Surface micromachined capacitive ultrasonic transducers

Modeling a Fluid-Coupled Single Piezoelectric Micromachined Ultrasonic Transducer Using the Finite Difference Method

A complete model was developed to simulate the behavior of a circular clamped axisymmetric fluid-coupled Piezoelectric Micromachined Ultrasonic Transducer (PMUT). Combining Finite Difference and Boundary Element Matrix (FD-BEM), this model is based on the discretization of the partial differential equation used to translate the mechanical behavior of a PMUT. In the model, both the axial and the transverse displacements are preserved in the equation of motion and used to properly define the neutral line position. To introduce fluid coupling, a Green's function dedicated to axisymmetric circular radiating sources is employed. The resolution of the behavioral equations is used to establish the equivalent electroacoustic circuit of a PMUT that preserves the average particular velocity, the mechanical power, and the acoustic power. Particular consideration is given to verifying the validity of certain assumptions that are usually made across various steps of previously reported analytical models. In this framework, the advantages of the membrane discretization performed in the FD-BEM model are highlighted through accurate simulations of the first vibration mode and especially the cutoff frequency that many other models do not predict. This high cutoff frequency corresponds to cases where the spatial average velocity of the plate is null and is of great importance for PMUT design because it defines the upper limit above which the device is considered to be mechanically blocked. These modeling results are compared with electrical and dynamic membrane displacement measurements of AlN-based (500 nm thick) PMUTs in air and fluid. The first resonance frequency confrontation showed a maximum relative error of 1.13% between the FD model and Finite Element Method (FEM). Moreover, the model perfectly predicts displacement amplitudes when PMUT vibrates in a fluid, with less than 5% relative error. Displacement amplitudes of 16 nm and 20 nm were measured for PMUT with 340 µm and 275 µm diameters, respectively. This complete PMUT model using the FD-BEM approach is shown to be very efficient in terms of computation time and accuracy.

High-Performance Electrode-Post CMUTs: Fabrication Details and Best Practices

Capacitive micromachined ultrasound transducers (CMUTs) have been investigated for over 25 years due to their promise for mass manufacturing and electronic co-integration. Previously, CMUTs were fabricated with many small membranes comprising a single transducer element. This, however, resulted in suboptimal electromechanical efficiency and transmit performance, such that resulting devices were not necessarily competitive with piezoelectric transducers. Moreover, many previous CMUT devices were subject to dielectric charging and operational hysteresis that limited long-term reliability. Recently, we demonstrated a CMUT architecture using a single long rectangular membrane per transducer element and novel electrode-post (EP) structures. This architecture not only offers long-term reliability, but also provides performance advantages over previously published CMUT and piezoelectric arrays. The purpose of this article is to highlight these performance advantages and provide details of the fabrication process, including the best practices to avoid common pitfalls. The objective is to provide sufficient detail to inspire a new generation of microfabricated transducers, which could lead to performance gains of future ultrasound systems.

Squeeze Film Effect in Surface Micromachined Nano Ultrasonic Sensor for Different Diaphragm Displacement Profiles

In the present paper, we have analytically explored the small variations of the local pressure in the trapped air film of both sides of the clamped circular capacitive micromachined ultrasonic transducer (CMUT), which consists of a thin movable membrane of silicon nitride (Si₃N₄). This time-independent pressure profile has been investigated thoroughly by solving the associated linear Reynold's equation in the framework of three analytical models, viz. membrane model, plate model, and non-local plate model. The solution involves Bessel functions of the first kind. The Landau-Lifschitz fringing technique has been assimilated to engrave the edge effects in estimation of the capacitance of CMUT, which should be considered in the micrometer or lesser dimension. To divulge the dimension-based efficacy of the considered analytical models, various statistical methods have been employed. Our use of contour plots of absolute quadratic deviation revealed a very satisfactory solution in this direction. Though the analytical expression of the pressure profile is very cumbersome in various models, the analysis of these outputs exhibits that the pressure profile follows the displacement profile in all the cases indicating no viscous damping. A finite element model (FEM) has been used to validate the systematic analyses of displacement profiles for several radii and thicknesses of the CMUT's diaphragm. The FEM result is further corroborated by published experimental results bearing excellent outcome.

Attenuation Compensation and Estimation

Estimating the loss of ultrasound signal with propagation depth as a function of frequency is essential for quantifying tissue properties. Specifically, ultrasound attenuation is used to correct for spectral distortion prior to estimating quantitative ultrasound parameters to assess the tissue. Ultrasound attenuation can also be used independently to characterize the tissue. In this chapter, we review the primary algorithms for estimating both the local attenuation within a region of interest as well as the total attenuation between a region of interest and an ultrasound source. The strengths and weaknesses of each algorithm are also discussed.

Outperforming piezoelectric ultrasonics with high-reliability single-membrane CMUT array elements

It has long been hypothesized that capacitive micromachined ultrasound transducers (CMUTs) could potentially outperform piezoelectric technologies. However, challenges with dielectric charging, operational hysteresis, and transmit sensitivity have stood as obstacles to these performance outcomes. In this paper, we introduce key architectural features to enable high-reliability CMUTs with enhanced performance. Typically, a CMUT element in an array is designed with an ensemble of smaller membranes oscillating together to transmit or detect ultrasound waves. However, this approach can lead to unreliable behavior and suboptimal transmit performance if these smaller membranes oscillate out of phase or collapse at different voltages. In this work, we designed CMUT array elements composed of a single long rectangular membrane, with the aim of improving the output pressure and electromechanical efficiency. We compare the performance of three different modifications of this architecture: traditional contiguous dielectric, isolated isolation post (IIP), and insulated electrode-post (EP) CMUTs. EPs were designed to improve performance while also imparting robustness to charging and minimization of hysteresis. To fabricate these devices, a wafer-bonding process was developed with near-100% bonding yield. EP CMUT elements achieved electromechanical efficiency values as high as 0.95, higher than values reported with either piezoelectric transducers or previous CMUT architectures. Moreover, all investigated CMUT architectures exhibited transmit efficiency 2-3 times greater than published CMUT or piezoelectric transducer elements in the 1.5-2.0 MHz range. The EP and IIP CMUTs demonstrated considerable charging robustness, demonstrating minimal charging over 500,000 collapse-snap-back actuation cycles while also mitigating hysteresis. Our proposed approach offers significant promise for future ultrasonic applications.

Applications of Capacitive Micromachined Ultrasonic Transducers: A Comprehensive Review

Capacitive micromachined ultrasonic transducer (CMUT) was introduced as an alternative to the piezoelectric thick-film-based transducers in medical imaging applications. Gradually, CMUTs have been investigated in almost all the applications in acoustics due to their superior transduction properties. CMOS compatible process flow and limitless possibilities of miniaturization made CMUT a preferred choice for the ultrasound industry. This article comprehensively reviews all the applications in which CMUT was used until now. Such a complete review of the practical applications of CMUT has not been reported elsewhere. A topicwise presentation approach is adopted, and wherever possible, the necessary details of the device properties and experimental niceties were briefly covered.

Integrated Circuits for Medical Ultrasound Applications: Imaging and Beyond

Medical ultrasound has become a crucial part of modern society and continues to play a vital role in the diagnosis and treatment of illnesses. Over the past decades, the development of medical ultrasound has seen extraordinary progress as a result of the tremendous research advances in microelectronics, transducer technology and signal processing algorithms. However, medical ultrasound still faces many challenges including power-efficient driving of transducers, low-noise recording of ultrasound echoes, effective beamforming in a non-linear, high-attenuation medium (human tissues) and reduced overall form factor. This paper provides a comprehensive review of the design of integrated circuits for medical ultrasound applications. The most important and ubiquitous modules in a medical ultrasound system are addressed, i) transducer driving circuit, ii) low-noise amplifier, iii) beamforming circuit and iv) analog-digital converter. Within each ultrasound module, some representative research highlights are described followed by a comparison of the state-of-the-art. This paper concludes with a discussion and recommendations for future research directions.

Analysis of Negative Capacitance-Based Broadband Impedance Matching for CMUTs

Tight integration of capacitive micromachined ultrasonic transducer (CMUT) arrays with integrated circuits can make active impedance matching feasible for practical imaging devices. In this article, negative capacitance-based impedance matching for CMUTs is investigated. Simple equivalent circuit model-based calculations show the potential of negative capacitance matching for improving the bandwidth along with electrical power transfer and acoustic reflectivity, but the model has limitations especially for acoustic reflectivity evaluation. For more realistic results, an experimentally validated CMUT array model is applied to a small 1-D CMUT array operating in the 5-15 MHz range. The results highlight the difference between electrical power transfer and acoustic reflectivity as well as the tradeoffs in signal-to-noise ratio (SNR). According to the results, ideal negative capacitance termination matched to the CMUT capacitance provides the broadest bandwidth and highest SNR if acoustic or electrical reflections are of no concern. On the other hand, negative capacitance and resistance matching to minimize acoustic reflectivity provides both lower reflection and closer to ideal SNR as compared with electrical power matching. It is observed that acoustic matching also reduces acoustic crosstalk and improves array uniformity. While several challenges for integrated circuit implementation are present, negative capacitance-based impedance matching can be a viable broadband active impedance matching method for CMUTs operating in conventional and collapsed mode as well as other ultrasound transducers with mainly capacitive impedance.

A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections

Analytical modeling of capacitive micromachined ultrasonic transducer (CMUT) is one of the commonly used modeling methods and has the advantages of intuitive understanding of the physics of CMUTs and convergent when modeling of collapse mode CMUT. This review article summarizes analytical modeling of the collapse voltage and shows that the collapse voltage of a CMUT correlates with the effective gap height and the electrode area. There are analytical expressions for the collapse voltage. Modeling of the membrane deflections are characterized by governing equations from Timoshenko, von Kármán equations and the 2D plate equation, and solved by various methods such as Galerkin’s method and perturbation method. Analytical expressions from Timoshenko’s equation can be used for small deflections, while analytical expression from von Kármán equations can be used for both small and large deflections.

Capacitive Based Micromachined Resonators for Low Level Mass Detection

Advancements in microfabrication technologies and novel materials have led to new innovations in miniaturized gas sensors that can identify miniscule changes in a complex environment. Micromachined resonators with the capability to offer high sensitivity and selectivity in array integration make mass loading a potential mechanism for electronic nose applications. This paper investigates the mass sensing characteristics of progressive capacitive based micromachined resonators as potential candidates for volatile organic compound detection where also there is a need for miniaturized array configuration. In this paper, a detailed investigative review of the major three geometric designs of capacitive based micromachined resonators, namely, the microcantilever, the microbridge and the clamped membrane sensors is performed. Although many reviews are present in literature regarding mass sensors, however there is a gap in the literature regarding the common capacitive based micromachined mass sensors. This research gives a review on the foundation for capacitive based micromachined mass sensors while highlighting the potential capabilities of each geometric design to be developed further. Moreover, this paper also introduces the advancements based on the geometric designs of the capacitive based micromachined mass sensors. An in-depth analysis is done for each geometric design, to identify the critical design parameters, which affect the sensors' performances. Furthermore, the theoretically achievable mass sensitivity for each capacitive based micromachined mass sensor is modeled and analyzed using finite element analysis with mass variation in the picogram range. Finally, a critical analysis is done on the sensor sensitivities and further discussed in detail wherein each design is compared to each other and its current advances. Additionally, an insight to the advantages and disadvantages associated with each simulated geometry and its different advances are given. The results of the investigative review and analysis indicate that the sensitivities of the capacitive based micromachined sensors are dependent not only on the material composition of the devices but also on the varying degrees of clamping between the sensor geometries. In essence, the paper provides future research the groundwork to choose proper candidate geometry for a capacitive based micromachined mass sensor, with its several advantages over other mass sensors, based on the needed application.

Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure-A Review

This review paper discusses the advances of the gravimetric detection devices based on capacitive micromachined ultrasound transducers structure. Principles of gravimetric operation and device modeling are reviewed through the presentation of an analytical, one-dimensional model and finite element modeling. Additionally, the most common fabrication techniques, including sacrificial release and wafer bonding, are discussed for advantages for gravimetric sensing. As functional materials are the most important part of the selective gravimetric sensing, the review of different functional material properties and coating and application methods is necessary. Particularly, absorption and desorption mechanisms of functional materials, like methylated polyethyleneimine, with examples of applications for gas sensing and using immune complexes for specific biomolecules detection are reviewed.

A Boundary Element Model for CMUT-Arrays Loaded by a Viscoelastic Medium

This work is an extension of a model previously developed by our group to simulate the electroacoustic response of capacitive micromachined ultrasonic transducer (CMUT)-based linear arrays acoustically loaded by a fluid medium. The goal is to introduce the viscoelasticity effects of the propagation medium into the modeling. These effects are mainly due to the passivation layer used to protect the transducer, i.e., a silicon polymer, a few hundred micrometers thick. The passivation layer is also required to ensure good acoustic coupling between the transducer front face and human skin. The theoretical approach relies on the determination of a new boundary matrix to simulate the acoustic coupling between the CMUT array and the viscoelastic medium. The complete numerical implementation of a 3-D Green's function for a viscoelastic half-space is hence described. In order to reduce computing time, an optimization was carried out through vectorization and parallelization methods. A comparison is then performed with the analytical solutions, from the literature, obtained for elastic half-space. An experimental validation of shear viscosity effects is performed through electrical impedance measurements of the CMUT linear arrays loaded by oils of varying viscosity. A very good agreement is obtained, showing that the model correctly takes the shear viscosity effects on the mechanical response of the CMUT into account, i.e., a shift in the resonance frequency and a diminution in the mechanical quality factor are observed.

Wide Bandwidth and Low Driving Voltage Vented CMUTs for Airborne Applications

This paper presents a novel method to increase the bandwidth (BW) of airborne capacitive micromachined ultrasonic transducers (CMUTs). This method introduces a gaseous squeeze film as a damping mechanism, which induces a stiffening effect that lowers the pull-in voltage and improves the sensitivity. The optimal behavior of this stiffening effect versus the damping mechanism can be controlled by creating optimized fluidic trenches of various heights within the gap. The fractional BW can be controlled from 0.89% to 8.1% by adjusting the trench height while lowering the pull-in voltage to less than 54 V at the gap height of 1.0 [Formula: see text]. To achieve the largest sensitivity and lowest pull-in voltage at a given BW, we have developed a multi-parameter optimization method to adjust all combinations of design parameters. A novel multiple hard-mask process flow has been developed to enable fabrication of CMUTs with different cavity and trench heights on the same wafer. These devices provided an equivalent noise pressure level of 4.77 μ Pa/ √ Hz with 6.24-kHz BW for 7.6- [Formula: see text] deep fluidic trenches and 4.88 μ Pa/ √ Hz with 7.48-kHz BW for 14.3- [Formula: see text] deep fluidic trenches. This demonstration of the wide-BW CMUTs with high sensitivity and low pull-in voltage makes them applicable to medical and thermoacoustic imaging, nondestructive testing, and ultrasonic flow metering.

Methylated Poly(ethylene)imine Modified Capacitive Micromachined Ultrasonic Transducer for Measurements of CO2 and SO2 in Their Mixtures

A gravimetric gas detection device based on surface functionalized Capacitive Micromachined Ultrasound Transducers (CMUTs) was designed, fabricated and tested for detection of carbon dioxide (CO₂) and sulfur dioxide (SO₂) mixtures in nitrogen. The created measurement setup of continuous data collection, integrated with an in-situ Fourier Transform Infrared (FT-IR) spectroscopy, allows for better understanding of the mechanisms and molecular interactions with the sensing layer (methylated poly(ethylene)imine) and its need of surface functionalization for multiple gas detection. During experimentation with CO₂ gases, weak molecular interactions were observed in spectroscopy data. Linear sensor response to frequency shift was observed with CO₂ concentrations ranging from 0.16 vol % to 1 vol %. Moreover, the Raman and FT-IR spectroscopy data showed much stronger SO₂ and the polymer interactions, molecules were bound by stronger forces and irreversibly changed the polymer film properties. However, the sensor change in resonance frequency in the tested region of 1 vol % to 5 vol % SO₂ showed a linear response. This effect changed not only the device resonance frequency but also affected the magnitude of electroacoustic impedance which was used for differentiating the gas mixture of CO₂, SO₂, in dry N₂.

A Microscale Linear Phased-Array Ultrasonic Transducer Based on PZT Ceramics

In this paper, a microscale high-frequency ultrasonic transducer was prepared by combining traditional planar ultrasonic phased-array technology and micro processing technology. The piezoelectric ceramic material PZT was used as the functional material of the transducer. The number of the arrays was 72, the width of each array was 50 μm, the pitch of each array was 70 μm, and the length of each array was 3 mm. The PZT chip was finely ground to a thickness of 130 μm and could reach a frequency of 10 MHz. The experimental platform of micron-scale precision was set up for a beam-forming lateral sound field test and imaging experiment to validate the theoretical analysis. The echo imaging test showed that a mold with a feature size of about 400 μm could be imaged well.

Optical sensitivity enhancement in grating based micromechanical accelerometer by reducing non-parallelism error

We report on optical sensitivity enhancement in a grating-based micromechanical accelerometer, which was achieved by reducing the non-parallelism error between the grating and reflected mirror. Based on the multi-slit Fraunhofer diffraction theory, an equivalent optical model is proposed in order to discuss the non-parallelism induced error that is caused by the residual stress in material and fabrication. An integrated fabrication flow with optimized quartz based and silicon based procedure is then presented to improve the parallelism between the grating and mirror, and to realize a hermetic package using silicon islands for the electrical interconnection. We experimentally characterize accelerometers' behavior by an interferometric beam detecting setup, which reveals the acceleration measurement with a scale factor improvement, noise floor decrease, and thus a bias stability enhancement from 2 mg to 0.35 mg (20 seconds interval, 1 g = 9.8 m/s²).

Advances in Capacitive Micromachined Ultrasonic Transducers

Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial success. In this review paper, we touch upon recent advancements in CMUT technology at all levels of abstraction; modeling, fabrication, integration, and applications. Regarding applications, we discuss future trends for CMUTs and their impact within the broad field of biomedical imaging.

Analysis and Design of High-Frequency 1-D CMUT Imaging Arrays in Noncollapsed Mode

High-frequency ultrasound imaging arrays are important for a broad range of applications, from small animal imaging to photoacoustics. Capacitive micromachined ultrasonic transducer (CMUT) arrays are particularly attractive for these applications as low noise receiver electronics can be integrated for an overall improved performance. In this paper, we present a comprehensive analysis of high-frequency CMUT arrays based on an experimentally verified CMUT array simulation tool. The results obtained on an example, a 40-MHz 1-D CMUT array for intravascular imaging, are used to obtain key design insights and tradeoffs for receive only and pulse-echo imaging. For the receiver side, thermal mechanical current noise, plane wave pressure sensitivity, and pressure noise spectrum are extracted from simulations. Using these parameters, we find that the receiver performance of CMUT arrays can be close to an ideal piston, independent of gap thickness, and applied dc bias, when coupled to low noise electronics with arrays utilizing smaller membranes performing better. For pulse-echo imaging, thermal mechanical current noise limited signal-to-noise ratio is observed to be dependent on the maximum available voltage and gap thickness. In terms of bandwidth, we find that the Bragg resonance of the array, related to the fill factor, is a significant determinant of the high frequency limit and the fluid loaded single membrane resonance determines the lower limit. Based on these results, we present design guidelines requiring only fluid loaded single membrane simulations and membrane pitch to achieve a desired pulse-echo response. We also provide a design example and discuss limitations of the approach.

Recent Progress on Photoacoustic Imaging Enhanced with Microelectromechanical Systems (MEMS) Technologies

Photoacoustic imaging (PAI) is a new biomedical imaging technology currently in the spotlight providing a hybrid contrast mechanism and excellent spatial resolution in the biological tissues. It has been extensively studied for preclinical and clinical applications taking advantage of its ability to provide anatomical and functional information of live bodies noninvasively. Recently, microelectromechanical systems (MEMS) technologies, particularly actuators and sensors, have contributed to improving the PAI system performance, further expanding the research fields. This review introduces cutting-edge MEMS technologies for PAI and summarizes the recent advances of scanning mirrors and detectors in MEMS.

A low power, area efficient fpga based beamforming technique for 1-D CMUT arrays

A low power area efficient digital beamformer targeting low frequency (2MHz) 1-D linear Capacitive Micromachined Ultrasonic Transducer (CMUT) array is developed. While designing the beamforming logic, the symmetry of the CMUT array is well exploited to reduce the area and power consumption. The proposed method is verified in Matlab by clocking an Arbitrary Waveform Generator(AWG). The architecture is successfully implemented in Xilinx Spartan 3E FPGA kit to check its functionality. The beamforming logic is implemented for 8, 16, 32, and 64 element CMUTs targeting Application Specific Integrated Circuit (ASIC) platform at Vdd 1.62V for UMC 90nm technology. It is observed that the proposed architecture consumes significantly lesser power and area (1.2895 mW power and 47134.4 μm(2) area for a 64 element digital beamforming circuit) compared to the conventional square root based algorithm.

Monolithic Multiband CMUTs for Photoacoustic Computed Tomography With In Vivo Biological Tissue Imaging

Among the biomedical imaging modalities, photoacoustic computed tomography (PACT) was one of the emerging hybrid techniques in recent years. In designing the PACT imaging system, a finite-bandwidth transducer is one of the limited factors for the overall performance. As the target size is inversely proportional to the dominant frequency components of the generated photoacoustic (PA) signal, a broad bandwidth transducer is desired for different scales' imaging. In this paper, a monolithic multiband capacitive micromachined ultrasonic transducer (CMUT) array was designed and fabricated for the reception of the wideband PA signals so as to provide high-resolution images with high-frequency CMUT arrays and present the high signal-to-noise-ratio major structure with low-frequency CMUT arrays. To demonstrate its performance, a phantom experiment was conducted to show and evaluate the various qualities of multiresolution images. In addition, an in vivo mouse model experiment was also carried out for revealing the multiscale PA imaging capability with the multiband CMUTs on biological tissues. From the obtained results, the images from different CMUT arrays could show the structures of the mouse brain in different scales. In addition, the images from the high-frequency CMUT arrays were able to reveal the major blood vasculatures, whereas the images from low-frequency CMUT arrays showed the gross macroscopic anatomy of the brain with higher contrast.

Numerical Study and Optimisation of a Novel Single-Element Dual-Frequency Ultrasound Transducer

A dual-frequency ultrasound transducer (DFUT) is usually preferred for its numerous advantageous applications, especially in biomedical imaging and sensing. However, most of DFUTs are based on the combination of fundamental and harmonic operations, or integration of multiple different single-frequency ultrasound transducers, hindering perfect beam alignment and acoustic impedance matching. A novel single-element DFUT has been proposed in this paper. A small piezoelectric membrane is used as the high-frequency ultrasound transducer, which is stacked on a large non-piezoelectric elastic membrane with a groove used as the low-frequency capacitive ultrasound transducer. Such a capacitive-piezoelectric hybrid structure is theoretically analysed in details, based on the electrostatic attraction force and converse piezoelectric effect. Both the low and high resonance frequencies are independently derived, with a maximum deviation of less than 4% from the finite element simulations. Besides, a lumped-parameter equivalent circuit model of combining both the capacitive and piezoelectric ultrasound transducers was also described. Based on our dual-frequency structure design, a high-to-low frequency ratio of about 2 to more than 20 could be achieved, with easy and independent controllability of two frequencies, and the high-frequency operation shows at least an order-of-magnitude displacement sensitivity improvement compared with the conventional harmonic operations.

Phased Array Focusing for Acoustic Wireless Power Transfer

Wireless power transfer (WPT) through acoustic waves can achieve higher efficiencies than inductive coupling when the distance is above several times the transducer size. This paper demonstrates the use of ultrasonic phased arrays to focus power to receivers at arbitrary locations to increase the power transfer efficiency. Using a phased array consisting of 37 elements at a distance nearly 5 times the receiver transducer diameter, a factor of 2.6 increase in efficiency was achieved when compared to a case equivalent to a single large transducer with the same peak efficiency distance. The array has a total diameter of 7 cm, and transmits through air at 40 kHz to a 1.1-cm diameter receiver, achieving a peak overall efficiency of 4% at a distance of 5 cm. By adjusting the focal distance, the efficiency can also be maintained relatively constant at distances up to 9 cm. Numerical models were developed and shown to closely match the experimental energy transfer behavior; modeling results indicate that the efficiency can be further doubled by increasing the number of elements. For comparison, an inductive WPT system was also built with the diameters of the transmitting and receiving coils equivalent to the dimensions of the transmitting ultrasonic phased array and receiver transducer, and the acoustic WPT system achieved higher efficiencies than the inductive WPT system when the transmit-to-receive distance is above 5 cm. In addition, beam angle steering was demonstrated by using a simplified seven-element 1-D array, achieving power transfer less dependent on receiver placement.

Fabrication and testing of polymer-based capacitive micromachined ultrasound transducers for medical imaging

The ultrasonic transducer industry is dominated by piezoelectric materials. As an emerging alternative, capacitive micromachined ultrasound transducers (CMUTs) offer wider bandwidth, better integration with electronics, and ease of fabricating large arrays. CMUTs have a sealed cavity between a fixed electrode and a suspended metalized membrane. Manufacturing cost and sensitivity are limiting factors in current CMUTs that depend on the fabrication equipment and, especially, on the materials used. For widespread use of CMUTs, a much lower fabrication cost that uses inexpensive materials, which maintain or improve upon existing sensitivity, is needed. Herein, a new fabrication process is described for polymer-based CMUTs (polyCMUTs) using the photopolymer SU-8 and Omnicoat. The first ultrasound B-mode image of a wire phantom created with a 64-element linear array using synthetic aperture beamforming techniques is presented. A 12 V _AC signal superimposed on a 10 V_DC signal was used on the transmission side, and only a bias-tee, with no amplifiers, was used on the receiving side. The low operational voltage and high sensitivity of this device can be partially attributed to a pre-biasing condition on the membrane. By using a novel sacrificial layer combined with a top electrode embedded inside the membrane, we demonstrated that SU-8 can be used to manufacture CMUTs inexpensively. Moreover, the fabrication used relatively simple equipment, and the number of fabrication steps was reduced compared to traditional CMUT fabrication. This new fabrication process has the potential to increase the use of CMUTs in the ultrasound market, including the market for wearable transducers.

An Optimization and Comparative Study of Air-Coupled CMUT Cells With Circular and Annular Geometries

Air-coupled capacitive micromachined ultrasonic transducers (CMUTs) with annular cell geometry have recently been reported to have a promising transmit sensitivity. This paper reports three optimization schemes, which further improve the transmit sensitivity and also help achieve a reasonable comparison between the novel annular and conventional circular cells. Lumped element models of both cell types with laminate plate structures are presented. Based on these models, a design optimization flowchart was constructed to facilitate analytical optimization on the three schemes. Circular and annular CMUTs with a common 97-kHz natural resonance frequency were fabricated and characterized to verify the efficacy of the optimization principle. Using the optimization flowchart, annular and circular cells with frequencies ranging from 100 to 300 kHz were analytically optimized and then compared. The comparison results demonstrate that, given the same dc bias and ac excitation voltage, the output power density at the plate surface of the optimized annular cell is double that of the optimized circular cell. Additionally, when generating the same surface power density, an optimized annular cell requires either half the dc bias or half the ac excitation voltage of an optimized circular cell. This paper provides a practical optimization framework for CMUT cell design and demonstrates the superiority of annular cells for air-coupled applications.

Understanding the neurovascular unit at multiple scales: Advantages and limitations of multi-photon and functional ultrasound imaging

Developing efficient brain imaging technologies by combining a high spatiotemporal resolution and a large penetration depth is a key step for better understanding the neurovascular interface that emerges as a main pathway to neurodegeneration in many pathologies such as dementia. This review focuses on the advances in two complementary techniques: multi-photon laser scanning microscopy (MPLSM) and functional ultrasound imaging (fUSi). MPLSM has become the gold standard for in vivo imaging of cellular dynamics and morphology, together with cerebral blood flow. fUSi is an innovative imaging modality based on Doppler ultrasound, capable of recording vascular brain activity over large scales (i.e., tens of cubic millimeters) at unprecedented spatial and temporal resolution for such volumes (up to 10μm pixel size at 10kHz). By merging these two technologies, researchers may have access to a more detailed view of the various processes taking place at the neurovascular interface. MPLSM and fUSi are also good candidates for addressing the major challenge of real-time delivery, monitoring, and in vivo evaluation of drugs in neuronal tissue.

A Comparative Analysis of CMUT Receiving Architectures for the Design Optimization of Integrated Transceiver Front Ends

A formal comparison between fundamental RX amplifier configurations for capacitive micromachined ultrasonic transducers (CMUTs) is proposed in this paper. The impact on both RX and the pulse-echo frequency response and on the output SNR is thoroughly analyzed and discussed. It is shown that the resistive-feedback amplifier yields a bandpass RX frequency response, while both open-loop voltage and capacitive-feedback amplifiers exhibit a low-pass frequency response. For a given power dissipation, it is formally proved that a capacitive-feedback amplifier provides a remarkable SNR improvement against the commonly adopted resistive feedback stage, achieved at the expense of a reduced pulse-echo center frequency, making its use convenient in low-frequency and midfrequency ultrasound imaging applications. The advantage mostly comes from a much lower noise contributed by the active devices, especially with low- Q , broadband transducers. The results of the analysis are applied to the design of a CMUT front end in BIPOLAR-CMOS-DMOS Silicon-on-Insulator technology operating at 10-MHz center frequency. It comprises a low-power RX amplifier, a high-voltage Transmission/Reception switch, and a 100-V TX driver. Extensive electrical characterization, pulse-echo measurements, and imaging results are shown. Compared with previously reported CMUT front ends, this transceiver demonstrates the highest dynamic range and state-of-the-art noise performance with an RX amplifier power dissipation of 1 mW.

Electrifying catheters with light

Smart minimally invasive devices face a connectivity challenge. An example is found in intracardiac echocardiography where the signal transmission and supply of power at the distal end require many thin and fragile wires in order to keep the catheter slim and flexible. We have built a fully functional bench-top prototype to demonstrate that electrical wires may be replaced by optical fibers. The prototype is immediately scalable to catheter dimensions. The absence of conductors will provide intrinsic galvanic isolation as well as radio frequency (RF) and magnetic resonance imaging (MRI) compatibility. Using optical fibers, we show signal transfer of synthetic aperture ultrasound images as well as photo-voltaic conversion to supply all electronics. The simple design utilizes only off the shelf components and holds a promise of cost effectiveness which may be pivotal for translation of these advanced devices into the clinic.

Lumped element modeling of air-coupled capacitive micromachined ultrasonic transducers with annular cell geometry

Air-coupled capacitive micromachined ultrasonic transducers (CMUTs) based on annular cell geometry have recently been reported. Finite element analysis and experimental studies have demonstrated their significant improvement in transmit efficiency compared with the conventional circular-cell CMUTs. Extending the previous work, this paper proposed a lumped element model of annular-cell CMUTs. Explicit expressions of the resonance frequency, modal vector, and static displacement of a clamped annular plate under uniform pressure were first derived based on the plate theory and curve fitting method. The lumped model of an annular CMUT cell was then developed by adopting the average displacement as the spatial variable. Using the proposed model, the ratio of average-to-maximum displacement was derived to be 8/15. Experimental and simulation studies on a fabricated annular CMUT cell verified the effectiveness of the lumped model. The proposed model provides an effective and efficient way to analyze and design air-coupled annular-cell CMUTs.

Air-coupled ultrasound detection using capillary-based optical ring resonators

We experimentally demonstrate and theoretically analyze high Q-factor (~107) capillary-based optical ring resonators for non-contact detection of air-coupled ultrasound. Noise equivalent pressures in air as low as 215 mPa/√Hz and 41 mPa/√Hz at 50 kHz and 800 kHz in air, respectively, are achieved. Furthermore, non-contact detection of air-coupled photoacoustic pulses optically generated from a 200 nm thick Chromium film is demonstrated. The interaction of an acoustic pulse and the mechanical mode of the ring resonator is also studied. Significant improvement in detection bandwidth is demonstrated by encapsulating the ring resonator in a damping medium. Our work will enable compact and sensitive ultrasound detection in many applications, such as air-coupled non-destructive ultrasound testing, photoacoustic imaging, and remote sensing. It will also provide a model system for fundamental study of the mechanical modes in the ring resonator.

Frequency Tuning of Collapse-Mode Capacitive Micromachined Ultrasonic Transducer

The information in an ultrasound image depends on the frequency that is used. In a clinical examination it may therefore be beneficial to generate ultrasound images acquired at multiple frequencies, which is difficult to achieve with conventional transducers. Capacitive micromachined ultrasonic transducers (CMUTs) offer a frequency response that is tunable by the bias voltage. In this study we investigate this frequency tunability for ultrasonic imaging. We characterized a CMUT array operated at bias voltages up to three times higher than the collapse-voltage. All elements of the array were connected to a single transmit and receive channel through a bias circuit. We quantified the transmit-receive and transmit sensitivity as a function of frequency for a range of bias voltages. Impulse response measurements show that the center frequency is modifiable between 8.7MHz and 15.3MHz with an applied bias voltage of -50V to -170V. The maximum transmit sensitivity is 52kPa/V at a center frequency of 9.0MHz with an applied bias voltage of -105V. The -3dB transmit range in center frequency accessible with the variable bias voltage is 6.7-15.5MHz. This study shows that a collapse-mode CMUT can operate efficiently at multiple center frequencies when the driving pulse and the bias voltage are optimized. We demonstrate the usefulness of frequency tuning by comparing images at different optimal combinations of driving frequency and bias voltage, acquired by linearly moving the transducer across a tissue mimicking phantom.

Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducers with Low-Temperature Wafer Direct Bonding

This paper presents a fabrication method of capacitive micromachined ultrasonic transducers (CMUTs) by wafer direct bonding, which utilizes both the wet chemical and O₂plasma activation processes to decrease the bonding temperature to 400 °C. Two key surface properties, the contact angle and surface roughness, are studied in relation to the activation processes, respectively. By optimizing the surface activation parameters, a surface roughness of 0.274 nm and a contact angle of 0° are achieved. The infrared images and static deflection of devices are assessed to prove the good bonding effect. CMUTs having silicon membranes with a radius of 60 μm and a thickness of 2 μm are fabricated. Device properties have been characterized by electrical and acoustic measurements to verify their functionality and thus to validate this low-temperature process. A resonant frequency of 2.06 MHz is obtained by the frequency response measurements. The electrical insertion loss and acoustic signal have been evaluated. This study demonstrates that the CMUT devices can be fabricated by low-temperature wafer direct bonding, which makes it possible to integrate them directly on top of integrated circuit (IC) substrates.

Self and Mutual Radiation Impedances for Modeling of Multi-Frequency CMUT Arrays

Multi-frequency capacitive micromachined ultrasonic transducers (CMUTs) consist of interlaced large and small membranes for multiband operation. In modeling these devices, accurate and computationally efficient methods are required for computing self- and mutual-acoustic-radiation impedances. However, most previous works considered mutual-acoustic impedance between radiators of identical size. A need was thus found to revisit the fundamental framework for mutual-acoustic impedance for its applicability to radiators, especially flexural disks, of differing size. The Bouwkamp integral method is used to achieve infinite series expressions for self- and mutual-acoustic radiation impedances. Polynomial-fitting-based approximate relations of the mutual-acoustic impedance are developed for arbitrary array geometries and are in good agreement with exact expressions. The derived mutual-acoustic impedance is incorporated into equivalent circuit models of multi-frequency CMUTs showing excellent agreement with finite element modeling. The results demonstrate that mutual-acoustic interactions significantly impact device performance. The framework presented here may prove valuable for future design of multi-frequency arrays for novel multiscale imaging, superharmonic contrast imaging, and image therapy applications.

An Air-Coupled Multiple Moving Membrane Micromachined Ultrasonic Transducer With Inverse Biasing Functionality

A novel air-coupled multiple moving membrane-capacitive micromachined ultrasonic transducer ( [Formula: see text]-CMUT) with individually biased deflectable plates has been developed. Unlike the conventional capacitive micromachined ultrasonic transducer, this device cell structure includes an additional deflectable plate that is suspended underneath the transducer top plate. This added flexible plate contributes to the device signal transmission and reception. It is demonstrated that due to the presence of this added moving plate, the transducer is capable of operating under inverse bias condition, where the driving voltage is sandwiched between two grounded electrodes. COMSOL electromechanical simulations were conducted to investigate the influence of the transducer additional moving plate. A set of three individuals and an array of [Formula: see text]-CMUT transducers were fabricated using a sacrificial technique and with resonant frequencies ranging from 0.8 to 2.1 MHz. Electrical, optical, and pitch-catch acoustic measurements were performed to characterize the transducers properties under inverse bias condition. The experimental results are shown to be in good agreement with the simulation results for all of the fabricated transducers. It is shown that these transducers are fully functional under both normal and inverse bias conditions without any degradation in the transducer performance.

Phase and Amplitude Modulation Methods for Nonlinear Ultrasound Imaging With CMUTs

Conventional amplitude and phase modulated pulse sequences for selective imaging of nonlinear tissue and ultrasound contrast agents are designed for piezoelectric transducers that behave linearly. Inherent nonlinearity of capacitive micromachined ultrasonic transducers (CMUTs), especially during large-signal operation, renders these methods inapplicable. In this paper, we present different pulse sequences for nonlinear imaging that are valid for small- and large-signal CMUT operations. For small-signal operation, two-pulse amplitude and phase modulation methods for microbubble and tissue harmonic imaging are presented, where CMUT nonlinearity is compensated via subharmonic excitation. In the large-signal regime, using a nonlinear model, we first show that there is a simple linear relationship between the phases of each harmonic distortion component generated and the input drive signal. Based on this observation, we demonstrate a pulse sequence using N+1 consecutive phase modulated transmit events to extract N harmonics of the nonlinear contrast agent echo content uncorrupted by CMUT nonlinearity. The proposed methods assume no apriori information about the transducer and, therefore, are applicable to any CMUT. The phase modulation method is also valid for piezoelectric transducers and systems with nonlinearities described by Taylor series where the same phase relationship between the input signal and the harmonic content is valid. The proof of principle experiments using a commercial contrast agent validates the phase modulated pulse sequences for CMUTs, operating in a highly nonlinear collapse-snapback mode and for piezoelectric transducers.

Fabrication of Vacuum-Sealed Capacitive Micromachined Ultrasonic Transducer Arrays Using Glass Reflow Process

This paper presents a process for the fabrication of vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays using glass reflow and anodic bonding techniques. Silicon through-wafer interconnects have been investigated by the glass reflow process. Then, the patterned silicon-glass reflow wafer is anodically bonded to an SOI (silicon-on-insulator) wafer for the fabrication of CMUT devices. The CMUT 5 × 5 array has been successfully fabricated. The resonant frequency of the CMUT array with a one-cell radius of 100 µm and sensing gap of 3.2 µm (distance between top and bottom electrodes) is observed at 2.84 MHz. The Q factor is approximately 1300 at pressure of 0.01 Pa.

Underwater Imaging Using a 1 × 16 CMUT Linear Array

A 1 × 16 capacitive micro-machined ultrasonic transducer linear array was designed, fabricated, and tested for underwater imaging in the low frequency range. The linear array was fabricated using Si-SOI bonding techniques. Underwater transmission performance was tested in a water tank, and the array has a resonant frequency of 700 kHz, with pressure amplitude 182 dB (μPa·m/V) at 1 m. The -3 dB main beam width of the designed dense linear array is approximately 5 degrees. Synthetic aperture focusing technique was applied to improve the resolution of reconstructed images, with promising results. Thus, the proposed array was shown to be suitable for underwater imaging applications.

Experimental and simulation characterisation of flexural vibration modes in unimorph ultrasound transducers

A unimorph flexural transducer design is proposed and tested with regard to mode shapes and frequencies. The transducers consist of a passive metal cap structure, and a thin piezoelectric disc, rigidly bonded to the inside. Extensive finite element (FE) modelling, and experimental 2D, time-resolved displacement measurements were done to characterise the transducers flexural properties, and to compare them to the analytical solutions of thin vibrating plates. Emphasis was put on characterising the passive layer of the unimorph structure, before bonding the piezoelectric element, to understand how the active element affects the behaviour of the flexing plate. A high power Nd:YAG laser was used to actuate the metal plate (non-contact), and the frequency content of the resulting displacement signal was analysed to identify the flexural modes. The non-axisymmetric modes, which are conventionally disregarded because of their unfavourable acoustic properties, were also taken into account. There was excellent agreement between the experimental results and the FE simulation data. There was good agreement with the analytical edge clamped plate model, but with some notable deviations, which have not previously been identified or commented upon. Specifically, the second axisymmetric mode is split into three separate modes, which is not explained by the traditional theory of vibrating plates.

Fabrication of SU-8 based Capacitive Micromachined Ultrasonic Transducer for low frequency therapeutic applications

In this paper we present a simple post-CMOS compatible sacrificial release method of fabricating SU-8 based Capacitive Micromachined Ultrasonic Transducer (CMUT) for low frequency therapeutic applications. CMUTs fabricated with Silicon Nitride and Silicon Dioxide lay constraints in terms of area and power consumption especially in the low frequency range. Fabrication of these devices need complex high temperature processes that makes them incompatible for post-CMOS processing. Analytical modeling shows that SU-8 based CMUT consumes less area (below 25%) and power compared to Silicon Nitride and Silicon Dioxide based CMUTs. The proposed fabrication method overcomes inherent disadvantages of sacrificial release method by providing uniformity in air gap and reducing the possibility of stiction.

Miniaturizing Ultrasonic System for Portable Health Care and Fitness

We present a miniaturized portable ultrasonic imager that uses a custom ASIC and a piezoelectric transducer array to transmit and capture 2-D sonographs. The ASIC, fabricated in 0.18 μm 32 V CMOS process, contains 7 identical channels, each with high-voltage level-shifters, high-voltage DC-DC converters, digital TX beamformer, and RX front-end. The chip is powered by a single 1.8 V supply and generates 5 V and 32 V internally using on-chip charge pumps with an efficiency of 33% to provide 32 V pulses for driving a bulk piezoelectric transducer array. The assembled prototype can operate up to 40 MHz, with beamformer delay resolution of 5 ns, and has a measured sensitivity of 225 nV/Pa , minimum detectable signal of 622 Pa assuming 12 dB SNR ( 4σ larger than the noise level), and data acquisition time of 21.3 ms. The system can image human tissue as deep as 5 cm while consuming less than 16.5 μJ per pulse-echo measurement. The high energy efficiency of the imager can enable a number of consumer applications.

Microbubble-mediated intravascular ultrasound imaging and drug delivery

Intravascular ultrasound (IVUS) provides radiation-free, real-time imaging and assessment of atherosclerotic disease in terms of anatomical, functional, and molecular composition. The primary clinical applications of IVUS imaging include assessment of luminal plaque volume and real-time image guidance for stent placement. When paired with microbubble contrast agents, IVUS technology may be extended to provide nonlinear imaging, molecular imaging, and therapeutic delivery modes. In this review, we discuss the development of emerging imaging and therapeutic applications that are enabled by the combination of IVUS imaging technology and microbubble contrast agents.

Electrostatic and Small-Signal Analysis of CMUTs With Circular and Square Anisotropic Plates

Traditionally, capacitive micromachined ultrasonic transducers (CMUTs) are modeled using the isotropic plate equation, and this leads to deviations between analytical calculations and finite element modeling (FEM). In this paper, the deflection is calculated for both circular and square plates using the full anisotropic plate equation. It is shown that the anisotropic calculations match excellently with FEM, whereas an isotropic approach causes up to 10% deviations in deflection. For circular plates, an exact solution can be found. For square plates using the Galerkin method, and utilizing the symmetry of the silicon crystal, a compact and accurate expression for the deflection can be obtained. The deviation from FEM in center deflection is <0.1%. The theory of multilayer plates is also applied to the CMUT. The deflection of a square plate was measured on fabricated CMUTs using a white light interferometer. Fitting the plate parameter for the anisotropic calculated deflection to the measurement, a deviation of 0.07% is seen. Electrostatic and small-signal dynamic analysis are performed using energy considerations including anisotropy. The stable position, effective spring constant, pullin distance, and pull-in voltage are found for both circular and square anisotropic plates, and the pressure dependence is included by comparison with the corresponding analysis for a parallel plate. Measurements on fabricated devices with both circular and square plates subjected to increasing bias voltage are performed, and it is observed that the models including anisotropic effects are within the uncertainty interval of the measurements. Finally, a lumped element small-signal model for both circular and square anisotropic plates is derived to describe the dynamics of the CMUT.

Piezoelectric micromachined ultrasound transducer (PMUT) arrays for integrated sensing, actuation and imaging

Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on silicon substrates, are a potential solution for integrated transducer arrays. This paper presents an overview of the current development status of PMUTs and a discussion of their suitability for miniaturized and integrated devices. The thin film piezoelectric materials required to functionalize these devices are discussed, followed by the microfabrication techniques used to create PMUT elements and the constraints the fabrication imposes on device design. Approaches for electrical interconnection and integration with on-chip electronics are discussed. Electrical and acoustic measurements from fabricated PMUT arrays with up to 320 diaphragm elements are presented. The PMUTs are shown to be broadband devices with an operating frequency which is tunable by tailoring the lateral dimensions of the flexural membrane or the thicknesses of the constituent layers. Finally, the outlook for future development of PMUT technology and the potential applications made feasible by integrated PMUT devices are discussed.

CMUTs with high-K atomic layer deposition dielectric material insulation layer

Use of high-κ dielectric, atomic layer deposition (ALD) materials as an insulation layer material for capacitive micromachined ultrasonic transducers (CMUTs) is investigated. The effect of insulation layer material and thickness on CMUT performance is evaluated using a simple parallel plate model. The model shows that both high dielectric constant and the electrical breakdown strength are important for the dielectric material, and significant performance improvement can be achieved, especially as the vacuum gap thickness is reduced. In particular, ALD hafnium oxide (HfO2) is evaluated and used as an improvement over plasma-enhanced chemical vapor deposition (PECVD) silicon nitride (Six)Ny)) for CMUTs fabricated by a low-temperature, complementary metal oxide semiconductor transistor-compatible, sacrificial release method. Relevant properties of ALD HfO2) such as dielectric constant and breakdown strength are characterized to further guide CMUT design. Experiments are performed on parallel fabricated test CMUTs with 50-nm gap and 16.5-MHz center frequency to measure and compare pressure output and receive sensitivity for 200-nm PECVD Six)Ny) and 100-nm HfO2) insulation layers. Results for this particular design show a 6-dB improvement in receiver output with the collapse voltage reduced by one-half; while in transmit mode, half the input voltage is needed to achieve the same maximum output pressure.

Rayleigh-Bloch waves in CMUT arrays

Using the small-signal electrical equivalent circuit of a capacitive micromachined ultrasonic transducer (CMUT) cell, along with the self and mutual radiation impedances of such cells, we present a computationally efficient method to predict the frequency response of a large CMUT element or array. The simulations show spurious resonances, which may degrade the performance of the array. We show that these unwanted resonances are due to dispersive Rayleigh-Bloch waves excited on the CMUT surface-liquid interface. We derive the dispersion relation of these waves for the purpose of predicting the resonance frequencies. The waves form standing waves at frequencies where the reflections from the edges of the element or the array result in a Fabry-Pérot resonator. High-order resonances are eliminated by a small loss in the individual cells, but low-order resonances remain even in the presence of significant loss. These resonances are reduced to tolerable levels when CMUT cells are built from larger and thicker plates at the expense of reduced bandwidth.

Acoustic metasurface with hybrid resonances

An impedance-matched surface has the property that an incident wave generates no reflection. Here we demonstrate that by using a simple construction, an acoustically reflecting surface can acquire hybrid resonances and becomes impedance-matched to airborne sound at tunable frequencies, such that no reflection is generated. Each resonant cell of the metasurface is deep-subwavelength in all its spatial dimensions, with its thickness less than the peak absorption wavelength by two orders of magnitude. As there can be no transmission, the impedance-matched acoustic wave is hence either completely absorbed at one or multiple frequencies, or converted into other form(s) of energy, such as an electrical current. A high acoustic-electrical energy conversion efficiency of 23% is achieved.

Review of air-coupled ultrasonic materials characterization

This article presents a review of air-coupled ultrasonics employed in the characterization or nondestructive inspection of industrial materials. Developments in air-coupled transduction and electronics are briefly treated, although the emphasis here is on methods of characterization and inspection, and in overcoming limitations inherent in the use of such a tenuous sound coupling medium as air. The role of Lamb waves in plate characterization is covered, including the use of air-coupled acoustic beams to measure the elastic and/or viscoelastic properties of a material. Air-coupled acoustic detection, when other methods are employed to generate high-amplitude sound beams is also reviewed. Applications to civil engineering, acoustic tomography, and the characterization of both paper and wood are dealt with here. A brief summary of developments in air-coupled acoustic arrays and the application of air-coupled methods in nonlinear ultrasonics complete the review. In particular, the work of Professor Bernard Hosten and his collaborators at Bordeaux is carefully examined.