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Jansson M, Nosenko VV, Torigoe Y, Nakama K, Yukimune M, Higo A, Ishikawa F, Chen WM, Buyanova IA. High-Performance Multiwavelength GaNAs Single Nanowire Lasers. ACS NANO 2024; 18:1477-1484. [PMID: 38166147 PMCID: PMC10795468 DOI: 10.1021/acsnano.3c07980] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/24/2023] [Revised: 12/18/2023] [Accepted: 12/20/2023] [Indexed: 01/04/2024]
Abstract
In this study, we report a significant enhancement in the performance of GaNAs-based single nanowire lasers through optimization of growth conditions, leading to a lower lasing threshold and higher operation temperatures. Our analysis reveals that these improvements in the laser performance can be attributed to a decrease in the density of localized states within the material. Furthermore, we demonstrate that owing to their excellent nonlinear optical properties, these nanowires support self-frequency conversion of the stimulated emission through second harmonic generation (SHG) and sum-frequency generation (SFG), providing coherent light emission in the cyan-green range. Mode-specific differences in the self-conversion efficiency are revealed and explained by differences in the light extraction efficiency of the converted light caused by the electric field distribution of the fundamental modes. Our work, therefore, facilitates the design and development of multiwavelength coherent light generation and higher-temperature operation of GaNAs nanowire lasers, which will be useful in the fields of optical communications, sensing, and nanophotonics.
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Affiliation(s)
- Mattias Jansson
- Department
of Physics, Chemistry and Biology, Linköping
University, SE-58183 Linköping, Sweden
| | - Valentyna V. Nosenko
- Department
of Physics, Chemistry and Biology, Linköping
University, SE-58183 Linköping, Sweden
| | - Yuto Torigoe
- Graduate
School of Science and Engineering, Ehime
University, Matsuyama 790-8577, Japan
| | - Kaito Nakama
- Research
Center for Integrated Quantum Electronics, Hokkaido University, Sapporo 060-8628, Japan
| | - Mitsuki Yukimune
- Graduate
School of Science and Engineering, Ehime
University, Matsuyama 790-8577, Japan
| | - Akio Higo
- Systems
Design Lab (d.lab), School of Engineering, The University of Tokyo, Tokyo 113-8656, Japan
| | - Fumitaro Ishikawa
- Research
Center for Integrated Quantum Electronics, Hokkaido University, Sapporo 060-8628, Japan
| | - Weimin M. Chen
- Department
of Physics, Chemistry and Biology, Linköping
University, SE-58183 Linköping, Sweden
| | - Irina A. Buyanova
- Department
of Physics, Chemistry and Biology, Linköping
University, SE-58183 Linköping, Sweden
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2
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Dursap T, Fadel M, Regreny P, Tapia Garcia C, Chevalier C, Nguyen HS, Drouard E, Brottet S, Gendry M, Danescu A, Koepf M, Artero V, Bugnet M, Penuelas J. Enhanced Light Trapping in GaAs/TiO 2-Based Photocathodes for Hydrogen Production. ACS APPLIED MATERIALS & INTERFACES 2023; 15:53446-53454. [PMID: 37943978 DOI: 10.1021/acsami.3c11481] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/12/2023]
Abstract
Photoelectrochemical cells (PEC) are appealing devices for the production of renewable energy carriers. In this context, III-V semiconductors such as GaAs are very promising materials due to their tunable band gaps, which can be appropriately adjusted for sunlight harvesting. Because of the high cost of these semiconductors, the nanostructuring of the photoactive layer can help to improve the device efficiency as well as drastically reduce the amount of material needed. III-V nanowire-based photoelectrodes benefit from the intrinsically high aspect ratio of nanowires, their enhanced ability to trap light, and their improved charge separation and collection abilities and thus are particularly attractive for PECs. However, III-V semiconductors often suffer from corrosion in aqueous electrolytes, preventing their utilization over long periods under relevant working conditions. Here, photocathodes of GaAs nanowires protected with thin TiO2 shells were prepared and studied under simulated sunlight irradiation to assess their photoelectrochemical performances in correlation with their structural degradation, highlighting the advantageous nanowire geometry compared to its thin-film counterpart. Morphological and electronic parameters, such as the aspect ratio of the nanowires and their doping pattern, were found to strongly influence the photocatalytic performances of the system. This work highlights the advantageous combination of nanowires featuring a buried radial p-n junction with Co nanoparticles used as a hydrogen evolution catalyst. The nanostructured photocathodes exhibit significant photocatalytic activities comparable with previous noble-metal-based systems. This study demonstrates the potential of a GaAs nanostructured semiconductor and its reliable use for photodriven hydrogen production.
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Affiliation(s)
- Thomas Dursap
- Univ. Lyon, CNRS, ECL, INSA Lyon, UCBL, CPE Lyon, INL, UMR 5270, 69130 Ecully, France
| | - Mariam Fadel
- Univ. Grenoble Alpes, CNRS, CEA, IRIG, Laboratoire de Chimie et Biologie des Métaux, 38000 Grenoble, France
| | - Philippe Regreny
- Univ. Lyon, CNRS, ECL, INSA Lyon, UCBL, CPE Lyon, INL, UMR 5270, 69130 Ecully, France
| | - Cristina Tapia Garcia
- Univ. Grenoble Alpes, CNRS, CEA, IRIG, Laboratoire de Chimie et Biologie des Métaux, 38000 Grenoble, France
| | - Céline Chevalier
- Univ. Lyon, CNRS, ECL, INSA Lyon, UCBL, CPE Lyon, INL, UMR 5270, 69130 Ecully, France
| | - Hai Son Nguyen
- Univ. Lyon, CNRS, ECL, INSA Lyon, UCBL, CPE Lyon, INL, UMR 5270, 69130 Ecully, France
| | - Emmanuel Drouard
- Univ. Lyon, CNRS, ECL, INSA Lyon, UCBL, CPE Lyon, INL, UMR 5270, 69130 Ecully, France
| | - Solène Brottet
- Univ. Lyon, CNRS, ECL, INSA Lyon, UCBL, CPE Lyon, INL, UMR 5270, 69130 Ecully, France
| | - Michel Gendry
- Univ. Lyon, CNRS, ECL, INSA Lyon, UCBL, CPE Lyon, INL, UMR 5270, 69130 Ecully, France
| | - Alexandru Danescu
- Univ. Lyon, CNRS, ECL, INSA Lyon, UCBL, CPE Lyon, INL, UMR 5270, 69130 Ecully, France
| | - Matthieu Koepf
- Univ. Grenoble Alpes, CNRS, CEA, IRIG, Laboratoire de Chimie et Biologie des Métaux, 38000 Grenoble, France
| | - Vincent Artero
- Univ. Grenoble Alpes, CNRS, CEA, IRIG, Laboratoire de Chimie et Biologie des Métaux, 38000 Grenoble, France
| | - Matthieu Bugnet
- Univ. Lyon, CNRS, INSA Lyon, UCBL, MATEIS, UMR 5510, 69621 Villeurbanne, France
| | - José Penuelas
- Univ. Lyon, CNRS, ECL, INSA Lyon, UCBL, CPE Lyon, INL, UMR 5270, 69130 Ecully, France
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3
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Schmiedeke P, Döblinger M, Meinhold-Heerlein MA, Doganlar C, Finley JJ, Koblmüller G. Sb-saturated high-temperature growth of extended, self-catalyzed GaAsSb nanowires on silicon with high quality. NANOTECHNOLOGY 2023; 35:055601. [PMID: 37879325 DOI: 10.1088/1361-6528/ad06ce] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/11/2023] [Accepted: 10/25/2023] [Indexed: 10/27/2023]
Abstract
Ternary GaAsSb nanowires (NW) are key materials for integrated high-speed photonic applications on silicon (Si), where homogeneous, high aspect-ratio dimensions and high-quality properties for controlled absorption, mode confinement and waveguiding are much desired. Here, we demonstrate a unique high-temperature (high-T >650 °C) molecular beam epitaxial (MBE) approach to realize self-catalyzed GaAsSb NWs site-selectively on Si with high aspect-ratio and non-tapered morphologies under antimony (Sb)-saturated conditions. While hitherto reported low-moderate temperature growth processes result in early growth termination and inhomogeneous morphologies, the non-tapered nature of NWs under high-T growth is independent of the supply rates of relevant growth species. Analysis of dedicated Ga-flux and growth time series, allows us to pinpoint the microscopic mechanisms responsible for the elimination of tapering, namely concurrent vapor-solid, step-flow growth along NW side-facets enabled by enhanced Ga diffusion under the high-T growth. Performing growth in an Sb-saturated regime, leads to high Sb-content in VLS-GaAsSb NW close to 30% that is independent of Ga-flux. This independence enables multi-step growth via sequentially increased Ga-flux to realize uniform and very long (>7μm) GaAsSb NWs. The excellent properties of these NWs are confirmed by a completely phase-pure, twin-free zincblende (ZB) crystal structure, a homogeneous Sb-content along the VLS-GaAsSb NW growth axis, along with remarkably narrow, single-peak low-temperature photoluminescence linewidth (<15 meV) at wavelengths of ∼1100-1200 nm.
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Affiliation(s)
- P Schmiedeke
- Walter Schottky Institute and Physics Department, TUM School of Natural Sciences, Technical University of Munich, Garching, Germany
| | - M Döblinger
- Department of Chemistry, Ludwig-Maximilians-University Munich, Munich, Germany
| | - M A Meinhold-Heerlein
- Walter Schottky Institute and Physics Department, TUM School of Natural Sciences, Technical University of Munich, Garching, Germany
| | - C Doganlar
- Walter Schottky Institute and Physics Department, TUM School of Natural Sciences, Technical University of Munich, Garching, Germany
| | - J J Finley
- Walter Schottky Institute and Physics Department, TUM School of Natural Sciences, Technical University of Munich, Garching, Germany
| | - G Koblmüller
- Walter Schottky Institute and Physics Department, TUM School of Natural Sciences, Technical University of Munich, Garching, Germany
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4
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Jeong HW, Ajay A, Yu H, Döblinger M, Mukhundhan N, Finley JJ, Koblmüller G. Sb-Mediated Tuning of Growth- and Exciton Dynamics in Entirely Catalyst-Free GaAsSb Nanowires. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2023; 19:e2207531. [PMID: 36670090 DOI: 10.1002/smll.202207531] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/02/2022] [Revised: 01/03/2023] [Indexed: 06/17/2023]
Abstract
Vapor-liquid-solid (VLS) growth is the mainstream method in realizing advanced semiconductor nanowires (NWs), as widely applied to many III-V compounds. It is exclusively explored also for antimony (Sb) compounds, such as the relevant GaAsSb-based NW materials, although morphological inhomogeneities, phase segregation, and limitations in the supersaturation due to Sb strongly inhibit their growth dynamics. Fundamental advances are now reported here via entirely catalyst-free GaAsSb NWs, where particularly the Sb-mediated effects on the NW growth dynamics and physical properties are investigated in this novel growth regime. Remarkably, depending on GaAsSb composition and nature of the growth surface, both surfactant and anti-surfactant action is found, as seen by transitions between growth acceleration and deceleration characteristics. For threshold Sb-contents up to 3-4%, adatom diffusion lengths are increased ≈sevenfold compared to Sb-free GaAs NWs, evidencing the significant surfactant effect. Furthermore, microstructural analysis reveals unique Sb-mediated transitions in compositional structure, as well as substantial reduction in twin defect density, ≈tenfold over only small compositional range (1.5-6% Sb), exhibiting much larger dynamics as found in VLS-type GaAsSb NWs. The effect of such extended twin-free domains is corroborated by ≈threefold increases in exciton lifetime (≈4.5 ns) due to enlarged electron-hole pair separation in these phase-pure NWs.
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Affiliation(s)
- Hyowon W Jeong
- Walter Schottky Institute, TUM School of Natural Sciences, Technical University of Munich, 85748, Garching bei München, Germany
| | - Akhil Ajay
- Walter Schottky Institute, TUM School of Natural Sciences, Technical University of Munich, 85748, Garching bei München, Germany
| | - Haiting Yu
- Walter Schottky Institute, TUM School of Natural Sciences, Technical University of Munich, 85748, Garching bei München, Germany
| | - Markus Döblinger
- Department of Chemistry, Ludwig-Maximilians-Universität München, 81377, Munich, Germany
| | - Nitin Mukhundhan
- Walter Schottky Institute, TUM School of Natural Sciences, Technical University of Munich, 85748, Garching bei München, Germany
| | - Jonathan J Finley
- Walter Schottky Institute, TUM School of Natural Sciences, Technical University of Munich, 85748, Garching bei München, Germany
| | - Gregor Koblmüller
- Walter Schottky Institute, TUM School of Natural Sciences, Technical University of Munich, 85748, Garching bei München, Germany
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5
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Becdelievre J, Guan X, Dudko I, Regreny P, Chauvin N, Patriarche G, Gendry M, Danescu A, Penuelas J. Growing self-assisted GaAs nanowires up to 80 μm long by molecular beam epitaxy. NANOTECHNOLOGY 2022; 34:045603. [PMID: 36270200 DOI: 10.1088/1361-6528/ac9c6b] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/30/2022] [Accepted: 10/20/2022] [Indexed: 06/16/2023]
Abstract
Ultralong GaAs nanowires were grown by molecular beam epitaxy using the vapor-liquid-solid method. In this ultralong regime we show the existence of two features concerning the growth kinetic and the structural properties. Firstly, we observed a non-classical growth mode, where the axial growth rate is attenuated. Secondly, we observed structural defects at the surface of Wurtzite segments located at the bottom part of the nanowires. We explain these two phenomena as arising from a particular pathway of the group V species, specific to ultralong nanowires. Finally, the optical properties of such ultralong nanowires are studied by photoluminescence experiments.
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Affiliation(s)
- Jeanne Becdelievre
- Univ Lyon, Ecole Centrale de Lyon, CNRS, INSA Lyon, Université Claude Bernard Lyon, CPE Lyon, INL, UMR5270, F69130 Ecully, France
| | - Xin Guan
- Univ Lyon, Ecole Centrale de Lyon, CNRS, INSA Lyon, Université Claude Bernard Lyon, CPE Lyon, INL, UMR5270, F69130 Ecully, France
| | - I Dudko
- Univ Lyon, Ecole Centrale de Lyon, CNRS, INSA Lyon, Université Claude Bernard Lyon, CPE Lyon, INL, UMR5270, F69130 Ecully, France
- School of Engineering, RMIT University, Melbourne 3001, Victoria, Australia
- Functional Materials and Microsystems, Research Group and Micro Nano Research Facility, RMIT University, Melbourne 3001, Victoria, Australia
| | - Philippe Regreny
- Univ Lyon, Ecole Centrale de Lyon, CNRS, INSA Lyon, Université Claude Bernard Lyon, CPE Lyon, INL, UMR5270, F69130 Ecully, France
| | - Nicolas Chauvin
- Univ Lyon, Ecole Centrale de Lyon, CNRS, INSA Lyon, Université Claude Bernard Lyon, CPE Lyon, INL, UMR5270, F69130 Ecully, France
| | - Gilles Patriarche
- Centre de Nanosciences et de Nanotechnologies-C2N, CNRS, Université Paris-Sud, Université Paris-Saclay, F-91120 Palaiseau, France
| | - Michel Gendry
- Univ Lyon, Ecole Centrale de Lyon, CNRS, INSA Lyon, Université Claude Bernard Lyon, CPE Lyon, INL, UMR5270, F69130 Ecully, France
| | - Alexandre Danescu
- Univ Lyon, Ecole Centrale de Lyon, CNRS, INSA Lyon, Université Claude Bernard Lyon, CPE Lyon, INL, UMR5270, F69130 Ecully, France
| | - José Penuelas
- Univ Lyon, Ecole Centrale de Lyon, CNRS, INSA Lyon, Université Claude Bernard Lyon, CPE Lyon, INL, UMR5270, F69130 Ecully, France
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6
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Peric N, Dursap T, Becdelievre J, Berthe M, Addad A, Romeo PR, Bachelet R, Saint-Girons G, Lancry O, Legendre S, Biadala L, Penuelas J, Grandidier B. Assessing the insulating properties of an ultrathin SrTiO 3shell grown around GaAs nanowires with molecular beam epitaxy. NANOTECHNOLOGY 2022; 33:375702. [PMID: 35654005 DOI: 10.1088/1361-6528/ac7576] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/06/2022] [Accepted: 06/01/2022] [Indexed: 06/15/2023]
Abstract
We have studied electronic transport in undoped GaAs/SrTiO3core-shell nanowires standing on their Si substrate with two-tip scanning tunneling microscopy in ultrahigh vacuum. The resistance profile along the nanowires is proportional to the tip separation with resistances per unit length of a few GΩ/μm. Examination of the different transport pathways parallel to the nanowire growth axis reveals that the measured resistance is consistent with a conduction along the interfacial states at the GaAs{110} sidewalls, the 2 nm thick SrTiO3shell being as much as resistive, despite oxygen deficient growth conditions. The origin of the shell resistivity is discussed in light of the nanowire analysis with transmission electron microscopy and Raman spectroscopy, providing good grounds for the use of SrTiO3shells as gate insulators.
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Affiliation(s)
- N Peric
- Univ. Lille, CNRS, Centrale Lille, Univ. Polytechnique Hauts-de-France, Junia-ISEN, UMR 8520 - IEMN, F-59000 Lille, France
| | - T Dursap
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, Ecole Centrale de Lyon, 36 Avenue Guy de Collongue, F-69134 Ecully cedex, France
| | - J Becdelievre
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, Ecole Centrale de Lyon, 36 Avenue Guy de Collongue, F-69134 Ecully cedex, France
| | - M Berthe
- Univ. Lille, CNRS, Centrale Lille, Univ. Polytechnique Hauts-de-France, Junia-ISEN, UMR 8520 - IEMN, F-59000 Lille, France
| | - A Addad
- Univ. Lille, CNRS, INRAE, Centrale Lille, UMR 8207-UMET - Unité Matériaux et Transformations, F-59000, Lille, France
| | - P Rojo Romeo
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, Ecole Centrale de Lyon, 36 Avenue Guy de Collongue, F-69134 Ecully cedex, France
| | - R Bachelet
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, Ecole Centrale de Lyon, 36 Avenue Guy de Collongue, F-69134 Ecully cedex, France
| | - G Saint-Girons
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, Ecole Centrale de Lyon, 36 Avenue Guy de Collongue, F-69134 Ecully cedex, France
| | - O Lancry
- HORIBA FRANCE SAS, 455 avenue Eugène Avinée 59120 Loos/Avenue de la Vauve-Passage Jobin Yvon F-91120 Palaiseau, France
| | - S Legendre
- HORIBA FRANCE SAS, 455 avenue Eugène Avinée 59120 Loos/Avenue de la Vauve-Passage Jobin Yvon F-91120 Palaiseau, France
| | - L Biadala
- Univ. Lille, CNRS, Centrale Lille, Univ. Polytechnique Hauts-de-France, Junia-ISEN, UMR 8520 - IEMN, F-59000 Lille, France
| | - J Penuelas
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, Ecole Centrale de Lyon, 36 Avenue Guy de Collongue, F-69134 Ecully cedex, France
| | - B Grandidier
- Univ. Lille, CNRS, Centrale Lille, Univ. Polytechnique Hauts-de-France, Junia-ISEN, UMR 8520 - IEMN, F-59000 Lille, France
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7
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Hafez MA, Zayed MK, Elsayed-Ali HE. Review: Geometric Interpretation of Reflection and Transmission RHEED Patterns. Micron 2022; 159:103286. [DOI: 10.1016/j.micron.2022.103286] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/06/2021] [Revised: 04/11/2022] [Accepted: 04/12/2022] [Indexed: 10/18/2022]
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8
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Demontis V, Zannier V, Sorba L, Rossella F. Surface Nano-Patterning for the Bottom-Up Growth of III-V Semiconductor Nanowire Ordered Arrays. NANOMATERIALS (BASEL, SWITZERLAND) 2021; 11:2079. [PMID: 34443910 PMCID: PMC8398085 DOI: 10.3390/nano11082079] [Citation(s) in RCA: 8] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/17/2021] [Revised: 08/07/2021] [Accepted: 08/10/2021] [Indexed: 12/18/2022]
Abstract
Ordered arrays of vertically aligned semiconductor nanowires are regarded as promising candidates for the realization of all-dielectric metamaterials, artificial electromagnetic materials, whose properties can be engineered to enable new functions and enhanced device performances with respect to naturally existing materials. In this review we account for the recent progresses in substrate nanopatterning methods, strategies and approaches that overall constitute the preliminary step towards the bottom-up growth of arrays of vertically aligned semiconductor nanowires with a controlled location, size and morphology of each nanowire. While we focus specifically on III-V semiconductor nanowires, several concepts, mechanisms and conclusions reported in the manuscript can be invoked and are valid also for different nanowire materials.
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Affiliation(s)
- Valeria Demontis
- NEST, Scuola Normale Superiore and Istituto Nanoscienze CNR, Piazza S. Silvestro 12, 56127 Pisa, Italy; (V.Z.); (L.S.)
| | - Valentina Zannier
- NEST, Scuola Normale Superiore and Istituto Nanoscienze CNR, Piazza S. Silvestro 12, 56127 Pisa, Italy; (V.Z.); (L.S.)
| | - Lucia Sorba
- NEST, Scuola Normale Superiore and Istituto Nanoscienze CNR, Piazza S. Silvestro 12, 56127 Pisa, Italy; (V.Z.); (L.S.)
| | - Francesco Rossella
- NEST, Scuola Normale Superiore and Istituto Nanoscienze CNR, Piazza S. Silvestro 12, 56127 Pisa, Italy; (V.Z.); (L.S.)
- Dipartimento di Scienze Fisiche, Informatiche e Matematiche, Università di Modena e Reggio Emilia, Via Campi 213/A, 41125 Modena, Italy
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9
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Jakob J, Schroth P, Feigl L, Al Humaidi M, Al Hassan A, Davtyan A, Hauck D, Pietsch U, Baumbach T. Correlating in situ RHEED and XRD to study growth dynamics of polytypism in nanowires. NANOSCALE 2021; 13:13095-13107. [PMID: 34477793 DOI: 10.1039/d1nr02320a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
Design of novel nanowire (NW) based semiconductor devices requires deep understanding and technological control of NW growth. Therefore, quantitative feedback over the structure evolution of the NW ensemble during growth is highly desirable. We analyse and compare the methodical potential of reflection high-energy electron diffraction (RHEED) and X-ray diffraction reciprocal space imaging (XRD) for in situ growth characterization during molecular-beam epitaxy (MBE). Simultaneously recorded in situ RHEED and in situ XRD intensities show strongly differing temporal behaviour and provide evidence of the highly complementary information value of both diffraction techniques. Exploiting the complementarity by a correlative data analysis presently offers the most comprehensive experimental access to the growth dynamics of statistical NW ensembles under standard MBE growth conditions. In particular, the combination of RHEED and XRD allows for translating quantitatively the time-resolved information into a height-resolved information on the crystalline structure without a priori assumptions on the growth model. Furthermore, we demonstrate, how careful analysis of in situ RHEED if supported by ex situ XRD and scanning electron microscopy (SEM), all usually available at conventional MBE laboratories, can also provide highly quantitative feedback on polytypism during growth allowing validation of current vapour-liquid-solid (VLS) growth models.
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Affiliation(s)
- Julian Jakob
- Laboratory for Applications of Synchrotron Radiation, Karlsruhe Institute of Technology, Kaiserstraße 12, D-76131 Karlsruhe, Germany.
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10
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Dursap T, Vettori M, Botella C, Regreny P, Blanchard N, Gendry M, Chauvin N, Bugnet M, Danescu A, Penuelas J. Wurtzite phase control for self-assisted GaAs nanowires grown by molecular beam epitaxy. NANOTECHNOLOGY 2021; 32:155602. [PMID: 33429384 DOI: 10.1088/1361-6528/abda75] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
The accurate control of the crystal phase in III-V semiconductor nanowires (NWs) is an important milestone for device applications. Although cubic zinc-blende (ZB) GaAs is a well-established material in microelectronics, the controlled growth of hexagonal wurtzite (WZ) GaAs has thus far not been achieved successfully. Specifically, the prospect of growing defect-free and gold catalyst-free wurtzite GaAs would pave the way towards integration on silicon substrate and new device applications. In this article, we present a method to select and maintain the WZ crystal phase in self-assisted NWs by molecular beam epitaxy. By choosing a specific regime where the NW growth process is a self-regulated system, the main experimental parameter to select the ZB or WZ phase is the V/III flux ratio. Using an analytical growth model, we show that the V/III flux ratio can be finely tuned by changing the As flux, thus driving the system toward a stationary regime where the wetting angle of the Ga droplet can be maintained in the range of values allowing the formation of pure WZ phase. The analysis of the in situ reflection high energy electron diffraction evolution, combined with high-resolution scanning transmission electron microscopy (TEM), dark field TEM, and photoluminescence all confirm the control of an extended pure WZ segment, more than a micrometer long, obtained by molecular beam epitaxy growth of self- assisted GaAs NWs with a V/III flux ratio of 4.0. This successful controlled growth of WZ GaAs suggests potential benefits for electronics and opto-electronics applications.
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Affiliation(s)
- T Dursap
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, Ecole Centrale de Lyon, 36 Avenue Guy de Collongue, F-69134 Ecully cedex, France
| | - M Vettori
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, Ecole Centrale de Lyon, 36 Avenue Guy de Collongue, F-69134 Ecully cedex, France
| | - C Botella
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, Ecole Centrale de Lyon, 36 Avenue Guy de Collongue, F-69134 Ecully cedex, France
| | - P Regreny
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, Ecole Centrale de Lyon, 36 Avenue Guy de Collongue, F-69134 Ecully cedex, France
| | - N Blanchard
- Université de Lyon, Université Claude Bernard Lyon 1, CNRS, Institut Lumière Matière, F-69622 Villeurbanne, France
| | - M Gendry
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, Ecole Centrale de Lyon, 36 Avenue Guy de Collongue, F-69134 Ecully cedex, France
| | - N Chauvin
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, INSA de Lyon, 7 Avenue Jean Capelle F-69621, Villeurbanne Cedex, France
| | - M Bugnet
- Université de Lyon, INSA de Lyon, Université Claude Bernard Lyon 1, MATEIS, UMR 5510 CNRS, Avenue Jean Capelle, F-69621 Villeurbanne, France
| | - A Danescu
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, Ecole Centrale de Lyon, 36 Avenue Guy de Collongue, F-69134 Ecully cedex, France
| | - J Penuelas
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, Ecole Centrale de Lyon, 36 Avenue Guy de Collongue, F-69134 Ecully cedex, France
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11
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Gang GW, Lee JH, Kim SY, Jeong T, Bin Kim K, Thi Hong Men N, Kim YR, Ahn SJ, Kim CS, Kim YH. Microstructural evolution in self-catalyzed GaAs nanowires during in-situ TEM study. NANOTECHNOLOGY 2021; 32:145709. [PMID: 33326944 DOI: 10.1088/1361-6528/abd437] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
The microstructural evolutions in self-catalyzed GaAs nanowires (NWs) were investigated by using in situ heating transmission electron microscopy (TEM). The morphological changes of the self-catalyst metal gallium (Ga) droplet, the GaAs NWs, and the atomic behavior at the interface between the self-catalyst metal gallium and GaAs NWs were carefully studied by analysis of high-resolution TEM images. The microstructural change of the Ga-droplet/GaAs-NWs started at a low temperature of ∼200 °C. Formation and destruction of atomic layers were observed at the Ga/GaAs interface and slow depletion of the Ga droplet was detected in the temperature range investigated. Above 300 °C, the evolution process dramatically changed with time: The Ga droplet depleted rapidly and fast growth of zinc-blende (ZB) GaAs structures were observed in the droplet. The Ga droplet was completely removed with time and temperature. When the temperature reached ∼600 °C, the decomposition of GaAs was detected. This process began in the wurtzite (WZ) structure and propagated to the ZB structure. The morphological and atomistic behaviors in self-catalyzed GaAs NWs were demonstrated based on thermodynamic considerations, in addition to the effect of the incident electron beam in TEM. Finally, GaAs decomposition was demonstrated in terms of congruent vaporization.
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Affiliation(s)
- Geun Won Gang
- Department of Physics, Chungnam National University, 99 Daehak-Ro, Yuseong-Gu, Daejeon 34134, Republic of Korea
| | - Jong Hoon Lee
- UNIST Central Research Facilities (UCRF), UNIST, Ulsan 44919, Republic of Korea
| | - Su Yeon Kim
- Graduate School of Analytical Science and Technology (GRAST), Chungnam National University, 99 Daehak-ro, Yuseong-gu, Daejeon 34134, Republic of Korea
| | - Taehyeon Jeong
- Graduate School of Analytical Science and Technology (GRAST), Chungnam National University, 99 Daehak-ro, Yuseong-gu, Daejeon 34134, Republic of Korea
| | - Kyung Bin Kim
- Graduate School of Analytical Science and Technology (GRAST), Chungnam National University, 99 Daehak-ro, Yuseong-gu, Daejeon 34134, Republic of Korea
| | - Nguyen Thi Hong Men
- Graduate School of Analytical Science and Technology (GRAST), Chungnam National University, 99 Daehak-ro, Yuseong-gu, Daejeon 34134, Republic of Korea
| | - Yu Ra Kim
- Graduate School of Analytical Science and Technology (GRAST), Chungnam National University, 99 Daehak-ro, Yuseong-gu, Daejeon 34134, Republic of Korea
| | - Sang Jung Ahn
- Korea Research Institute of Standard and Science, 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, Republic of Korea
- Korea University of Science and Technology, 217 Gajeong-ro, Yuseong-gu, Daejeon 34113, Republic of Korea
| | - Chung Soo Kim
- Korea Institute of Ceramic Engineering and Technology, 101 Soho-ro, Jinju 52851, Republic of Korea
| | - Young Heon Kim
- Graduate School of Analytical Science and Technology (GRAST), Chungnam National University, 99 Daehak-ro, Yuseong-gu, Daejeon 34134, Republic of Korea
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12
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Arif O, Zannier V, Rossi F, Ercolani D, Beltram F, Sorba L. Self-Catalyzed InSb/InAs Quantum Dot Nanowires. NANOMATERIALS 2021; 11:nano11010179. [PMID: 33450840 PMCID: PMC7828319 DOI: 10.3390/nano11010179] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/21/2020] [Revised: 01/08/2021] [Accepted: 01/10/2021] [Indexed: 11/16/2022]
Abstract
The nanowire platform offers great opportunities for improving the quality and range of applications of semiconductor quantum wells and dots. Here, we present the self-catalyzed growth of InAs/InSb/InAs axial heterostructured nanowires with a single defect-free InSb quantum dot, on Si substrates, by chemical beam epitaxy. A systematic variation of the growth parameters for the InAs top segment has been investigated and the resulting nanowire morphology analyzed. We found that the growth temperature strongly influences the axial and radial growth rates of the top InAs segment. As a consequence, we can reduce the InAs shell thickness around the InSb quantum dot by increasing the InAs growth temperature. Moreover, we observed that both axial and radial growth rates are enhanced by the As line pressure as long as the In droplet on the top of the nanowire is preserved. Finally, the time evolution of the diameter along the entire length of the nanowires allowed us to understand that there are two In diffusion paths contributing to the radial InAs growth and that the interplay of these two mechanisms together with the total length of the nanowires determine the final shape of the nanowires. This study provides insights in understanding the growth mechanisms of self-catalyzed InSb/InAs quantum dot nanowires, and our results can be extended also to the growth of other self-catalyzed heterostructured nanowires, providing useful guidelines for the realization of quantum structures with the desired morphology and properties.
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Affiliation(s)
- Omer Arif
- NEST, Istituto Nanoscienze–CNR and Scuola Normale Superiore, Piazza San Silvestro 12, I-56127 Pisa, Italy; (O.A.); (D.E.); (F.B.); (L.S.)
| | - Valentina Zannier
- NEST, Istituto Nanoscienze–CNR and Scuola Normale Superiore, Piazza San Silvestro 12, I-56127 Pisa, Italy; (O.A.); (D.E.); (F.B.); (L.S.)
- Correspondence: ; Tel.: +39-050-509-123(474)
| | - Francesca Rossi
- IMEM–CNR, Parco Area delle Scienze 37/A, I-43124 Parma, Italy;
| | - Daniele Ercolani
- NEST, Istituto Nanoscienze–CNR and Scuola Normale Superiore, Piazza San Silvestro 12, I-56127 Pisa, Italy; (O.A.); (D.E.); (F.B.); (L.S.)
| | - Fabio Beltram
- NEST, Istituto Nanoscienze–CNR and Scuola Normale Superiore, Piazza San Silvestro 12, I-56127 Pisa, Italy; (O.A.); (D.E.); (F.B.); (L.S.)
| | - Lucia Sorba
- NEST, Istituto Nanoscienze–CNR and Scuola Normale Superiore, Piazza San Silvestro 12, I-56127 Pisa, Italy; (O.A.); (D.E.); (F.B.); (L.S.)
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13
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Zhu X, Lin F, Chen X, Zhang Z, Chen X, Wang D, Tang J, Fang X, Fang D, Liao L, Wei Z. Influence of the depletion region in GaAs/AlGaAs quantum well nanowire photodetector. NANOTECHNOLOGY 2020; 31:444001. [PMID: 32585644 DOI: 10.1088/1361-6528/aba02c] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
In semiconductor nanowire (NW) photodetectors, the Schottky barrier formed by the contact between metal and semiconductor can act as a depletion layer. For NW structures with a smaller diameter, the depletion region is especially important to the carrier transport. We prepared a GaAs/AlGaAs quantum well NW photodetector with a two-dimensional electron-hole tube, in which the two-dimensional hole tube (2DHT) formed by the inner layer of GaAs and AlGaAs has the most important role in the regulation of carriers. By adjusting the bias voltage to vary the depth of the depletion region, we have confirmed the influence of the depletion region in a 2DHT. A significant inflection point was found in the responsivity-voltage curve at 1.5 V. By combining the depletion region and 2DHT, the responsivity of the fabricated device was increased by 18 times to 0.199 A W-1 and the detectivity is increased by 5 times to 5.8 × 1010 Jones, compared to the pure GaAs NW photodetector. Reasonable combination of depletion layer and 2DHT was proved to promote high-performance NW photodetector.
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Affiliation(s)
- Xiaotian Zhu
- State Key Laboratory of High Power Semiconductor Lasers, Changchun University of Science and Technology, Changchun 130022, People's Republic of China
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14
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Yeu IW, Han G, Hwang CS, Choi JH. An ab initio approach on the asymmetric stacking of GaAs 〈111〉 nanowires grown by a vapor-solid method. NANOSCALE 2020; 12:17703-17714. [PMID: 32608427 DOI: 10.1039/d0nr02010a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
This study provides an ab initio thermodynamics approach to take a step forward in the theoretical modeling on the growth of GaAs nanowires. In order to understand the effects of growth conditions on the involvement of stacking faults and polytypism, we investigated the vapor-phase growth kinetics under arbitrary temperature-pressure conditions by combining the atomic-scale calculation with the thermodynamic treatment of a vapor-solid system. Considering entropy contribution and electronic energy, the chemical potential and surface energies of various reconstructions were calculated as a function of temperature and pressure, leading to the prediction of the change in Gibbs free energy at each stage of nucleation and growth. This enabled us to predict the temperature-pressure-dependent variation in nucleation rate and formation probability of possible stacking sequences: zinc blende, stacking faults, twin, and wurtzite. As a result, the formation probabilities of stacking faults and polytypism were found to decrease with increasing temperature or decreasing pressure, which agreed well with available experiments. In addition, by showing that the formation probability of the stacking defects in GaAs nanowires grown along the 〈111〉B direction is about ten times higher than that along the 〈111〉A direction, the intriguing asymmetric stacking behavior during the growth along the polar direction and its dependence on growth conditions were fundamentally elucidated. The proposed ab initio approach bridges the gap between atomic-scale static calculation at zero-temperature and kinetic growth process under arbitrary vapor-phase conditions, and thus will contribute to the nanoscale growth not only for GaAs nanowires but also for other materials.
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Affiliation(s)
- In Won Yeu
- Center for Electronic Materials, Korea Institute of Science and Technology, Seoul 02792, Korea.
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15
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Dursap T, Vettori M, Danescu A, Botella C, Regreny P, Patriarche G, Gendry M, Penuelas J. Crystal phase engineering of self-catalyzed GaAs nanowires using a RHEED diagram. NANOSCALE ADVANCES 2020; 2:2127-2134. [PMID: 36132505 PMCID: PMC9418245 DOI: 10.1039/d0na00273a] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/13/2019] [Accepted: 04/09/2020] [Indexed: 06/12/2023]
Abstract
It is well known that the crystalline structure of the III-V nanowires (NWs) is mainly controlled by the wetting contact angle of the catalyst droplet which can be tuned by the III and V flux. In this work we present a method to control the wurtzite (WZ) or zinc-blende (ZB) structure in self-catalyzed GaAs NWs grown by molecular beam epitaxy, using in situ reflection high energy electron diffraction (RHEED) diagram analysis. Since the diffraction patterns of the ZB and WZ structures differ according to the azimuth [11̄0], it is possible to follow the evolution of the intensity of specific ZB and WZ diffraction spots during NW growth as a function of the growth parameters such as the Ga flux. By analyzing the evolution of the WZ and ZB spot intensities during NW growth with specific changes of the Ga flux, it is then possible to control the crystal structure of the NWs. ZB GaAs NWs with a controlled WZ segment have thus been realized. Using a semi-empirical model for the NW growth and our in situ RHEED measurements, the critical wetting angle of the Ga catalyst droplet for the structural transition is deduced.
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Affiliation(s)
- T Dursap
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, École Centrale de Lyon 36 avenue Guy de Collongue F-69134 Ecully cedex France
| | - M Vettori
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, École Centrale de Lyon 36 avenue Guy de Collongue F-69134 Ecully cedex France
| | - A Danescu
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, École Centrale de Lyon 36 avenue Guy de Collongue F-69134 Ecully cedex France
| | - C Botella
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, École Centrale de Lyon 36 avenue Guy de Collongue F-69134 Ecully cedex France
| | - P Regreny
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, École Centrale de Lyon 36 avenue Guy de Collongue F-69134 Ecully cedex France
| | - G Patriarche
- Université Paris-Saclay, CNRS, Centre de Nanosciences et de Nanotechnologies 91120 Palaiseau France
| | - M Gendry
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, École Centrale de Lyon 36 avenue Guy de Collongue F-69134 Ecully cedex France
| | - J Penuelas
- Institut des Nanotechnologies de Lyon-INL, UMR 5270 CNRS, Université de Lyon, École Centrale de Lyon 36 avenue Guy de Collongue F-69134 Ecully cedex France
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16
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Wen L, Pan D, Liao D, Zhao J. Foreign-catalyst-free GaSb nanowires directly grown on cleaved Si substrates by molecular-beam epitaxy. NANOTECHNOLOGY 2020; 31:155601. [PMID: 31783375 DOI: 10.1088/1361-6528/ab5d78] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
We have successfully fabricated foreign-catalyst-free GaSb nanowires directly on cleaved Si (111) substrates by molecular-beam epitaxy. We find that GaSb nanowires with the absence and presence of Ga droplets at the tip can be simultaneously obtained on cleaved Si substrates without Ga pre-deposition. Systematic morphological and structural studies verify that the two kinds of nanowires presented have different growth mechanisms, which are vapor-solid and vapor-liquid-solid mechanisms. The growth of GaSb nanowires can also be achieved on cleaved Si (110) and Si (100) substrates. The cleavage plane of the Si substrate has an obvious influence on the growth of the GaSb nanowires. The growth direction and crystal quality of catalyst-free nanowires are independent of the cleavage plane of the substrate. Our results may facilitate the understanding of the growth mechanism of III-V nanowires and the integration of foreign-catalyst-free GaSb nanowire-based devices with mature semiconductor technology.
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Affiliation(s)
- Lianjun Wen
- State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, PO Box 912, Beijing 100083, People's Republic of China. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, People's Republic of China
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17
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Panciera F, Baraissov Z, Patriarche G, Dubrovskii VG, Glas F, Travers L, Mirsaidov U, Harmand JC. Phase Selection in Self-catalyzed GaAs Nanowires. NANO LETTERS 2020; 20:1669-1675. [PMID: 32027145 DOI: 10.1021/acs.nanolett.9b04808] [Citation(s) in RCA: 46] [Impact Index Per Article: 9.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/25/2023]
Abstract
Crystal phase switching between the zincblende and wurtzite structures in III-V nanowires is crucial from the fundamental viewpoint as well as for electronic and photonic applications of crystal phase heterostructures. Here, the results of in situ monitoring of self-catalyzed vapor-liquid-solid growth of GaAs nanowires by molecular beam epitaxy inside a transmission electron microscope are presented. It is demonstrated that the occurrence of the zincblende or wurtzite phase in self-catalyzed nanowires is determined by the sole parameter, the droplet contact angle, which can be finely tuned by changing the group III and V fluxes. The zincblende phase forms at small (<100°) and large (>125°) contact angles, whereas pure wurtzite phase is observed for intermediate contact angles. Wurtzite nanowires are restricted by vertical sidewalls, whereas zincblende nanowires taper or develop the truncated edge at their top. These findings are explained within a dedicated model for the surface energetics. These results give a clear route for the crystal phase control in Au-free III-V nanowires. On a more general note, in situ growth monitoring with atomic resolution and at the technological-relevant growth rates is shown to be a powerful tool for the fine-tuning of material properties at the nanoscale.
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Affiliation(s)
- Federico Panciera
- Université Paris-Saclay, CNRS, Centre de Nanosciences et de Nanotechnologies, 91120, Palaiseau, France
- Centre for BioImaging Sciences, Department of Biological Sciences, National University of Singapore, 14 Science Drive 4, 117557, Singapore
| | - Zhaslan Baraissov
- Centre for BioImaging Sciences, Department of Biological Sciences, National University of Singapore, 14 Science Drive 4, 117557, Singapore
- Centre for Advanced 2D Materials and Department of Physics, National University of Singapore, Science Drive 4, 117543, Singapore
| | - Gilles Patriarche
- Université Paris-Saclay, CNRS, Centre de Nanosciences et de Nanotechnologies, 91120, Palaiseau, France
| | | | - Frank Glas
- Université Paris-Saclay, CNRS, Centre de Nanosciences et de Nanotechnologies, 91120, Palaiseau, France
| | - Laurent Travers
- Université Paris-Saclay, CNRS, Centre de Nanosciences et de Nanotechnologies, 91120, Palaiseau, France
| | - Utkur Mirsaidov
- Centre for BioImaging Sciences, Department of Biological Sciences, National University of Singapore, 14 Science Drive 4, 117557, Singapore
- Centre for Advanced 2D Materials and Department of Physics, National University of Singapore, Science Drive 4, 117543, Singapore
| | - Jean-Christophe Harmand
- Université Paris-Saclay, CNRS, Centre de Nanosciences et de Nanotechnologies, 91120, Palaiseau, France
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18
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Jakob J, Schroth P, Feigl L, Hauck D, Pietsch U, Baumbach T. Quantitative analysis of time-resolved RHEED during growth of vertical nanowires. NANOSCALE 2020; 12:5471-5482. [PMID: 32083629 DOI: 10.1039/c9nr09621c] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
We present an approach for quantitative evaluation of time-resolved reflection high-energy electron diffraction (RHEED) intensity patterns measured during the growth of vertical, free-standing nanowires (NWs). The approach considers shadowing due to attenuation by absorption and extinction within the individual nanowires and estimates the time dependence of its influence on the RHEED signal of the nanowire ensemble as a function of instrumental RHEED parameters and the growth dynamics averaged over the nanowire ensemble. The developed RHEED simulation model takes into account the nanowire structure evolution related to essential growth aspects, such as axial growth, radial growth with tapering and facet growth, as well as so-called parasitic intergrowth on the substrate. It also considers the influence of the NW density, which turns out to be a sensitive parameter for the time-dependent interpretation of the intensity patterns. Finally, the application potential is demonstrated by evaluating experimental data obtained during molecular beam epitaxy (MBE) of self-catalysed GaAs nanowires. We demonstrate, how electron shadowing enables a time-resolved analysis of the crystal structure evolution at the top part of the growing NWs. The approach offers direct access to study growth dynamics of polytypism in nanowire ensembles at the growth front region under standard growth conditions.
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Affiliation(s)
- Julian Jakob
- Laboratory for Applications of Synchrotron Radiation, Karlsruhe Institute of Technology, Kaiserstraße 12, D-76131 Karlsruhe, Germany.
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19
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Vettori M, Danescu A, Guan X, Regreny P, Penuelas J, Gendry M. Impact of the Ga flux incidence angle on the growth kinetics of self-assisted GaAs nanowires on Si(111). NANOSCALE ADVANCES 2019; 1:4433-4441. [PMID: 36134421 PMCID: PMC9418788 DOI: 10.1039/c9na00443b] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/16/2019] [Accepted: 10/06/2019] [Indexed: 06/12/2023]
Abstract
In this work we show that the incidence angle of group-III element fluxes plays a significant role in the diffusion-controlled growth of III-V nanowires (NWs) by molecular beam epitaxy (MBE). We present a thorough experimental study on the self-assisted growth of GaAs NWs by using a MBE reactor equipped with two Ga cells located at different incidence angles with respect to the surface normal of the substrate, so as to ascertain the impact of such a parameter on the NW growth kinetics. The as-obtained results show a dramatic influence of the Ga flux incidence angle on the NW length and diameter, as well as on the shape and size of the Ga droplets acting as catalysts. In order to interpret the results we developed a semi-empirical analytical model inspired by those already developed for MBE-grown Au-catalyzed GaAs NWs. Numerical simulations performed with the model allow us to reproduce thoroughly the experimental results (in terms of NW length and diameter and of droplet size and wetting angle), putting in evidence that under formally the same experimental conditions the incidence angle of the Ga flux is a key parameter which can drastically affect the growth kinetics of the NWs grown by MBE.
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Affiliation(s)
- Marco Vettori
- Université de Lyon, Institut des Nanotechnologies de Lyon - INL, Ecole Centrale de Lyon UMR CNRS 5270 69134 Ecully France
| | - Alexandre Danescu
- Université de Lyon, Institut des Nanotechnologies de Lyon - INL, Ecole Centrale de Lyon UMR CNRS 5270 69134 Ecully France
| | - Xin Guan
- Université de Lyon, Institut des Nanotechnologies de Lyon - INL, Ecole Centrale de Lyon UMR CNRS 5270 69134 Ecully France
| | - Philippe Regreny
- Université de Lyon, Institut des Nanotechnologies de Lyon - INL, Ecole Centrale de Lyon UMR CNRS 5270 69134 Ecully France
| | - José Penuelas
- Université de Lyon, Institut des Nanotechnologies de Lyon - INL, Ecole Centrale de Lyon UMR CNRS 5270 69134 Ecully France
| | - Michel Gendry
- Université de Lyon, Institut des Nanotechnologies de Lyon - INL, Ecole Centrale de Lyon UMR CNRS 5270 69134 Ecully France
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20
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de Lépinau R, Scaccabarozzi A, Patriarche G, Travers L, Collin S, Cattoni A, Oehler F. Evidence and control of unintentional As-rich shells in GaAs 1-x P x nanowires. NANOTECHNOLOGY 2019; 30:294003. [PMID: 31032812 DOI: 10.1088/1361-6528/ab14c1] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
We report on the detailed composition of ternary GaAsP nanowires (NWs) grown using self-catalyzed vapor-liquid-solid (VLS) growth by molecular beam epitaxy. We evidence the formation of an unintentional shell, which enlarges by vapor-solid growth concurrently to the main VLS-grown core. The NW core and unintentional shell have typically different chemical compositions if no effort is made to adjust the growth conditions. The compositions can be made equal by changing the substrate temperature and the P/As flux ratio in the vapor phase. In all cases, we still observe the existence of a P-rich interface between the GaAsP NW core and the unintentional shell, even if favorable growth conditions are used.
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Affiliation(s)
- Romaric de Lépinau
- IPVF, Institut Photovoltaïque d'Île-de-France, F-91120 Palaiseau, France. C2N, Centre de Nanosciences et de Nanotechnologies, UMR 9001 CNRS, Univ. Paris Sud, Univ. Paris-Saclay, F-91120 Palaiseau, France
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21
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Sonner MM, Sitek A, Janker L, Rudolph D, Ruhstorfer D, Döblinger M, Manolescu A, Abstreiter G, Finley JJ, Wixforth A, Koblmüller G, Krenner HJ. Breakdown of Corner States and Carrier Localization by Monolayer Fluctuations in Radial Nanowire Quantum Wells. NANO LETTERS 2019; 19:3336-3343. [PMID: 31013103 DOI: 10.1021/acs.nanolett.9b01028] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
We report a comprehensive study of the impact of the structural properties in radial GaAs-Al0.3Ga0.7As nanowire-quantum well heterostructures on the optical recombination dynamics and electrical transport properties, emphasizing particularly the role of the commonly observed variations of the quantum well thickness at different facets. Typical thickness fluctuations of the radial quantum well observed by transmission electron microscopy lead to pronounced localization. Our optical data exhibit clear spectral shifts and a multipeak structure of the emission for such asymmetric ring structures resulting from spatially separated, yet interconnected quantum well systems. Charge carrier dynamics induced by a surface acoustic wave are resolved and prove efficient carrier exchange on native, subnanosecond time scales within the heterostructure. Experimental findings are corroborated by theoretical modeling, which unambiguously show that electrons and holes localize on facets where the quantum well is the thickest and that even minute deviations of the perfect hexagonal shape strongly perturb the commonly assumed 6-fold symmetric ground state.
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Affiliation(s)
- Maximilian M Sonner
- Lehrstuhl für Experimentalphysik 1, Institut für Physik and Augsburg Centre for Innovative Technologies (ACIT) , Universität Augsburg , Universitätsstr. 1 , 86159 Augsburg , Germany
- Nanosystems Initiative Munich (NIM) , Schellingstr. 4 , 80799 München , Germany
| | - Anna Sitek
- School of Science and Engineering , Reykjavik University , Menntavegur 1 , 101 Reykjavik , Iceland
- Department of Theoretical Physics, Faculty of Fundamental Problems of Technology , Wroclaw University of Science and Technology , Wybrzeże Wyspiańskiego 27 , 50-370 Wroclaw , Poland
| | - Lisa Janker
- Lehrstuhl für Experimentalphysik 1, Institut für Physik and Augsburg Centre for Innovative Technologies (ACIT) , Universität Augsburg , Universitätsstr. 1 , 86159 Augsburg , Germany
- Nanosystems Initiative Munich (NIM) , Schellingstr. 4 , 80799 München , Germany
| | - Daniel Rudolph
- Nanosystems Initiative Munich (NIM) , Schellingstr. 4 , 80799 München , Germany
- Walter Schottky Institut and Physik Department , Technische Universität München , Am Coulombwall 4 , 85748 Garching , Germany
| | - Daniel Ruhstorfer
- Nanosystems Initiative Munich (NIM) , Schellingstr. 4 , 80799 München , Germany
- Walter Schottky Institut and Physik Department , Technische Universität München , Am Coulombwall 4 , 85748 Garching , Germany
| | - Markus Döblinger
- Nanosystems Initiative Munich (NIM) , Schellingstr. 4 , 80799 München , Germany
- Department of Chemistry , Ludwig-Maximilians-Universität München , Butenandtstr. 5-13(E) , 81377 München , Germany
| | - Andrei Manolescu
- School of Science and Engineering , Reykjavik University , Menntavegur 1 , 101 Reykjavik , Iceland
| | - Gerhard Abstreiter
- Nanosystems Initiative Munich (NIM) , Schellingstr. 4 , 80799 München , Germany
- Walter Schottky Institut and Physik Department , Technische Universität München , Am Coulombwall 4 , 85748 Garching , Germany
| | - Jonathan J Finley
- Nanosystems Initiative Munich (NIM) , Schellingstr. 4 , 80799 München , Germany
- Walter Schottky Institut and Physik Department , Technische Universität München , Am Coulombwall 4 , 85748 Garching , Germany
| | - Achim Wixforth
- Lehrstuhl für Experimentalphysik 1, Institut für Physik and Augsburg Centre for Innovative Technologies (ACIT) , Universität Augsburg , Universitätsstr. 1 , 86159 Augsburg , Germany
- Nanosystems Initiative Munich (NIM) , Schellingstr. 4 , 80799 München , Germany
| | - Gregor Koblmüller
- Nanosystems Initiative Munich (NIM) , Schellingstr. 4 , 80799 München , Germany
- Walter Schottky Institut and Physik Department , Technische Universität München , Am Coulombwall 4 , 85748 Garching , Germany
| | - Hubert J Krenner
- Lehrstuhl für Experimentalphysik 1, Institut für Physik and Augsburg Centre for Innovative Technologies (ACIT) , Universität Augsburg , Universitätsstr. 1 , 86159 Augsburg , Germany
- Nanosystems Initiative Munich (NIM) , Schellingstr. 4 , 80799 München , Germany
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22
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Vettori M, Piazza V, Cattoni A, Scaccabarozzi A, Patriarche G, Regreny P, Chauvin N, Botella C, Grenet G, Penuelas J, Fave A, Tchernycheva M, Gendry M. Growth optimization and characterization of regular arrays of GaAs/AlGaAs core/shell nanowires for tandem solar cells on silicon. NANOTECHNOLOGY 2019; 30:084005. [PMID: 30524074 DOI: 10.1088/1361-6528/aaf3fe] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
With a band gap value of 1.7 eV, Al0.2Ga0.8As is one of the ideal III-V alloys for the development of nanowire-based Tandem Solar Cells on silicon. Nevertheless, growing self-catalysed AlGaAs nanowires on silicon by solid-source molecular beam epitaxy is a very difficult task due to the oxidation of Al adatoms by the SiO2 layer present on the surface. Here we propose a nanowire structure including a p.i.n radial junction inside an Al0.2Ga0.8As shell grown on a p-GaAs core. The crystalline structure of such self-catalysed nanowires grown on an epi-ready Si(111) substrate (with a thin native SiO2 layer) was investigated by transmission electronic microscopy and photoluminescence. I(V) measurements performed on single nanowires have shown a diode-like behaviour corresponding to the radial p.i.n junction inside the Al0.2Ga0.8As shell. Moreover, a current generation under the electron beam was evidenced over the entire radial junction along the nanowires by means of electron beam induced current (EBIC) microscopy. The same structure was reproduced on patterned substrates with a SiO2 mask, producing an ordered hexagonal array. High and uniform yields from 83% to 87% of vertical nanowires were obtained on 0.9 × 0.9 cm2 patterned areas. EBIC mapping performed on these nanowires confirmed the good electrical properties of the radial junction within the nanowires.
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Affiliation(s)
- M Vettori
- INL, UMR 5270 CNRS, University of Lyon, Ecole Centrale de Lyon, F-69134, Ecully, France. INL, UMR 5270 CNRS, University of Lyon, INSA de Lyon, F-69621, Villeurbanne, France
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23
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Piazza V, Vettori M, Ahmed AA, Lavenus P, Bayle F, Chauvin N, Julien FH, Regreny P, Patriarche G, Fave A, Gendry M, Tchernycheva M. Nanoscale investigation of a radial p-n junction in self-catalyzed GaAs nanowires grown on Si (111). NANOSCALE 2018; 10:20207-20217. [PMID: 30357204 DOI: 10.1039/c8nr03827a] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
One obstacle for the development of nanowire (NW) solar cells is the challenge to assess and control their nanoscale electrical properties. In this work a top-cell made of p-n GaAs core/shell NWs grown on a Si(111) substrate by Molecular Beam Epitaxy (MBE) is investigated by high resolution charge collection microscopy. Electron Beam Induced Current (EBIC) analyses of single NWs have validated the formation of a homogeneous radial p-n junction over the entire length of the NWs. The radial geometry leads to an increase of the junction area by 38 times with respect to the NW footprint. The interface between the NWs and the Si(111) substrate does not show any electrical loss, which would have led to a decrease of the EBIC signal. Single NW I-V characteristics present a diodic behavior. A model of the radial junction single NW is proposed and the electrical parameters are estimated by numerical fitting of the I-Vs and of the EBIC map. Solar cells based on NW arrays were fabricated and analyzed by EBIC microscopy, which evidenced the presence of a Schottky barrier at the NW/ITO top contact. Improvement of the top contact quality is achieved by thermal annealing at 400 °C, which strongly reduces the parasitic Schottky barrier.
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Affiliation(s)
- Valerio Piazza
- Centre de Nanosciences et de Nanotechnologies (C2N), UMR 9001 CNRS, Univ. Paris Sud, Univ. Paris-Saclay, 8 Avenue de la Vauve, 91120 Palaiseau, France.
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24
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Stettner T, Thurn A, Döblinger M, Hill MO, Bissinger J, Schmiedeke P, Matich S, Kostenbader T, Ruhstorfer D, Riedl H, Kaniber M, Lauhon LJ, Finley JJ, Koblmüller G. Tuning Lasing Emission toward Long Wavelengths in GaAs-(In,Al)GaAs Core-Multishell Nanowires. NANO LETTERS 2018; 18:6292-6300. [PMID: 30185051 DOI: 10.1021/acs.nanolett.8b02503] [Citation(s) in RCA: 25] [Impact Index Per Article: 3.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
Semiconductor nanowire (NW) lasers are attractive as integrated on-chip coherent light sources with strong potential for applications in optical communication and sensing. Realizing lasers from individual bulk-type NWs with emission tunable from the near-infrared to the telecommunications spectral region is, however, challenging and requires low-dimensional active gain regions with an adjustable band gap and quantum confinement. Here, we demonstrate lasing from GaAs-(InGaAs/AlGaAs) core-shell NWs with multiple InGaAs quantum wells (QW) and lasing wavelengths tunable from ∼0.8 to ∼1.1 μm. Our investigation emphasizes particularly the critical interplay between QW design, growth kinetics, and the control of InGaAs composition in the active region needed for effective tuning of the lasing wavelength. A low shell growth temperature and GaAs interlayers at the QW/barrier interfaces enable In molar fractions up to ∼25% without plastic strain relaxation or alloy intermixing in the QWs. Correlated scanning transmission electron microscopy, atom probe tomography, and confocal PL spectroscopy analyses illustrate the high sensitivity of the optically pumped lasing characteristics on microscopic properties, providing useful guidelines for other III-V-based NW laser systems.
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Affiliation(s)
- T Stettner
- Walter Schottky Institut and Physik Department , Technische Universität München , 85748 Garching , Germany
| | - A Thurn
- Walter Schottky Institut and Physik Department , Technische Universität München , 85748 Garching , Germany
| | - M Döblinger
- Department of Chemistry , Ludwig-Maximilians-Universität München , 81377 München , Germany
| | - M O Hill
- Department of Materials Science and Engineering , Northwestern University , Evanston , Illinois 60208 , United States
| | - J Bissinger
- Walter Schottky Institut and Physik Department , Technische Universität München , 85748 Garching , Germany
| | - P Schmiedeke
- Walter Schottky Institut and Physik Department , Technische Universität München , 85748 Garching , Germany
| | - S Matich
- Walter Schottky Institut and Physik Department , Technische Universität München , 85748 Garching , Germany
| | - T Kostenbader
- Walter Schottky Institut and Physik Department , Technische Universität München , 85748 Garching , Germany
| | - D Ruhstorfer
- Walter Schottky Institut and Physik Department , Technische Universität München , 85748 Garching , Germany
| | - H Riedl
- Walter Schottky Institut and Physik Department , Technische Universität München , 85748 Garching , Germany
| | - M Kaniber
- Walter Schottky Institut and Physik Department , Technische Universität München , 85748 Garching , Germany
| | - L J Lauhon
- Department of Materials Science and Engineering , Northwestern University , Evanston , Illinois 60208 , United States
| | - J J Finley
- Walter Schottky Institut and Physik Department , Technische Universität München , 85748 Garching , Germany
| | - G Koblmüller
- Walter Schottky Institut and Physik Department , Technische Universität München , 85748 Garching , Germany
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25
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Jeon N, Ruhstorfer D, Döblinger M, Matich S, Loitsch B, Koblmüller G, Lauhon L. Connecting Composition-Driven Faceting with Facet-Driven Composition Modulation in GaAs-AlGaAs Core-Shell Nanowires. NANO LETTERS 2018; 18:5179-5185. [PMID: 29995425 DOI: 10.1021/acs.nanolett.8b02104] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
Ternary III-V alloys of tunable bandgap are a foundation for engineering advanced optoelectronic devices based on quantum-confined structures including quantum wells, nanowires, and dots. In this context, core-shell nanowires provide useful geometric degrees of freedom in heterostructure design, but alloy segregation is frequently observed in epitaxial shells even in the absence of interface strain. High-resolution scanning transmission electron microscopy and laser-assisted atom probe tomography were used to investigate the driving forces of segregation in nonplanar GaAs-AlGaAs core-shell nanowires. Growth-temperature-dependent studies of Al-rich regions growing on radial {112} nanofacets suggest that facet-dependent bonding preferences drive the enrichment, rather than kinetically limited diffusion. Observations of the distinct interface faceting when pure AlAs is grown on GaAs confirm the preferential bonding of Al on {112} facets over {110} facets, explaining the decomposition behavior. Furthermore, three-dimensional composition profiles generated by atom probe tomography reveal the presence of Al-rich nanorings perpendicular to the growth direction; correlated electron microscopy shows that short zincblende insertions in a nanowire segment with predominantly wurtzite structure are enriched in Al, demonstrating that crystal phase engineering can be used to modulate composition. The findings suggest strategies to limit alloy decomposition and promote new geometries of quantum confined structures.
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Affiliation(s)
- Nari Jeon
- Department of Materials Science and Engineering , Northwestern University , Evanston , Illinois 60208 , United States
| | - Daniel Ruhstorfer
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials , Technische Universität München , Garching 85748 , Germany
| | - Markus Döblinger
- Department of Chemistry , Ludwig-Maximilians-Universität München , Munich 81377 , Germany
| | - Sonja Matich
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials , Technische Universität München , Garching 85748 , Germany
| | - Bernhard Loitsch
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials , Technische Universität München , Garching 85748 , Germany
| | - Gregor Koblmüller
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials , Technische Universität München , Garching 85748 , Germany
| | - Lincoln Lauhon
- Department of Materials Science and Engineering , Northwestern University , Evanston , Illinois 60208 , United States
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26
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Pöpsel C, Becker J, Jeon N, Döblinger M, Stettner T, Gottschalk YT, Loitsch B, Matich S, Altzschner M, Holleitner AW, Finley JJ, Lauhon LJ, Koblmüller G. He-Ion Microscopy as a High-Resolution Probe for Complex Quantum Heterostructures in Core-Shell Nanowires. NANO LETTERS 2018; 18:3911-3919. [PMID: 29781624 DOI: 10.1021/acs.nanolett.8b01282] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
Core-shell semiconductor nanowires (NW) with internal quantum heterostructures are amongst the most complex nanostructured materials to be explored for assessing the ultimate capabilities of diverse ultrahigh-resolution imaging techniques. To probe the structure and composition of these materials in their native environment with minimal damage and sample preparation calls for high-resolution electron or ion microscopy methods, which have not yet been tested on such classes of ultrasmall quantum nanostructures. Here, we demonstrate that scanning helium ion microscopy (SHeIM) provides a powerful and straightforward method to map quantum heterostructures embedded in complex III-V semiconductor NWs with unique material contrast at ∼1 nm resolution. By probing the cross sections of GaAs-Al(Ga)As core-shell NWs with coaxial GaAs quantum wells as well as short-period GaAs/AlAs superlattice (SL) structures in the shell, the Al-rich and Ga-rich layers are accurately discriminated by their image contrast in excellent agreement with correlated, yet destructive, scanning transmission electron microscopy and atom probe tomography analysis. Most interestingly, quantitative He-ion dose-dependent SHeIM analysis of the ternary AlGaAs shell layers and of compositionally nonuniform GaAs/AlAs SLs reveals distinct alloy composition fluctuations in the form of Al-rich clusters with size distributions between ∼1-10 nm. In the GaAs/AlAs SLs the alloy clustering vanishes with increasing SL-period (>5 nm-GaAs/4 nm-AlAs), providing insights into critical size dimensions for atomic intermixing effects in short-period SLs within a NW geometry. The straightforward SHeIM technique therefore provides unique benefits in imaging the tiniest nanoscale features in topography, structure and composition of a multitude of diverse complex semiconductor nanostructures.
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Affiliation(s)
- Christian Pöpsel
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials , Technische Universität München , Am Coulombwall 4 , Garching , 85748 , Germany
| | - Jonathan Becker
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials , Technische Universität München , Am Coulombwall 4 , Garching , 85748 , Germany
| | - Nari Jeon
- Department of Materials Science & Engineering , Northwestern University , Evanston , Illinois 60208 , United States
| | - Markus Döblinger
- Department of Chemistry , Ludwig-Maximilian-Universität München , Butenandtstraße 5-13 , München , 81377 , Germany
| | - Thomas Stettner
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials , Technische Universität München , Am Coulombwall 4 , Garching , 85748 , Germany
| | - Yeanitza Trujillo Gottschalk
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials , Technische Universität München , Am Coulombwall 4 , Garching , 85748 , Germany
| | - Bernhard Loitsch
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials , Technische Universität München , Am Coulombwall 4 , Garching , 85748 , Germany
| | - Sonja Matich
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials , Technische Universität München , Am Coulombwall 4 , Garching , 85748 , Germany
| | - Marcus Altzschner
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials , Technische Universität München , Am Coulombwall 4 , Garching , 85748 , Germany
| | - Alexander W Holleitner
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials , Technische Universität München , Am Coulombwall 4 , Garching , 85748 , Germany
| | - Jonathan J Finley
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials , Technische Universität München , Am Coulombwall 4 , Garching , 85748 , Germany
| | - Lincoln J Lauhon
- Department of Materials Science & Engineering , Northwestern University , Evanston , Illinois 60208 , United States
| | - Gregor Koblmüller
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials , Technische Universität München , Am Coulombwall 4 , Garching , 85748 , Germany
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27
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Ali H, Zhang Y, Tang J, Peng K, Sun S, Sun Y, Song F, Falak A, Wu S, Qian C, Wang M, Zuo Z, Jin KJ, Sanchez AM, Liu H, Xu X. High-Responsivity Photodetection by a Self-Catalyzed Phase-Pure p-GaAs Nanowire. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2018; 14:e1704429. [PMID: 29611286 DOI: 10.1002/smll.201704429] [Citation(s) in RCA: 22] [Impact Index Per Article: 3.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/20/2017] [Revised: 02/02/2018] [Indexed: 05/25/2023]
Abstract
Defects are detrimental for optoelectronics devices, such as stacking faults can form carrier-transportation barriers, and foreign impurities (Au) with deep-energy levels can form carrier traps and nonradiative recombination centers. Here, self-catalyzed p-type GaAs nanowires (NWs) with a pure zinc blende (ZB) structure are first developed, and then a photodetector made from these NWs is fabricated. Due to the absence of stacking faults and suppression of large amount of defects with deep energy levels, the photodetector exhibits room-temperature high photoresponsivity of 1.45 × 105 A W-1 and excellent specific detectivity (D*) up to 1.48 × 1014 Jones for a low-intensity light signal of wavelength 632.8 nm, which outperforms previously reported NW-based photodetectors. These results demonstrate these self-catalyzed pure-ZB GaAs NWs to be promising candidates for optoelectronics applications.
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Affiliation(s)
- Hassan Ali
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
- School of Physical Sciences, University of Chinese Academy of Sciences, Beijing, 100190, China
| | - Yunyan Zhang
- Department of Electronics and Electrical Engineering, University College London, London, WC1E 7JE, UK
| | - Jing Tang
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
| | - Kai Peng
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
| | - Sibai Sun
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
| | - Yue Sun
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
| | - Feilong Song
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
| | - Attia Falak
- National Centre for Nanoscience and Technology, Chinese Academy of Sciences, Beijing, 100190, China
- Department of Physics, University of the Punjab, Quaid-e-Azam Campus, Lahore, 54000, Pakistan
| | - Shiyao Wu
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
| | - Chenjiang Qian
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
| | - Meng Wang
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
| | - Zhanchun Zuo
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
| | - Kui-Juan Jin
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
- School of Physical Sciences, University of Chinese Academy of Sciences, Beijing, 100190, China
| | - Ana M Sanchez
- Department of Physics, University of Warwick, Coventry, CV4 7AL, UK
| | - Huiyun Liu
- Department of Electronics and Electrical Engineering, University College London, London, WC1E 7JE, UK
| | - Xiulai Xu
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
- School of Physical Sciences, University of Chinese Academy of Sciences, Beijing, 100190, China
- CAS Center for Excellence in Topological Quantum Computation, University of Chinese Academy of Sciences, Beijing, 100190, China
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28
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Becker J, Hill MO, Sonner M, Treu J, Döblinger M, Hirler A, Riedl H, Finley JJ, Lauhon L, Koblmüller G. Correlated Chemical and Electrically Active Dopant Analysis in Catalyst-Free Si-Doped InAs Nanowires. ACS NANO 2018; 12:1603-1610. [PMID: 29385327 DOI: 10.1021/acsnano.7b08197] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Direct correlations between dopant incorporation, distribution, and their electrical activity in semiconductor nanowires (NW) are difficult to access and require a combination of advanced nanometrology methods. Here, we present a comprehensive investigation of the chemical and electrically active dopant concentrations in n-type Si-doped InAs NW grown by catalyst-free molecular beam epitaxy using various complementary techniques. N-type carrier concentrations are determined by Seebeck effect measurements and four-terminal NW field-effect transistor characterization and compared with the Si dopant distribution analyzed by local electrode atom probe tomography. With increased dopant supply, a distinct saturation of the free carrier concentration is observed in the mid-1018 cm-3 range. This behavior coincides with the incorporated Si dopant concentrations in the bulk part of the NW, suggesting the absence of compensation effects. Importantly, excess Si dopants with very high concentrations (>1020 cm-3) segregate at the NW sidewall surfaces, which confirms recent first-principles calculations and results in modifications of the surface electronic properties that are sensitively probed by field-effect measurements. These findings are expected to be relevant also for doping studies of other noncatalytic III-V NW systems.
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Affiliation(s)
- Jonathan Becker
- Walter Schottky Institut, Physik Department, and Center of Nanotechnology and Nanomaterials, Technische Universität München , Garching 85748, Germany
| | - Megan O Hill
- Department of Materials Science and Engineering, Northwestern University , Evanston, Illinois 60208, United States
| | - Max Sonner
- Walter Schottky Institut, Physik Department, and Center of Nanotechnology and Nanomaterials, Technische Universität München , Garching 85748, Germany
| | - Julian Treu
- Walter Schottky Institut, Physik Department, and Center of Nanotechnology and Nanomaterials, Technische Universität München , Garching 85748, Germany
| | - Markus Döblinger
- Department of Chemistry, Ludwig-Maximilians-Universität München , Munich 81377, Germany
| | - Alexander Hirler
- Walter Schottky Institut, Physik Department, and Center of Nanotechnology and Nanomaterials, Technische Universität München , Garching 85748, Germany
| | - Hubert Riedl
- Walter Schottky Institut, Physik Department, and Center of Nanotechnology and Nanomaterials, Technische Universität München , Garching 85748, Germany
| | - Jonathan J Finley
- Walter Schottky Institut, Physik Department, and Center of Nanotechnology and Nanomaterials, Technische Universität München , Garching 85748, Germany
| | - Lincoln Lauhon
- Department of Materials Science and Engineering, Northwestern University , Evanston, Illinois 60208, United States
| | - Gregor Koblmüller
- Walter Schottky Institut, Physik Department, and Center of Nanotechnology and Nanomaterials, Technische Universität München , Garching 85748, Germany
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29
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Jo J, Tchoe Y, Yi GC, Kim M. Real-Time Characterization Using in situ RHEED Transmission Mode and TEM for Investigation of the Growth Behaviour of Nanomaterials. Sci Rep 2018; 8:1694. [PMID: 29374190 PMCID: PMC5786047 DOI: 10.1038/s41598-018-19857-2] [Citation(s) in RCA: 21] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/02/2017] [Accepted: 01/08/2018] [Indexed: 11/09/2022] Open
Abstract
A novel characterization technique using both in situ reflection high-energy electron diffraction (RHEED) transmission mode and transmission electron microscopy (TEM) has been developed to investigate the growth behaviour of semiconductor nanostructures. RHEED employed in transmission mode enables the acquisition of structural information during the growth of nanostructures such as nanorods. Such real-time observation allows the investigation of growth mechanisms of various nanomaterials that is not possible with conventional ex situ analytical methods. Additionally, real-time monitoring by RHEED transmission mode offers a complete range of information when coupled with TEM, providing structural and chemical information with excellent spatial resolution, leading to a better understanding of the growth behaviour of nanomaterials. Here, as a representative study using the combined technique, the nucleation and crystallization of InAs nanorods and the epitaxial growth of InxGa1−xAs(GaAs) shell layers on InAs nanorods are explored. The structural changes in the InAs nanorods at the early growth stage caused by the transition of the local growth conditions and the strain relaxation processes that occur during epitaxial coating of the shell layers are shown. This technique advances our understanding of the growth behaviour of various nanomaterials, which allows the realization of nanostructures with novel properties and their application in future electronics and optoelectronics.
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Affiliation(s)
- Janghyun Jo
- Department of Materials Science and Engineering and Research Institute of Advanced Materials, Seoul National University, Seoul, 08826, Korea
| | - Youngbin Tchoe
- Department of Physics and Astronomy, Institute of Applied Physics and Research Institute of Advance Materials, Seoul National University, Seoul, 08826, Korea
| | - Gyu-Chul Yi
- Department of Physics and Astronomy, Institute of Applied Physics and Research Institute of Advance Materials, Seoul National University, Seoul, 08826, Korea.
| | - Miyoung Kim
- Department of Materials Science and Engineering and Research Institute of Advanced Materials, Seoul National University, Seoul, 08826, Korea.
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30
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Irber DM, Seidl J, Carrad DJ, Becker J, Jeon N, Loitsch B, Winnerl J, Matich S, Döblinger M, Tang Y, Morkötter S, Abstreiter G, Finley JJ, Grayson M, Lauhon LJ, Koblmüller G. Quantum Transport and Sub-Band Structure of Modulation-Doped GaAs/AlAs Core-Superlattice Nanowires. NANO LETTERS 2017; 17:4886-4893. [PMID: 28732167 DOI: 10.1021/acs.nanolett.7b01732] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Modulation-doped III-V semiconductor nanowire (NW) heterostructures have recently emerged as promising candidates to host high-mobility electron channels for future high-frequency, low-energy transistor technologies. The one-dimensional geometry of NWs also makes them attractive for studying quantum confinement effects. Here, we report correlated investigations into the discrete electronic sub-band structure of confined electrons in the channel of Si δ-doped GaAs-GaAs/AlAs core-superlattice NW heterostructures and the associated signatures in low-temperature transport. On the basis of accurate structural and dopant analysis using scanning transmission electron microscopy and atom probe tomography, we calculated the sub-band structure of electrons confined in the NW core and employ a labeling system inspired by atomic orbital notation. Electron transport measurements on top-gated NW transistors at cryogenic temperatures revealed signatures consistent with the depopulation of the quasi-one-dimensional sub-bands, as well as confinement in zero-dimensional-like states due to an impurity-defined background disorder potential. These findings are instructive toward reaching the ballistic transport regime in GaAs-AlGaAs based NW systems.
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Affiliation(s)
- Dominik M Irber
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials, Technical University of Munich , Garching, 85748, Germany
| | - Jakob Seidl
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials, Technical University of Munich , Garching, 85748, Germany
| | - Damon J Carrad
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials, Technical University of Munich , Garching, 85748, Germany
| | - Jonathan Becker
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials, Technical University of Munich , Garching, 85748, Germany
| | - Nari Jeon
- Department of Materials Science and Engineering, Northwestern University , Evanston, Illinois 60208, United States
| | - Bernhard Loitsch
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials, Technical University of Munich , Garching, 85748, Germany
| | - Julia Winnerl
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials, Technical University of Munich , Garching, 85748, Germany
| | - Sonja Matich
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials, Technical University of Munich , Garching, 85748, Germany
| | - Markus Döblinger
- Department of Chemistry, Ludwig-Maximilians-Universität München , Munich 81377, Germany
| | - Yang Tang
- Department of Electrical Engineering and Computer Science, Northwestern University , Evanston, Illinois 60208, United States
| | - Stefanie Morkötter
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials, Technical University of Munich , Garching, 85748, Germany
| | - Gerhard Abstreiter
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials, Technical University of Munich , Garching, 85748, Germany
| | - Jonathan J Finley
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials, Technical University of Munich , Garching, 85748, Germany
| | - Matthew Grayson
- Department of Electrical Engineering and Computer Science, Northwestern University , Evanston, Illinois 60208, United States
| | - Lincoln J Lauhon
- Department of Materials Science and Engineering, Northwestern University , Evanston, Illinois 60208, United States
| | - Gregor Koblmüller
- Walter Schottky Institut, Physik Department, and Center for Nanotechnology and Nanomaterials, Technical University of Munich , Garching, 85748, Germany
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31
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Tan SL, Genuist Y, den Hertog MI, Bellet-Amalric E, Mariette H, Pelekanos NT. Highly uniform zinc blende GaAs nanowires on Si(111) using a controlled chemical oxide template. NANOTECHNOLOGY 2017; 28:255602. [PMID: 28475104 DOI: 10.1088/1361-6528/aa7169] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
GaAs-based nanowires (NWs) can be grown without extrinsic catalyst using the Ga-assisted vapor-liquid-solid method in an epitaxy reactor, on Si(111) substrates covered with native oxide. Despite its wide use, the conventional method fails to provide a good control over uniformity, reproducibility, and yield of vertical NWs. The nucleation of GaAs NWs is very sensitive to the properties of the native oxide such as chemical composition, roughness and porosity. Consequently, samples grown under the same conditions on Si(111) substrates from different manufacturing batches often produce dramatically different growth results. In order to remove the dependence on wafer batch, a controlled chemical oxidation process is developed to replace the native oxide on Si(111) substrate with a reproducible chemical oxide. A high yield (exceeding 90%) of vertical GaAs NWs is achieved with excellent uniformity on chemical oxide-covered substrate. As an added advantage, the crystalline quality is significantly improved over that of GaAs NWs grown on native oxide-covered substrate, and pure zinc blende crystal structure can be achieved with minimal defects. In addition, the chemical oxide can be used as a template for producing different combinations of NW densities and sizes in parallel on the same wafer using the same growth conditions.
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Affiliation(s)
- Siew Li Tan
- Université Grenoble Alpes, F-38000 Grenoble, France. CEA, INAC, 'Nanophysique et Semiconducteurs' group, 17 rue des Martyrs, F-38054 Grenoble cedex 9, France
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32
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Soo MT, Zheng K, Gao Q, Tan HH, Jagadish C, Zou J. Growth of Catalyst-Free Epitaxial InAs Nanowires on Si Wafers Using Metallic Masks. NANO LETTERS 2016; 16:4189-4193. [PMID: 27248817 DOI: 10.1021/acs.nanolett.6b01064] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
Development of heteroepitaxy growth of catalyst-free vertical III-V nanowires on Si wafers is highly desirable for future nanoscale Si-based electronic and optoelectronic devices. In this study, a proof-of-concept approach is developed for catalyst-free heteroepitaxy growth of InAs nanowires on Si wafers. Before the growth of InAs nanowires, a Si-compatible metallic film with a thickness of several tens of nanometers was predeposited on a Si wafer and then annealed to form nanosize openings so as to obtain a metallic mask. These nano-openings exposed the surface of the Si wafer, which allowed subsequent nucleation and growth of epitaxial InAs nanowires directly on the surface of the Si wafer. The small size of the nano-openings limits the lateral growth of the nanostructures but promotes their axial growth. Through this approach, catalyst-free InAs nanowires were grown on both Si (111) and (001) wafers successfully at different growth temperatures. In particular, ultralong defect-free InAs nanowires with the wurtzite structure were grown the Si (111) wafers at 550 °C using the Ni mask. This study offers a simple, cost-effective, and scalable method to grow catalyst-free III-V nanowires on Si wafers. The simplicity of the approach opens a new avenue for the growth and integration of catalyst-free high-quality heteroepitaxial III-V nanowires on Si wafers.
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Affiliation(s)
| | | | - Qiang Gao
- Department of Electronic Materials Engineering, Research School of Physics and Engineering, The Australian National University , Canberra, Australian Capital Territory 2601, Australia
| | - H Hoe Tan
- Department of Electronic Materials Engineering, Research School of Physics and Engineering, The Australian National University , Canberra, Australian Capital Territory 2601, Australia
| | - Chennupati Jagadish
- Department of Electronic Materials Engineering, Research School of Physics and Engineering, The Australian National University , Canberra, Australian Capital Territory 2601, Australia
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33
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Gomes UP, Ercolani D, Zannier V, David J, Gemmi M, Beltram F, Sorba L. Nucleation and growth mechanism of self-catalyzed InAs nanowires on silicon. NANOTECHNOLOGY 2016; 27:255601. [PMID: 27171601 DOI: 10.1088/0957-4484/27/25/255601] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
We report on the nucleation and growth mechanism of self-catalyzed InAs nanowires (NWs) grown on Si (111) substrates by chemical beam epitaxy. Careful choices of the growth parameters lead to In-rich conditions such that the InAs NWs nucleate from an In droplet and grow by the vapor-liquid-solid mechanism while sustaining an In droplet at the tip. As the growth progresses, new NWs continue to nucleate on the Si (111) surface causing a spread in the NW size distribution. The observed behavior in NW nucleation and growth is described within a suitable existing theoretical model allowing us to extract relevant growth parameters. We argue that these results provide useful guidelines to rationally control the growth of self-catalyzed InAs NWs for various applications.
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Affiliation(s)
- U P Gomes
- NEST Scuola Normale Superiore and Istituto di Nanoscienze-CNR, Piazza S. Silvestro 12, I-56127 Pisa, Italy
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34
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Kinzel JB, Schülein FJR, Weiß M, Janker L, Bühler DD, Heigl M, Rudolph D, Morkötter S, Döblinger M, Bichler M, Abstreiter G, Finley JJ, Wixforth A, Koblmüller G, Krenner HJ. The Native Material Limit of Electron and Hole Mobilities in Semiconductor Nanowires. ACS NANO 2016; 10:4942-4953. [PMID: 27007813 DOI: 10.1021/acsnano.5b07639] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Affiliation(s)
- Jörg B Kinzel
- Lehrstuhl für Experimentalphysik 1 and Augsburg Centre for Innovative Technologies (ACIT), Universität Augsburg , Universitätsstraße 1, 86159 Augsburg, Germany
- Nanosystems Initiative Munich (NIM) , Schellingstraße 4, 80339 München, Germany
| | - Florian J R Schülein
- Lehrstuhl für Experimentalphysik 1 and Augsburg Centre for Innovative Technologies (ACIT), Universität Augsburg , Universitätsstraße 1, 86159 Augsburg, Germany
- Nanosystems Initiative Munich (NIM) , Schellingstraße 4, 80339 München, Germany
| | - Matthias Weiß
- Lehrstuhl für Experimentalphysik 1 and Augsburg Centre for Innovative Technologies (ACIT), Universität Augsburg , Universitätsstraße 1, 86159 Augsburg, Germany
- Nanosystems Initiative Munich (NIM) , Schellingstraße 4, 80339 München, Germany
| | - Lisa Janker
- Lehrstuhl für Experimentalphysik 1 and Augsburg Centre for Innovative Technologies (ACIT), Universität Augsburg , Universitätsstraße 1, 86159 Augsburg, Germany
- Nanosystems Initiative Munich (NIM) , Schellingstraße 4, 80339 München, Germany
| | - Dominik D Bühler
- Lehrstuhl für Experimentalphysik 1 and Augsburg Centre for Innovative Technologies (ACIT), Universität Augsburg , Universitätsstraße 1, 86159 Augsburg, Germany
| | - Michael Heigl
- Lehrstuhl für Experimentalphysik 1 and Augsburg Centre for Innovative Technologies (ACIT), Universität Augsburg , Universitätsstraße 1, 86159 Augsburg, Germany
| | - Daniel Rudolph
- Nanosystems Initiative Munich (NIM) , Schellingstraße 4, 80339 München, Germany
- Walter Schottky Institut and Physik Department E24, Technische Universität München , Am Coulombwall 4, 85748 Garching, Germany
| | - Stefanie Morkötter
- Nanosystems Initiative Munich (NIM) , Schellingstraße 4, 80339 München, Germany
- Walter Schottky Institut and Physik Department E24, Technische Universität München , Am Coulombwall 4, 85748 Garching, Germany
| | - Markus Döblinger
- Department of Chemistry, Ludwig-Maximilians-Universität München , 81377 München, Germany
- Center for Nanoscience (CeNS), Ludwig-Maximilians-Universität München , Geschwister-Scholl-Platz 1, 80539 München, Germany
| | - Max Bichler
- Walter Schottky Institut and Physik Department E24, Technische Universität München , Am Coulombwall 4, 85748 Garching, Germany
| | - Gerhard Abstreiter
- Nanosystems Initiative Munich (NIM) , Schellingstraße 4, 80339 München, Germany
- Walter Schottky Institut and Physik Department E24, Technische Universität München , Am Coulombwall 4, 85748 Garching, Germany
- Institute for Advanced Study (IAS), Technische Universität München , Lichtenbergstraße 2a, 85748 Garching, Germany
| | - Jonathan J Finley
- Nanosystems Initiative Munich (NIM) , Schellingstraße 4, 80339 München, Germany
- Walter Schottky Institut and Physik Department E24, Technische Universität München , Am Coulombwall 4, 85748 Garching, Germany
| | - Achim Wixforth
- Lehrstuhl für Experimentalphysik 1 and Augsburg Centre for Innovative Technologies (ACIT), Universität Augsburg , Universitätsstraße 1, 86159 Augsburg, Germany
- Nanosystems Initiative Munich (NIM) , Schellingstraße 4, 80339 München, Germany
- Center for Nanoscience (CeNS), Ludwig-Maximilians-Universität München , Geschwister-Scholl-Platz 1, 80539 München, Germany
| | - Gregor Koblmüller
- Nanosystems Initiative Munich (NIM) , Schellingstraße 4, 80339 München, Germany
- Walter Schottky Institut and Physik Department E24, Technische Universität München , Am Coulombwall 4, 85748 Garching, Germany
| | - Hubert J Krenner
- Lehrstuhl für Experimentalphysik 1 and Augsburg Centre for Innovative Technologies (ACIT), Universität Augsburg , Universitätsstraße 1, 86159 Augsburg, Germany
- Nanosystems Initiative Munich (NIM) , Schellingstraße 4, 80339 München, Germany
- Center for Nanoscience (CeNS), Ludwig-Maximilians-Universität München , Geschwister-Scholl-Platz 1, 80539 München, Germany
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35
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Guan X, Becdelievre J, Meunier B, Benali A, Saint-Girons G, Bachelet R, Regreny P, Botella C, Grenet G, Blanchard NP, Jaurand X, Silly MG, Sirotti F, Chauvin N, Gendry M, Penuelas J. GaAs Core/SrTiO3 Shell Nanowires Grown by Molecular Beam Epitaxy. NANO LETTERS 2016; 16:2393-2399. [PMID: 27008537 DOI: 10.1021/acs.nanolett.5b05182] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
We have studied the growth of a SrTiO3 shell on self-catalyzed GaAs nanowires grown by vapor-liquid-solid assisted molecular beam epitaxy on Si(111) substrates. To control the growth of the SrTiO3 shell, the GaAs nanowires were protected using an arsenic capping/decapping procedure in order to prevent uncontrolled oxidation and/or contamination of the nanowire facets. Reflection high energy electron diffraction, scanning electron microscopy, transmission electron microscopy, and X-ray photoelectron spectroscopy were performed to determine the structural, chemical, and morphological properties of the heterostructured nanowires. Using adapted oxide growth conditions, it is shown that most of the perovskite structure SrTiO3 shell appears to be oriented with respect to the GaAs lattice. These results are promising for achieving one-dimensional epitaxial semiconductor core/functional oxide shell nanostructures.
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Affiliation(s)
- X Guan
- Institut des Nanotechnologies de Lyon, Université de Lyon, UMR 5270-CNRS, Ecole Centrale de Lyon , 36 avenue Guy de Collongue, F-69134 Ecully Cedex, France
| | - J Becdelievre
- Institut des Nanotechnologies de Lyon, Université de Lyon, UMR 5270-CNRS, Ecole Centrale de Lyon , 36 avenue Guy de Collongue, F-69134 Ecully Cedex, France
| | - B Meunier
- Institut des Nanotechnologies de Lyon, Université de Lyon, UMR 5270-CNRS, Ecole Centrale de Lyon , 36 avenue Guy de Collongue, F-69134 Ecully Cedex, France
| | - A Benali
- Institut des Nanotechnologies de Lyon, Université de Lyon, UMR 5270-CNRS, Ecole Centrale de Lyon , 36 avenue Guy de Collongue, F-69134 Ecully Cedex, France
| | - G Saint-Girons
- Institut des Nanotechnologies de Lyon, Université de Lyon, UMR 5270-CNRS, Ecole Centrale de Lyon , 36 avenue Guy de Collongue, F-69134 Ecully Cedex, France
| | - R Bachelet
- Institut des Nanotechnologies de Lyon, Université de Lyon, UMR 5270-CNRS, Ecole Centrale de Lyon , 36 avenue Guy de Collongue, F-69134 Ecully Cedex, France
| | - P Regreny
- Institut des Nanotechnologies de Lyon, Université de Lyon, UMR 5270-CNRS, Ecole Centrale de Lyon , 36 avenue Guy de Collongue, F-69134 Ecully Cedex, France
| | - C Botella
- Institut des Nanotechnologies de Lyon, Université de Lyon, UMR 5270-CNRS, Ecole Centrale de Lyon , 36 avenue Guy de Collongue, F-69134 Ecully Cedex, France
| | - G Grenet
- Institut des Nanotechnologies de Lyon, Université de Lyon, UMR 5270-CNRS, Ecole Centrale de Lyon , 36 avenue Guy de Collongue, F-69134 Ecully Cedex, France
| | - N P Blanchard
- Institut Lumière Matière (ILM), UMR5306 Université Lyon 1-CNRS Université de Lyon , 69622 Villeurbanne Cedex, France
| | - X Jaurand
- Centre Technologique des Microstructures, Université Claude Bernard Lyon 1 , 5 rue Raphael Dubois-Bâtiment Darwin B, F-69622, Villeurbanne Cedex, France
| | - M G Silly
- Synchrotron SOLEIL (TEMPO Beamline), l'Orme des Merisiers, Saint-Aubin, 91192 Gif-sur-Yvette, France
| | - F Sirotti
- Synchrotron SOLEIL (TEMPO Beamline), l'Orme des Merisiers, Saint-Aubin, 91192 Gif-sur-Yvette, France
| | - N Chauvin
- Institut des Nanotechnologies de Lyon, Université de Lyon, UMR 5270-CNRS, INSA-Lyon , 7 avenue Jean Capelle, 69621 Villeurbanne, France
| | - M Gendry
- Institut des Nanotechnologies de Lyon, Université de Lyon, UMR 5270-CNRS, Ecole Centrale de Lyon , 36 avenue Guy de Collongue, F-69134 Ecully Cedex, France
| | - J Penuelas
- Institut des Nanotechnologies de Lyon, Université de Lyon, UMR 5270-CNRS, Ecole Centrale de Lyon , 36 avenue Guy de Collongue, F-69134 Ecully Cedex, France
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36
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Bastiman F, Küpers H, Somaschini C, Geelhaar L. Growth map for Ga-assisted growth of GaAs nanowires on Si(111) substrates by molecular beam epitaxy. NANOTECHNOLOGY 2016; 27:095601. [PMID: 26822408 DOI: 10.1088/0957-4484/27/9/095601] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
For the Ga-assisted growth of GaAs nanowires on Si(111) substrates by molecular beam epitaxy, growth temperature, As flux, and Ga flux have been systematically varied across the entire window of growth conditions that result in the formation of nanowires. A range of GaAs structures was observed, progressing from pure Ga droplets under negligible As flux through horizontal nanowires, tilted nanowires, vertical nanowires, and nanowires without droplets to crystallites as the As flux was increased. Quantitative analysis of the resulting sample morphology was performed in terms of nanowire number and volume density, number yield and volume yield of vertical nanowires, diameter, length, as well as the number and volume density of parasitic growth. The result is a growth map that comprehensively describes all nanowire and parasitic growth morphologies and hence enables growth of nanowire samples in a predictive manner. Further analysis indicates the combination of global Ga flux and growth temperature determines the total density of all objects, whereas the global As/Ga flux ratio independently determines the resultant sample morphology. Several dependencies observed here imply that all objects present on the substrate surface, i.e. both nanowires and parasitic structures, originate from Ga droplets.
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Affiliation(s)
- Faebian Bastiman
- Paul-Drude-Institut für Festkörperelektronik, Hausvogteiplatz 5-7, 10117 Berlin, Germany
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37
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Yao M, Sheng C, Ge M, Chi CY, Cong S, Nakano A, Dapkus PD, Zhou C. Facile Five-Step Heteroepitaxial Growth of GaAs Nanowires on Silicon Substrates and the Twin Formation Mechanism. ACS NANO 2016; 10:2424-2435. [PMID: 26831573 DOI: 10.1021/acsnano.5b07232] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
Monolithic integration of III-V semiconductors with Si has been pursued for some time in the semiconductor industry. However, the mismatch of lattice constants and thermal expansion coefficients represents a large technological challenge for the heteroepitaxial growth. Nanowires, due to their small lateral dimension, can relieve strain and mitigate dislocation formation to allow single-crystal III-V materials to be grown on Si. Here, we report a facile five-step heteroepitaxial growth of GaAs nanowires on Si using selective area growth (SAG) in metalorganic chemical vapor deposition, and we further report an in-depth study on the twin formation mechanism. Rotational twin defects were observed in the nanowire structures and showed strong dependence on the growth condition and nanowire size. We adopt a model of faceted growth to demonstrate the formation of twins during growth, which is well supported by both a transmission electron microscopy study and simulation based on nucleation energetics. Our study has led to twin-free segments in the length up to 80 nm, a significant improvement compared to previous work using SAG. The achievements may open up opportunities for future functional III-V-on-Si heterostructure devices.
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Affiliation(s)
- Maoqing Yao
- Ming Hsieh Department of Electrical Engineering, ‡Collaboratory for Advanced Computing and Simulations, Department of Physics and Astronomy, Department of Computer Science, and Department of Chemical Engineering and Materials Science, §Mork Family Department of Chemical Engineering and Materials Science, and ∥Center for Energy Nanoscience, University of Southern California , Los Angeles, California 90089, United States
| | - Chunyang Sheng
- Ming Hsieh Department of Electrical Engineering, ‡Collaboratory for Advanced Computing and Simulations, Department of Physics and Astronomy, Department of Computer Science, and Department of Chemical Engineering and Materials Science, §Mork Family Department of Chemical Engineering and Materials Science, and ∥Center for Energy Nanoscience, University of Southern California , Los Angeles, California 90089, United States
| | - Mingyuan Ge
- Ming Hsieh Department of Electrical Engineering, ‡Collaboratory for Advanced Computing and Simulations, Department of Physics and Astronomy, Department of Computer Science, and Department of Chemical Engineering and Materials Science, §Mork Family Department of Chemical Engineering and Materials Science, and ∥Center for Energy Nanoscience, University of Southern California , Los Angeles, California 90089, United States
| | - Chun-Yung Chi
- Ming Hsieh Department of Electrical Engineering, ‡Collaboratory for Advanced Computing and Simulations, Department of Physics and Astronomy, Department of Computer Science, and Department of Chemical Engineering and Materials Science, §Mork Family Department of Chemical Engineering and Materials Science, and ∥Center for Energy Nanoscience, University of Southern California , Los Angeles, California 90089, United States
| | - Sen Cong
- Ming Hsieh Department of Electrical Engineering, ‡Collaboratory for Advanced Computing and Simulations, Department of Physics and Astronomy, Department of Computer Science, and Department of Chemical Engineering and Materials Science, §Mork Family Department of Chemical Engineering and Materials Science, and ∥Center for Energy Nanoscience, University of Southern California , Los Angeles, California 90089, United States
| | - Aiichiro Nakano
- Ming Hsieh Department of Electrical Engineering, ‡Collaboratory for Advanced Computing and Simulations, Department of Physics and Astronomy, Department of Computer Science, and Department of Chemical Engineering and Materials Science, §Mork Family Department of Chemical Engineering and Materials Science, and ∥Center for Energy Nanoscience, University of Southern California , Los Angeles, California 90089, United States
| | - P Daniel Dapkus
- Ming Hsieh Department of Electrical Engineering, ‡Collaboratory for Advanced Computing and Simulations, Department of Physics and Astronomy, Department of Computer Science, and Department of Chemical Engineering and Materials Science, §Mork Family Department of Chemical Engineering and Materials Science, and ∥Center for Energy Nanoscience, University of Southern California , Los Angeles, California 90089, United States
| | - Chongwu Zhou
- Ming Hsieh Department of Electrical Engineering, ‡Collaboratory for Advanced Computing and Simulations, Department of Physics and Astronomy, Department of Computer Science, and Department of Chemical Engineering and Materials Science, §Mork Family Department of Chemical Engineering and Materials Science, and ∥Center for Energy Nanoscience, University of Southern California , Los Angeles, California 90089, United States
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38
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Zhang Y, Sanchez AM, Sun Y, Wu J, Aagesen M, Huo S, Kim D, Jurczak P, Xu X, Liu H. Influence of Droplet Size on the Growth of Self-Catalyzed Ternary GaAsP Nanowires. NANO LETTERS 2016; 16:1237-1243. [PMID: 26708002 DOI: 10.1021/acs.nanolett.5b04554] [Citation(s) in RCA: 29] [Impact Index Per Article: 3.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
The influences of droplet size on the growth of self-catalyzed ternary nanowires (NWs) were studied using GaAsP NWs. The size-induced Gibbs-Thomson (GT) effect makes the smaller catalytic droplets have lower effective supersaturations and hence slower nucleation rates than the larger ones. Large variation in droplet size thus led to the growth of NWs with low uniformity, while a good size uniformity of droplets resulted in the production of highly uniform NWs. Moreover, thinner NWs were observed to be richer in P, indicating that P is more resistant to the GT effect than As because of a higher chemical potential inside Ga droplets. These results provide useful information for understanding the mechanisms of self-catalyzed III-V NW nucleation and growth with the important ternary III-V material systems.
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Affiliation(s)
- Yunyan Zhang
- Department of Electronic and Electrical Engineering, University College London , London WC1E 7JE, United Kingdom
| | - Ana M Sanchez
- Department of Physics, University of Warwick , Coventry CV4 7AL, United Kingdom
| | - Yue Sun
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences , Beijing 100190, People's Republic of China
| | - Jiang Wu
- Department of Electronic and Electrical Engineering, University College London , London WC1E 7JE, United Kingdom
| | - Martin Aagesen
- Gasp Solar ApS, Gregersensvej 7, Taastrup DK-2630, Denmark
| | - Suguo Huo
- London Centre for Nanotechnology, University College London , London WC1H 0AH, United Kingdom
| | - Dongyoung Kim
- Department of Electronic and Electrical Engineering, University College London , London WC1E 7JE, United Kingdom
| | - Pamela Jurczak
- Department of Electronic and Electrical Engineering, University College London , London WC1E 7JE, United Kingdom
| | - Xiulai Xu
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences , Beijing 100190, People's Republic of China
| | - Huiyun Liu
- Department of Electronic and Electrical Engineering, University College London , London WC1E 7JE, United Kingdom
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39
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Jo J, Tchoe Y, Yi GC, Kim M. B21-P-05Characterization of In xGa 1-xAs/InAs Coaxial Nanorod Grown on Graphene Layers by Catalyst-Free Molecular Beam Epitaxy. Microscopy (Oxf) 2015. [DOI: 10.1093/jmicro/dfv249] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
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40
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Abstract
Nanowire growth has generally relied on an initial particle of a catalyst such as Au to define the wire diameter and stabilize the growth. Self-catalyzed growth of III-V nanowires avoids the need for a foreign element, with the nanowire growing from the vapor via a droplet of the native group-III liquid. However, as suggested by Gibbs' phase rule, the absence of third element has a destabilizing effect. Here we analyze this system theoretically, finding that growth can be dynamically stable at pressures far above the equilibrium vapor pressure. Steady-state growth occurs via kinetic self-regulation of the droplet volume and wire diameter. In particular, for a given temperature and source-gas pressures there is a unique stable wire diameter and droplet volume, both of which decrease with increasing V/III ratio. We also examine the evolution of the droplet size and wire diameter toward the steady state as the wire grows and discuss implications for structural control.
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Affiliation(s)
- J Tersoff
- IBM T. J. Watson Research Center , Yorktown Heights, New York 10598, United States
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41
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Scarpellini D, Somaschini C, Fedorov A, Bietti S, Frigeri C, Grillo V, Esposito L, Salvalaglio M, Marzegalli A, Montalenti F, Bonera E, Medaglia PG, Sanguinetti S. InAs/GaAs Sharply Defined Axial Heterostructures in Self-Assisted Nanowires. NANO LETTERS 2015; 15:3677-3683. [PMID: 25942628 DOI: 10.1021/nl504690r] [Citation(s) in RCA: 15] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
We present the fabrication of axial InAs/GaAs nanowire heterostructures on silicon with atomically sharp interfaces by molecular beam epitaxy. Our method exploits the crystallization at low temperature, by As supply, of In droplets deposited on the top of GaAs NWs grown by the self-assisted (self-catalyzed) mode. Extensive characterization based on transmission electron microscopy sets an upper limit for the InAs/GaAs interface thickness within few bilayers (≤1.5 nm). A detailed study of elastic/plastic strain relaxation at the interface is also presented, highlighting the role of nanowire lateral free surfaces.
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Affiliation(s)
- David Scarpellini
- †L-NESS and Dipartimento di Scienza dei Materiali, Universitá di degli Studi di Milano Bicocca, Milan, Italy
- ‡Dipartimento di Ingegneria Industriale, Universitá di Roma 'Tor Vergata', Rome, Italy
| | - Claudio Somaschini
- †L-NESS and Dipartimento di Scienza dei Materiali, Universitá di degli Studi di Milano Bicocca, Milan, Italy
| | | | - Sergio Bietti
- †L-NESS and Dipartimento di Scienza dei Materiali, Universitá di degli Studi di Milano Bicocca, Milan, Italy
| | | | - Vincenzo Grillo
- ∥Istituto CNR-IMEM, Parma, Italy
- ⊥Centro CNR-S3-NANO, Modena, Italy
| | - Luca Esposito
- #L-NESS and Dipartimento di Fisica, Politecnico di Milano, Como, Italy
| | - Marco Salvalaglio
- †L-NESS and Dipartimento di Scienza dei Materiali, Universitá di degli Studi di Milano Bicocca, Milan, Italy
| | - Anna Marzegalli
- †L-NESS and Dipartimento di Scienza dei Materiali, Universitá di degli Studi di Milano Bicocca, Milan, Italy
| | - Francesco Montalenti
- †L-NESS and Dipartimento di Scienza dei Materiali, Universitá di degli Studi di Milano Bicocca, Milan, Italy
| | - Emiliano Bonera
- †L-NESS and Dipartimento di Scienza dei Materiali, Universitá di degli Studi di Milano Bicocca, Milan, Italy
| | - Pier Gianni Medaglia
- ‡Dipartimento di Ingegneria Industriale, Universitá di Roma 'Tor Vergata', Rome, Italy
| | - Stefano Sanguinetti
- †L-NESS and Dipartimento di Scienza dei Materiali, Universitá di degli Studi di Milano Bicocca, Milan, Italy
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42
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Morkötter S, Jeon N, Rudolph D, Loitsch B, Spirkoska D, Hoffmann E, Döblinger M, Matich S, Finley JJ, Lauhon LJ, Abstreiter G, Koblmüller G. Demonstration of Confined Electron Gas and Steep-Slope Behavior in Delta-Doped GaAs-AlGaAs Core-Shell Nanowire Transistors. NANO LETTERS 2015; 15:3295-302. [PMID: 25923841 DOI: 10.1021/acs.nanolett.5b00518] [Citation(s) in RCA: 29] [Impact Index Per Article: 2.9] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/09/2023]
Abstract
Strong surface and impurity scattering in III-V semiconductor-based nanowires (NW) degrade the performance of electronic devices, requiring refined concepts for controlling charge carrier conductivity. Here, we demonstrate remote Si delta (δ)-doping of radial GaAs-AlGaAs core-shell NWs that unambiguously exhibit a strongly confined electron gas with enhanced low-temperature field-effect mobilities up to 5 × 10(3) cm(2) V(-1) s(-1). The spatial separation between the high-mobility free electron gas at the NW core-shell interface and the Si dopants in the shell is directly verified by atom probe tomographic (APT) analysis, band-profile calculations, and transport characterization in advanced field-effect transistor (FET) geometries, demonstrating powerful control over the free electron gas density and conductivity. Multigated NW-FETs allow us to spatially resolve channel width- and crystal phase-dependent variations in electron gas density and mobility along single NW-FETs. Notably, dc output and transfer characteristics of these n-type depletion mode NW-FETs reveal excellent drain current saturation and record low subthreshold slopes of 70 mV/dec at on/off ratios >10(4)-10(5) at room temperature.
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Affiliation(s)
- S Morkötter
- †Walter Schottky Institut, Physik Department, and Center of Nanotechnology and Nanomaterials, Technische Universität München, Garching 85748, Germany
| | - N Jeon
- ‡Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60201, United States
| | - D Rudolph
- †Walter Schottky Institut, Physik Department, and Center of Nanotechnology and Nanomaterials, Technische Universität München, Garching 85748, Germany
| | - B Loitsch
- †Walter Schottky Institut, Physik Department, and Center of Nanotechnology and Nanomaterials, Technische Universität München, Garching 85748, Germany
| | - D Spirkoska
- †Walter Schottky Institut, Physik Department, and Center of Nanotechnology and Nanomaterials, Technische Universität München, Garching 85748, Germany
| | - E Hoffmann
- †Walter Schottky Institut, Physik Department, and Center of Nanotechnology and Nanomaterials, Technische Universität München, Garching 85748, Germany
- ∥Institute for Advanced Study, Technische Universität München, Garching 85748, Germany
| | - M Döblinger
- §Department of Chemistry, Ludwig-Maximilians-Universität München, Munich 81377, Germany
| | - S Matich
- †Walter Schottky Institut, Physik Department, and Center of Nanotechnology and Nanomaterials, Technische Universität München, Garching 85748, Germany
| | - J J Finley
- †Walter Schottky Institut, Physik Department, and Center of Nanotechnology and Nanomaterials, Technische Universität München, Garching 85748, Germany
| | - L J Lauhon
- ‡Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60201, United States
| | - G Abstreiter
- †Walter Schottky Institut, Physik Department, and Center of Nanotechnology and Nanomaterials, Technische Universität München, Garching 85748, Germany
- ∥Institute for Advanced Study, Technische Universität München, Garching 85748, Germany
| | - G Koblmüller
- †Walter Schottky Institut, Physik Department, and Center of Nanotechnology and Nanomaterials, Technische Universität München, Garching 85748, Germany
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Loitsch B, Rudolph D, Morkötter S, Döblinger M, Grimaldi G, Hanschke L, Matich S, Parzinger E, Wurstbauer U, Abstreiter G, Finley JJ, Koblmüller G. Tunable quantum confinement in ultrathin, optically active semiconductor nanowires via reverse-reaction growth. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2015; 27:2195-2202. [PMID: 25728601 DOI: 10.1002/adma.201404900] [Citation(s) in RCA: 30] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/25/2014] [Revised: 01/13/2015] [Indexed: 06/04/2023]
Abstract
A unique growth scheme is demonstrated to realize ultrathin GaAs nanowires on Si with sizes down to the sub-10 nm regime. While this scheme preserves the bulk-like crystal properties, correlated optical experiments reveal huge blueshifted photo-luminescence (up to ≈100 meV) with decreasing nanowire cross-section, demonstrating very strong quantum confinement effects.
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Affiliation(s)
- Bernhard Loitsch
- Walter Schottky Institut, Physik Department and Nanosystems Initiative Munich, TU München, Am Coulombwall 4, 85748, Garching, Germany
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Abstract
Vertically oriented and ordered GaAs nanowire arrays have been grown by the self-assisted mechanism using substrates prepared with nano-patterned oxide templates. Patterned Ga-assisted GaAs nanowire growth on (111) silicon by molecular beam epitaxy showed that the axial and radial growth rates increased with increasing interhole spacing. A model is described which accounts for the correlation of the final length and diameter with pattern pitch. The model considers that growth material is supplied by a secondary flux of both gallium and arsenic adatoms desorbing from the oxide surface between the nanowires which subsequently impinge on the liquid droplet and nanowire sidewalls. We show that shading of the incident and scattered flux by neighboring nanowires in the array can strongly affect the axial and radial growth rates, leading to significant differences in final nanowire morphologies.
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Weiss M, Kinzel JB, Schülein FJR, Heigl M, Rudolph D, Morkötter S, Döblinger M, Bichler M, Abstreiter G, Finley JJ, Koblmüller G, Wixforth A, Krenner HJ. Dynamic acoustic control of individual optically active quantum dot-like emission centers in heterostructure nanowires. NANO LETTERS 2014; 14:2256-2264. [PMID: 24678960 DOI: 10.1021/nl4040434] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/03/2023]
Abstract
We probe and control the optical properties of emission centers forming in radial heterostructure GaAs-Al0.3Ga0.7As nanowires and show that these emitters, located in Al0.3Ga0.7As layers, can exhibit quantum-dot like characteristics. We employ a radio frequency surface acoustic wave to dynamically control their emission energy, and occupancy state on a nanosecond time scale. In the spectral oscillations, we identify unambiguous signatures arising from both the mechanical and electrical component of the surface acoustic wave. In addition, different emission lines of a single emission center exhibit pronounced anticorrelated intensity oscillations during the acoustic cycle. These arise from a dynamically triggered carrier extraction out of the emission center to a continuum in the radial heterostructure. Using finite element modeling and Wentzel-Kramers-Brillouin theory we identify quantum tunneling as the underlying mechanism. These simulation results quantitatively reproduce the observed switching and show that in our systems these emission centers are spatially separated from the continuum by >10.5 nm.
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Affiliation(s)
- Matthias Weiss
- Lehrstuhl für Experimentalphysik 1 and Augsburg Centre for Innovative Technologies (ACIT), Universität Augsburg , Universitätsstraße 1, 86159 Augsburg, Germany
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46
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Lasing from individual GaAs-AlGaAs core-shell nanowires up to room temperature. Nat Commun 2013; 4:2931. [DOI: 10.1038/ncomms3931] [Citation(s) in RCA: 191] [Impact Index Per Article: 15.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/09/2013] [Accepted: 11/14/2013] [Indexed: 12/22/2022] Open
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47
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Somaschini C, Bietti S, Trampert A, Jahn U, Hauswald C, Riechert H, Sanguinetti S, Geelhaar L. Control over the number density and diameter of GaAs nanowires on Si(111) mediated by droplet epitaxy. NANO LETTERS 2013; 13:3607-3613. [PMID: 23898953 DOI: 10.1021/nl401404w] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/02/2023]
Abstract
We present a novel approach for the growth of GaAs nanowires (NWs) with controllable number density and diameter, which consists of the combination between droplet epitaxy (DE) and self-assisted NW growth. In our method, GaAs islands are initially formed on Si(111) by DE and, subsequently, GaAs NWs are selectively grown on their top facet, which acts as a nucleation site. By DE, we can successfully tailor the number density and diameter of the template of initial GaAs islands and the same degree of control is transferred to the final GaAs NWs. We show how, by a suitable choice of V/III flux ratio, a single NW can be accommodated on top of each GaAs base island. By transmission electron microscopy, as well as cathodo- and photoluminescence spectroscopy, we confirmed the high structural and optical quality of GaAs NWs grown by our method. We believe that this combined approach can be more generally applied to the fabrication of different homo- or heteroepitaxial NWs, nucleated on the top of predefined islands obtained by DE.
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48
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Rudolph D, Funk S, Döblinger M, Morkötter S, Hertenberger S, Schweickert L, Becker J, Matich S, Bichler M, Spirkoska D, Zardo I, Finley JJ, Abstreiter G, Koblmüller G. Spontaneous alloy composition ordering in GaAs-AlGaAs core-shell nanowires. NANO LETTERS 2013; 13:1522-7. [PMID: 23517063 DOI: 10.1021/nl3046816] [Citation(s) in RCA: 63] [Impact Index Per Article: 5.3] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/09/2023]
Abstract
By employing various high-resolution metrology techniques we directly probe the material composition profile within GaAs-Al0.3Ga0.7As core-shell nanowires grown by molecular beam epitaxy on silicon. Micro Raman measurements performed along the entire (>10 μm) length of the [111]-oriented nanowires reveal excellent average compositional homogeneity of the nominally Al0.3Ga0.7As shell. In strong contrast, along the radial direction cross-sectional scanning transmission electron microscopy and associated chemical analysis reveal rich structure in the AlGaAs alloy composition due to interface segregation, nanofaceting, and local alloy fluctuations. Most strikingly, we observe a 6-fold Al-rich substructure along the corners of the hexagonal AlGaAs shell where the Al-content is up to x ~ 0.6, a factor of 2 larger than the body of the AlGaAs shell. This is associated with facet-dependent capillarity diffusion due to the nonplanarity of shell growth. A modulation of the Al-content is also found along the radial [110] growth directions of the AlGaAs shell. Besides the ~10(3)-fold enhancement of the photoluminescence yield due to inhibition of nonradiative surface recombination, the AlGaAs shell gives rise to a broadened band of sharp-line luminescence features extending ~150-30 meV below the band gap of Al0.3Ga0.7As. These features are attributed to deep level defects under influence of the observed local alloy fluctuations in the shell.
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Affiliation(s)
- Daniel Rudolph
- Walter Schottky Institut, Physik Department, Technische Universität München, Garching, Germany
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Hertenberger S, Rudolph D, Becker J, Bichler M, Finley JJ, Abstreiter G, Koblmüller G. Rate-limiting mechanisms in high-temperature growth of catalyst-free InAs nanowires with large thermal stability. NANOTECHNOLOGY 2012; 23:235602. [PMID: 22595881 DOI: 10.1088/0957-4484/23/23/235602] [Citation(s) in RCA: 14] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
Abstract
We identify the entire growth parameter space and rate-limiting mechanisms in non-catalytic InAs nanowires (NWs) grown by molecular beam epitaxy. Surprisingly huge growth temperature ranges are found with maximum temperatures close to ~600°C upon dramatic increase of V/III ratio, exceeding by far the typical growth temperature range for catalyst-assisted InAs NWs. Based on quantitative in situ line-of-sight quadrupole mass spectrometry, we determine the rate-limiting factors in high-temperature InAs NW growth by directly monitoring the critical desorption and thermal decomposition processes of InAs NWs. Both under dynamic (growth) and static (no growth, ultra-high vacuum) conditions the (111)-oriented InAs NWs evidence excellent thermal stability at elevated temperatures even under negligible supersaturation. The rate-limiting factor for InAs NW growth is hence dominated by In desorption from the substrate surface. Closer investigation of the group-III and group-V flux dependences on growth rate reveals two apparent growth regimes, an As-rich and an In-rich regime defined by the effective As/In flux ratio, and maximum achievable growth rates of > 6 µm h(-1). The unique features of high-T growth and excellent thermal stability provide the opportunity for operation of InAs-based NW materials under caustic environment and further allow access to temperature regimes suitable for alloying non-catalytic InAs NWs with GaAs.
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Affiliation(s)
- S Hertenberger
- Walter Schottky Institut, Physik Department, and Center of Nanotechnology and Nanomaterials, Technische Universität München, Garching, Germany
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50
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Ritenour AJ, Cramer RC, Levinrad S, Boettcher SW. Efficient n-GaAs photoelectrodes grown by close-spaced vapor transport from a solid source. ACS APPLIED MATERIALS & INTERFACES 2012; 4:69-73. [PMID: 22136204 DOI: 10.1021/am201631p] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
Abstract
n-GaAs films were grown epitaxially on n(+)-GaAs substrates by a close-spaced vapor transport method and their photoelectrochemical energy conversion properties studied. Under 100 mW cm(-2) of ELH solar simulation, conversion efficiencies up to 9.3% for CSVT n-GaAs photoanodes were measured in an unoptimized ferrocene/ferrocenium test cell. This value was significantly higher than the 5.7% measured for similarly doped commercial n-GaAs wafers. Spectral response experiments showed that the higher performance of CSVT n-GaAs films relative to the commercial wafers was due to longer minority carrier diffusion lengths (L(D)), up to 1,020 nm in the CSVT films compared to 260 nm in the commercial n-GaAs wafers. Routes to improve the performance of CSVT GaAs and the implications of these results for the development of scalable GaAs-based solar energy conversion devices are discussed.
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Affiliation(s)
- Andrew J Ritenour
- Department of Chemistry and the Materials Science Institute, University of Oregon, University of Oregon, Eugene, Oregon 97403, USA
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