Direct X-ray and electron-beam lithography of halogenated zeolitic imidazolate frameworks

Advanced lithography materials: From fundamentals to applications

The semiconductor industry has long been driven by advances in a nanofabrication technology known as lithography, and the fabrication of nanostructures on chips relies on an important coating, the photoresist layer. Photoresists are typically spin-coated to form a film and have a photolysis solubility transition and etch resistance that allow for rapid fabrication of nanostructures. As a result, photoresists have attracted great interest in both fundamental research and industrial applications. Currently, the semiconductor industry has entered the era of extreme ultraviolet lithography (EUVL) and expects photoresists to be able to fabricate sub-10 nm structures. In order to realize sub-10 nm nanofabrication, the development of photoresists faces several challenges in terms of sensitivity, etch resistance, and molecular size. In this paper, three types of lithographic mechanisms are reviewed to provide strategies for designing photoresists that can enable high-resolution nanofabrication. The discussion of the current state of the art in optical lithography is presented in depth. Practical applications of photoresists and related recent advances are summarized. Finally, the current achievements and remaining issues of photoresists are discussed and future research directions are envisioned.

Crosslinking-induced patterning of MOFs by direct photo- and electron-beam lithography

Metal-organic frameworks (MOFs) with diverse chemistry, structures, and properties have emerged as appealing materials for miniaturized solid-state devices. The incorporation of MOF films in these devices, such as the integrated microelectronics and nanophotonics, requires robust patterning methods. However, existing MOF patterning methods suffer from some combinations of limited material adaptability, compromised patterning resolution and scalability, and degraded properties. Here we report a universal, crosslinking-induced patterning approach for various MOFs, termed as CLIP-MOF. Via resist-free, direct photo- and electron-beam (e-beam) lithography, the ligand crosslinking chemistry leads to drastically reduced solubility of colloidal MOFs, permitting selective removal of unexposed MOF films with developer solvents. This enables scalable, micro-/nanoscale (≈70 nm resolution), and multimaterial patterning of MOFs on large-area, rigid or flexible substrates. Patterned MOF films preserve their crystallinity, porosity, and other properties tailored for targeted applications, such as diffractive gas sensors and electrochromic pixels. The combined features of CLIP-MOF create more possibilities in the system-level integration of MOFs in various electronic, photonic, and biomedical devices.

Beyond the Meso/Macroporous Boundary: Extending Capillary Condensation-Based Pore Size Characterization in Thin Films Through Tailored Adsorptives

The characterization of thin films containing nanopores with diameters exceeding 50 nm poses significant challenges, especially when deploying sorption-based techniques. Conventional volumetric physisorption or mercury intrusion methods have limited applicability in thin films due to constraints in sample preparation and nondestructive testing. In this context, ellipsometric porosimetry represents a viable alternative, leveraging its optical sensitivity to thin films. With existing setups relying on the capillary condensation of volatile compounds such as water, applicability is typically restricted to pore dimensions <50 nm. In this study, we introduce two high-molar-mass hydrocarbon adsorptives, namely ethylbenzene and n-nonane. These adsorptives exhibit substantial potential in improving the accuracy of physisorption measurements beyond mesoporosity (i.e., >50 nm). Specifically, with n-nonane, applicability is extended up to 80 nm pores. Our measurement guidelines propose a nondestructive, expeditious (<60 min), low-pressure (<0.03 bar) approach to investigate nanoporous thin films with potential adaptability to diverse structural architectures.

Tuning Coordination Structures of Zn Sites Through Symmetry-Breaking Accelerates Electrocatalysis

Manipulating the coordination environment of individual active sites in a precise manner remains an important challenge in electrocatalytic reactions. Herein, inspired by theoretical predictions, a facile procedure to synthesize a series of symmetry-breaking zinc metal-organic framework (Zn-MOF) catalysts with well-defined structures is presented. Benefiting from the optimized coordination microenvironment regulated by symmetry-breaking, Zn-N2 S2 -MOF exhibits the best performance of nitrogen (N2 ) reduction reaction (NRR) with NH3 yield rate of 25.07 ± 1.57 µg h-1  cm-2 and Faradaic efficiency of 44.57 ± 2.79% compared with reported Zn-based NRR catalysts. X-ray absorption near-edge structure shows that the symmetry-breaking distorts the coordination environment and modulates the delocalized electrons around the Zn sites, which favors the formation of unpaired low-valence Znδ+ , thereby facilitating the adsorption/activation of N2 . Theoretical calculations elucidate that low-valence Znδ+ in Zn-N2 S2 -MOF can effectively lower the energy barrier of potential determining step, promoting the kinetics and boosting the NRR activity. This work highlights the relationship between the precise coordination environment of metal sites and the catalytic activity, which offers insightful guidance for rationally designing high-efficiency electrocatalysts.

Fabrication of Oriented Polycrystalline MOF Superstructures

The field of metal-organic frameworks (MOFs) has progressed beyond the design and exploration of powdery and single-crystalline materials. A current challenge is the fabrication of organized superstructures that can harness the directional properties of the individual constituent MOF crystals. To date, the progress in the fabrication methods of polycrystalline MOF superstructures has led to close-packed structures with defined crystalline orientation. By controlling the crystalline orientation, the MOF pore channels of the constituent crystals can be aligned along specific directions: these systems possess anisotropic properties including enhanced diffusion along specific directions, preferential orientation of guest species, and protection of functional guests. In this perspective, we discuss the current status of MOF research in the fabrication of oriented polycrystalline superstructures focusing on the specific crystalline directions of orientation. Three methods are examined in detail: the assembly from colloidal MOF solutions, the use of external fields for the alignment of MOF particles, and the heteroepitaxial ceramic-to-MOF growth. This perspective aims at promoting the progress of this field of research and inspiring the development of new protocols for the preparation of MOF systems with oriented pore channels, to enable advanced MOF-based devices with anisotropic properties.

Recent Advances in Patterning Strategies for Full-Color Perovskite Light-Emitting Diodes

Metal halide perovskites have emerged as promising light-emitting materials for next-generation displays owing to their remarkable material characteristics including broad color tunability, pure color emission with remarkably narrow bandwidths, high quantum yield, and solution processability. Despite recent advances have pushed the luminance efficiency of monochromic perovskite light-emitting diodes (PeLEDs) to their theoretical limits, their current fabrication using the spin-coating process poses limitations for fabrication of full-color displays. To integrate PeLEDs into full-color display panels, it is crucial to pattern red-green-blue (RGB) perovskite pixels, while mitigating issues such as cross-contamination and reductions in luminous efficiency. Herein, we present state-of-the-art patterning technologies for the development of full-color PeLEDs. First, we highlight recent advances in the development of efficient PeLEDs. Second, we discuss various patterning techniques of MPHs (i.e., photolithography, inkjet printing, electron beam lithography and laser-assisted lithography, electrohydrodynamic jet printing, thermal evaporation, and transfer printing) for fabrication of RGB pixelated displays. These patterning techniques can be classified into two distinct approaches: in situ crystallization patterning using perovskite precursors and patterning of colloidal perovskite nanocrystals. This review highlights advancements and limitations in patterning techniques for PeLEDs, paving the way for integrating PeLEDs into full-color panels.

Nanoscale Vertical Resolution in Optical Printing of Inorganic Nanoparticles

Direct optical printing of functional inorganics shows tremendous potential as it enables the creation of intricate two-dimensional (2D) patterns and affordable design and production of various devices. Although there have been recent advancements in printing processes using short-wavelength light or pulsed lasers, the precise control of the vertical thickness in printed 3D structures has received little attention. This control is vital to the diverse functionalities of inorganic thin films and their devices, as they rely heavily on their thicknesses. This lack of research is attributed to the technical intricacy and complexity involved in the lithographic processes. Herein, we present a generalized optical 3D printing process for inorganic nanoparticles using maskless digital light processing. We develop a range of photocurable inorganic nanoparticle inks encompassing metals, semiconductors, and oxides, combined with photolinkable ligands and photoacid generators, enabling the direct solidification of nanoparticles in the ink medium. Our process creates complex and large-area patterns with a vertical resolution of ∼50 nm, producing 50-nm-thick 2D films and several micrometer-thick 3D architectures with no layer height difference via layer-by-layer deposition. Through fabrication and operation of multilayered switching devices with Au electrodes and Ag-organic resistive layers, the feasibility of our process for cost-effective manufacturing of multilayered devices is demonstrated.

Unit-cell-thick zeolitic imidazolate framework films for membrane application

Zeolitic imidazolate frameworks (ZIFs) are a subset of metal-organic frameworks with more than 200 characterized crystalline and amorphous networks made of divalent transition metal centres (for example, Zn2+ and Co2+) linked by imidazolate linkers. ZIF thin films have been intensively pursued, motivated by the desire to prepare membranes for selective gas and liquid separations. To achieve membranes with high throughput, as in ångström-scale biological channels with nanometre-scale path lengths, ZIF films with the minimum possible thickness-down to just one unit cell-are highly desired. However, the state-of-the-art methods yield membranes where ZIF films have thickness exceeding 50 nm. Here we report a crystallization method from ultradilute precursor mixtures, which exploits registry with the underlying crystalline substrate, yielding (within minutes) crystalline ZIF films with thickness down to that of a single structural building unit (2 nm). The film crystallized on graphene has a rigid aperture made of a six-membered zinc imidazolate coordination ring, enabling high-permselective H2 separation performance. The method reported here will probably accelerate the development of two-dimensional metal-organic framework films for efficient membrane separation.

Radiation-Induced De Novo Defects in Metal-Organic Frameworks Boost CO2 Sorption

Defects in metal-organic frameworks (MOFs) can significantly change their local microstructures, thus notably leading to an alteration-induced performance in sorption or catalysis. However, achieving de novo defect engineering in MOFs under ambient conditions without the scarification of their crystallinity remains a challenge. Herein, we successfully synthesize defective ZIF-7 through 60Co gamma ray radiation under ambient conditions. The obtained ZIF-7 is defect-rich but also has excellent crystallinity, enhanced BET surface area, and hierarchical pore structure. Moreover, the amount and structure of these defects within ZIF-7 were determined from the two-dimensional (2D) 13C-1H frequency-switched Lee-Goldburg heteronuclear correlation (FSLG-HETCOR) spectra, continuous rotation electron diffraction (cRED), and high-resolution transmission electron microscopy (HRTEM). Interestingly, the defects in ZIF-7 all strongly bind to CO2, leading to a remarkable enhancement of the CO2 sorption capability compared with that synthesized by the solvothermal method.

Charge Shielding-Oriented Design of Zinc-Based Nanoparticle Liquids for Controlled Nanofabrication

Metal-containing nanoparticles possess nanoscale sizes, but the exploitation of their nanofeatures in nanofabrication processes remains challenging. Herein, we report the realization of a class of zinc-based nanoparticle liquids and their potential for applications in controlled nanofabrication. Utilizing the metal-core charge shielding strategy, we prepared nanoparticles that display glass-to-liquid transition behavior with glass transition temperature far below room temperature (down to -50.9 °C). Theoretical calculations suggest the outer surface of these unusual nanoparticles is almost neutral, thus leading to interparticle interactions weak enough to give them liquefaction characteristics. Such features endow them with extraordinarily high dispersibility and excellent film-forming capabilities. Twenty-two types of nanoparticles synthesized by this strategy have all shown good lithographic properties in the mid-ultraviolet, electron beam, or extreme ultraviolet light, and these nanoparticle liquids have achieved controlled top-down nanofabrication with predesigned 18 or 16 nm patterns. This proposed strategy is synthetically scalable and structurally extensible and is expected to inspire the design of entirely new forms of nanomaterials.

Growth mechanisms and anisotropic softness-dependent conductivity of orientation-controllable metal-organic framework nanofilms

Conductive metal-organic frameworks (cMOFs) manifest great potential in modern electrical devices due to their porous nature and the ability to conduct charges in a regular network. cMOFs applied in electrical devices normally hybridize with other materials, especially a substrate. Therefore, the precise control of the interface between cMOF and a substrate is particularly crucial. However, the unexplored interface chemistry of cMOFs makes the controlled synthesis and advanced characterization of high-quality thin films, particularly challenging. Herein, we report the development of a simplified synthesis method to grow "face-on" and "edge-on" cMOF nanofilms on substrates, and the establishment of operando characterization methodology using atomic force microscopy and X-ray, thereby demonstrating the relationship between the soft structure of surface-mounted oriented networks and their characteristic conductive functions. As a result, crystallinity of cMOF nanofilms with a thickness down to a few nanometers is obtained, the possible growth mechanisms are proposed, and the interesting anisotropic softness-dependent conducting properties (over 2 orders of magnitude change) of the cMOF are also illustrated.

Experimental and fluid flow simulation studies of laser-electrochemical hybrid manufacturing of micro-nano symbiotic superamphiphobic surfaces

Micro-nano symbiotic superamphiphobic surfaces can prevent liquids from adhering to metal surfaces and, as a result, improve their corrosion resistance, self-cleaning performance, pollution resistance, and ice resistance. However, the fabrication of stable and controllable micro-nano symbiotic superamphiphobic structures on metal surfaces commonly used in industry remains a significant challenge. In this study, a laser-electrochemical hybrid subtractive-additive manufacturing method was proposed and developed for preparing copper superamphiphobic surfaces. Both experimental and fluid simulation studies were carried out. Utilizing this novel hybrid method, the controllable preparation of superamphiphobic micro-nano symbiotic structures was realized. The experimental results showed that the prepared surfaces had excellent superamphiphobic properties following subsequent modification with low surface energy substances. The contact angles of water droplets and oil droplets on the surface following electrodeposition treatment reached values of 161 ± 4° and 151 ± 4°, respectively, which showed that the prepared surface possessed perfect superamphiphobicity. Both the fabrication method and the test results provided useful insights for the preparation of stable and controllable superamphiphobic structures on metal surfaces in the future.

Metal-organic framework template-guided electrochemical lithography on substrates for SERS sensing applications

The templating method holds great promise for fabricating surface nanopatterns. To enhance the manufacturing capabilities of complex surface nanopatterns, it is important to explore new modes of the templates beyond their conventional masking and molding modes. Here, we employed the metal-organic framework (MOF) microparticles assembled monolayer films as templates for metal electrodeposition and revealed a previously unidentified guiding growth mode enabling the precise growth of metallic films exclusively underneath the MOF microparticles. The guiding growth mode was induced by the fast ion transportation within the nanochannels of the MOF templates. The MOF template could be repeatedly used, allowing for the creation of identical metallic surface nanopatterns for multiple times on different substrates. The MOF template-guided electrochemical growth mode provided a robust route towards cost-effective fabrication of complex metallic surface nanopatterns with promising applications in metamaterials, plasmonics, and surface-enhanced Raman spectroscopy (SERS) sensing fields.

Enhanced blue-green response of nanoarray AlGaAs photocathodes for underwater low-light detection

Underwater optical communication and low-light detection are usually realized via blue-green laser sources and blue-green light-sensitive detectors. Negative-electron-affinity AlGaAs photocathode is an ideal photosensitive material for ocean exploration due to its adjustable spectrum range, long working lifetime, and easy epitaxy of materials. However, compared with other photocathodes, the main problem of AlGaAs photocathode is its low quantum efficiency. Based on Spicer's three-step photoemission model, nanoarray structures are designed on the surface of AlGaAs photocathode to improve its quantum efficiency from two aspects of optical absorption and photoelectron transport. Through simulation, it is concluded that the cylinder with diameter of 120 nm and height of 600 nm is the best nanoarray structure, and its absorptance is always greater than 90% in the 445∼532 nm range. Moreover, the absorptance and quantum efficiency of the cylinder nanoarray AlGaAs photocathode are less affected by the incident angle. When the angle of incident light reaches 70°, the minimum absorptance and quantum efficiency are still 64.6% and 24.9%. In addition, the square or hexagonal arrangement pattern of the nanoarray has little effect on the absorptance, however, a reduction in the overall emission layer thickness will decrease the absorptance near 532 nm.

Advances of Electroactive Metal-Organic Frameworks

The preparation of electroactive metal-organic frameworks (MOFs) for applications of supercapacitors and batteries has received much attention and remarkable progress during the past few years. MOF-based materials including pristine MOFs, hybrid MOFs or MOF composites, and MOF derivatives are well designed by a combination of organic linkers (e.g., carboxylic acids, conjugated aromatic phenols/thiols, conjugated aromatic amines, and N-heterocyclic donors) and metal salts to construct predictable structures with appropriate properties. This review will focus on construction strategies of pristine MOFs and hybrid MOFs as anodes, cathodes, separators, and electrolytes in supercapacitors and batteries. Descriptions and discussions follow categories of electrochemical double-layer capacitors (EDLCs), pseudocapacitors (PSCs), and hybrid supercapacitors (HSCs) for supercapacitors. In contrast, Li-ion batteries (LIBs), Lithium-sulfur batteries (LSBs), Lithium-oxygen batteries (LOBs), Sodium-ion batteries (SIBs), Sodium-sulfur batteries (SSBs), Zinc-ion batteries (ZIBs), Zinc-air batteries (ZABs), Aluminum-sulfur batteries (ASBs), and others (e.g., LiSe, NiZn, H⁺ , alkaline, organic, and redox flow batteries) are categorized for batteries.

Polarization-dependent plasmonic heating in epitaxially grown multilayered metal-organic framework thin films embedded with Ag nanoparticles

The development of metal-organic framework (MOF) thin films with various functionalities has paved the way for research into a wide variety of applications. MOF-oriented thin films can exhibit anisotropic functionality in the not only out-of-plane but also in-plane directions, making it possible to utilize MOF thin films for more sophisticated applications. However, the functionality of oriented MOF thin films has not been fully exploited, and finding novel anisotropic functionality in oriented MOF thin films should be cultivated. In the present study, we report the first demonstration of polarization-dependent plasmonic heating in a MOF oriented film embedded with Ag nanoparticles (AgNPs), pioneering an anisotropic optical functionality in MOF thin films. Spherical AgNPs exhibit polarization-dependent plasmon-resonance absorption (anisotropic plasmon damping) when incorporated into an anisotropic lattice of MOFs. The anisotropic plasmon resonance results in a polarization-dependent plasmonic heating behavior; the highest elevated temperature was observed in case the polarization of incident light is parallel to the crystallographic axis of the host MOF lattice favorable for the larger plasmon resonance, resulting in polarization-controlled temperature regulation. Such spatially and polarization selective plasmonic heating offered by the use of oriented MOF thin films as a host can pave the way for applications such as efficient reactivation in MOF thin film sensors, partial catalytic reactions in MOF thin film devices, and soft microrobotics in composites with thermo-responsive materials.

Construction of Metal-Organic Framework Films via Crosslinking-Induced Assembly

The construction of metal-organic framework (MOF) films is a crucial step for integrating them into technical applications. However, due to the crystallization nature, it is difficult to grow most MOFs spontaneously or process them into films. Here, a convenient strategy is demonstrated for constructing MOF films by using modulators to achieve homogeneous assembly of MOF clusters. Small clusters in the early growth steps of MOFs can be stabilized by modulators to form fluidic precursors with good processibility. Then, simple removal of modulators will trigger the crosslinking of MOF clusters and lead to the formation of continuous films. This strategy is universal for the fabrication of several types of MOF films with large scale and controllable thickness, which can be deposited on a variety of substrates as well as can be patterned in micro/nano resolution. Additionally, versatile composite MOF films can be easily synthesized by introducing functional materials during the crosslinking process, which brings them broader application prospects.

Elettra-Sincrotrone Trieste: present and future

We present an overview of the Elettra-Sincrotrone Trieste research center, which hosts synchrotron and free-electron laser light sources. We review the current status, provide examples of recent achievements in basic and applied research and discuss the upgrade programs of the facility.

Molecule-Enhanced Electrocatalysis of Sustainable Oxygen Evolution Using Organoselenium Functionalized Metal-Organic Nanosheets

Remolding the reactivity of metal active sites is critical to facilitate renewable electricity-powered water electrolysis. Doping heteroatoms, such as Se, into a metal crystal lattice has been considered an effective approach, yet usually suffers from loss of functional heteroatoms during harsh electrocatalytic conditions, thus leading to the gradual inactivation of the catalysts. Here, we report a new heteroatom-containing molecule-enhanced strategy toward sustainable oxygen evolution improvement. An organoselenium ligand, bis(3,5-dimethyl-1H-pyrazol-4-yl)selenide containing robust C-Se-C covalent bonds equipped in the precatalyst of ultrathin metal-organic nanosheets Co-SeMON, is revealed to significantly enhance the catalytic mass activity of the cobalt site by 25 times, as well as extend the catalyst operation time in alkaline conditions by 1 or 2 orders of magnitude compared with these reported metal selenides. A combination of various in situ/ex situ spectroscopic techniques, ab initio molecular dynamics, and density functional theory calculations unveiled the organoselenium intensified mechanism, in which the nonclassical bonding of Se to O-containing intermediates endows adsorption-energy regulation beyond the conventional scaling relationship. Our results showcase the great potential of molecule-enhanced catalysts for highly efficient and economical water oxidation.

Chemical Vapor Deposition and High-Resolution Patterning of a Highly Conductive Two-Dimensional Coordination Polymer Film

Crystalline coordination polymers with high electrical conductivities and charge carrier mobilities might open new opportunities for electronic devices. However, current solvent-based synthesis methods hinder compatibility with microfabrication standards. Here, we describe a solvent-free chemical vapor deposition method to prepare high-quality films of the two-dimensional conjugated coordination polymer Cu-BHT (BHT = benzenehexanothiolate). This approach involves the conversion of a metal oxide precursor into Cu-BHT nanofilms with a controllable thickness (20-85 nm) and low roughness (<10 nm) through exposure to the vaporized organic linker. Moreover, the restricted metal ion mobility during the vapor-solid reaction enables high-resolution patterning via both bottom-up lithography, including the fabrication of micron-sized Hall bar and electrode patterns to accurately evaluate the conductivity and mobility values of the Cu-BHT films.

A Review on Low-Dimensional Nanomaterials: Nanofabrication, Characterization and Applications

The development of modern cutting-edge technology relies heavily on the huge success and advancement of nanotechnology, in which nanomaterials and nanostructures provide the indispensable material cornerstone. Owing to their nanoscale dimensions with possible quantum limit, nanomaterials and nanostructures possess a high surface-to-volume ratio, rich surface/interface effects, and distinct physical and chemical properties compared with their bulk counterparts, leading to the remarkably expanded horizons of their applications. Depending on their degree of spatial quantization, low-dimensional nanomaterials are generally categorized into nanoparticles (0D); nanorods, nanowires, and nanobelts (1D); and atomically thin layered materials (2D). This review article provides a comprehensive guide to low-dimensional nanomaterials and nanostructures. It begins with the classification of nanomaterials, followed by an inclusive account of nanofabrication and characterization. Both top-down and bottom-up fabrication approaches are discussed in detail. Next, various significant applications of low-dimensional nanomaterials are discussed, such as photonics, sensors, catalysis, energy storage, diverse coatings, and various bioapplications. This article would serve as a quick and facile guide for scientists and engineers working in the field of nanotechnology and nanomaterials.

Accelerated water activation and stabilized metal-organic framework via constructing triangular active-regions for ampere-level current density hydrogen production

Two-dimensional metal-organic frameworks (MOFs) have been explored as effective electrocatalysts for hydrogen evolution reaction (HER). However, the sluggish water activation kinetics and structural instability under ultrahigh-current density hinder their large-scale industrial applications. Herein, we develop a universal ligand regulation strategy to build well-aligned Ni-benzenedicarboxylic acid (BDC)-based MOF nanosheet arrays with S introducing (S-NiBDC). Benefiting from the closer p-band center to the Fermi level with strong electron transferability, S-NiBDC array exhibits a low overpotential of 310 mV to attain 1.0 A cm^-2 with high stability in alkaline electrolyte. We speculate the newly-constructed triangular "Ni₂-S₁" motif as the improved HER active region based on detailed mechanism analysis and structural characterization, and the enhanced covalency of Ni-O bonds by S introducing stabilizes S-NiBDC structure. Experimental observations and theoretical calculations elucidate that such Ni sites in "Ni₂-S₁" center distinctly accelerate the water activation kinetics, while the S site readily captures the H atom as the optimal HER active site, boosting the whole HER activity.

Generalised optical printing of photocurable metal chalcogenides

Optical three-dimensional (3D) printing techniques have attracted tremendous attention owing to their applicability to mask-less additive manufacturing, which enables the cost-effective and straightforward creation of patterned architectures. However, despite their potential use as alternatives to traditional lithography, the printable materials obtained from these methods are strictly limited to photocurable resins, thereby restricting the functionality of the printed objects and their application areas. Herein, we report a generalised direct optical printing technique to obtain functional metal chalcogenides via digital light processing. We developed universally applicable photocurable chalcogenidometallate inks that could be directly used to create 2D patterns or micrometre-thick 2.5D architectures of various sizes and shapes. Our process is applicable to a diverse range of functional metal chalcogenides for compound semiconductors and 2D transition-metal dichalcogenides. We then demonstrated the feasibility of our technique by fabricating and evaluating a micro-scale thermoelectric generator bearing tens of patterned semiconductors. Our approach shows potential for simple and cost-effective architecturing of functional inorganic materials.

Optical 3D printing techniques are low-cost mask-less patterning methods, but their application is limited by the number of printable materials. Here, the authors report a generalized optical method to print 2D or micrometre-thick 2.5D architectures based on metal chalcogenides inks, showing the realization of micro-scale thermoelectric generators.

Insights into Solid-To-Solid Transformation of MOF Amorphous Phases

Metal-organic frameworks (MOFs) have been recently explored as crystalline solids for conversion into amorphous phases demonstrating non-specific mechanical, catalytic, and optical properties. The real-time control of such structural transformations and their outcomes still remain a challenge. Here, we use in situ high-resolution transmission electron microscopy with 0.01 s time resolution to explore non-thermal (electron induced) amorphization of a MOF single crystal, followed by transformation into an amorphous nanomaterial. By comparing a series of M-BTC (M: Fe³⁺, Co³⁺, Co²⁺, Ni²⁺, and Cu²⁺; BTC: 1,3,5-benzentricarboxylic acid), we demonstrate that the topology of a metal cluster of the parent MOFs determines the rate of formation and the chemistry of the resulting phases containing an intact ligand and metal or metal oxide nanoparticles. Confocal Raman and photoluminescence spectroscopies further confirm the integrity of the BTC ligand and coordination bond breaking, while high-resolution imaging with chemical and structural analysis over time allows for tracking the dynamics of solid-to-solid transformations. The revealed relationship between the initial and resulting structures and the stability of the obtained phase and its photoluminescence over time contribute to the design of new amorphous MOF-based optical nanomaterials.

Achieving high aspect ratio in plasmonic lithography for practical applications with sub-20 nm half pitch

Plasmonic lithography, which exploits a bowtie nanoaperture (BNA) for the purpose of subwavelength near-field focusing, has the capability of high-resolution patterning. However, the ultra-small feature size is achieved at the price of sharply decay of the surface plasmon waves (SPWs) in the photoresist (PR) layer, which directly leads to some unfavorable patterning issues, such as non-uniformity and shallow pattern depth even over small exposure areas. In this work, a special hybrid plasmonic waveguide (HPW) patterning system, which is composed of the plasmonic BNA-PR layer-silver reflector, is designed to facilitate high spatial frequency selection and amplify the evanescent field in the PR layer. Theoretical calculations indicate that the antisymmetric coupled SPWs and plasmonic waveguide modes excited by the HPW structure can remove the exponential decay and ensure uniform exposure over the entire depth of the PR layer. Importantly, the hyperbolic decaying characteristic of the SPWs in the PR layer plays a noticeable role in the improvement of achievable resolution, depth-of-field, and line array pattern profile. It is worth to note that the uniform periodic patterns in sub-20 nm feature can be achieved with high aspect ratio. Additionally, further numerical simulation results are presented to demonstrate the achievement of spatial frequency selection of high-k mode in HPW structure by controlling the PR thickness and gap size. Our findings may provide a new perspective on the manufacture of surface nanostructures and broaden the potential promising applications of plasmonic lithography in nanoscale patterning.

Morphologically Controlled Metal-Organic Framework-Derived FeNi Oxides for Efficient Water Oxidation

The complex oxygen evolution reaction (OER) is recognized as the most studied and explored electrochemical conversion, which plays a crucial role in energy-related applications. In this work, a series of metal-organic framework (MOF)-derived FeNi oxides from a barrel-shaped Ni-based BMM-10 precursor are conveniently obtained to show an excellent OER performance. Under mild Fe(III) etching, a type of core-shell Fe_0.5-BMM-10 can be well preserved and the coordination bond of the middle frame structure is decomposed. Furthermore, the Fe_x-BMM-10-T series is successfully synthesized with a well-preserved morphology compared to precursors after direct oxidation. Finally, followed by initial electrochemical activation, the decomposition of FeNi oxides generates active Fe-doped nickel oxyhydroxides for efficient water oxidation. The improved OER performance stems from the high specific surface area and abundant exposed active centers, as well as the significant synergistic effect between iron and nickel, which is further verified by the theoretical calculation. This approach can be extended to precisely adjust the morphology of MOFs and their derivatives that can result in superior electrocatalytic properties in terms of energy conversion and storage applications.

In Situ Tracking of Nonthermal Plasma Etching of ZIF-8 Films

Surface characterization is critical for understanding the processes used for preparing catalysts, sorbents, and membranes. Nonthermal plasma (NTP) is a process that achieves high reactivity at low temperatures and is used to tailor the surface properties of materials. In this work, we combine the capabilities of infrared reflection absorption spectroscopy (IRRAS) with NTP for the in situ interrogation of zeolitic imidazolate framework-8 (ZIF-8) thin films to probe modifications in the material induced by oxygen and nitrogen plasmas. The IRRAS measurements in oxygen plasma reveal etching of organic ligands with sequential removal of the methyl group and imidazole ring and with the formation of carbonyl moieties (C═O). In contrast, nitrogen plasma induces mild etching and grafting of nitrile groups (-C≡N). Scanning electron microscopy imaging shows that oxygen plasma, at prolonged times, significantly degrades the ZIF-8 film at the grain boundaries. Treatment of ZIF-8 membranes using mild plasma conditions yields a fivefold enhancement for H₂/N₂ and CO₂/CH₄ ideal selectivities and an eightfold enhancement for CO₂/N₂ ideal selectivity. Additionally, the new tools described here can be used for spectroscopic in situ tracking of plasma-induced chemistry on thin films in general.

Vibrational Modes and Terahertz Phenomena of the Large-Cage Zeolitic Imidazolate Framework-71

The zeolitic imidazole framework ZIF-71 has the potential to outperform other well-studied metal-organic frameworks due to its intrinsic hydrophobicity and relatively large pore size. However, a detailed description of its complex physical phenomena and structural dynamics has been lacking thus far. Herein, we report the complete assignment of the vibrational modes of ZIF-71 using high-resolution inelastic neutron scattering measurements and synchrotron radiation infrared spectroscopy, corroborated by density functional theory (DFT) calculations. With its 816 atoms per unit cell, ZIF-71 is the largest system yet for which frequency calculations have been accomplished employing the CRYSTAL17 DFT code. We discover low-energy terahertz dynamics such as gate-opening and shearing modes that are central to the functions and stability of the ZIF-71 framework structure. Nanoscale analytical methods based on atomic force microscopy (near-field infrared spectroscopy and AFM nanoindentation) further unravel the local chemical and mechanical properties of ZIF-71 single crystals.

X-Ray Lithography for Nanofabrication: Is There a Future?

X-ray lithography has been first proposed almost 50 years ago, and the related LIGA process around 25 years ago. It is therefore a good time to make an analysis of the technique, with its pros and cons. In this perspective article, we describe X-ray lithography’s latest advancements. First, we report the improvement in the fabrication of the high aspect ratio and high-resolution micro/nanostructures. Then, we present the radiation-assisted synthesis and processing of novel materials for the next generation of functional devices. We finally draw our conclusion on the future prospects of the technique.

A Fullerene-Platinum Complex for Direct Functional Patterning of Single Metal Atom-Embedded Carbon Nanostructures

The development of patterning materials ("resists") at the nanoscale involves two distinct trends: one is toward high sensitivity and resolution for miniaturization, the other aims at functionalization of the resists to realize bottom-up construction of distinct nanoarchitectures. Patterning of carbon nanostructures, a seemingly ideal application for organic functional resists, has been highly reliant on complicated pattern transfer processes because of a lack of patternable precursors. Herein, we present a fullerene-metal coordination complex as a fabrication material for direct functional patterning of sub-10 nm metal-containing carbon structures. The attachment of one platinum atom per fullerene molecule not only leads to significant improvement of sensitivity and resolution but also enables stable atomic dispersion of the platinum ions within the carbon matrix, which may gain fundamentally new interest in functional patterning of hierarchical carbon nanostructures.

Deep X-ray lithography on "sol-gel" processed noble metal mesoarchitectured films

Noble metal coordination xerogel films (mesostructured with block-copolymers) exhibit solubility switching with increasing X-ray irradiation. Different from other sol-gel systems, these are attributed to film deconstruction under irradiation. These materials can be used as recyclable negative tone resists for deep X-ray lithography that can be further converted into metallic nanoarchitectured films.

Solvent-free bottom-up patterning of zeolitic imidazolate frameworks

Patterning metal-organic frameworks (MOFs) at submicrometer scale is a crucial yet challenging task for their integration in miniaturized devices. Here we report an electron beam (e-beam) assisted, bottom-up approach for patterning of two MOFs, zeolitic imidazolate frameworks (ZIF), ZIF-8 and ZIF-67. A mild pretreatment of metal oxide precursors with linker vapor leads to the sensitization of the oxide surface to e-beam irradiation, effectively inhibiting subsequent conversion of the oxide to ZIFs in irradiated areas, while ZIF growth in non-irradiated areas is not affected. Well-resolved patterns with features down to the scale of 100 nm can be achieved. This developer-free, all-vapor phase technique will facilitate the incorporation of MOFs in micro- and nanofabrication processes.

There is a long-standing interest in the development of patterning process for porous materials. Here, the authors report a solvent-free bottom-up approach for the patterning of zeolitic imidazolate frameworks; well-resolved patterns with features down to the scale of 100 nm can be achieved.

Vapor-Phase Processing of Metal-Organic Frameworks

ConspectusPorous metal-organic frameworks (MOFs), formed from organic linkers and metal nodes, have attracted intense research attention. Because of their high specific surface areas, uniform and adjustable pore sizes, and versatile physicochemical properties, MOFs have shown disruptive potential in adsorption, catalysis, separation, etc. For many of these applications, MOFs are synthesized solvothermally as bulk powders and subsequently shaped as pellets or extrudates. Other applications, such as membrane separations and (opto)electronics, require the implementation of MOFs as (patterned) thin films. Most thin-film formation methods are adapted from liquid-phase synthesis protocols. Precursor transport and nucleation are difficult to control in these cases, often leading to particle formation in solution. Moreover, the use of solvents gives rise to environmental and safety challenges, incompatibility issues with some substrates, and corrosion issues in the case of dissolved metal salts. In contrast, vapor-phase processing methods have the merits of environmental friendliness, control over thickness and conformality, scalability in production, and high compatibility with other workflows.In this Account, we outline some of our efforts and related studies in the development and application of vapor-phase processing of crystalline MOF materials (MOF-VPP). We first highlight the advances and mechanisms in the vapor-phase deposition of MOFs (MOF-VPD), mainly focusing on the reactions between a linker vapor and a metal-containing precursor layer. The characteristics of the obtained MOFs (thickness, porosity, crystallographic phase, orientation, etc.) and the correlation of these properties with the deposition parameters (precursors, temperatures, humidity, post-treatments, etc.) are discussed. Some in situ characterization methods that contributed to a fundamental understanding of the involved mechanisms are included in the discussion. Second, four vapor-phase postsynthetic functionalization (PSF) methods are summarized: linker exchange, guest loading, linker grafting, and metalation. These approaches eliminate potential solubility issues and enable fast diffusion of reactants and guests as well as a high loading or degree of exchange. Vapor-phase PSF provides a platform to modify the MOF porosity or even introduce new functionalities (e.g., luminescence photoswitching and catalytic activity). Third, since vapor-phase processing methods enable the integration of MOF film deposition into a (micro)fabrication workflow, they facilitate a range of applications with improved performance (low-k dielectrics, sensors, membrane separations, etc.). Finally, we provide a discussion on the limitations, challenges, and further opportunities for MOF-VPP. Through the discussion and analysis of the vapor-phase processing strategies as well as the underlying mechanisms in this Account, we hope to contribute to the development of the controllable synthesis, functionalization, and application of MOFs and related materials.

Zinc-coordinated polydopamine surface with a nanostructure and superhydrophilicity for antibiofouling and antibacterial applications

A superhydrophilic nanostructured surface of zinc-coordinated polydopamine is formed by the growth and intertwining of the PDA/Zn nanowires via Zn–N and Zn–O bonds, which has potential for preventing biomaterial-associated biofouling and infections.

Plasticity of Metal-Organic Framework Glasses

Metal-organic framework (MOF) glasses provide new perspectives on many material properties due to their unique chemical and structural nature. Their mechanical properties are of particular interest because glasses are inherently brittle, which limits their applications as structural materials. Here we perform strain-rate-dependent uniaxial micropillar compression experiments on a_gZIF-62, a_gZIF-UC-5, and a_gTIF-4, a series of MOF glasses with different substituting linker molecules, and find that these glasses show substantial plasticity, at least on the micrometer scale. At a quasi-static strain rate of 0.001 s^-1, the micropillars yielded at approximately 0.32 GPa and subsequently deformed plastically up to 35% strain, irrespective of the type of substituting linker. With increasing strain rate, the yield strength of a_gZIF-62 evolved with the strain-rate sensitivity m = 0.024 to reach a yield strength of 0.44 GPa at a strain rate of 510 s^-1. On the basis of this relatively low strain-rate sensitivity and the absence of serrated flow, we conclude that structural densification is the predominant mechanism that accommodates such extensive plasticity.

Cathodic Electrodeposition of MOF Films Using Hydrogen Peroxide

Metal-organic framework (MOF) films can be made by cathodic electrodeposition, where a Brønsted base is formed electrochemically which deprotonates the MOF linkers that are present in solution as undissociated/partially dissociated weak acids. However, the co-deposition of metal and the narrow range of possible metal nodes limit the scope of this method. In this work, we propose the use of hydrogen peroxide (hydrogen peroxide assisted cathodic deposition or HPACD), to overcome these limitations. Electrochemical measurements indicate that in DMF, hydrogen peroxide is reduced to superoxide anions that deprotonate the carboxylic ligands. This single-electron reduction happens at much higher potentials than all previous reported methods. This prevents the co-deposition of metal and extends the range of possible metal nodes. Various pure MOF films (HKUST-1, MIL-53(Fe) and MOF-5) were prepared via this approach. HPACD was also used for the preparation of patterned MOF films and of flexible Cu-BTC coated paper membranes which reject 99.1 % of Rose Bengal from water with a permeance of 8.4 L m^-2  h^-1  bar^-1 .

Molecular bixbyite-like In12-oxo clusters with tunable functionalization sites for lithography patterning applications

Indium oxides have been widely applied in many technological areas, but their utilization in lithography has not been developed. Herein, we illustrated a family of unprecedented In₁₂-oxo clusters with a general formula [In₁₂(μ₄-O)₄(μ₂-OH)₂(OCH₂CH₂NHCH₂CH₂O)₈(OR)₄X₄]X₂ (where X = Cl or Br; R = CH₃, C₆H₄NO₂ or C₆H₄F), which not only present the largest size record in the family of indium-oxo clusters (InOCs), but also feature the first molecular model of bixbyite-type In₂O₃. Moreover, through the labile coordination sites of the robust diethanolamine-stabilized In₁₂-oxo core, these InOCs can be accurately functionalized with different halides and alcohol or phenol derivatives, producing tunable solubility. Based on the high solution stability as confirmed by ESI-MS analysis, homogeneous films can be fabricated using these In₁₂-oxo clusters by the spin-coating method, which can be further used for electron beam lithography (EBL) patterning studies. Accordingly, the above structural regulations have significantly influenced their corresponding film quality and patterning performance, with bromide or p-nitrophenol functionalized In₁₂-oxo clusters displaying better performance of sub-50 nm lines. Thus, the here developed bixbyite-type In₁₂-oxo cluster starts the research on indium-based patterning materials and provides a new platform for future lithography radiation mechanism studies.

Bixbyite-like In₁₂-oxo clusters with labile coordination sites show tunable solubility, varying film quality and distinct lithography patterning performance.

ResponZIF Structures: Zeolitic Imidazolate Frameworks as Stimuli-Responsive Materials

Zeolitic imidazolate frameworks (ZIFs) have long been recognized as a prominent subset of the metal-organic framework (MOF) family, in part because of their ease of synthesis and good thermal and chemical stability, alongside attractive properties for diverse potential applications. Prototypical ZIFs like ZIF-8 have become embodiments of the significant promise held by porous coordination polymers as next-generation designer materials. At the same time, their intriguing property of experiencing significant structural changes upon the application of external stimuli such as temperature, mechanical pressure, guest adsorption, or electromagnetic fields, among others, has placed this family of MOFs squarely under the umbrella of stimuli-responsive materials. In this review, we provide an overview of the current understanding of the triggered structural and electronic responses observed in ZIFs (linker and bond dynamics, crystalline and amorphous phase changes, luminescence, etc.). We then describe the state-of-the-art experimental and computational methodology capable of shedding light on these complex phenomena, followed by a comprehensive summary of the stimuli-responsive nature of four prototypical ZIFs: ZIF-8, ZIF-7, ZIF-4, and ZIF-zni. We further expose the relevant challenges for the characterization and fundamental understanding of responsive ZIFs, including how to take advantage of their flexible properties for new application avenues.

3D MOF Nanoarchitecture Membrane via Ultrafast Laser Nanoforging

Metal-organic framework (MOF) crystals are useful in a vast area of applications because of their unique chemical and physical properties. Manufacturing of an integrated MOF membrane with 3D nanoarchitectures on the surface is especially important for their applications. However, as MOF crystals usually exist as powdery crystals, fabrication of their large area, monolithic, and high-resolution patterns is challenging. Here, it is found that isolated MOF nanocrystals could be directly converted to a monolithic MOF film with designed 3D nanoarchitectures/patterns via an ultrafast laser induced nanoforging without binders. During the nanosecond laser shock, the voids among MOF nanocrystals are eliminated due to the surface amorphization effect, which allows the fusing of the MOF nanocrystals on the grain boundaries, leading to the formation of a dense film while preserving the nature of the pristine MOF. The high strain rate by laser enhances formability of MOFs and overcomes their brittleness to generate arbitrary 3D nanoarchitectures with feature sizes down to 100 nm and high productivity up to 80 cm² min^-1 . These 3D MOF nanoarchitectures also exhibit boosted mechanical strength up to 100% compared with their powdery particles. This method is facile and low-cost and could potentially be used in various fields, such as devices, separation, and biochemical applications.

Metal-Organic Framework Photonic Balls: Single Object Analysis for Local Thermal Probing

Due to their high porosity and chemical versatility, metal-organic frameworks (MOFs) exhibit physical properties appealing for photonic-based applications. While several MOF photonic structures have been reported, examples of applications thereof are mainly limited to chemical sensing. Herein, the range of application of photonic MOFs is extended to local thermal and photothermal sensing by integrating them into a new architecture: MOF photonic balls. Micrometric-sized photonic balls are made of monodispersed MOFs colloids that are self-assembled via spray-drying, a low-cost, green, and high-throughput method. The versatility of the process allows tuning the morphology and the composition of photonic balls made of several MOFs and composites with tailored optical properties. X-ray nanotomography and environmental hyperspectral microscopy enable analysis of single objects and their evolution in controlled atmosphere and temperature. Notably, in presence of vapors, the MOF photonic balls act as local, label-free temperature probes. Importantly, compared to other thermal probes, the temperature detection range of these materials can be adjusted "on-demand." As proof of concept, the photonic balls are used to determine local temperature profiles around a concentrated laser beam. More broadly, this work is expected to stimulate new research on the physical properties of photonic MOFs providing new possibilities for device fabrication.

Avoiding the Center-Symmetry Trap: Programmed Assembly of Dipolar Precursors into Porous, Crystalline Molecular Thin Films

Liquid-phase, quasi-epitaxial growth is used to stack asymmetric, dipolar organic compounds on inorganic substrates, permitting porous, crystalline molecular materials that lack inversion symmetry. This allows material fabrication with built-in electric fields. A new programmed assembly strategy based on metal-organic frameworks (MOFs) is described that facilitates crystalline, noncentrosymmetric space groups for achiral compounds. Electric fields are integrated into crystalline, porous thin films with an orientation normal to the substrate. Changes in electrostatic potential are detected via core-level shifts of marker atoms on the MOF thin films and agree with theoretical results. The integration of built-in electric fields into organic, crystalline, and porous materials creates possibilities for band structure engineering to control the alignment of electronic levels in organic molecules. Built-in electric fields may also be used to tune the transfer of charges from donors loaded via programmed assembly into MOF pores. Applications include organic electronics, photonics, and nonlinear optics, since the absence of inversion symmetry results in a clear second-harmonic generation signal.