dissipation. The introduced design strategy opens up new horizons for creating multidirectional multistable metamaterials with load bearing capabilities for applications in soft robotics, shape-morphing architectures, and reusable and deployable energy absorbers/dampers.

Self-Assembly of Silica-Gold Core-Shell Microparticles by Electric Fields Toward Dynamically Tunable Metamaterials

Metamaterials, rationally engineered composite materials with exotic properties, have provided unprecedented opportunities to manipulate the propagation of electromagnetic waves and control light-matter interactions in a prescribed manner. At present, most metamaterials are in solid states, and their functions are fixed once fabricated. Applying external electric fields to assemble metallic and metallodielectric particles into distinct configurations is an approach to realize dynamically tunable or reconfigurable metamaterials. In this paper, we show that core-shell microparticles can be self-assembled into chain structures under an alternating current (AC) electric field at different oscillation frequencies. We have conducted optical characterizations of silica-gold core-shell particles by Fourier transform infrared (FTIR) spectroscopy, which show distinct optical responses at mid-infrared wavelengths before and after the chain formation. Full-wave simulations unveil that the spectral features arise from the coupling between the sophisticated plasmonic resonant modes of individual core-shell particles. The reconfigurable metamaterials based on the manipulation and assembly of metallic and metallodielectric particles have potential applications in optofluidic devices, liquid-borne microcircuits, and optical sensing.

In3SbTe2 as a programmable nanophotonics material platform for the infrared

The high dielectric optical contrast between the amorphous and crystalline structural phases of non-volatile phase-change materials (PCMs) provides a promising route towards tuneable nanophotonic devices. Here, we employ the next-generation PCM In₃SbTe₂ (IST) whose optical properties change from dielectric to metallic upon crystallization in the whole infrared spectral range. This distinguishes IST as a switchable infrared plasmonic PCM and enables a programmable nanophotonics material platform. We show how resonant metallic nanostructures can be directly written, modified and erased on and below the meta-atom level in an IST thin film by a pulsed switching laser, facilitating direct laser writing lithography without need for cumbersome multi-step nanofabrication. With this technology, we demonstrate large resonance shifts of nanoantennas of more than 4 µm, a tuneable mid-infrared absorber with nearly 90% absorptance as well as screening and nanoscale “soldering” of metallic nanoantennas. Our concepts can empower improved designs of programmable nanophotonic devices for telecommunications, (bio)sensing and infrared optics, e.g. programmable infrared detectors, emitters and reconfigurable holograms.

Here, the authors introduce In3SbTe2 (IST) as a programmable material platform for plasmonics and nanophotonics in the infrared. They demonstrate direct optical writing, modifying and erasing of metallic crystalline IST nanoantennas, tuning their resonances, as well as nanoscale screening and soldering.

Graphene-Driven Metadevice for Active Microwave Camouflage with High-Efficiency Transmission Window

The general method to achieve electromagnetic (EM) invisibility is to use absorbing materials that can reduce the backscattering microwave signals. However, they will influence the transmission of useful signals, and their passive operation mode also blocks the realization of active camouflage systems. Here, the authors propose an electrically tunable metadevice which can dynamically manipulate the reflection magnitude and realize high-efficiency transmission at two distinctive frequency bands. Such a metadevice is driven by graphene sandwich structure integrated with multi-layer metasurface. By electrically controlling the sheet resistance of graphene, the authors have experimentally verified that the metadevice can tune the reflection magnitude from -5 to -20 dB over a wide frequency band of 5-15 GHz, and meanwhile realize a high transparent EM window with 3-dB transmission band covering from 23 to 25 GHz. The operation mechanism is discussed by examining the electric field distribution and also employing an equivalent circuit model to analyze the input impedance. Furthermore, using the developed metadevice, the authors still demonstrate its dynamical camouflaging performance and application potential as an antenna radome by experiment. The finding in this study is expected to trigger great interest in adaptive camouflage, stealth radome, and multifunctional EM manipulation fields.

Strain-Multiplex Metalens Array for Tunable Focusing and Imaging

Metalenses on a flexible template are engineered metal-dielectric interfaces that improve conventional imaging system and offer dynamic focusing and zooming capabilities by controlling the focal length and bandwidth through a mechanical or external stretch. However, realizing large-scale and cost-effective flexible metalenses with high yields in a strain-multiplex fashion remains as a great challenge. Here, single-pulsed, maskless light interference and imprinting technique is utilized to fabricate reconfigurable, flexible metalenses on a large-scale and demonstrate its strain-multiplex tunable focusing. Experiments, in accordance with the theory, show that applied stretch on the flexible-template reconfigurable diffractive metalenses (FDMLs) accurately mapped focused wavefront, bandwidth, and focal length. The surface relief metastructures consisted of metal-coated hemispherical cavities in a hexagonal close-packed arrangement to enhance tunable focal length, numerical aperture, and fill factor, FF ≈ 100% through normal and angular light illumination with external stretch. The strain-multiplex of FDMLs approach lays the foundation of a new class of large-scale, cost-effective metalens offering tunable light focusing and imaging.

Kerr Metasurface Enabled by Metallic Quantum Wells

Optical metasurfaces have emerged as promising candidates for multifunctional devices. Dynamically reconfigurable metasurfaces have been introduced by employing phase-change materials or by applying voltage, heat, or strain. While existing metasurfaces exhibit appealing properties, they do not express any significant nonlinear effects due to the negligible nonlinear responses from the typical materials used to build the metasurface. In this work, we propose and experimentally demonstrate one kind of Kerr metasurface that shows strong intensity-dependent responses. The Kerr metasurface is composed of a top layer of gold antennas, a dielectric spacer, and a ground layer of metallic quantum wells (MQWs). Because of the large Kerr nonlinearity supported by the MQWs, the effective optical properties of the MQWs can change from metallic to dielectric with increasing of the input intensity, leading to dramatic modifications of the metasurface responses. This opens up new routes for potential applications in the field of nonlinear optics.

Actively tunable THz filter based on an electromagnetically induced transparency analog hybridized with a MEMS metamaterial

Electromagnetically induced transparency (EIT) analogs in classical oscillator systems have been investigated due to their potential in optical applications such as nonlinear devices and the slow-light field. Metamaterials are good candidates that utilize EIT-like effects to regulate optical light. Here, an actively reconfigurable EIT metamaterial for controlling THz waves, which consists of a movable bar and a fixed wire pair, is numerically and experimentally proposed. By changing the distance between the bar and wire pair through microelectromechanical system (MEMS) technology, the metamaterial can controllably regulate the EIT behavior to manipulate the waves around 1.832 THz, serving as a dynamic filter. A high transmittance modulation rate of 38.8% is obtained by applying a drive voltage to the MEMS actuator. The dispersion properties and polarization of the metamaterial are also investigated. Since this filter is readily miniaturized and integrated by taking advantage of MEMS, it is expected to significantly promote the development of THz-related practical applications such as THz biological detection and THz communications.

Array-Level Inverse Design of Beam Steering Active Metasurfaces

We report an array-level inverse design approach to optimize the beam steering performance of active metasurfaces, thus overcoming the limitations posed by nonideal metasurface phase and amplitude tuning. In contrast to device-level topology optimization of passive metasurfaces, the outlined system-level optimization framework relies on the electrical tunability of geometrically identical nanoantennas, enabling the design of active antenna arrays with variable spatial phase and amplitude profiles. Based on this method, we demonstrate high-directivity, continuous beam steering up to 70° for phased arrays with realistic tunable antenna designs, despite nonidealities such as strong covariation of scattered light amplitude with phase. Nonintuitive array phase and amplitude profiles further facilitate beam steering with a phase modulation range as low as 180°. Furthermore, we use the device geometries presented in this work for experimental validation of the system-level inverse design approach of active beam steering metasurfaces. The proposed method offers a framework to optimize nanophotonic structures at the array level that is potentially applicable to a wide variety of objective functions and actively tunable metasurface antenna array platforms.

Demonstration of focal length tuning by rotational varifocal moiré metalens in an ir-A wavelength

This paper reports an experimental demonstration of moiré metalens which shows wide focal length tunability from negative to positive by mutual angle rotation at the wavelength of 900 nm. The moiré metalens was developed using high index contrast transmitarray meta-atoms made of amorphous silicon octagonal pillars, which is designed to have polarization insensitivity and full 2π phase coverage. The fabricated moiré metalens showed focal length tunability at the ranges between ±1.73 - ±5 mm, which corresponds to the optical power ranges between ±578 - ±200 m^-1 at the mutual rotation between ±90 degrees.

Metamaterials for Enhanced Optical Responses and their Application to Active Control of Terahertz Waves

Metamaterials, artificially constructed structures that mimic lattices in natural materials, have made numerous contributions to the development of unconventional optical devices. With an increasing demand for more diverse functionalities, terahertz (THz) metamaterials are also expanding their domain, from the realm of mere passive devices to the broader area where functionalized active THz devices are particularly required. A brief review on THz metamaterials is given with a focus on research conducted in the authors' group. The first part is centered on enhanced THz optical responses from tightly coupled meta-atom structures, such as high refractive index, enhanced optical activity, anomalous wavelength scaling, large phase retardation, and nondispersive polarization rotation. Next, electrically gated graphene metamaterials are reviewed with an emphasis on the functionalization of enhanced THz optical responses. Finally, the linear frequency conversion of THz waves in a rapidly time-variant THz metamaterial is briefly discussed in the more general context of spatiotemporal control of light.

Broadband Filter and Adjustable Extinction Ratio Modulator Based on Metal-Graphene Hybrid Metamaterials

A novel multifunctional device based on a hybrid metal-graphene Electromagnetically induced transparency (EIT) metamaterial at the terahertz band is proposed. It is composed of a parallel cut wire pair (PCWP) that serves as a dark mode resonator, a vertical cut wire pair (VCWP) that serves as a bright mode resonator and a graphene ribbon that serves as a modulator. An ultra-broadband transmission window with 1.23 THz bandwidth can be obtained. The spectral extinction ratio can be tuned from 26% to 98% by changing the Fermi level of the graphene. Compared with previous work, our work has superior performance in the adjustable bandwidth of the transmission window without changing the structure of the dark and bright mode resonators, and has a high extinction ratio and dynamic adjustability. Besides, we present the specific application of the device in filters and optical modules. Therefore, we believe that such a metamaterial structure provides a new way to actively control EIT-like, which has promising applications in broadband optical filters and photoelectric intensity modulators in terahertz communications.

Soft optical metamaterials

Optical metamaterials consist of artificially engineered structures exhibiting unprecedented optical properties beyond natural materials. Optical metamaterials offer many novel functionalities, such as super-resolution imaging, negative refraction and invisibility cloaking. However, most optical metamaterials are comprised of rigid materials that lack tunability and flexibility, which hinder their practical applications. This limitation can be overcome by integrating soft matters within the metamaterials or designing responsive metamaterial structures. In addition, soft metamaterials can be reconfigured via optical, electrical, thermal and mechanical stimuli, thus enabling new optical properties and functionalities. This paper reviews different types of soft and reconfigurable optical metamaterials and their fabrication methods, highlighting their exotic properties. Future directions to employ soft optical metamaterials in next-generation metamaterial devices are identified.

On-chip sub-wavelength Bragg grating design based on novel low loss phase-change materials

We propose a reconfigurable and non-volatile Bragg grating in the telecommunication C-band based on the combination of novel low-loss phase-change materials (specifically Ge₂Sb₂Se₄Te₁ and Sb₂S₃) with a silicon nitride platform. The Bragg grating is formed by arrayed cells of phase-change material, whose crystallisation fraction modifies the Bragg wavelength and extinction ratio. These devices could be used in integrated photonic circuits for optical communications applications in smart filters and Bragg mirrors and could also find use in tuneable ring resonators, Mach-Zehnder interferometers or frequency selectors for future laser on chip applications. In the case of Ge₂Sb₂Se₄Te₁, crystallisation produces a Bragg resonance shift up to ∼ 15 nm, accompanied with a large amplitude modulation (insertion loss of 22 dB). Using Sb₂S₃, low losses are presented in both states of the phase change material, obtaining a ∼ 7 nm red-shift in the Bragg wavelength. The gratings are evaluated for two period numbers, 100 and 200 periods. The number of periods determines the bandwidth and extinction ratio of the filters. Increasing the number of periods increases the extinction ratio and reflected power, also narrowing the bandwidth. This results in a trade-off between device size and performance. Finally, we combine both phase-change materials in a single Bragg grating to provide both frequency and amplitude modulation. A defect is introduced in the Sb₂S₃ Bragg grating, producing a high quality factor resonance (Q ∼ 10⁴) which can be shifted by 7 nm via crystallisation. A GSST cell is then placed in the defect which can modulate the transmission amplitude from low loss to below -16 dB.

Tunable terahertz metamaterial absorber actuated by thermomechanical bimaterial microcantilevers

We report a tunable terahertz (THz) metamaterial absorber (MA) actuated by thermomechanical bimaterial microcantilevers. The THz MA, which is suspended on a silicon substrate by the bimaterial microcantilevers, is a sandwich structure with a bottom Al ground plane, middle air and SiN_x dielectric layers, and a top Al rotationally symmetric open split ring resonator. Upon application of a current, a Ti heating resistor integrated on the SiN_x dielectric layer induces the bimaterial microcantilevers to bend, causing the air layer thickness to change, modulating the absorption of the THz MA. The tunable THz MA exhibited a relative modulation depth of absorption of 28.1% at 0.69 THz and a thermomechanical sensitivity of 0.12°/K. This tunable THz MA has potential applications in filtering, modulation, control, and THz imaging.

Chemo- and Thermomechanically Configurable 3D Optical Metamaterials Constructed from Colloidal Nanocrystal Assemblies

Nanofabrication has limited most optical metamaterials to 2D or, often with multiple patterning steps, simple 3D meta-atoms that typically have limited built-in tunability. Here, with a one-step scalable patterning process, we exploit the chemical addressability and structural adaptability of colloidal Au nanocrystal assemblies to transform 2D nanocrystal/Ti bilayers into complex, 3D-structured meta-atoms and to thermally direct their shape morphing and alter their optical properties. By tailoring the length, number, and curvature of 3D helical structures in each meta-atom, we create large-area metamaterials with chiroptical responses of as high as ∼40% transmission difference between left-hand (LCP) and right-hand (RCP) circularly polarized light (ΔT = T_RCP - T_LCP) that are suitable for broadband circular polarizers and, upon thermally configuring their shape, switch the polarity of polarization rotation. These 3D optical metamaterials provide prototypes for low-cost, large-scale fabrication of optical metamaterials for ultrathin lenses, polarizers, and waveplates.

Spatiotemporal light control with active metasurfaces

Optical metasurfaces have provided us with extraordinary ways to control light by spatially structuring materials. The space-time duality in Maxwell's equations suggests that additional structuring of metasurfaces in the time domain can even further expand their impact on the field of optics. Advances toward this goal critically rely on the development of new materials and nanostructures that exhibit very large and fast changes in their optical properties in response to external stimuli. New physics is also emerging as ultrafast tuning of metasurfaces is becoming possible, including wavelength shifts that emulate the Doppler effect, Lorentz nonreciprocity, time-reversed optical behavior, and negative refraction. The large-scale manufacturing of dynamic flat optics has the potential to revolutionize many emerging technologies that require active wavefront shaping with lightweight, compact, and power-efficient components.

Chalcogenide-gold dual-layers coupled to gold nanoparticles for reconfigurable perfect absorption

Recently, tunable high absorptance from various nanophotonic structures has been demonstrated. However, most of these structures require nano-lithography, which is expensive and slow. Lithography-free tuneable absorbers are rarely explored for tuneable visible and near-infrared photonics. Herein, we demonstrate a gold (Au)/chalcogenide dual-layer that is resonantly coupled to Au nanoparticles (NPs). The structure exhibits angle and polarisation-independent high absorptance. At resonance, waveguide cavity-like modes are excited between the film and NPs whilst gap plasmon modes are excited between the NPs. Coalescence of the waveguide cavity-like modes, the gap plasmon modes, and the highly absorbing chalcogenide semiconductor not only leads to perfect absorptance but also a reconfigurable response via reversible structural phase transitions in the chalcogenide film. In the amorphous state, the design provides nearly perfect absorptance for both p- and s-polarisation states at an incident angle of 20°. However, after switching to the crystalline state, the peak absorptance spectrally broadens and redshifts from 980 to 1520 nm. This experimental observation was theoretically validated by the finite element method. Thermal-electric modeling was performed to show that the structural transition from crystalline to amorphous states is possible in just 5 ns, thus allowing high-speed reconfigurable perfect absorbers.

Mechanochromic Reconfigurable Metasurfaces

The change of optical properties that some usually natural compounds or polymeric materials show upon the application of external stress is named mechanochromism. Herein, an artificial nanomechanical metasurface formed by a subwavelength nanowire array made of molybdenum disulfide, molybdenum oxide, and silicon nitride changes color upon mechanical deformation. The aforementioned deformation induces reversible changes in the optical transmission (relative transmission change of 197% at 654 nm), thus demonstrating a giant mechanochromic effect. Moreover, these types of metasurfaces can exist in two nonvolatile states presenting a difference in optical transmission of 45% at 678 nm, when they are forced to bend rapidly. The wide optical tunability that photonic nanomechanical metasurfaces, such as the one presented here, possess by design, can provide a valuable platform for mechanochromic and bistable responses across the visible and near infrared regime and form a new family of smart materials with applications in reconfigurable, multifunctional photonic filters, switches, and stress sensors.

Rolled-up single-layered vanadium oxide nanomembranes for microactuators with tunable active temperature

Multilayer vanadium dioxide (VO₂) actuators are a widespread concern as these micro/nano-actuators present a fast and efficient dynamic response when VO₂ occurs in metal-insulator transition (MIT) at 68 °C. By tuning the O₂ flow rate during oxide deposition and rolled-up nanotechnology, a microactuator based on a single-layered vanadium oxide nanomembrane with vertical component gradient is fabricated. Upward bending of the nanomembrane is driven by the release of the compressive strain gradient which is revealed through the difference in Raman shift of the vibration mode. Combining strain engineering, the initial curvature of microactuators is tuned in a wide range by the thickness of the nanomembranes. The actuation behavior from low curvature to high final curvature across the MIT is observed which depends on the nanomembrane thickness. Initial compressive strain distribution of the rolled-up nanomembrane decreases the MIT temperature simultaneously. Thus, taking advantage of the tunable MIT and reversible shape transformation, micro/nano-actuators with tunable triggering temperature, controllable initial curvature and large-displacement actuation are fabricated for curvature engineering in micromechanical systems.

Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens

The electromagnetic (EM) properties of metasurfaces depend on both structural design and material properties. microelectromechanical systems (MEMS) technology offers an approach for tuning metasurface EM properties by structural reconfiguration. In the past 10 years, vast applications have been demonstrated based on MEMS metasurfaces, which proved to have merits including, large tunability, fast speed, small size, light weight, capability of dense integration, and compatibility of cost-effective fabrication process. Here, recent advances in MEMS metasurface applications are reviewed and categorized based on the tuning mechanisms, operation band and tuning speed. As an example, the pros and cons of MEMS metasurfaces for tunable lens applications are discussed and compared with traditional tunable lens technologies followed by the summary and outlook.

Stimuli-Responsive DNA-Linked Nanoparticle Arrays as Programmable Surfaces

Self- and directed-assembly approaches have enabled precise control over the composition and geometry of 2D and 3D nanoparticle constructs. However, the resulting structures are typically static, providing only a single structural arrangement of the nanoparticle building blocks. In this work, the power of DNA-linked nanoparticle assembly is coupled to a grayscale patterning technique to create programmable surfaces for assembly and thermally activated reorganization of gold nanoparticle arrays. Direct grayscale patterning of DNA monolayers by electron-beam lithography (DNA-EBL) enables the production of surfaces with nanometer-scale control over the density of functional DNA. This enables tuning of the particle-surface interactions with single-nanoparticle resolution and without the need for a physical template as employed in most directed assembly methods. This technique is applied on suspended membrane structures to achieve high-resolution assembly of 2D nanoparticle arrays with highly mutable architectures. Gold nanorods assembled on grayscale-patterned surfaces exhibit temperature-dependent configurations and ordering behavior that result in tunable polarization-dependent optical properties. In addition, spherical gold particles assembled from a bimodal suspension produce arrays with temperature-dependent configurations of small and large particles. These results have important implications for the design and fabrication of reconfigurable nanoparticle arrays for application as structurally tunable optical metasurfaces.

Advanced Optical Programming of Individual Meta-Atoms Beyond the Effective Medium Approach

Nanometer-thick active metasurfaces (MSs) based on phase-change materials (PCMs) enable compact photonic components, offering adjustable functionalities for the manipulation of light, such as polarization filtering, lensing, and beam steering. Commonly, they feature multiple operation states by switching the whole PCM fully between two states of drastically different optical properties. Intermediate states of the PCM are also exploited to obtain gradual resonance shifts, which are usually uniform over the whole MS and described by effective medium response. For programmable MSs, however, the ability to selectively address and switch the PCM in individual meta-atoms is required. Here, simultaneous control of size, position, and crystallization depth of the switched phase-change material (PCM) volume within each meta-atom in a proof-of-principle MS consisting of a PCM-covered Al-nanorod antenna array is demonstrated. By modifying optical properties locally, amplitude and light phase can be programmed at the meta-atom scale. As this goes beyond previous effective medium concepts, it will enable small adaptive corrections to external aberrations and fabrication errors or multiple complex functionalities programmable on the same MS.

Flexible plasmonic modulators induced by the thermomechanical effect

Reconfigurable plasmon-based flexible devices, composed of artificial plasmonic nanostructures on stretchable substrates, show great promise for dynamic functionalities such as tunability, switching and modulation of electromagnetic waves. Here, we theoretically proposed and experimentally demonstrated a simple and efficient flexible plasmonic modulator based on an array of gold nanostructures on a poly(dimethylsiloxane) (PDMS) substrate. Arising from the current-induced local Joule heat, the local expansion of the PDMS substrate widens the gap distances between the neighboring gold wires, which results in a spectral shift of the plasmon resonance. The experimental results show that the plasmon resonance has a blue-shift of 39 nm under a total power consumption of only 10.5 mW, which results in a high modulation depth of up to 30.5% for the modulator. Such a low power consumption can be ascribed to the small active area and excellent thermal isolation of the PDMS. The optical and thermomechanical responses were confirmed and understood by the electromagnetic and thermomechanical co-simulations based on the finite-difference time-domain and finite-element methods. This novel mechanism to manipulate light provides new opportunities for active optical components and integrated circuits.

From Single-Dimensional to Multidimensional Manipulation of Optical Waves with Metasurfaces

Metasurfaces, 2D artificial arrays of subwavelength elements, have attracted great interest from the optical scientific community in recent years because they provide versatile possibilities for the manipulation of optical waves and promise an effective way for miniaturization and integration of optical devices. In the past decade, the main efforts were focused on the realization of single-dimensional (amplitude, frequency, polarization, or phase) manipulation of optical waves. Compared to the metasurfaces with single-dimensional manipulation, metasurfaces with multidimensional manipulation of optical waves show significant advantages in many practical application areas, such as optical holograms, sub-diffraction imaging, and the design of integrated multifunctional optical devices. Nowadays, with the rapid development of nanofabrication techniques, the research of metasurfaces has been inevitably developed from single-dimensional manipulation toward multidimensional manipulation of optical waves, which greatly boosts the application of metasurfaces and further paves the way for arbitrary design of optical devices. Herein, the recent advances in metasurfaces are briefly reviewed and classified from the viewpoint of different dimensional manipulations of optical waves. Single-dimensional manipulation and 2D manipulation of optical waves with metasurfaces are discussed systematically. In conclusion, an outlook and perspectives on the challenges and future prospects in these rapidly growing research areas are provided.

Machine-learning reprogrammable metasurface imager

Conventional microwave imagers usually require either time-consuming data acquisition, or complicated reconstruction algorithms for data post-processing, making them largely ineffective for complex in-situ sensing and monitoring. Here, we experimentally report a real-time digital-metasurface imager that can be trained in-situ to generate the radiation patterns required by machine-learning optimized measurement modes. This imager is electronically reprogrammed in real time to access the optimized solution for an entire data set, realizing storage and transfer of full-resolution raw data in dynamically varying scenes. High-accuracy image coding and recognition are demonstrated in situ for various image sets, including hand-written digits and through-wall body gestures, using a single physical hardware imager, reprogrammed in real time. Our electronically controlled metasurface imager opens new venues for intelligent surveillance, fast data acquisition and processing, imaging at various frequencies, and beyond.

Conventional imagers require time-consuming data acquisition, or complicated reconstruction algorithms for data post-processing. Here, the authors demonstrate a real-time digital-metasurface imager that can be trained in-situ to show high accuracy image coding and recognition for various image sets.

Magnetite nanoparticles program the assembly, response, and reconfiguration of structured emulsions

Endoskeletal droplets-non-spherical emulsion droplets that respond to external stimuli with shape change-are modified with ferromagnetic iron oxide nanoparticles to make them susceptible to magnetic fields. The resulting droplets can be manipulated using static or oscillating magnetic fields, each producing a different response. Static fields control the orientation and position of the droplets, important in driving assembly into organized structures. Oscillating fields are shown to cause magnetic hyperthermia in ferrofluid nanoparticles, leading to droplet heating and forcing droplet reconfiguration. We demonstrate the use of static and dynamic fields to affect the organization and stability of endoskeletal droplets and their assemblies, producing highly-tunable programmable colloids that adapt to changing environmental conditions.

Flexible controls of broadband electromagnetic wavefronts with a mechanically programmable metamaterial

Coding and programmable metamaterials have experienced a rapid development since 2014, leading to many physical phenomena and engineering applications from microwave to terahertz frequencies, and even in the acoustic regime. The major challenge for current programmable metamaterials based on switching diodes is the experimental realization of a huge number of feeding lines for independent control of each digital unit. In this work, we provide an alternative approach for the experimental realization of the programmable metamaterial by developing a mechanical system, which consists of an array of metal blocks with adjustable height. The system supports the combination with conventional coding metamaterials to take full controls of both the phase and polarization of EM waves. As a theoretical byproduct of this work, we propose group delay code to achieve diffraction-limited achromatic redirection of linearly polarized broadband beam from 4 to 6 GHz by combining the group-delay code with the conventional phase code, a feat that traditionally requires complex structural design of unit cell. In view of the multifunctional performance afforded by the full-control of the phase, polarization and group delay, the mechanically controllable metamaterial in the microwave region may benefit different applications, such as imaging, communication, and radar detection.

Integrating microsystems with metamaterials towards metadevices

Electromagnetic metamaterials, which are a major type of artificially engineered materials, have boosted the development of optical and photonic devices due to their unprecedented and controllable effective properties, including electric permittivity and magnetic permeability. Metamaterials consist of arrays of subwavelength unit cells, which are also known as meta-atoms. Importantly, the effective properties of metamaterials are mainly determined by the geometry of the constituting subwavelength unit cells rather than their chemical composition, enabling versatile designs of their electromagnetic properties. Recent research has mainly focused on reconfigurable, tunable, and nonlinear metamaterials towards the development of metamaterial devices, namely, metadevices, via integrating actuation mechanisms and quantum materials with meta-atoms. Microelectromechanical systems (MEMS), or microsystems, provide powerful platforms for the manipulation of the effective properties of metamaterials and the integration of abundant functions with metamaterials. In this review, we will introduce the fundamentals of metamaterials, approaches to integrate MEMS with metamaterials, functional metadevices from the synergy, and outlooks for metamaterial-enabled photonic devices.

Reconfiguring structured light beams using nonlinear metasurfaces

Ultra-compact, low-loss, fast, and reconfigurable optical components, enabling manipulation of light by light, could open numerous opportunities for controlling light on the nanoscale. Nanostructured all-dielectric metasurfaces have been shown to enable extensive control of amplitude and phase of light in the linear optical regime. Among other functionalities, they offer unique opportunities for shaping the wave front of light to introduce the orbital angular momentum (OAM) to a beam. Such structured light beams bring a new degree of freedom for applications ranging from spectroscopy and micromanipulation to classical and quantum optical communications. To date, reconfigurability or tuning of the optical properties of all-dielectric metasurfaces have been achieved mechanically, thermally, electrically or optically, using phase-change or nonlinear optical materials. However, a majority of demonstrated tuning approaches are either slow or require high optical powers. Arsenic trisulfide (As₂S₃) chalcogenide glass offering ultra-fast and large χ⁽³⁾nonlinearity as well as a low two-photon absorption coefficient in the near and mid-wave infrared spectral range, could provide a new platform for the realization of fast and relatively low intensity reconfigurable metasurfaces. Here, we design and experimentally demonstrate an As₂S₃ chalcogenide glass based metasurface that enables reshaping of a conventional Hermite-Gaussian beam with no OAM into an OAM beam at low intensity levels, while preserves the original beam's amplitude and phase characteristics at high intensity levels. The proposed metasurface could find applications for a new generation of optical communication systems and optical signal processing.

Ultranarrow-band metagrating absorbers for sensing and modulation

Nanostructured plasmonic metamaterials are an excellent platform for narrowband optical absorption, which has wide applications in sensing, filtering, modulation, and emission tailoring. However, achieving a subnanometer absorption bandwidth for optical sensing and dynamical control of light is still challenging. Here, we propose an asymmetric metagrating structure and make use of the propagating surface plasmonic mode that has a small dissipation rate, to achieve perfect optical absorption with a bandwidth of 0.28 nm near the wavelength of 1.55 μm. Our proposed structure can be used in solution environments as a chemical or biological sensor in the visible spectral range just by changing the structural parameters. The sensor possesses a sensitivity of 440 nm/RIU and figure of merit of 1333.33 RIU^-1. In addition, by combining an organic electro-optic material with this metagrating, our device can be reconfigurable with a dynamic range of 15.52 dB. Therefore, our proposed metagrating platform not only works as an ultranarrow-band absorber, but also can be employed for optical sensing and dynamic control of light.

Reconfigurable MEMS Fano metasurfaces with multiple-input-output states for logic operations at terahertz frequencies

A broad range of dynamic metasurfaces has been developed for manipulating the intensity, phase and wavefront of electromagnetic radiation from microwaves to optical frequencies. However, most of these metasurfaces operate in single-input-output state. Here, we experimentally demonstrate a reconfigurable MEMS Fano resonant metasurface possessing multiple-input-output (MIO) states that performs logic operations with two independently controlled electrical inputs and an optical readout at terahertz frequencies. The far-field behaviour of Fano resonance exhibits XOR and XNOR operations, while the near-field resonant confinement enables the NAND operation. The MIO configuration resembling hysteresis-type closed-loop behaviour is realized through inducing electromechanically tuneable out-of-plane anisotropy in the near-field coupling of constituent resonator structures. The XOR metamaterial gate possesses potential applications in cryptographically secured terahertz wireless communication networks. Furthermore, the MIO features could lay the foundation for the realization of programmable and randomly accessible metamaterials with enhanced electro-optical performance across terahertz, infrared and optical frequencies.