1
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Erbas B, Conde-Rubio A, Liu X, Pernollet J, Wang Z, Bertsch A, Penedo M, Fantner G, Banerjee M, Kis A, Boero G, Brugger J. Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification. MICROSYSTEMS & NANOENGINEERING 2024; 10:28. [PMID: 38405129 PMCID: PMC10891065 DOI: 10.1038/s41378-024-00655-y] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 08/25/2023] [Revised: 01/03/2024] [Accepted: 01/07/2024] [Indexed: 02/27/2024]
Abstract
Grayscale structured surfaces with nanometer-scale features are used in a growing number of applications in optics and fluidics. Thermal scanning probe lithography achieves a lateral resolution below 10 nm and a vertical resolution below 1 nm, but its maximum depth in polymers is limited. Here, we present an innovative combination of nanowriting in thermal resist and plasma dry etching with substrate cooling, which achieves up to 10-fold amplification of polymer nanopatterns into SiO2 without proportionally increasing surface roughness. Sinusoidal nanopatterns in SiO2 with 400 nm pitch and 150 nm depth are fabricated free of shape distortion after dry etching. To exemplify the possible applications of the proposed method, grayscale dielectric nanostructures are used for scalable manufacturing through nanoimprint lithography and for strain nanoengineering of 2D materials. Such a method for aspect ratio amplification and smooth grayscale nanopatterning has the potential to find application in the fabrication of photonic and nanoelectronic devices.
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Affiliation(s)
- Berke Erbas
- Microsystems Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015 Switzerland
| | - Ana Conde-Rubio
- Microsystems Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015 Switzerland
- Present Address: Institute of Materials Science of Barcelona ICMAB-CSIC, Campus UAB, Bellaterra, 08193 Spain
| | - Xia Liu
- Microsystems Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015 Switzerland
- Present Address: School of Integrated Circuits and Electronics, MIIT Key Laboratory for Low-Dimensional Quantum Structure and Devices, Beijing Institute of Technology, Beijing, 100081 China
| | - Joffrey Pernollet
- Center of MicroNanoTechnology (CMi), EPFL, Lausanne, 1015 Switzerland
| | - Zhenyu Wang
- Laboratory of Nanoscale Electronics and Structures, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015 Switzerland
| | - Arnaud Bertsch
- Microsystems Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015 Switzerland
| | - Marcos Penedo
- Laboratory for Bio- and Nano- Instrumentation, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015 Switzerland
| | - Georg Fantner
- Laboratory for Bio- and Nano- Instrumentation, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015 Switzerland
| | - Mitali Banerjee
- Laboratory of Quantum Physics, Topology and Correlations, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015 Switzerland
| | - Andras Kis
- Laboratory of Nanoscale Electronics and Structures, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015 Switzerland
| | - Giovanni Boero
- Microsystems Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015 Switzerland
| | - Juergen Brugger
- Microsystems Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015 Switzerland
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2
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Mei Y, Huang W, Di W, Wang X, Zhu Z, Zhou Y, Huo F, Wang W, Cao Y. Mechanochemical Lithography. J Am Chem Soc 2022; 144:9949-9958. [PMID: 35637174 DOI: 10.1021/jacs.2c02883] [Citation(s) in RCA: 5] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/15/2022]
Abstract
Surfaces with patterned biomolecules have wide applications in biochips and biomedical diagnostics. However, most patterning methods are inapplicable to physiological conditions and incapable of creating complex structures. Here, we develop a mechanochemical lithography (MCL) method based on compressive force-triggered reactions. In this method, biomolecules containing a bioaffinity ligand and a mechanoactive group are used as mechanochemical inks (MCIs). The bioaffinity ligand facilitates concentrating MCIs from surrounding solutions to a molded surface, enabling direct and continuous printing in an aqueous environment. The mechanoactive group facilitates covalent immobilization of MCIs through force-triggered reactions, thus avoiding the broadening of printed features due to the diffusion of inks. We discovered that the ubiquitously presented amino groups in biomolecules can react with maleimide through a force-triggered Michael addition. The resulting covalent linkage is mechanically and chemically stable. As a proof-of-concept, we fabricate patterned surfaces of biotin and His-tagged proteins at nanoscale spatial resolution by MCL and verify the resulting patterns by fluorescence imaging. We further demonstrated the creation of multiplex protein patterns using this technique.
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Affiliation(s)
- Yuehai Mei
- Collaborative Innovation Center of Advanced Microstructures, National Laboratory of Solid State Microstructure, Department of Physics, Nanjing University, Nanjing 210093, China
| | - Wenmao Huang
- Collaborative Innovation Center of Advanced Microstructures, National Laboratory of Solid State Microstructure, Department of Physics, Nanjing University, Nanjing 210093, China
| | - Weishuai Di
- Collaborative Innovation Center of Advanced Microstructures, National Laboratory of Solid State Microstructure, Department of Physics, Nanjing University, Nanjing 210093, China.,Wenzhou Institute, University of Chinese Academy of Sciences, Wenzhou 325001, China
| | - Xin Wang
- Collaborative Innovation Center of Advanced Microstructures, National Laboratory of Solid State Microstructure, Department of Physics, Nanjing University, Nanjing 210093, China.,Wenzhou Institute, University of Chinese Academy of Sciences, Wenzhou 325001, China
| | - Zhenshu Zhu
- Collaborative Innovation Center of Advanced Microstructures, National Laboratory of Solid State Microstructure, Department of Physics, Nanjing University, Nanjing 210093, China
| | - Yanyan Zhou
- Collaborative Innovation Center of Advanced Microstructures, National Laboratory of Solid State Microstructure, Department of Physics, Nanjing University, Nanjing 210093, China.,Wenzhou Institute, University of Chinese Academy of Sciences, Wenzhou 325001, China
| | - Fengwei Huo
- Key Laboratory of Flexible Electronics & Institute of Advanced Materials, Jiangsu National Synergetic Innovation Center for Advanced Materials, Nanjing Tech University, Nanjing 210093, China
| | - Wei Wang
- Collaborative Innovation Center of Advanced Microstructures, National Laboratory of Solid State Microstructure, Department of Physics, Nanjing University, Nanjing 210093, China.,Institute for Brain Sciences, Nanjing University, Nanjing 210093, China
| | - Yi Cao
- Collaborative Innovation Center of Advanced Microstructures, National Laboratory of Solid State Microstructure, Department of Physics, Nanjing University, Nanjing 210093, China.,Institute for Brain Sciences, Nanjing University, Nanjing 210093, China.,Chemistry and Biomedicine Innovation Center, Nanjing University, Nanjing 210093, China.,Wenzhou Institute, University of Chinese Academy of Sciences, Wenzhou 325001, China
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3
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Jidling C, Fleming AJ, Wills AG, Schön TB. Memory efficient constrained optimization of scanning-beam lithography. OPTICS EXPRESS 2022; 30:20564-20579. [PMID: 36224798 DOI: 10.1364/oe.457334] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/13/2022] [Accepted: 05/16/2022] [Indexed: 06/16/2023]
Abstract
This article describes a memory efficient method for solving large-scale optimization problems that arise when planning scanning-beam lithography processes. These processes require the identification of an exposure pattern that minimizes the difference between a desired and predicted output image, subject to constraints. The number of free variables is equal to the number of pixels, which can be on the order of millions or billions in practical applications. The proposed method splits the problem domain into a number of smaller overlapping subdomains with constrained boundary conditions, which are then solved sequentially using a constrained gradient search method (L-BFGS-B). Computational time is reduced by exploiting natural sparsity in the problem and employing the fast Fourier transform for efficient gradient calculation. When it comes to the trade-off between memory usage and computational time we can make a different trade-off compared to previous methods, where the required memory is reduced by approximately the number of subdomains at the cost of more computations. In an example problem with 30 million variables, the proposed method reduces memory requirements by 67% but increases computation time by 27%. Variations of the proposed method are expected to find applications in the planning of processes such as scanning laser lithography, scanning electron beam lithography, and focused ion beam deposition, for example.
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4
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Scanning Probe Lithography: State-of-the-Art and Future Perspectives. MICROMACHINES 2022; 13:mi13020228. [PMID: 35208352 PMCID: PMC8878409 DOI: 10.3390/mi13020228] [Citation(s) in RCA: 8] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/30/2021] [Revised: 01/24/2022] [Accepted: 01/28/2022] [Indexed: 02/04/2023]
Abstract
High-throughput and high-accuracy nanofabrication methods are required for the ever-increasing demand for nanoelectronics, high-density data storage devices, nanophotonics, quantum computing, molecular circuitry, and scaffolds in bioengineering used for cell proliferation applications. The scanning probe lithography (SPL) nanofabrication technique is a critical nanofabrication method with great potential to evolve into a disruptive atomic-scale fabrication technology to meet these demands. Through this timely review, we aspire to provide an overview of the SPL fabrication mechanism and the state-the-art research in this area, and detail the applications and characteristics of this technique, including the effects of thermal aspects and chemical aspects, and the influence of electric and magnetic fields in governing the mechanics of the functionalized tip interacting with the substrate during SPL. Alongside this, the review also sheds light on comparing various fabrication capabilities, throughput, and attainable resolution. Finally, the paper alludes to the fact that a majority of the reported literature suggests that SPL has yet to achieve its full commercial potential and is currently largely a laboratory-based nanofabrication technique used for prototyping of nanostructures and nanodevices.
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5
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Sirianni QEA, Wang TD, Borecki A, Deng Z, Ronald J, Gillies ER. Self-immolative Polyplexes for DNA Delivery. Biomater Sci 2022; 10:2557-2567. [DOI: 10.1039/d1bm01684a] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
Nucleic acids have immense potential for the treatment and prevention of a wide range of diseases, but delivery vehicles are needed to assist with their entry into cells. Polycations can...
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6
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Blelloch ND, Yarbrough HJ, Mirica KA. Stimuli-responsive temporary adhesives: enabling debonding on demand through strategic molecular design. Chem Sci 2021; 12:15183-15205. [PMID: 34976340 PMCID: PMC8635214 DOI: 10.1039/d1sc03426j] [Citation(s) in RCA: 7] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/24/2021] [Accepted: 10/07/2021] [Indexed: 11/24/2022] Open
Abstract
Stimuli-responsive temporary adhesives constitute a rapidly developing class of materials defined by the modulation of adhesion upon exposure to an external stimulus or stimuli. Engineering these materials to shift between two characteristic properties, strong adhesion and facile debonding, can be achieved through design strategies that target molecular functionalities. This perspective reviews the recent design and development of these materials, with a focus on the different stimuli that may initiate debonding. These stimuli include UV light, thermal energy, chemical triggers, and other potential triggers, such as mechanical force, sublimation, electromagnetism. The conclusion discusses the fundamental value of systematic investigations of the structure-property relationships within these materials and opportunities for unlocking novel functionalities in future versions of adhesives.
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Affiliation(s)
- Nicholas D Blelloch
- Burke Laboratory, Department of Chemistry, Dartmouth College Hanover New Hampshire 03755 USA http://www.miricagroup.com
| | - Hana J Yarbrough
- Burke Laboratory, Department of Chemistry, Dartmouth College Hanover New Hampshire 03755 USA http://www.miricagroup.com
| | - Katherine A Mirica
- Burke Laboratory, Department of Chemistry, Dartmouth College Hanover New Hampshire 03755 USA http://www.miricagroup.com
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7
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Sirianni QEA, Liang X, Such GK, Gillies ER. Polyglyoxylamides with a pH-Mediated Solubility and Depolymerization Switch. Macromolecules 2021. [DOI: 10.1021/acs.macromol.1c01796] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/13/2022]
Affiliation(s)
- Quinton E. A. Sirianni
- Department of Chemistry, The University of Western Ontario, London, Ontario, Canada N6A 5B7
- The Centre for Advanced Materials and Biomaterials Research, The University of Western Ontario, London, Ontario, Canada N6A 5B7
| | - Xiaoli Liang
- Department of Chemistry, The University of Western Ontario, London, Ontario, Canada N6A 5B7
- The Centre for Advanced Materials and Biomaterials Research, The University of Western Ontario, London, Ontario, Canada N6A 5B7
| | - Georgina K. Such
- The School of Chemistry, The University of Melbourne, Parkville, Victoria 3010, Australia
| | - Elizabeth R. Gillies
- Department of Chemistry, The University of Western Ontario, London, Ontario, Canada N6A 5B7
- The Centre for Advanced Materials and Biomaterials Research, The University of Western Ontario, London, Ontario, Canada N6A 5B7
- Department of Chemical and Biochemical Engineering, The University of Western Ontario, London, Ontario, Canada N6A 5B9
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8
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Farmakidis N, Swett JL, Youngblood N, Li X, Evangeli C, Aggarwal S, Mol JA, Bhaskaran H. Exploiting rotational asymmetry for sub-50 nm mechanical nanocalligraphy. MICROSYSTEMS & NANOENGINEERING 2021; 7:84. [PMID: 34691759 PMCID: PMC8528849 DOI: 10.1038/s41378-021-00300-y] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 02/04/2021] [Revised: 05/17/2021] [Accepted: 06/04/2021] [Indexed: 06/13/2023]
Abstract
Nanofabrication has experienced extraordinary progress in the area of lithography-led processes over the last decades, although versatile and adaptable techniques addressing a wide spectrum of materials are still nascent. Scanning probe lithography (SPL) offers the capability to readily pattern sub-100 nm structures on many surfaces; however, the technique does not scale to dense and multi-lengthscale structures. Here, we demonstrate a technique, which we term nanocalligraphy scanning probe lithography (nc-SPL), that overcomes these limitations. Nc-SPL employs an asymmetric tip and exploits its rotational asymmetry to generate structures spanning the micron to nanometer lengthscales through real-time linewidth tuning. Using specialized tip geometries and by precisely controlling the patterning direction, we demonstrate sub-50 nm patterns while simultaneously improving on throughput, tip longevity, and reliability compared to conventional SPL. We further show that nc-SPL can be employed in both positive and negative tone patterning modes, in contrast to conventional SPL. This underlines the potential of this technique for processing sensitive surfaces such as 2D materials, which are prone to tip-induced shear or beam-induced damage.
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Affiliation(s)
- Nikolaos Farmakidis
- Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH UK
| | - Jacob L. Swett
- Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH UK
| | - Nathan Youngblood
- Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH UK
| | - Xuan Li
- Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH UK
| | | | - Samarth Aggarwal
- Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH UK
| | - Jan A. Mol
- Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH UK
- Department of Physics, Queen Mary University of London, London, E1 4NS UK
| | - Harish Bhaskaran
- Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH UK
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9
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Lassaline N, Thureja D, Chervy T, Petter D, Murthy PA, Knoll AW, Norris DJ. Freeform Electronic and Photonic Landscapes in Hexagonal Boron Nitride. NANO LETTERS 2021; 21:8175-8181. [PMID: 34591490 DOI: 10.1021/acs.nanolett.1c02625] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
Atomically smooth hexagonal boron nitride (hBN) flakes have revolutionized two-dimensional (2D) optoelectronics. They provide the key substrate, encapsulant, and gate dielectric for 2D electronics while offering hyperbolic dispersion and quantum emission for photonics. The shape, thickness, and profile of these hBN flakes affect device functionality. However, researchers are restricted to simple, flat flakes, limiting next-generation devices. If arbitrary structures were possible, enhanced control over the flow of photons, electrons, and excitons could be exploited. Here, we demonstrate freeform hBN landscapes by combining thermal scanning-probe lithography and reactive-ion etching to produce previously unattainable flake structures with surprising fidelity. We fabricate photonic microelements (phase plates, grating couplers, and lenses) and show their straightforward integration, constructing a high-quality optical microcavity. We then decrease the length scale to introduce Fourier surfaces for electrons, creating sophisticated Moiré patterns for strain and band-structure engineering. These capabilities generate opportunities for 2D polaritonics, twistronics, quantum materials, and deep-ultraviolet devices.
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Affiliation(s)
- Nolan Lassaline
- Optical Materials Engineering Laboratory, Department of Mechanical and Process Engineering, ETH Zurich, 8092 Zurich, Switzerland
| | - Deepankur Thureja
- Optical Materials Engineering Laboratory, Department of Mechanical and Process Engineering, ETH Zurich, 8092 Zurich, Switzerland
- Quantum Photonics Group, Department of Physics, ETH Zurich, 8092 Zurich, Switzerland
| | - Thibault Chervy
- Quantum Photonics Group, Department of Physics, ETH Zurich, 8092 Zurich, Switzerland
- Physics and Informatics Laboratories, NTT Research, Inc., Sunnyvale, California 94085, United States
| | - Daniel Petter
- Optical Materials Engineering Laboratory, Department of Mechanical and Process Engineering, ETH Zurich, 8092 Zurich, Switzerland
| | - Puneet A Murthy
- Quantum Photonics Group, Department of Physics, ETH Zurich, 8092 Zurich, Switzerland
| | | | - David J Norris
- Optical Materials Engineering Laboratory, Department of Mechanical and Process Engineering, ETH Zurich, 8092 Zurich, Switzerland
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10
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Gottlieb S, Pigard L, Ryu YK, Lorenzoni M, Evangelio L, Fernández-Regúlez M, Rawlings CD, Spieser M, Perez-Murano F, Müller M, Knoll AW. Thermal Imaging of Block Copolymers with Sub-10 nm Resolution. ACS NANO 2021; 15:9005-9016. [PMID: 33938722 DOI: 10.1021/acsnano.1c01820] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
Thermal silicon probes have demonstrated their potential to investigate the thermal properties of various materials at high resolution. However, a thorough assessment of the achievable resolution is missing. Here, we present a probe-based thermal-imaging technique capable of providing sub-10 nm lateral resolution at a sub-10 ms pixel rate. We demonstrate the resolution by resolving microphase-separated PS-b-PMMA block copolymers that self-assemble in 11 to 19 nm half-period lamellar structures. We resolve an asymmetry in the heat flux signal at submolecular dimensions and assess the ratio of heat flux into both polymers in various geometries. These observations are quantitatively compared with coarse-grained molecular simulations of energy transport that reveal an enhancement of transport along the macromolecular backbone and a Kapitza resistance at the internal interfaces of the self-assembled structure. This comparison discloses a tip-sample contact radius of a ≈ 4 nm and identifies combinations of enhanced intramolecular transport and Kapitza resistance.
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Affiliation(s)
- Steven Gottlieb
- Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Carrer dels Tillers s/n, 08193 Bellaterra, Barcelona, Spain
| | - Louis Pigard
- Institute for Theoretical Physics, Georg-August-University, 37077 Göttingen, Germany
| | - Yu Kyoung Ryu
- IBM Research - Zurich, Säumerstrasse 4, 8803 Rüschlikon, Switzerland
| | - Matteo Lorenzoni
- Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Carrer dels Tillers s/n, 08193 Bellaterra, Barcelona, Spain
| | - Laura Evangelio
- Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Carrer dels Tillers s/n, 08193 Bellaterra, Barcelona, Spain
| | - Marta Fernández-Regúlez
- Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Carrer dels Tillers s/n, 08193 Bellaterra, Barcelona, Spain
| | - Colin D Rawlings
- IBM Research - Zurich, Säumerstrasse 4, 8803 Rüschlikon, Switzerland
| | - Martin Spieser
- SwissLitho AG, Technoparkstrasse 1, 8805 Zürich, Switzerland
| | - Francesc Perez-Murano
- Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Carrer dels Tillers s/n, 08193 Bellaterra, Barcelona, Spain
| | - Marcus Müller
- Institute for Theoretical Physics, Georg-August-University, 37077 Göttingen, Germany
| | - Armin W Knoll
- IBM Research - Zurich, Säumerstrasse 4, 8803 Rüschlikon, Switzerland
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11
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Meng Y, Cheng G, Man Z, Xu Y, Zhou S, Bian J, Lu Z, Zhang W. Deterministic Assembly of Single Sub-20 nm Functional Nanoparticles Using a Thermally Modified Template with a Scanning Nanoprobe. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2020; 32:e2005979. [PMID: 33180357 DOI: 10.1002/adma.202005979] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/01/2020] [Revised: 10/30/2020] [Indexed: 06/11/2023]
Abstract
A deterministic assembly technique for single sub-20 nm functional nanoparticles is developed based on nanostructured templates fabricated by hot scanning nanoprobes. With this technique, single nanoparticles including quantum dots, polystyrene fluorescent nanobeads, and gold nanoparticles are successfully assembled into 2D arrays with high yields. Experimental and theoretical analyses show that the key for the high yields is the hot-probe-based template fabrication technique, which creates geometrical nanotraps and modifies their surface energy simultaneously. In addition to single nanoparticle patterning, further experiments demonstrate that this technique is also capable of building complex nanostructures, such as nanoparticle clusters with well-defined shapes and heterogeneously integrated nanostructures consisting of quantum dots and silver nanowires. It opens the door to many important applications.
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Affiliation(s)
- Yan Meng
- College of Engineering and Applied Sciences, State Key Laboratory of Analytical Chemistry for Life Sciences, Jiangsu Key Laboratory of Artificial Functional Materials, MOE Key Laboratory of Intelligent Optical Sensing and Manipulation, Nanjing University, Nanjing, 210093, China
| | - Gang Cheng
- College of Engineering and Applied Sciences, State Key Laboratory of Analytical Chemistry for Life Sciences, Jiangsu Key Laboratory of Artificial Functional Materials, MOE Key Laboratory of Intelligent Optical Sensing and Manipulation, Nanjing University, Nanjing, 210093, China
| | - Zaiqin Man
- College of Engineering and Applied Sciences, State Key Laboratory of Analytical Chemistry for Life Sciences, Jiangsu Key Laboratory of Artificial Functional Materials, MOE Key Laboratory of Intelligent Optical Sensing and Manipulation, Nanjing University, Nanjing, 210093, China
| | - Ya Xu
- College of Engineering and Applied Sciences, State Key Laboratory of Analytical Chemistry for Life Sciences, Jiangsu Key Laboratory of Artificial Functional Materials, MOE Key Laboratory of Intelligent Optical Sensing and Manipulation, Nanjing University, Nanjing, 210093, China
| | - Shuang Zhou
- College of Engineering and Applied Sciences, State Key Laboratory of Analytical Chemistry for Life Sciences, Jiangsu Key Laboratory of Artificial Functional Materials, MOE Key Laboratory of Intelligent Optical Sensing and Manipulation, Nanjing University, Nanjing, 210093, China
| | - Jie Bian
- College of Engineering and Applied Sciences, State Key Laboratory of Analytical Chemistry for Life Sciences, Jiangsu Key Laboratory of Artificial Functional Materials, MOE Key Laboratory of Intelligent Optical Sensing and Manipulation, Nanjing University, Nanjing, 210093, China
| | - Zhenda Lu
- College of Engineering and Applied Sciences, State Key Laboratory of Analytical Chemistry for Life Sciences, Jiangsu Key Laboratory of Artificial Functional Materials, MOE Key Laboratory of Intelligent Optical Sensing and Manipulation, Nanjing University, Nanjing, 210093, China
| | - Weihua Zhang
- College of Engineering and Applied Sciences, State Key Laboratory of Analytical Chemistry for Life Sciences, Jiangsu Key Laboratory of Artificial Functional Materials, MOE Key Laboratory of Intelligent Optical Sensing and Manipulation, Nanjing University, Nanjing, 210093, China
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12
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Chemical carving lithography with scanning catalytic probes. Sci Rep 2020; 10:13411. [PMID: 32770060 PMCID: PMC7415144 DOI: 10.1038/s41598-020-70407-1] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/21/2019] [Accepted: 05/26/2020] [Indexed: 11/09/2022] Open
Abstract
This study introduces a new chemical carving technique as an alternative to existing lithography and etching techniques. Chemical carving incorporates the concept of scanning probe lithography and metal-assisted chemical etching (MaCE). A catalyst-coated probe mechanically scans a Si substrate in a solution, and the Si is chemically etched into the shape of the probes, forming pre-defined 3D patterns. A metal catalyst is used to oxidize the Si, and the silicon oxide formed is etched in the solution; this local MaCE reaction takes place continuously on the Si substrate in the scanning direction of probes. Polymer resist patterning for subsequent etching is not required; instead, scanning probes pattern the oxidation mask directly and chemical etching of Si occurs concurrently. A prototype that drives the probe with an actuator was used to analyze various aspects of the etching profiles based on the scanning speeds and sizes of the probe used. This technique suggests the possibility of forming arbitrary structures because the carving trajectory is formed according to the scan direction of the probes.
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14
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Howell ST, Grushina A, Holzner F, Brugger J. Thermal scanning probe lithography-a review. MICROSYSTEMS & NANOENGINEERING 2020; 6:21. [PMID: 34567636 PMCID: PMC8433166 DOI: 10.1038/s41378-019-0124-8] [Citation(s) in RCA: 37] [Impact Index Per Article: 9.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/12/2019] [Revised: 11/05/2019] [Accepted: 11/25/2019] [Indexed: 05/08/2023]
Abstract
Fundamental aspects and state-of-the-art results of thermal scanning probe lithography (t-SPL) are reviewed here. t-SPL is an emerging direct-write nanolithography method with many unique properties which enable original or improved nano-patterning in application fields ranging from quantum technologies to material science. In particular, ultrafast and highly localized thermal processing of surfaces can be achieved through the sharp heated tip in t-SPL to generate high-resolution patterns. We investigate t-SPL as a means of generating three types of material interaction: removal, conversion, and addition. Each of these categories is illustrated with process parameters and application examples, as well as their respective opportunities and challenges. Our intention is to provide a knowledge base of t-SPL capabilities and current limitations and to guide nanoengineers to the best-fitting approach of t-SPL for their challenges in nanofabrication or material science. Many potential applications of nanoscale modifications with thermal probes still wait to be explored, in particular when one can utilize the inherently ultrahigh heating and cooling rates.
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Affiliation(s)
- Samuel Tobias Howell
- Microsystems Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland
| | - Anya Grushina
- Heidelberg Instruments Nano - SwissLitho AG, Technoparkstrasse 1, 8005 Zürich, Switzerland
| | - Felix Holzner
- Heidelberg Instruments Nano - SwissLitho AG, Technoparkstrasse 1, 8005 Zürich, Switzerland
| | - Juergen Brugger
- Microsystems Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland
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15
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Oh DK, Lee S, Lee SH, Lee W, Yeon G, Lee N, Han KS, Jung S, Kim DH, Lee DY, Lee SH, Park HJ, Ok JG. Tailored Nanopatterning by Controlled Continuous Nanoinscribing with Tunable Shape, Depth, and Dimension. ACS NANO 2019; 13:11194-11202. [PMID: 31593432 DOI: 10.1021/acsnano.9b04221] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/17/2023]
Abstract
We present that the tailored nanopatterning with tunable shape, depth, and dimension for diverse application-specific designs can be realized by utilizing controlled dynamic nanoinscribing (DNI), which can generate bur-free plastic deformation on various flexible substrates via continuous mechanical inscription of a small sliced edge of a nanopatterned mold in a compact and vacuum-free system. Systematic controlling of prime DNI processing parameters including inscribing force, temperature, and substrate feed rate can determine the nanopattern depths and their specific profiles from rounded to angular shapes as a summation of the force-driven plastic deformation and heat-driven thermal deformation. More complex nanopatterns with gradient depths and/or multidimensional profiles can also be readily created by modulating the horizontal mold edge alignment and/or combining sequential DNI strokes, which otherwise demand laborious and costly procedures. Many practical user-specific applications may benefit from this study by tailor-making the desired nanopattern structures within desired areas, including precision machine and optics components, transparent electronics and photonics, flexible sensors, and reattachable and wearable devices. We demonstrate one vivid example in which the light diffusion direction of a light-emitting diode can be tuned by application of specifically designed DNI nanopatterns.
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Affiliation(s)
- Dong Kyo Oh
- Department of Mechanical and Automotive Engineering , Seoul National University of Science and Technology , Seoul 01811 , Korea
| | - Seungjo Lee
- Department of Mechanical and Automotive Engineering , Seoul National University of Science and Technology , Seoul 01811 , Korea
| | - Seung Hu Lee
- Department of Energy Systems Research , Ajou University , Suwon 16499 , Korea
| | - Wonseok Lee
- Department of Mechanical and Automotive Engineering , Seoul National University of Science and Technology , Seoul 01811 , Korea
| | - Gyubeom Yeon
- Department of Mechanical and Automotive Engineering , Seoul National University of Science and Technology , Seoul 01811 , Korea
| | - Nayeong Lee
- Department of Mechanical and Automotive Engineering , Seoul National University of Science and Technology , Seoul 01811 , Korea
- Research Center for Electrical and Information Technology , Seoul National University of Science and Technology , Seoul 01811 , Korea
| | - Kang-Soo Han
- Display Research Center , Samsung Display, Co., Ltd. , Gyeonggi-do 17113 , Korea
| | - Sunmin Jung
- Department of Mechanical and Automotive Engineering , Seoul National University of Science and Technology , Seoul 01811 , Korea
| | - Dong Ha Kim
- Department of Mechanical and Automotive Engineering , Seoul National University of Science and Technology , Seoul 01811 , Korea
| | - Dae-Young Lee
- Display Research Center , Samsung Display, Co., Ltd. , Gyeonggi-do 17113 , Korea
| | - Sang Hoon Lee
- Department of Mechanical and Automotive Engineering , Seoul National University of Science and Technology , Seoul 01811 , Korea
- Research Center for Electrical and Information Technology , Seoul National University of Science and Technology , Seoul 01811 , Korea
| | - Hui Joon Park
- Department of Organic and Nano Engineering , Hanyang University , Seoul 04763 , Korea
| | - Jong G Ok
- Department of Mechanical and Automotive Engineering , Seoul National University of Science and Technology , Seoul 01811 , Korea
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16
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Yardley RE, Kenaree AR, Gillies ER. Triggering Depolymerization: Progress and Opportunities for Self-Immolative Polymers. Macromolecules 2019. [DOI: 10.1021/acs.macromol.9b00965] [Citation(s) in RCA: 76] [Impact Index Per Article: 15.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/16/2022]
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17
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Ryu YK, Knoll AW. Oxidation and Thermal Scanning Probe Lithography for High-Resolution Nanopatterning and Nanodevices. ELECTRICAL ATOMIC FORCE MICROSCOPY FOR NANOELECTRONICS 2019. [DOI: 10.1007/978-3-030-15612-1_5] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 12/12/2022]
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18
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Ogieglo W, Stenbock-Fermor A, Juraschek TM, Bogdanova Y, Benes N, Tsarkova LA. Synergic Swelling of Interactive Network Support and Block Copolymer Films during Solvent Vapor Annealing. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2018; 34:9950-9960. [PMID: 30070855 DOI: 10.1021/acs.langmuir.8b02304] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
We report the effect of "interactive" polymer network (PN) supports on the solvent-vapor processing of thin polymer films. Densely cross-linked surface-attached network exhibits under experimental time scale a glassy swelling behavior with the conformational states and solvent-uptake clearly sensitive to the degree of solvent vapor saturation in the atmosphere. Pretreatment of the thermally cured PN films by complete immersion or by swelling in saturated chloroform vapors facilitates relaxation of the residual stresses and induces irreversible changes to the network structure as revealed by the swelling/deswelling tests. The presence of a polymer film on top of the PN support results in a mutual influence of the layers on the respective swelling kinetics, steady-state solvent uptake, and chain dynamics. Using UV-vis ellipsometry, we revealed a significantly faster swelling and higher solvent uptake of glassy PN layer below a polymer film as compared to a single PN layer on silicon substrate. Remarkably, the swelling of the network support continues to increase even when the overall swelling of the bilayer is in a steady-state regime. Block copolymer films on PN supports exhibit a faster ordering dynamics and exceptional stability toward dewetting as compared to similar films on silicon wafers. The mechanical stress produced by continuously swelling PN is suggested to account for the enhanced segmental dynamics even at low solvent concentration in the block copolymer film. Apart from novel insights into dynamics of solvent uptake by heterogeneous polymer films, these results might be useful in developing novel approaches toward fast-processing/annealing of functional polymer films and fibers.
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Affiliation(s)
- Wojciech Ogieglo
- DWI-Leibniz-Institut für Interaktive Materialien , Forckenbeckstraße 50 , 52056 Aachen , Germany
| | - Anja Stenbock-Fermor
- DWI-Leibniz-Institut für Interaktive Materialien , Forckenbeckstraße 50 , 52056 Aachen , Germany
| | - Thomas M Juraschek
- DWI-Leibniz-Institut für Interaktive Materialien , Forckenbeckstraße 50 , 52056 Aachen , Germany
| | - Yulia Bogdanova
- Chair of Colloid Chemistry, Faculty of Chemistry , Moscow State University , 1-3 Leninskiye Gory , 119991 Moscow , Russia
| | - Nieck Benes
- Membrane Science and Technology Cluster/Films in Fluids Group, Faculty of Science and Technology , University of Twente , 7500 AE Enschede , The Netherlands
| | - Larisa A Tsarkova
- Chair of Colloid Chemistry, Faculty of Chemistry , Moscow State University , 1-3 Leninskiye Gory , 119991 Moscow , Russia
- Deutsches Textilforschungszentrum Nord-West gGmbH (DTNW) , Adlerstraße 1 , 47798 Krefeld , Germany
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19
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Nanomanufacturing of silicon surface with a single atomic layer precision via mechanochemical reactions. Nat Commun 2018; 9:1542. [PMID: 29670215 PMCID: PMC5906689 DOI: 10.1038/s41467-018-03930-5] [Citation(s) in RCA: 50] [Impact Index Per Article: 8.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/09/2017] [Accepted: 03/23/2018] [Indexed: 11/18/2022] Open
Abstract
Topographic nanomanufacturing with a depth precision down to atomic dimension is of importance for advancement of nanoelectronics with new functionalities. Here we demonstrate a mask-less and chemical-free nanolithography process for regio-specific removal of atomic layers on a single crystalline silicon surface via shear-induced mechanochemical reactions. Since chemical reactions involve only the topmost atomic layer exposed at the interface, the removal of a single atomic layer is possible and the crystalline lattice beneath the processed area remains intact without subsurface structural damages. Molecular dynamics simulations depict the atom-by-atom removal process, where the first atomic layer is removed preferentially through the formation and dissociation of interfacial bridge bonds. Based on the parametric thresholds needed for single atomic layer removal, the critical energy barrier for water-assisted mechanochemical dissociation of Si–Si bonds was determined. The mechanochemical nanolithography method demonstrated here could be extended to nanofabrication of other crystalline materials. The continued scaling of silicon based electronic devices requires the development of increasingly innovative approaches for high-precision material removal. Here, the authors demonstrate subnanometre depth removal of silicon using scanning probe, shear-induced mechanochemical reactions.
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20
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Lee SH, Shin SH, Madsen M, Takei K, Nah J, Lee MH. A soft lithographic approach to fabricate InAs nanowire field-effect transistors. Sci Rep 2018; 8:3204. [PMID: 29453402 PMCID: PMC5816620 DOI: 10.1038/s41598-018-21420-y] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/11/2017] [Accepted: 02/05/2018] [Indexed: 11/09/2022] Open
Abstract
The epitaxial layer transfer process was previously introduced to integrate high-quality and ultrathin III-V compound semiconductor layers on any substrate. However, this technique has limitation for fabrication of sub-micron nanoribbons due to the diffraction limit of photolithography. In order to overcome this limitation and scale down its width to sub-50 nm, we need either a costly short wavelength lithography system or a non-optical patterning method. In this work, high-quality III-V compound semiconductor nanowires were fabricated and integrated onto a Si/SiO2 substrate by a soft-lithography top-down approach and an epitaxial layer transfer process, using MBE-grown ultrathin InAs as a source wafer. The width of the InAs nanowires was controlled using solvent-assisted nanoscale embossing (SANE), descumming, and etching processes. By optimizing these processes, NWs with a width less than 50 nm were readily obtained. The InAs NWFETs prepared by our method demonstrate peak electron mobility of ~1600 cm2/Vs, indicating negligible material degradation during the SANE process.
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Affiliation(s)
- Sang Hwa Lee
- Department of Applied Chemistry, Kyung Hee University, Yongin, Gyeonggi, 17104, Korea
| | - Sung-Ho Shin
- Department of Electrical Engineering, Chungnam National University, Daejeon, 34134, Korea
| | - Morten Madsen
- SDU NanoSYD, Mads Clausen Institute University of Southern Denmark, Alsion 2, 6400, Sønderborg, Denmark
| | - Kuniharu Takei
- Department of Physics and Electronics, Osaka Prefecture University, Sakai, Osaka, 599-8531, Japan
| | - Junghyo Nah
- Department of Electrical Engineering, Chungnam National University, Daejeon, 34134, Korea.
| | - Min Hyung Lee
- Department of Applied Chemistry, Kyung Hee University, Yongin, Gyeonggi, 17104, Korea.
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21
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Ryu Cho YK, Rawlings CD, Wolf H, Spieser M, Bisig S, Reidt S, Sousa M, Khanal SR, Jacobs TDB, Knoll AW. Sub-10 Nanometer Feature Size in Silicon Using Thermal Scanning Probe Lithography. ACS NANO 2017; 11:11890-11897. [PMID: 29083870 PMCID: PMC5746844 DOI: 10.1021/acsnano.7b06307] [Citation(s) in RCA: 36] [Impact Index Per Article: 5.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/05/2017] [Accepted: 10/30/2017] [Indexed: 05/20/2023]
Abstract
High-resolution lithography often involves thin resist layers which pose a challenge for pattern characterization. Direct evidence that the pattern was well-defined and can be used for device fabrication is provided if a successful pattern transfer is demonstrated. In the case of thermal scanning probe lithography (t-SPL), highest resolutions are achieved for shallow patterns. In this work, we study the transfer reliability and the achievable resolution as a function of applied temperature and force. Pattern transfer was reliable if a pattern depth of more than 3 nm was reached and the walls between the patterned lines were slightly elevated. Using this geometry as a benchmark, we studied the formation of 10-20 nm half-pitch dense lines as a function of the applied force and temperature. We found that the best pattern geometry is obtained at a heater temperature of ∼600 °C, which is below or close to the transition from mechanical indentation to thermal evaporation. At this temperature, there still is considerable plastic deformation of the resist, which leads to a reduction of the pattern depth at tight pitch and therefore limits the achievable resolution. By optimizing patterning conditions, we achieved 11 nm half-pitch dense lines in the HM8006 transfer layer and 14 nm half-pitch dense lines and L-lines in silicon. For the 14 nm half-pitch lines in silicon, we measured a line edge roughness of 2.6 nm (3σ) and a feature size of the patterned walls of 7 nm.
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Affiliation(s)
| | - Colin D. Rawlings
- IBM
Research Zurich, Säumerstrasse
4, 8803 Rüschlikon, Switzerland
- SwissLitho
AG, Technoparkstrasse
1, 8005 Zurich, Switzerland
| | - Heiko Wolf
- IBM
Research Zurich, Säumerstrasse
4, 8803 Rüschlikon, Switzerland
| | - Martin Spieser
- SwissLitho
AG, Technoparkstrasse
1, 8005 Zurich, Switzerland
| | - Samuel Bisig
- SwissLitho
AG, Technoparkstrasse
1, 8005 Zurich, Switzerland
| | - Steffen Reidt
- IBM
Research Zurich, Säumerstrasse
4, 8803 Rüschlikon, Switzerland
| | - Marilyne Sousa
- IBM
Research Zurich, Säumerstrasse
4, 8803 Rüschlikon, Switzerland
| | - Subarna R. Khanal
- University
of Pittsburgh, Pittsburgh, Pennsylvania 15261, United States
| | | | - Armin W. Knoll
- IBM
Research Zurich, Säumerstrasse
4, 8803 Rüschlikon, Switzerland
- E-mail:
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22
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Zimmermann ST, Balkenende DWR, Lavrenova A, Weder C, Brugger J. Nanopatterning of a Stimuli-Responsive Fluorescent Supramolecular Polymer by Thermal Scanning Probe Lithography. ACS APPLIED MATERIALS & INTERFACES 2017; 9:41454-41461. [PMID: 29077391 PMCID: PMC5709779 DOI: 10.1021/acsami.7b13672] [Citation(s) in RCA: 15] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/10/2017] [Accepted: 10/27/2017] [Indexed: 05/24/2023]
Abstract
The miniaturization of nanometer-sized multicolor fluorescent features is of continuous significance for counterfeit security features, data storage, and sensors. Recent advances in engineering of stimuli-responsive supramolecular polymeric materials that respond upon exposure to heat or mechanical force by changing their fluorescence characteristics open new opportunities as functional lithographic resists. Here, we demonstrate the patterning of a thermochromic supramolecular material by thermal scanning probe lithography (t-SPL), an emerging nanofabrication technique, which allows for ultrafast indentation with a heated probe, resulting in both fluorescent and topographic nanofeatures. t-SPL indentation reveals a linear relationship between the temperature at which material softening occurs and the indentation force in the range from 200 to 500 nN. The softening temperature decreases as the heating time increases from 4 μs to 1 ms, following time-temperature superposition behavior. Our results herein confirm that the fluorescence contrast, perceivable as a shift from red to green, was obtained by kinetic trapping of the dissociated state due to ultrarapid cooling when the probe is removed. We use t-SPL to create highly customized fluorescence patterns up to 40 × 40 μm2 in size with a spatial resolution of 86 nm and change the pitch size to modify the fluorescence intensity when observed by fluorescence microscopy. As an application, multifaceted security features with nanometer resolution are explored.
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Affiliation(s)
- Samuel Tobias Zimmermann
- Microsystems Laboratory, École Polytechnique Fédérale
de Lausanne, CH-1015 Lausanne, Switzerland
| | | | - Anna Lavrenova
- Adolphe Merkle Institute, University of
Fribourg, 1700 Fribourg, Switzerland
| | - Christoph Weder
- Adolphe Merkle Institute, University of
Fribourg, 1700 Fribourg, Switzerland
| | - Jürgen Brugger
- Microsystems Laboratory, École Polytechnique Fédérale
de Lausanne, CH-1015 Lausanne, Switzerland
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23
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Control of the interaction strength of photonic molecules by nanometer precise 3D fabrication. Sci Rep 2017; 7:16502. [PMID: 29184150 PMCID: PMC5705769 DOI: 10.1038/s41598-017-16496-x] [Citation(s) in RCA: 13] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/28/2017] [Accepted: 11/13/2017] [Indexed: 11/08/2022] Open
Abstract
Applications for high resolution 3D profiles, so-called grayscale lithography, exist in diverse fields such as optics, nanofluidics and tribology. All of them require the fabrication of patterns with reliable absolute patterning depth independent of the substrate location and target materials. Here we present a complete patterning and pattern-transfer solution based on thermal scanning probe lithography (t-SPL) and dry etching. We demonstrate the fabrication of 3D profiles in silicon and silicon oxide with nanometer scale accuracy of absolute depth levels. An accuracy of less than 1nm standard deviation in t-SPL is achieved by providing an accurate physical model of the writing process to a model-based implementation of a closed-loop lithography process. For transfering the pattern to a target substrate we optimized the etch process and demonstrate linear amplification of grayscale patterns into silicon and silicon oxide with amplification ratios of ∼6 and ∼1, respectively. The performance of the entire process is demonstrated by manufacturing photonic molecules of desired interaction strength. Excellent agreement of fabricated and simulated structures has been achieved.
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24
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Wang F, Diesendruck CE. Polyphthalaldehyde: Synthesis, Derivatives, and Applications. Macromol Rapid Commun 2017; 39. [DOI: 10.1002/marc.201700519] [Citation(s) in RCA: 30] [Impact Index Per Article: 4.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/31/2017] [Revised: 09/11/2017] [Indexed: 02/06/2023]
Affiliation(s)
- Feng Wang
- Schulich Faculty of Chemistry and Russell-Berrie Nanotechnology Institute; Technion - Israel Institute of Technology; Haifa 32000 Israel
| | - Charles E. Diesendruck
- Schulich Faculty of Chemistry and Russell-Berrie Nanotechnology Institute; Technion - Israel Institute of Technology; Haifa 32000 Israel
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25
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He Q, Tan C, Zhang H. Recent Advances in Cantilever-Free Scanning Probe Lithography: High-Throughput, Space-Confined Synthesis of Nanostructures and Beyond. ACS NANO 2017; 11:4381-4386. [PMID: 28532155 DOI: 10.1021/acsnano.7b03143] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Scalability is the major challenge for scanning probe lithography (SPL). Recently developed cantilever-free scanning probe technologies provide a solution to the issue of scalability by incorporating massive arrays of polymer pens, which fundamentally overcome the low-throughput nature of SPL. The further development of cantilever-free SPL brings up a variety of applications in electronics, biology, and chemical synthesis. In this Perspective, we highlight the space-confined synthesis of complex nanostructures enabled by different types of cantilever-free SPL technologies.
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Affiliation(s)
- Qiyuan He
- Center for Programmable Materials, School of Materials Science and Engineering, Nanyang Technological University , 50 Nanyang Avenue, Singapore 639798
| | - Chaoliang Tan
- Center for Programmable Materials, School of Materials Science and Engineering, Nanyang Technological University , 50 Nanyang Avenue, Singapore 639798
| | - Hua Zhang
- Center for Programmable Materials, School of Materials Science and Engineering, Nanyang Technological University , 50 Nanyang Avenue, Singapore 639798
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26
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Xu X, Yang Q, Cheung KM, Zhao C, Wattanatorn N, Belling JN, Abendroth JM, Slaughter LS, Mirkin CA, Andrews AM, Weiss PS. Polymer-Pen Chemical Lift-Off Lithography. NANO LETTERS 2017; 17:3302-3311. [PMID: 28409640 DOI: 10.1021/acs.nanolett.7b01236] [Citation(s) in RCA: 21] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/22/2023]
Abstract
We designed and fabricated large arrays of polymer pens having sub-20 nm tips to perform chemical lift-off lithography (CLL). As such, we developed a hybrid patterning strategy called polymer-pen chemical lift-off lithography (PPCLL). We demonstrated PPCLL patterning using pyramidal and v-shaped polymer-pen arrays. Associated simulations revealed a nanometer-scale quadratic relationship between contact line widths of the polymer pens and two other variables: polymer-pen base line widths and vertical compression distances. We devised a stamp support system consisting of interspersed arrays of flat-tipped polymer pens that are taller than all other sharp-tipped polymer pens. These supports partially or fully offset stamp weights thereby also serving as a leveling system. We investigated a series of v-shaped polymer pens with known height differences to control relative vertical positions of each polymer pen precisely at the sub-20 nm scale mimicking a high-precision scanning stage. In doing so, we obtained linear-array patterns of alkanethiols with sub-50 nm to sub-500 nm line widths and minimum sub-20 nm line width tunable increments. The CLL pattern line widths were in agreement with those predicted by simulations. Our results suggest that through informed design of a stamp support system and tuning of polymer-pen base widths, throughput can be increased by eliminating the need for a scanning stage system in PPCLL without sacrificing precision. To demonstrate functional microarrays patterned by PPCLL, we inserted probe DNA into PPCLL patterns and observed hybridization by complementary target sequences.
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Affiliation(s)
- Xiaobin Xu
- California NanoSystems Institute, ‡Department of Chemistry and Biochemistry, §Department of Materials Science and Engineering, and ∥Department of Psychiatry and Biobehavioral Health, Semel Institute for Neuroscience and Human Behavior, and Hatos Center for Neuropharmacology, University of California, Los Angeles , Los Angeles, California 90095, United States
- Department of Chemistry and International Institute for Nanotechnology and #Department of Materials Science and Engineering, Northwestern University , Evanston, Illinois 60208, United States
| | - Qing Yang
- California NanoSystems Institute, ‡Department of Chemistry and Biochemistry, §Department of Materials Science and Engineering, and ∥Department of Psychiatry and Biobehavioral Health, Semel Institute for Neuroscience and Human Behavior, and Hatos Center for Neuropharmacology, University of California, Los Angeles , Los Angeles, California 90095, United States
- Department of Chemistry and International Institute for Nanotechnology and #Department of Materials Science and Engineering, Northwestern University , Evanston, Illinois 60208, United States
| | - Kevin M Cheung
- California NanoSystems Institute, ‡Department of Chemistry and Biochemistry, §Department of Materials Science and Engineering, and ∥Department of Psychiatry and Biobehavioral Health, Semel Institute for Neuroscience and Human Behavior, and Hatos Center for Neuropharmacology, University of California, Los Angeles , Los Angeles, California 90095, United States
- Department of Chemistry and International Institute for Nanotechnology and #Department of Materials Science and Engineering, Northwestern University , Evanston, Illinois 60208, United States
| | - Chuanzhen Zhao
- California NanoSystems Institute, ‡Department of Chemistry and Biochemistry, §Department of Materials Science and Engineering, and ∥Department of Psychiatry and Biobehavioral Health, Semel Institute for Neuroscience and Human Behavior, and Hatos Center for Neuropharmacology, University of California, Los Angeles , Los Angeles, California 90095, United States
- Department of Chemistry and International Institute for Nanotechnology and #Department of Materials Science and Engineering, Northwestern University , Evanston, Illinois 60208, United States
| | - Natcha Wattanatorn
- California NanoSystems Institute, ‡Department of Chemistry and Biochemistry, §Department of Materials Science and Engineering, and ∥Department of Psychiatry and Biobehavioral Health, Semel Institute for Neuroscience and Human Behavior, and Hatos Center for Neuropharmacology, University of California, Los Angeles , Los Angeles, California 90095, United States
- Department of Chemistry and International Institute for Nanotechnology and #Department of Materials Science and Engineering, Northwestern University , Evanston, Illinois 60208, United States
| | - Jason N Belling
- California NanoSystems Institute, ‡Department of Chemistry and Biochemistry, §Department of Materials Science and Engineering, and ∥Department of Psychiatry and Biobehavioral Health, Semel Institute for Neuroscience and Human Behavior, and Hatos Center for Neuropharmacology, University of California, Los Angeles , Los Angeles, California 90095, United States
- Department of Chemistry and International Institute for Nanotechnology and #Department of Materials Science and Engineering, Northwestern University , Evanston, Illinois 60208, United States
| | - John M Abendroth
- California NanoSystems Institute, ‡Department of Chemistry and Biochemistry, §Department of Materials Science and Engineering, and ∥Department of Psychiatry and Biobehavioral Health, Semel Institute for Neuroscience and Human Behavior, and Hatos Center for Neuropharmacology, University of California, Los Angeles , Los Angeles, California 90095, United States
- Department of Chemistry and International Institute for Nanotechnology and #Department of Materials Science and Engineering, Northwestern University , Evanston, Illinois 60208, United States
| | - Liane S Slaughter
- California NanoSystems Institute, ‡Department of Chemistry and Biochemistry, §Department of Materials Science and Engineering, and ∥Department of Psychiatry and Biobehavioral Health, Semel Institute for Neuroscience and Human Behavior, and Hatos Center for Neuropharmacology, University of California, Los Angeles , Los Angeles, California 90095, United States
- Department of Chemistry and International Institute for Nanotechnology and #Department of Materials Science and Engineering, Northwestern University , Evanston, Illinois 60208, United States
| | - Chad A Mirkin
- California NanoSystems Institute, ‡Department of Chemistry and Biochemistry, §Department of Materials Science and Engineering, and ∥Department of Psychiatry and Biobehavioral Health, Semel Institute for Neuroscience and Human Behavior, and Hatos Center for Neuropharmacology, University of California, Los Angeles , Los Angeles, California 90095, United States
- Department of Chemistry and International Institute for Nanotechnology and #Department of Materials Science and Engineering, Northwestern University , Evanston, Illinois 60208, United States
| | - Anne M Andrews
- California NanoSystems Institute, ‡Department of Chemistry and Biochemistry, §Department of Materials Science and Engineering, and ∥Department of Psychiatry and Biobehavioral Health, Semel Institute for Neuroscience and Human Behavior, and Hatos Center for Neuropharmacology, University of California, Los Angeles , Los Angeles, California 90095, United States
- Department of Chemistry and International Institute for Nanotechnology and #Department of Materials Science and Engineering, Northwestern University , Evanston, Illinois 60208, United States
| | - Paul S Weiss
- California NanoSystems Institute, ‡Department of Chemistry and Biochemistry, §Department of Materials Science and Engineering, and ∥Department of Psychiatry and Biobehavioral Health, Semel Institute for Neuroscience and Human Behavior, and Hatos Center for Neuropharmacology, University of California, Los Angeles , Los Angeles, California 90095, United States
- Department of Chemistry and International Institute for Nanotechnology and #Department of Materials Science and Engineering, Northwestern University , Evanston, Illinois 60208, United States
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27
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Abstract
Tip-based nanofabrication (TBN) is a family of emerging nanofabrication techniques that use a nanometer scale tip to fabricate nanostructures. In this review, we first introduce the history of the TBN and the technology development. We then briefly review various TBN techniques that use different physical or chemical mechanisms to fabricate features and discuss some of the state-of-the-art techniques. Subsequently, we focus on those TBN methods that have demonstrated potential to scale up the manufacturing throughput. Finally, we discuss several research directions that are essential for making TBN a scalable nano-manufacturing technology.
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28
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High-speed maskless nanolithography with visible light based on photothermal localization. Sci Rep 2017; 7:43892. [PMID: 28252011 PMCID: PMC5333155 DOI: 10.1038/srep43892] [Citation(s) in RCA: 23] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/21/2016] [Accepted: 01/30/2017] [Indexed: 12/23/2022] Open
Abstract
High-speed maskless nanolithography is experimentally achieved on AgInSbTe thin films. The lithography was carried out in air at room temperature, with a GaN diode laser (λ = 405 nm), and on a large sample disk of diameter 120 mm. The normal width of the written features measures 46 ± 5 nm, about 1/12 of the diffraction allowed smallest light spot, and the lithography speed reaches 6 ~ 8 m/s, tens of times faster than traditional laser writing methods. The writing resolution is instantaneously tunable by adjusting the laser power. The reason behind the significant breakthrough in terms of writing resolution and speed is found as the concentration of light induced heat. Therefore, the heat spot is far smaller than the light spot, so does the size of the written features. Such a sharp focus of heat occurs only on the selected writing material, and the phenomenon is referred as the photothermal localization response. The physics behind the effect is explained and supported with numerical simulations.
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29
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Zhang K, Chen Z, Wei J, Wei T, Geng Y, Wang Y, Wu Y. A study on one-step laser nanopatterning onto copper–hydrazone-complex thin films and its mechanism. Phys Chem Chem Phys 2017; 19:13272-13280. [DOI: 10.1039/c7cp00477j] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
One-step nanopatterning onto copper–hydrazone-complex thin films through diode-based laser writing lithography system working at visible light wavelengths.
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Affiliation(s)
- Kui Zhang
- Lab of High Density Optical Storage
- Shanghai Institute of Optics and Fine Mechanics
- Chinese Academy of Sciences
- Shanghai 201800
- P. R. China
| | - Zhimin Chen
- Key Lab of Functional Inorganic Material Chemistry (Ministry of Education of China)
- School of Chemistry and Materials Science
- Heilongjiang University
- Harbin 150080
- P. R. China
| | - Jingsong Wei
- Lab of High Density Optical Storage
- Shanghai Institute of Optics and Fine Mechanics
- Chinese Academy of Sciences
- Shanghai 201800
- P. R. China
| | - Tao Wei
- Lab of High Density Optical Storage
- Shanghai Institute of Optics and Fine Mechanics
- Chinese Academy of Sciences
- Shanghai 201800
- P. R. China
| | - Youyong Geng
- Lab of High Density Optical Storage
- Shanghai Institute of Optics and Fine Mechanics
- Chinese Academy of Sciences
- Shanghai 201800
- P. R. China
| | - Yang Wang
- Lab of High Density Optical Storage
- Shanghai Institute of Optics and Fine Mechanics
- Chinese Academy of Sciences
- Shanghai 201800
- P. R. China
| | - Yiqun Wu
- Lab of High Density Optical Storage
- Shanghai Institute of Optics and Fine Mechanics
- Chinese Academy of Sciences
- Shanghai 201800
- P. R. China
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30
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Thermal scanning probe lithography. ACTA ACUST UNITED AC 2016. [DOI: 10.1016/b978-0-08-100354-1.00016-8] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register]
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31
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Rawlings C, Wolf H, Hedrick JL, Coady DJ, Duerig U, Knoll AW. Accurate Location and Manipulation of Nanoscaled Objects Buried under Spin-Coated Films. ACS NANO 2015; 9:6188-95. [PMID: 26046586 DOI: 10.1021/acsnano.5b01485] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/24/2023]
Abstract
Detection and precise localization of nanoscale structures buried beneath spin-coated films are highly valuable additions to nanofabrication technology. In principle, the topography of the final film contains information about the location of the buried features. However, it is generally believed that the relation is masked by flow effects, which lead to an upstream shift of the dry film's topography and render precise localization impossible. Here we demonstrate, theoretically and experimentally, that the flow-shift paradigm does not apply at the submicrometer scale. Specifically, we show that the resist topography is accurately obtained from a convolution operation with a symmetric Gaussian kernel whose parameters solely depend on the resist characteristics. We exploit this finding for a 3 nm precise overlay fabrication of metal contacts to an InAs nanowire with a diameter of 27 nm using thermal scanning probe lithography.
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Affiliation(s)
| | - Heiko Wolf
- †IBM Research - Zurich, Rueschlikon 8803, Switzerland
| | - James L Hedrick
- ‡IBM Research - Almaden, San Jose, California 95120, United States
| | - Daniel J Coady
- ‡IBM Research - Almaden, San Jose, California 95120, United States
| | - Urs Duerig
- †IBM Research - Zurich, Rueschlikon 8803, Switzerland
| | - Armin W Knoll
- †IBM Research - Zurich, Rueschlikon 8803, Switzerland
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32
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DiLauro AM, Phillips ST. End-capped poly(4,5-dichlorophthalaldehyde): a stable self-immolative poly(aldehyde) for translating specific inputs into amplified outputs, both in solution and the solid state. Polym Chem 2015. [DOI: 10.1039/c5py00190k] [Citation(s) in RCA: 28] [Impact Index Per Article: 3.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
Poly(4,5-dichlorophthalaldehyde) is a new self-immolative CDr polymer that is substantially more stable than poly(phthalaldehyde), yet retains its favorable attributes.
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Affiliation(s)
| | - Scott T. Phillips
- Department of Chemistry
- Pennsylvania State University
- University Park
- USA
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33
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Garcia R, Knoll AW, Riedo E. Advanced scanning probe lithography. NATURE NANOTECHNOLOGY 2014; 9:577-87. [PMID: 25091447 DOI: 10.1038/nnano.2014.157] [Citation(s) in RCA: 252] [Impact Index Per Article: 25.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/03/2014] [Accepted: 07/04/2014] [Indexed: 05/24/2023]
Abstract
The nanoscale control afforded by scanning probe microscopes has prompted the development of a wide variety of scanning-probe-based patterning methods. Some of these methods have demonstrated a high degree of robustness and patterning capabilities that are unmatched by other lithographic techniques. However, the limited throughput of scanning probe lithography has prevented its exploitation in technological applications. Here, we review the fundamentals of scanning probe lithography and its use in materials science and nanotechnology. We focus on robust methods, such as those based on thermal effects, chemical reactions and voltage-induced processes, that demonstrate a potential for applications.
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Affiliation(s)
- Ricardo Garcia
- Instituto de Ciencia de Materiales de Madrid, CSIC, Sor Juana Inés de la Cruz 3. 28049 Madrid, Spain
| | - Armin W Knoll
- IBM Research - Zurich, Saeumerstr. 4, 8803 Rueschlikon, Switzerland
| | - Elisa Riedo
- School of Physics, Georgia Institute of Technology, Atlanta, Georgia 30332-0400, USA
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34
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Phillips ST, Robbins JS, DiLauro AM, Olah MG. Amplified responses in materials using linear polymers that depolymerize from end-to-end when exposed to specific stimuli. J Appl Polym Sci 2014. [DOI: 10.1002/app.40992] [Citation(s) in RCA: 40] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/17/2023]
Affiliation(s)
- Scott T. Phillips
- Department of Chemistry; The Pennsylvania State University, University Park; State College Pennsylvania 16802
| | - Jessica S. Robbins
- Department of Chemistry; The Pennsylvania State University, University Park; State College Pennsylvania 16802
| | - Anthony M. DiLauro
- Department of Chemistry; The Pennsylvania State University, University Park; State College Pennsylvania 16802
| | - Michael G. Olah
- Department of Chemistry; The Pennsylvania State University, University Park; State College Pennsylvania 16802
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35
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Stenbock-Fermor A, Knoll AW, Böker A, Tsarkova L. Enhancing Ordering Dynamics in Solvent-Annealed Block Copolymer Films by Lithographic Hard Mask Supports. Macromolecules 2014. [DOI: 10.1021/ma500561q] [Citation(s) in RCA: 20] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/28/2023]
Affiliation(s)
- Anja Stenbock-Fermor
- DWI—Leibniz-Institut
für Interaktive Materialien, Forckenbeckstraße 50, 52056, Aachen Germany
| | - Armin W. Knoll
- IBM Research—Zurich, Säumerstrasse 4, CH-8803 Rüschlikon, Switzerland
| | - Alexander Böker
- DWI—Leibniz-Institut
für Interaktive Materialien, Forckenbeckstraße 50, 52056, Aachen Germany
| | - Larisa Tsarkova
- DWI—Leibniz-Institut
für Interaktive Materialien, Forckenbeckstraße 50, 52056, Aachen Germany
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