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Jannesari R, Pühringer G, Stocker G, Grille T, Jakoby B. Design of a High Q-Factor Label-Free Optical Biosensor Based on a Photonic Crystal Coupled Cavity Waveguide. Sensors (Basel) 2023; 24:193. [PMID: 38203055 PMCID: PMC10781198 DOI: 10.3390/s24010193] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/12/2023] [Revised: 12/17/2023] [Accepted: 12/22/2023] [Indexed: 01/12/2024]
Abstract
In recent years, there has been a significant increase in research into silicon-based on-chip sensing. In this paper, a coupled cavity waveguide (CCW) based on a slab photonic crystal structure was designed for use as a label-free biosensor. The photonic crystal consisted of holes arranged in a triangular lattice. The incorporation of defects can be used to design sensor devices, which are highly sensitive to even slight alterations in the refractive index with a small quantity of analyte. The plane wave expansion method (PWE) was used to study the dispersion and profile of the CCW modes, and the finite difference time domain (FDTD) technique was used to study the transmission spectrum, quality factor, and sensitivity. We present an analysis of adiabatically coupling light into a coupled cavity waveguide. The results of the simulation indicated that a sensitivity of 203 nm/RIU and a quality factor of 13,360 could be achieved when the refractive indices were in the range of 1.33 to 1.55.
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Affiliation(s)
- Reyhaneh Jannesari
- Institute for Microelectronics and Microsensors, Johannes Kepler University, 4040 Linz, Austria; (G.P.); (B.J.)
| | - Gerald Pühringer
- Institute for Microelectronics and Microsensors, Johannes Kepler University, 4040 Linz, Austria; (G.P.); (B.J.)
| | - Gerald Stocker
- Infineon Technologies Austria AG, 9520 Villach, Austria (T.G.)
| | - Thomas Grille
- Infineon Technologies Austria AG, 9520 Villach, Austria (T.G.)
| | - Bernhard Jakoby
- Institute for Microelectronics and Microsensors, Johannes Kepler University, 4040 Linz, Austria; (G.P.); (B.J.)
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2
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Doppelhammer N, Puttinger S, Pellens N, Voglhuber-Brunnmaier T, Asselman K, Jakoby B, Kirschhock CEA, Reichel EK. Generation and Observation of Long-Lasting and Self-Sustaining Marangoni Flow. Langmuir 2023. [PMID: 37227151 DOI: 10.1021/acs.langmuir.3c00634] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Subscribe] [Scholar Register] [Indexed: 05/26/2023]
Abstract
When solute molecules in a liquid evaporate at the surface, concentration gradients can lead to surface tension gradients and provoke fluid convection at the interface, a phenomenon commonly known as the Marangoni effect. Here, we demonstrate that minute quantities of ethanol in concentrated sodium hydroxide solution can induce pronounced and long-lasting Marangoni flow upon evaporation at room temperature. By employing particle image velocimetry and gravimetric analysis, we show that the mean interfacial speed of the evaporating solution sensitively increases with the evaporation rate for ethanol concentrations lower than 0.5 mol %. Placing impermeable objects near the liquid-gas interface enforces steady concentration gradients, thereby promoting the formation of stationary flows. This allows for contact-free control of the flow pattern as well as its modification by altering the objects shape. Analysis of bulk flows reveals that the energy of evaporation in the case of stationary flows is converted to kinetic fluid energy with high efficiency, but reducing the sodium hydroxide concentration drastically suppresses the observed effect to the point where flows become entirely absent. Investigating the properties of concentrated sodium hydroxide solution suggests that ethanol dissolution in the bulk is strongly limited. At the surface, however, the co-solvent is efficiently stored, enabling rapid adsorption or desorption of the alcohol depending on its concentration in the adjacent gas phase. This facilitates the generation of large surface tension gradients and, in combination with the perpetual replenishment of the surface ethanol concentration by bulk convection, to the generation of long-lasting, self-sustaining flows.
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Affiliation(s)
- Nikolaus Doppelhammer
- Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Altenbergerstraße 69, 4040 Linz, Austria
- Centre for Surface Chemistry and Catalysis: Characterization and Application Team, KU Leuven, 3001 Leuven, Belgium
| | - Stefan Puttinger
- Department of Particulate Flow Modelling, Johannes Kepler University Linz, Altenbergerstraße 69, 4040 Linz, Austria
| | - Nick Pellens
- Centre for Surface Chemistry and Catalysis: Characterization and Application Team, KU Leuven, 3001 Leuven, Belgium
| | - Thomas Voglhuber-Brunnmaier
- Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Altenbergerstraße 69, 4040 Linz, Austria
| | - Karel Asselman
- Centre for Surface Chemistry and Catalysis: Characterization and Application Team, KU Leuven, 3001 Leuven, Belgium
| | - Bernhard Jakoby
- Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Altenbergerstraße 69, 4040 Linz, Austria
| | - Christine E A Kirschhock
- Centre for Surface Chemistry and Catalysis: Characterization and Application Team, KU Leuven, 3001 Leuven, Belgium
| | - Erwin K Reichel
- Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Altenbergerstraße 69, 4040 Linz, Austria
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3
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Jannesari R, Grille T, Stocker G, Jakoby B. Design of a Narrow Band Filter Based on a Photonic Crystal Cavity for CO 2 Sensing Application. Sensors (Basel) 2023; 23:4958. [PMID: 37430872 DOI: 10.3390/s23104958] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/28/2023] [Revised: 05/13/2023] [Accepted: 05/17/2023] [Indexed: 07/12/2023]
Abstract
This paper investigates the use of a miniaturized filter based on a triangular lattice of holes in a photonic crystal (PhC) slab. The plane wave expansion method (PWE) and finite-difference time-domain (FDTD) techniques were utilized to analyze the dispersion and transmission spectrum, as well as the quality factor and free spectral range (FSR) of the filter. A 3D simulation has demonstrated that for the designed filter, an FSR of more than 550 nm and a quality factor of 873 can be attained by adiabatically coupling light from a slab waveguide into a PhC waveguide. This work designs a filter structure that is implemented into the waveguide and is suitable for a fully integrated sensor. The small size of the device provides a strong potential for the realization of large arrays of independent filters on a single chip. The fully integrated character of this filter has further advantages such as reducing power loss in coupling light from sources to filters and also from filters to waveguides. The ease of fabrication is another benefit of completely integrating the filter.
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Affiliation(s)
- Reyhaneh Jannesari
- Institute for Microelectronics and Microsensors, Johannes Kepler University, 4040 Linz, Austria
| | - Thomas Grille
- Infineon Technologies Austria AG, 9520 Villach, Austria
| | | | - Bernhard Jakoby
- Institute for Microelectronics and Microsensors, Johannes Kepler University, 4040 Linz, Austria
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4
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Pellens N, Doppelhammer N, Radhakrishnan S, Asselman K, Chandran CV, Vandenabeele D, Jakoby B, Martens JA, Taulelle F, Reichel EK, Breynaert E, Kirschhock CEA. Nucleation of Porous Crystals from Ion-Paired Prenucleation Clusters. Chem Mater 2022; 34:7139-7149. [PMID: 36032557 PMCID: PMC9404542 DOI: 10.1021/acs.chemmater.2c00418] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/22/2023]
Abstract
Current nucleation models propose manifold options for the formation of crystalline materials. Exploring and distinguishing between different crystallization pathways on the molecular level however remain a challenge, especially for complex porous materials. These usually consist of large unit cells with an ordered framework and pore components and often nucleate in complex, multiphasic synthesis media, restricting in-depth characterization. This work shows how aluminosilicate speciation during crystallization can be documented in detail in monophasic hydrated silicate ionic liquids (HSILs). The observations reveal that zeolites can form via supramolecular organization of ion-paired prenucleation clusters, consisting of aluminosilicate anions, ion-paired to alkali cations, and imply that zeolite crystallization from HSILs can be described within the spectrum of modern nucleation theory.
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Affiliation(s)
- Nick Pellens
- Center
for Surface Chemistry and Catalysis—Characterisation and Application
Team (COK-KAT), KU Leuven, Celestijnenlaan 200F, 3001 Leuven, Belgium
| | - Nikolaus Doppelhammer
- Center
for Surface Chemistry and Catalysis—Characterisation and Application
Team (COK-KAT), KU Leuven, Celestijnenlaan 200F, 3001 Leuven, Belgium
- Institute
for Microelectronics and Microsystems JKU Linz, 4040 Linz, Austria
| | - Sambhu Radhakrishnan
- Center
for Surface Chemistry and Catalysis—Characterisation and Application
Team (COK-KAT), KU Leuven, Celestijnenlaan 200F, 3001 Leuven, Belgium
- NMR-Xray
Platform for Convergence Research (NMRCoRe), KU Leuven, 3001 Leuven, Belgium
| | - Karel Asselman
- Center
for Surface Chemistry and Catalysis—Characterisation and Application
Team (COK-KAT), KU Leuven, Celestijnenlaan 200F, 3001 Leuven, Belgium
| | - C. Vinod Chandran
- Center
for Surface Chemistry and Catalysis—Characterisation and Application
Team (COK-KAT), KU Leuven, Celestijnenlaan 200F, 3001 Leuven, Belgium
- NMR-Xray
Platform for Convergence Research (NMRCoRe), KU Leuven, 3001 Leuven, Belgium
| | - Dries Vandenabeele
- Center
for Surface Chemistry and Catalysis—Characterisation and Application
Team (COK-KAT), KU Leuven, Celestijnenlaan 200F, 3001 Leuven, Belgium
| | - Bernhard Jakoby
- Institute
for Microelectronics and Microsystems JKU Linz, 4040 Linz, Austria
| | - Johan A. Martens
- Center
for Surface Chemistry and Catalysis—Characterisation and Application
Team (COK-KAT), KU Leuven, Celestijnenlaan 200F, 3001 Leuven, Belgium
- NMR-Xray
Platform for Convergence Research (NMRCoRe), KU Leuven, 3001 Leuven, Belgium
| | - Francis Taulelle
- Center
for Surface Chemistry and Catalysis—Characterisation and Application
Team (COK-KAT), KU Leuven, Celestijnenlaan 200F, 3001 Leuven, Belgium
- NMR-Xray
Platform for Convergence Research (NMRCoRe), KU Leuven, 3001 Leuven, Belgium
| | - Erwin K. Reichel
- Institute
for Microelectronics and Microsystems JKU Linz, 4040 Linz, Austria
| | - Eric Breynaert
- Center
for Surface Chemistry and Catalysis—Characterisation and Application
Team (COK-KAT), KU Leuven, Celestijnenlaan 200F, 3001 Leuven, Belgium
- NMR-Xray
Platform for Convergence Research (NMRCoRe), KU Leuven, 3001 Leuven, Belgium
| | - Christine E. A. Kirschhock
- Center
for Surface Chemistry and Catalysis—Characterisation and Application
Team (COK-KAT), KU Leuven, Celestijnenlaan 200F, 3001 Leuven, Belgium
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5
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Pellens N, Doppelhammer N, Asselman K, Thijs B, Jakoby B, Reichel EK, Taulelle F, Martens J, Breynaert E, Kirschhock CEA. A zeolite crystallisation model confirmed by in situ observation. Faraday Discuss 2022; 235:162-182. [PMID: 35660805 DOI: 10.1039/d1fd00093d] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
Probing nucleation and growth of porous crystals at a molecular level remains a cumbersome experimental endeavour due to the complexity of the synthesis media involved. In particular, the study of zeolite formation is hindered as these typically form in multiphasic synthesis media, which restricts experimental access to crystallisation processes. Zeolite formation from single phasic hydrated silicate ionic liquids (HSiL) opens new possibilities. In this work, HSiL zeolite crystallisation is investigated in situ using a specifically designed conductivity measurement set-up yielding access to crystallisation kinetics. Based on the conductivity data and final yields, a crystallisation model explaining the results based on a surface growth mechanism was derived. The excellent agreement between experiment and theory indicates zeolite crystallisation from highly ionic media proceeds via a multi-step mechanism, involving an initial reversible surface condensation of a growth unit, followed by incorporation of that unit into the growing crystal. The first step is governed by the liquid phase concentration and surface energy, while the final step shows a correlation to the mobility of the cation involved.
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Affiliation(s)
| | - Nikolaus Doppelhammer
- KU Leuven, COK-KAT, Leuven, Belgium. .,JKU Linz, Institut für Mikroelektronik und Mikrosensorik, Linz, Austria
| | | | | | - Bernhard Jakoby
- JKU Linz, Institut für Mikroelektronik und Mikrosensorik, Linz, Austria
| | - Erwin K Reichel
- JKU Linz, Institut für Mikroelektronik und Mikrosensorik, Linz, Austria
| | - Francis Taulelle
- KU Leuven, COK-KAT, Leuven, Belgium. .,KU Leuven, NMRCoRe, Leuven, Belgium
| | - Johan Martens
- KU Leuven, COK-KAT, Leuven, Belgium. .,KU Leuven, NMRCoRe, Leuven, Belgium
| | - Eric Breynaert
- KU Leuven, COK-KAT, Leuven, Belgium. .,KU Leuven, NMRCoRe, Leuven, Belgium
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6
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Pühringer G, Consani C, Jannesari R, Fleury C, Dubois F, Spettel J, Dao TD, Stocker G, Grille T, Jakoby B. Design of a Slab Tamm Plasmon Resonator Coupled to a Multistrip Array Waveguide for the Mid Infrared. Sensors (Basel) 2022; 22:2968. [PMID: 35458953 PMCID: PMC9029879 DOI: 10.3390/s22082968] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 02/24/2022] [Revised: 04/08/2022] [Accepted: 04/09/2022] [Indexed: 12/04/2022]
Abstract
In this work, we present and analyze a design of an absorber-waveguide system combining a highly sensitive waveguide array concept with a resonant selective absorber. The waveguide part is composed of an array of coupled strip waveguides and is therefore called a coupled strip array (CSA). The CSA is then coupled to the end of a slab Tamm plasmon (STP-) resonator, which is composed of a quasicrystal-like reflector formed by the patterning of a silicon slab and an interfacing tungsten slab. The concept describes an emitter-waveguide or waveguide-detector system featuring selective plasmon-enhanced resonant absorption or emission. These are crucial properties for corresponding optical on-chip integrated devices in context with evanescent field absorption sensing in fluids or gases, for example. Thus, the concept comprises a valuable and more cost-effective alternative to quantum cascade lasers. We designed the lateral dimensions of the STP resonator via a simple quasi-crystal approach and achieved strong narrowband resonances (emittance and Q-factors up to 85% and 88, respectively) for different silicon thicknesses and substrate materials (air and silicon oxide). Moreover, we analyze and discuss the sensitivity of the complete emitter-waveguide system in dependence on the slab thickness. This reveals the crucial correlation between the expected sensitivity assigned to the absorber-waveguide system and field confinement within the silicon.
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Affiliation(s)
- Gerald Pühringer
- Institute for Microelectronics and Microsensors, Johannes Kepler University, 4040 Linz, Austria; (R.J.); (B.J.)
| | - Cristina Consani
- Silicon Austria Labs GmbH, 9524 Villach, Austria; (C.C.); (C.F.); (F.D.); (J.S.); (T.D.D.)
| | - Reyhaneh Jannesari
- Institute for Microelectronics and Microsensors, Johannes Kepler University, 4040 Linz, Austria; (R.J.); (B.J.)
| | - Clement Fleury
- Silicon Austria Labs GmbH, 9524 Villach, Austria; (C.C.); (C.F.); (F.D.); (J.S.); (T.D.D.)
| | - Florian Dubois
- Silicon Austria Labs GmbH, 9524 Villach, Austria; (C.C.); (C.F.); (F.D.); (J.S.); (T.D.D.)
| | - Jasmin Spettel
- Silicon Austria Labs GmbH, 9524 Villach, Austria; (C.C.); (C.F.); (F.D.); (J.S.); (T.D.D.)
| | - Thang Duy Dao
- Silicon Austria Labs GmbH, 9524 Villach, Austria; (C.C.); (C.F.); (F.D.); (J.S.); (T.D.D.)
| | - Gerald Stocker
- Infineon Technologies Austria AG, 9500 Villach, Austria; (G.S.); (T.G.)
| | - Thomas Grille
- Infineon Technologies Austria AG, 9500 Villach, Austria; (G.S.); (T.G.)
| | - Bernhard Jakoby
- Institute for Microelectronics and Microsensors, Johannes Kepler University, 4040 Linz, Austria; (R.J.); (B.J.)
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7
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Stocker G, Spettel J, Dao TD, Tortschanoff A, Jannesari R, Pühringer G, Saeidi P, Dubois F, Fleury C, Consani C, Grille T, Aschauer E, Jakoby B. Ultra-Narrow SPP Generation from Ag Grating. Sensors (Basel) 2021; 21:s21216993. [PMID: 34770299 PMCID: PMC8587063 DOI: 10.3390/s21216993] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/11/2021] [Revised: 10/15/2021] [Accepted: 10/18/2021] [Indexed: 11/16/2022]
Abstract
In this study, we investigate the potential of one-dimensional plasmonic grating structures to serve as a platform for, e.g., sensitive refractive index sensing. This is achieved by comparing numerical simulations to experimental results with respect to the excitation of surface plasmon polaritons (SPPs) in the mid-infrared region. The samples, silver-coated poly-silicon gratings, cover different grating depths in the range of 50 nm-375 nm. This variation of the depth, at a fixed grating geometry, allows the active tuning of the bandwidth of the SPP resonance according to the requirements of particular applications. The experimental setup employs a tunable quantum cascade laser (QCL) and allows the retrieval of angle-resolved experimental wavelength spectra to characterize the wavelength and angle dependence of the SPP resonance of the specular reflectance. The experimental results are in good agreement with the simulations. As a tendency, shallower gratings reveal narrower SPP resonances in reflection. In particular, we report on 2.9 nm full width at half maximum (FWHM) at a wavelength of 4.12 µm and a signal attenuation of 21%. According to a numerical investigation with respect to a change of the refractive index of the dielectric above the grating structure, a spectral shift of 4122nmRIU can be expected, which translates to a figure of merit (FOM) of about 1421 RIU-1. The fabrication of the suggested structures is performed on eight-inch silicon substrates, entirely accomplished within an industrial fabrication environment using standard microfabrication processes. This in turn represents a decisive step towards plasmonic sensor technologies suitable for semiconductor mass-production.
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Affiliation(s)
- Gerald Stocker
- Infineon Technologies Austria AG, 9500 Villach, Austria; (J.S.); (T.G.); (E.A.)
- Correspondence:
| | - Jasmin Spettel
- Infineon Technologies Austria AG, 9500 Villach, Austria; (J.S.); (T.G.); (E.A.)
- Silicon Austria Labs GmbH, 9524 Villach, Austria; (T.D.D.); (A.T.); (F.D.); (C.F.); (C.C.)
| | - Thang Duy Dao
- Silicon Austria Labs GmbH, 9524 Villach, Austria; (T.D.D.); (A.T.); (F.D.); (C.F.); (C.C.)
| | - Andreas Tortschanoff
- Silicon Austria Labs GmbH, 9524 Villach, Austria; (T.D.D.); (A.T.); (F.D.); (C.F.); (C.C.)
| | - Reyhaneh Jannesari
- Institute of Microelectronics and Micro Sensoric, Johannes Kepler University Linz, 4040 Linz, Austria; (R.J.); (G.P.); (P.S.); (B.J.)
| | - Gerald Pühringer
- Institute of Microelectronics and Micro Sensoric, Johannes Kepler University Linz, 4040 Linz, Austria; (R.J.); (G.P.); (P.S.); (B.J.)
| | - Parviz Saeidi
- Institute of Microelectronics and Micro Sensoric, Johannes Kepler University Linz, 4040 Linz, Austria; (R.J.); (G.P.); (P.S.); (B.J.)
| | - Florian Dubois
- Silicon Austria Labs GmbH, 9524 Villach, Austria; (T.D.D.); (A.T.); (F.D.); (C.F.); (C.C.)
| | - Clement Fleury
- Silicon Austria Labs GmbH, 9524 Villach, Austria; (T.D.D.); (A.T.); (F.D.); (C.F.); (C.C.)
| | - Cristina Consani
- Silicon Austria Labs GmbH, 9524 Villach, Austria; (T.D.D.); (A.T.); (F.D.); (C.F.); (C.C.)
| | - Thomas Grille
- Infineon Technologies Austria AG, 9500 Villach, Austria; (J.S.); (T.G.); (E.A.)
| | - Elmar Aschauer
- Infineon Technologies Austria AG, 9500 Villach, Austria; (J.S.); (T.G.); (E.A.)
| | - Bernhard Jakoby
- Institute of Microelectronics and Micro Sensoric, Johannes Kepler University Linz, 4040 Linz, Austria; (R.J.); (G.P.); (P.S.); (B.J.)
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Jannesari R, Grille T, Consani C, Stocker G, Tortschanoff A, Jakoby B. Design of a Curved Shape Photonic Crystal Taper for Highly Efficient Mode Coupling. Sensors (Basel) 2021; 21:s21020585. [PMID: 33467496 PMCID: PMC7829998 DOI: 10.3390/s21020585] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/11/2020] [Revised: 01/06/2021] [Accepted: 01/11/2021] [Indexed: 11/22/2022]
Abstract
The design and modeling of a curved shape photonic crystal taper consisting of Si rods integrated with a photonic crystal waveguide are presented. The waveguide is composed of a hexagonal lattice of Si rods and optimized for CO2 sensing based on absorption spectroscopy. We investigated two different approaches to design a taper for a photonic crystal waveguide in a hexagonal lattice of silicon rods. For the first approach (type 1), the taper consists of a square lattice taper followed by a lattice composed of a smooth transition from a square to a hexagonal lattice. In the second approach (type 2), the taper consists of a distorted hexagonal lattice. Different shapes, such as convex, concave, and linear, for the curvature of the taper were considered and investigated. The structure of the taper was improved to enhance the coupling efficiency up to 96% at a short taper length of 25 lattice periods. The finite-difference time-domain (FDTD) technique was used to study the transmission spectrum and the group index. The study proves the improvement of coupling using a curved shape taper. Controlling the group index along the taper could be further improved to enhance the coupling efficiency in a wider spectral range.
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Affiliation(s)
- Reyhaneh Jannesari
- Institute for Microelectronics and Microsensors, Johannes Kepler University, 4040 Linz, Austria;
- Correspondence:
| | - Thomas Grille
- Infineon Technologies Austria AG, 9500 Villach, Austria; (T.G.); (G.S.)
| | - Cristina Consani
- Silicon Austria Labs GmbH, Europastraße 12, 9524 Villach, Austria; (C.C.); (A.T.)
| | - Gerald Stocker
- Infineon Technologies Austria AG, 9500 Villach, Austria; (T.G.); (G.S.)
| | - Andreas Tortschanoff
- Silicon Austria Labs GmbH, Europastraße 12, 9524 Villach, Austria; (C.C.); (A.T.)
| | - Bernhard Jakoby
- Institute for Microelectronics and Microsensors, Johannes Kepler University, 4040 Linz, Austria;
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9
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Pühringer G, Consani C, Jakoby B. Impact of Different Metals on the Performance of Slab Tamm Plasmon Resonators. Sensors (Basel) 2020; 20:s20236804. [PMID: 33260503 PMCID: PMC7730609 DOI: 10.3390/s20236804] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/30/2020] [Revised: 11/23/2020] [Accepted: 11/25/2020] [Indexed: 11/16/2022]
Abstract
We investigate the concept of slab Tamm plasmons (STP) in regard to their properties as resonant absorber or emitter structures in the mid-infrared spectral region. In particular, we compare the selective absorption characteristics resulting from different choices of absorbing material, namely Ag, W, Mo or highly doped Si. We devised a simplified optimization procedure using finite element simulations for the calculation of the absorption together with the application of micro-genetic algorithm (GA) optimization. As characteristic for plasmonic structures, the specific choice of the metallic absorber material strongly determines the achievable quality factor (Q). We show that STP absorbers are able to mitigate the degradation of Q for less reflective metals or even non-metals such as doped silicon as plasmonic absorber material. Moreover, our results strongly indicate that the maximum achievable plasmon-enhanced absorption does not depend on the choice of the plasmonic material presuming an optimized configuration is obtained via the GA process. As a result, absorptances in the order of 50-80% could be achieved for any absorber material depending on the slab thickness (up to 1.1 µm) and a target resonance wavelength of 4.26 µm (CO2 absorption line). The proposed structures are compatible with modern semiconductor mass fabrication processes. At the same time, the optimization procedure allows us to choose the best plasmonic material for the corresponding application of the STP structure. Therefore, we believe that our results represent crucial advances towards corresponding integrated resonant absorber and thermal emitter components.
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Affiliation(s)
- Gerald Pühringer
- Institute for Microelectronics and Microsensors, Johannes Kepler University, 4040 Linz, Austria;
- Correspondence: ; Tel.: +43-732-2468-6273
| | | | - Bernhard Jakoby
- Institute for Microelectronics and Microsensors, Johannes Kepler University, 4040 Linz, Austria;
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10
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Doppelhammer N, Pellens N, Martens J, Kirschhock CEA, Jakoby B, Reichel EK. Moving Electrode Impedance Spectroscopy for Accurate Conductivity Measurements of Corrosive Ionic Media. ACS Sens 2020; 5:3392-3397. [PMID: 33107724 PMCID: PMC7706010 DOI: 10.1021/acssensors.0c01465] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/16/2020] [Accepted: 10/19/2020] [Indexed: 11/30/2022]
Abstract
A measurement cell for the use of accurate conductivity measurements of corrosive ionic media is presented. Based on the concept of moving electrode electrochemical impedance spectroscopy, exceptional measurement accuracy is achieved in a large conductivity range. Extensive testing with corrosive ionic media demonstrated the robust operation of the cell under harsh chemical conditions, up to temperatures of 130 °C. The novel design allows monitoring small conductivity changes during chemical reactions in ionic media, for instance, zeolite formation from hydrated ionic liquids.
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Affiliation(s)
| | - Nick Pellens
- Centre
for Surface Chemistry and Catalysis: Characterization and Application
Team, KU Leuven, 3000 Leuven, Belgium
| | - Johan Martens
- Centre
for Surface Chemistry and Catalysis: Characterization and Application
Team, KU Leuven, 3000 Leuven, Belgium
| | - Christine E. A. Kirschhock
- Centre
for Surface Chemistry and Catalysis: Characterization and Application
Team, KU Leuven, 3000 Leuven, Belgium
| | - Bernhard Jakoby
- Institute
for Microelectronics and Microsystems, JKU
Linz, A-4040 Linz, Austria
| | - Erwin K. Reichel
- Institute
for Microelectronics and Microsystems, JKU
Linz, A-4040 Linz, Austria
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11
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Voglhuber-Brunnmaier T, Jakoby B. Higher-Order Models for Resonant Viscosity and Mass-Density Sensors. Sensors (Basel) 2020; 20:s20154279. [PMID: 32751881 PMCID: PMC7435703 DOI: 10.3390/s20154279] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/18/2020] [Revised: 07/20/2020] [Accepted: 07/29/2020] [Indexed: 01/16/2023]
Abstract
Advanced fluid models relating viscosity and density to resonance frequency and quality factor of vibrating structures immersed in fluids are presented. The numerous established models which are ultimately all based on the same approximation are refined, such that the measurement range for viscosity can be extended. Based on the simple case of a vibrating cylinder and dimensional analysis, general models for arbitrary order of approximation are derived. Furthermore, methods for model parameter calibration and the inversion of the models to determine viscosity and/or density from measured resonance parameters are shown. One of the two presented fluid models is a viscosity-only model, where the parameters of it can be calibrated without knowledge of the fluid density. The models are demonstrated for a tuning fork-based commercial instrument, where maximum deviations between measured and reference viscosities of approximately ±0.5% in the viscosity range from 1.3 to 243 mPas could be achieved. It is demonstrated that these results show a clear improvement over the existing models.
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12
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Hintermüller MA, Offenzeller C, Knoll M, Tröls A, Jakoby B. Parallel Droplet Deposition via a Superhydrophobic Plate with Integrated Heater and Temperature Sensors. Micromachines (Basel) 2020; 11:E354. [PMID: 32231168 PMCID: PMC7231214 DOI: 10.3390/mi11040354] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 03/03/2020] [Revised: 03/24/2020] [Accepted: 03/27/2020] [Indexed: 06/10/2023]
Abstract
A simple setup, which is suitable for parallel deposition of homogenous liquids with a precise volume (dosage), is presented. First, liquid is dispensed as an array of droplets onto a superhydrophobic dosage plate, featuring a 3 × 3 array of holes. The droplets rest on these holes and evaporate with time until they are small enough to pass through them to be used on the final target, where a precise amount of liquid is required. The system can be fabricated easily and operates in a highly parallel manner. The design of the superhydrophobic dosage plate can be adjusted, in terms of the hole positions and sizes, in order to meet different specifications. This makes the proposed system extremely flexible. The initial dispensed droplet mass is not significant, as the dosing takes place during the evaporation process, where the dosage is determined by the hole diameter. In order to speed up the evaporation process, microheaters are screen printed on the back side of the dosage plate. To characterize the temperature distribution caused by the microheaters, temperature sensors are screen printed on the top side of the dosage plate as well. Experimental data regarding the temperature sensors, the microheaters, and the performance of the setup are presented, and the improvement due to the heating of the dosage plate is assessed. A significant reduction of the total evaporation time due to the microheaters was observed. The improvement caused by the temperature increase was found to follow a power law. At a substrate temperature of 80 °C, the total evaporation time was reduced by about 79%.
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Affiliation(s)
- Marcus A. Hintermüller
- Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, 4040 Linz, Austria; (C.O.); (M.K.); (A.T.); (B.J.)
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13
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Brabants G, Hubin M, Reichel EK, Jakoby B, Breynaert E, Taulelle F, Martens JA, Kirschhock CEA. Revisiting Silicalite-1 Nucleation in Clear Solution by Electrochemical Impedance Spectroscopy. Langmuir 2017; 33:2581-2589. [PMID: 28212030 DOI: 10.1021/acs.langmuir.6b04135] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
Electrochemical impedance spectroscopy (EIS) was used to detect and investigate nucleation in silicalite-1 clear solutions. Although zeolite nucleation was previously assumed to be a step event, inducing a sharp discontinuity around a Si/OH- ratio of 1, complex bulk conductivity measurements at elevated temperatures reveal a gradual decay of conductivity with increased silicon concentrations. Inverse Laplace transformation of the complex conductivity allows the observation of the chemical exchange phenomena governing nanoaggregate formation. At low temperatures, the fast exchange between dissociated ions and ion pairs leads to a gradual decay of conductivity with an increasing silicon content. Upon heating, the exchange rate is slower and the residence time of ion pairs inside of the nanoaggregates is increasing, facilitating the crystallization process. This results in a bilinear chemical exchange and gives rise to the discontinuity at the Si/OH- ratio of 1, as observed by Fedeyko et al. EIS allows the observation of slow chemical exchange processes occurring in zeolite precursors. Until now, such processes could be observed only using techniques such as nuclear magnetic or electron paramagnetic resonance spectroscopy. In addition, EIS enables the quantification of interfacial processes via the double layer (DL) capacitance. The electrical DL thickness, derived from the DL capacitance, shows a similar gradual decay and confirms that the onset of nanoaggregate formation is indeed not narrowly defined.
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Affiliation(s)
- G Brabants
- Centre for Surface Chemistry and Catalysis, KU Leuven , Leuven 3000, Belgium
- Institute for Microelectronics and Microsensors, Johannes Kepler University , Linz 4040, Austria
| | - M Hubin
- Centre for Surface Chemistry and Catalysis, KU Leuven , Leuven 3000, Belgium
| | - E K Reichel
- Institute for Microelectronics and Microsensors, Johannes Kepler University , Linz 4040, Austria
| | - B Jakoby
- Institute for Microelectronics and Microsensors, Johannes Kepler University , Linz 4040, Austria
| | - E Breynaert
- Centre for Surface Chemistry and Catalysis, KU Leuven , Leuven 3000, Belgium
| | - F Taulelle
- Centre for Surface Chemistry and Catalysis, KU Leuven , Leuven 3000, Belgium
| | - J A Martens
- Centre for Surface Chemistry and Catalysis, KU Leuven , Leuven 3000, Belgium
| | - C E A Kirschhock
- Centre for Surface Chemistry and Catalysis, KU Leuven , Leuven 3000, Belgium
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14
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Bauer-Marschallinger J, Höllinger A, Jakoby B, Burgholzer P, Berer T. Fiber-optic annular detector array for large depth of field photoacoustic macroscopy. Photoacoustics 2017; 5:1-9. [PMID: 28239552 PMCID: PMC5314819 DOI: 10.1016/j.pacs.2017.01.001] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/05/2016] [Revised: 12/16/2016] [Accepted: 01/20/2017] [Indexed: 05/16/2023]
Abstract
We report on a novel imaging system for large depth of field photoacoustic scanning macroscopy. Instead of commonly used piezoelectric transducers, fiber-optic based ultrasound detection is applied. The optical fibers are shaped into rings and mainly receive ultrasonic signals stemming from the ring symmetry axes. Four concentric fiber-optic rings with varying diameters are used in order to increase the image quality. Imaging artifacts, originating from the off-axis sensitivity of the rings, are reduced by coherence weighting. We discuss the working principle of the system and present experimental results on tissue mimicking phantoms. The lateral resolution is estimated to be below 200 μm at a depth of 1.5 cm and below 230 μm at a depth of 4.5 cm. The minimum detectable pressure is in the order of 3 Pa. The introduced method has the potential to provide larger imaging depths than acoustic resolution photoacoustic microscopy and an imaging resolution similar to that of photoacoustic computed tomography.
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Affiliation(s)
- Johannes Bauer-Marschallinger
- Research Center for Non-Destructive Testing GmbH (RECENDT), Altenberger Straße 69, 4040 Linz, Austria
- Corresponding author.
| | - Astrid Höllinger
- Research Center for Non-Destructive Testing GmbH (RECENDT), Altenberger Straße 69, 4040 Linz, Austria
| | - Bernhard Jakoby
- Institute for Microelectronics and Microsensors, Johannes Kepler University, Altenberger Straße 69, 4040 Linz, Austria
| | - Peter Burgholzer
- Research Center for Non-Destructive Testing GmbH (RECENDT), Altenberger Straße 69, 4040 Linz, Austria
| | - Thomas Berer
- Research Center for Non-Destructive Testing GmbH (RECENDT), Altenberger Straße 69, 4040 Linz, Austria
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15
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Antlinger H, Beigelbeck R, Clara S, Cerimovic S, Keplinger F, Jakoby B. Investigation and Modeling of an Acoustoelectric Sensor Setup for the Determination of the Longitudinal Viscosity. IEEE Trans Ultrason Ferroelectr Freq Control 2016; 63:2187-2197. [PMID: 27662676 DOI: 10.1109/tuffc.2016.2611563] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
We present a two transducer setup suited for the determination of the second coefficient of viscosity, sometimes also termed acoustic viscosity. We present the basic sensor setup and according models in frequency and time domain allowing to extract the acoustic viscosity from the measurement data. We illustrate the approach using experimental data obtained with a demonstrator device. The setup, which has potential for further miniaturization, is operated in the time domain. Unwanted spurious effects and imperfections, such as diffraction, acoustic matching losses, and transducer losses, are discussed and according calibration and correction strategies are presented.
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16
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Brabants G, Lieben S, Breynaert E, Reichel EK, Taulelle F, Martens JA, Jakoby B, Kirschhock CEA. Monitoring early zeolite formation via in situ electrochemical impedance spectroscopy. Chem Commun (Camb) 2016; 52:5478-81. [PMID: 27020096 DOI: 10.1039/c6cc01106c] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/17/2022]
Abstract
Hitherto zeolite formation has not been fully understood. Although electrochemical impedance spectroscopy has proven to be a versatile tool for characterizing ionic solutions, it was never used for monitoring zeolite growth. We show here that EIS can quantitatively monitor zeolite formation, especially during crucial early steps where other methods fall short.
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Affiliation(s)
- G Brabants
- Center for Surface Chemistry and Catalysis, KU Leuven, Leuven, Belgium. and Institute for Microelectronics and Microsensors, Johannes Kepler University, Linz, Austria
| | - S Lieben
- Center for Surface Chemistry and Catalysis, KU Leuven, Leuven, Belgium.
| | - E Breynaert
- Center for Surface Chemistry and Catalysis, KU Leuven, Leuven, Belgium.
| | - E K Reichel
- Institute for Microelectronics and Microsensors, Johannes Kepler University, Linz, Austria
| | - F Taulelle
- Center for Surface Chemistry and Catalysis, KU Leuven, Leuven, Belgium.
| | - J A Martens
- Center for Surface Chemistry and Catalysis, KU Leuven, Leuven, Belgium.
| | - B Jakoby
- Institute for Microelectronics and Microsensors, Johannes Kepler University, Linz, Austria
| | - C E A Kirschhock
- Center for Surface Chemistry and Catalysis, KU Leuven, Leuven, Belgium.
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17
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Lavchiev VM, Jakoby B, Hedenig U, Grille T, Kirkbride JMR, Ritchie GAD. M-line spectroscopy on mid-infrared Si photonic crystals for fluid sensing and chemical imaging. Opt Express 2016; 24:262-271. [PMID: 26832257 DOI: 10.1364/oe.24.000262] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
The presented work demonstrates the design and characterization of Si-based photonic crystal waveguides operating as an evanescent wave absorption sensor in the mid-IR range λ = 5-6 µm. The photonic crystal structure is fabricated in a Si slab upon a thin Si(3)N(4)/TEOS/Si(3)N(4) membrane. M-line spectroscopy is used to verify the presence of guided waves. Different fillings of the photonic crystal holes have been realized to avoid sample residuals in the holes and, at the same time, to obtain spectral tuning of the structures by modification of the refractive index contrast with the photonic background. The chip displays sensitivity to fluid droplets in two-prism experiments. The output signal is quantitatively related to the fluid's absorption coefficient thereby validating the experimental method.
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18
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Heinisch M, Reichel EK, Dufour I, Jakoby B. Modeling and Experimental Investigation of Resonant Viscosity and Mass Density Sensors Considering their Cross-Sensitivity to Temperature. ACTA ACUST UNITED AC 2014. [DOI: 10.1016/j.proeng.2014.11.391] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/24/2022]
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19
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Antlinger H, Clara S, Beigelbeck R, Cerimovic S, Keplinger F, Jakoby B. An acoustic transmission sensor for the longitudinal viscosity of fluids. Sens Actuators A Phys 2013; 202:23-29. [PMID: 25844023 PMCID: PMC4376050 DOI: 10.1016/j.sna.2013.03.011] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 10/22/2012] [Revised: 03/12/2013] [Accepted: 03/13/2013] [Indexed: 06/04/2023]
Abstract
Physical fluid parameters like viscosity, mass density and sound velocity can be determined utilizing ultrasonic sensors. We introduce the concept of a recently devised transmission based sensor utilizing pressure waves to determine the longitudinal viscosity, bulk viscosity, and second coefficient of viscosity of a sample fluid in a test chamber. A model is presented which allows determining these parameters from measurement values by means of a fit. The setup is particularly suited for liquids featuring higher viscosities for which measurement data are scarcely available to date. The setup can also be used to estimate the sound velocity in a simple manner from the phase of the transfer function.
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Affiliation(s)
- Hannes Antlinger
- Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Altenberger Str. 69, A-4040 Linz, Austria
| | - Stefan Clara
- Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Altenberger Str. 69, A-4040 Linz, Austria
| | - Roman Beigelbeck
- Institute for Integrated Sensor Systems, Austrian Academy of Sciences, Viktor Kaplan Strasse 2, 2700 Wiener Neustadt, Austria
| | - Samir Cerimovic
- Institute of Sensor and Actuator Systems, Vienna University of Technology, Gusshausstrasse 27-29, 1040 Vienna, Austria
| | - Franz Keplinger
- Institute of Sensor and Actuator Systems, Vienna University of Technology, Gusshausstrasse 27-29, 1040 Vienna, Austria
| | - Bernhard Jakoby
- Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Altenberger Str. 69, A-4040 Linz, Austria
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20
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Abstract
Fluorescent foils are used with silicon photodiodes for large-area detection of objects, when combined with lasers forming a light curtain. An object entering the detection area penetrates the light curtain and casts shadows onto the fluorescent foils. Using a simple mathematical algorithm, the position of the object is detected with high speed. The device is suitable for security applications and can be used as a touch input device for computers, gaming and presentations.
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Affiliation(s)
- Petr Bartu
- Institute for Microelectronics and Microsensors, JKU Linz, Altenbergerstrasse 69, 4040 Linz, Austria.
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21
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Hochreiner A, Bauer-Marschallinger J, Burgholzer P, Jakoby B, Berer T. Non-contact photoacoustic imaging using a fiber based interferometer with optical amplification. Biomed Opt Express 2013; 4:2322-31. [PMID: 24298397 PMCID: PMC3829530 DOI: 10.1364/boe.4.002322] [Citation(s) in RCA: 15] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/29/2013] [Accepted: 09/23/2013] [Indexed: 05/04/2023]
Abstract
In photoacoustic imaging the ultrasonic signals are usually detected by contacting transducers. For some applications contact with the tissue should be avoided. As alternatives to contacting transducers interferometric means can be used to acquire photoacoustic signals remotely. In this paper we report on non-contact three and two dimensional photoacoustic imaging using an optical fiber-based Mach-Zehnder interferometer. A detection beam is transmitted through an optical fiber network onto the surface of the specimen. Back reflected light is collected and coupled into the same optical fiber. To achieve a high signal/noise ratio the reflected light is amplified by means of optical amplification with an erbium doped fiber amplifier before demodulation. After data acquisition the initial pressure distribution is reconstructed by a Fourier domain reconstruction algorithm. We present remote photoacoustic imaging of a tissue mimicking phantom and on chicken skin.
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Affiliation(s)
- Armin Hochreiner
- Research Center for Non-Destructive Testing GmbH (RECENDT), Altenberger Straße 69, 4040 Linz, Austria
| | | | - Peter Burgholzer
- Research Center for Non-Destructive Testing GmbH (RECENDT), Altenberger Straße 69, 4040 Linz, Austria
| | - Bernhard Jakoby
- Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Altenberger Straße 69, 4040 Linz, Austria
| | - Thomas Berer
- Research Center for Non-Destructive Testing GmbH (RECENDT), Altenberger Straße 69, 4040 Linz, Austria
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22
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Antlinger H, Clara S, Beigelbeck R, Cerimovic S, Keplinger F, Jakoby B. Sensing the characteristic acoustic impedance of a fluid utilizing acoustic pressure waves. Sens Actuators A Phys 2012; 186:94-99. [PMID: 23565036 PMCID: PMC3617730 DOI: 10.1016/j.sna.2012.02.050] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 10/20/2011] [Revised: 02/28/2012] [Accepted: 02/28/2012] [Indexed: 06/02/2023]
Abstract
Ultrasonic sensors can be used to determine physical fluid parameters like viscosity, density, and speed of sound. In this contribution, we present the concept for an integrated sensor utilizing pressure waves to sense the characteristic acoustic impedance of a fluid. We note that the basic setup generally allows to determine the longitudinal viscosity and the speed of sound if it is operated in a resonant mode as will be discussed elsewhere. In this contribution, we particularly focus on a modified setup where interferences are suppressed by introducing a wedge reflector. This enables sensing of the liquid's characteristic acoustic impedance, which can serve as parameter in condition monitoring applications. We present a device model, experimental results and their evaluation.
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Affiliation(s)
- Hannes Antlinger
- Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Altenberger Str. 69, A-4040 Linz, Austria
| | - Stefan Clara
- Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Altenberger Str. 69, A-4040 Linz, Austria
| | - Roman Beigelbeck
- Institute for Integrated Sensor Systems, Austrian Academy of Sciences, Viktor Kaplan Strasse 2, 2700 Wiener Neustadt, Austria
| | - Samir Cerimovic
- Institute of Sensor and Actuator Systems, Vienna University of Technology, Gusshausstrasse 27-29, 1040 Vienna, Austria
| | - Franz Keplinger
- Institute of Sensor and Actuator Systems, Vienna University of Technology, Gusshausstrasse 27-29, 1040 Vienna, Austria
| | - Bernhard Jakoby
- Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Altenberger Str. 69, A-4040 Linz, Austria
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23
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Lederer T, Stehrer BP, Bauer S, Jakoby B, Hilber W. Utilizing a high fundamental frequency quartz crystal resonator as a biosensor in a digital microfluidic platform. Sens Actuators A Phys 2011; 172:161-168. [PMID: 22241942 PMCID: PMC3235545 DOI: 10.1016/j.sna.2011.04.032] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
Abstract
We demonstrate the operation of a digital microfluidic lab-on-a-chip system utilizing Electro Wetting on Dielectrics (EWOD) as the actuation principle and a High Fundamental Frequency (HFF; 50 MHz) quartz crystal microbalance (QCM) resonator as a mass-sensitive sensor. In a first experiment we have tested the reversible formation of a phosphor-lipid monolayer of phospholipid vesicles out of an aqueous buffer suspension onto a bio-functionalized integrated QCM sensor. A binding of bio-molecules results in an altered mass load of the resonant sensor and a shift of the resonance frequency can be measured. In the second part of the experiment, the formation of a protein multilayer composed of the biomolecule streptavidin and biotinylated immunoglobulin G was monitored. Additionally, the macroscopic contact angle was optically measured in order to verify the bio-specific binding and to test the implications onto the balance of the surface tensions. Using these sample applications, we were able to demonstrate and to verify the feasibility of integrating a mass-sensitive QCM sensor into a digital microfluidic chip.
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Affiliation(s)
- Thomas Lederer
- Institute for Microelectronics and Microsensors, Johannes Kepler University, Linz, Austria
| | - Brigitte P. Stehrer
- Department of Soft Matter Physics, Johannes Kepler University, Linz, Austria
| | - Siegfried Bauer
- Department of Soft Matter Physics, Johannes Kepler University, Linz, Austria
| | - Bernhard Jakoby
- Institute for Microelectronics and Microsensors, Johannes Kepler University, Linz, Austria
| | - Wolfgang Hilber
- Institute for Microelectronics and Microsensors, Johannes Kepler University, Linz, Austria
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24
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Lucklum F, Jakoby B. Electromagnetic-acoustic high-Q silicon resonators for liquid phase sensing. IEEE Trans Ultrason Ferroelectr Freq Control 2010; 57:1000-1002. [PMID: 20442010 DOI: 10.1109/tuffc.2010.1511] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/29/2023]
Abstract
Piezoelectric and electrostatic excitation are the standard transduction methods of ultrasonic sensors. However, electromagnetic-acoustic transduction has been demonstrated as a suitable alternative with unique advantages of noncontact excitation and multi-mode vibration in inexpensive materials, such as thin metal plates. We have also demonstrated the use of high-Q silicon membranes as resonator elements. Here, we report on the utilization of these devices as liquid phase sensors for density and viscosity measurements.
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25
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Mayrwöger J, Reichl W, Krutzer C, Jakoby B. Gas monitoring with a Fabry–Perot based bolometer: Cross-sensitivity to water vapor. ACTA ACUST UNITED AC 2010. [DOI: 10.1016/j.proeng.2010.09.332] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/24/2022]
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26
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Jakoby B, Beigelbeck R, Keplinger F, Lucklum F, Niedermayer A, Reichel EK, Riesch C, Voglhuber-Brunnmaier T, Weiss B. Miniaturized sensors for the viscosity and density of liquids--performance and issues. IEEE Trans Ultrason Ferroelectr Freq Control 2010; 57:111-20. [PMID: 20040434 DOI: 10.1109/tuffc.2010.1386] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/24/2023]
Abstract
This paper reviews our recent work on vibrating sensors for the physical properties of fluids, particularly viscosity and density. Several device designs and the associated properties, specifically with respect to the sensed rheological domain and the onset of non-Newtonian behavior, are discussed.
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Affiliation(s)
- Bernhard Jakoby
- Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Linz, Austria.
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27
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Follens LRA, Reichel EK, Riesch C, Vermant J, Martens JA, Kirschhock CEA, Jakoby B. Viscosity sensing in heated alkaline zeolite synthesis media. Phys Chem Chem Phys 2009; 11:2854-7. [PMID: 19421498 DOI: 10.1039/b816040f] [Citation(s) in RCA: 19] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
A quartz disc resonator operating in thickness shear mode was used for the in situ monitoring of the viscosity during zeolite crystal formation.
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Affiliation(s)
- Lana R A Follens
- Centre for Surface Chemistry and Catalysis, K. U. Leuven, Kasteelpark Arenberg 23, B-3001 Heverlee, Belgium
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28
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29
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Jakoby B, Vellekoop MJ. Analysis of viscous losses in the chemical interface layer of Love wave sensors. IEEE Trans Ultrason Ferroelectr Freq Control 2000; 47:696-700. [PMID: 18238598 DOI: 10.1109/58.842058] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/25/2023]
Abstract
Love waves have been introduced as highly effective devices for liquid-sensing applications. For chemical sensors, a microacoustic delay line featuring a multilayered waveguide supporting a generalised Love wave mode can be used in an oscillator setup. The top layer of the waveguide is a chemical interface, which selectively adsorbs certain target molecules in the adjacent liquid. The increase in mass density caused by adsorption can be detected as changes in the oscillation frequency. Commonly used interface materials show viscoelastic losses leading to an unwanted damping of the wave. To keep the signal-to-noise ratio high, the total insertion loss of the delay line should be kept as low as possible. Furthermore, it must not exceed a certain value to allow the electronic circuitry to sustain the oscillation. We analyzed the viscoelastic losses, which strongly depend on the frequency being used. By means of the proposed theoretical approach, the maximum thickness of the interface layer can be determined not to exceed the losses that can be handled by the driving electronics.
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Affiliation(s)
- B Jakoby
- Delft University of Technology, Electronic Instrumentation Lab./DIMES, Mekelweg 4, 2628 CD Delft, The Netherlands.
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30
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Jakoby B, Vellekoop MJ. Substrates for zero temperature coefficient Love wave sensors. IEEE Trans Ultrason Ferroelectr Freq Control 2000; 47:701-705. [PMID: 18238599 DOI: 10.1109/58.842059] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/25/2023]
Abstract
Microacoustic Love wave delay lines show high sensitivity to perturbations such as mass depositions on the wave-guide surface. Furthermore, because of their shear polarization, Love waves are ideally suited for liquid sensing applications. Using a Love wave delay line as feedback element in an oscillator allows the realization of viscosity sensors, and, using a chemical interface, chemical sensors, where the output signal is the oscillation frequency. To achieve a high effective sensitivity, the cross-sensitivity to temperature has to be kept low. We outline the proper choice of a material and especially focus on the influence of crystal cut and the major device design parameters (mass sensitivity and coupling coefficient) on the temperature coefficient of the sensor.
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Affiliation(s)
- B Jakoby
- Delft University of Technology, Electronic Instrumentation Lab./DIMES, Mekelweg 4, 2628 CD Delft, The Netherlands.
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31
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Jakoby B, Vellekoop MJ. FFT-based analysis of periodic structures in microacoustic devices. IEEE Trans Ultrason Ferroelectr Freq Control 2000; 47:651-656. [PMID: 18238593 DOI: 10.1109/58.842053] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/25/2023]
Abstract
Periodic structures utilized as transducer or reflector elements play an important role in microacoustic wave devices. Such structures can be described using approximate analytical models. However, to obtain the accuracy required for reliable device simulation, numerical methods have to be employed. In this contribution, we present an efficient numerical approach to calculate the dispersion curves associated with microacoustic modes propagating in periodic structures; the method is demonstrated for the case of Love wave modes. The computational efficiency is related to the utilization of the FFT algorithm in a hybrid Method of Moments (MoM)/Mode-Matching analysis. From the obtained dispersion curves, characteristic parameters such as the stopband width can be obtained which can be used in a coupling-of-modes (COM) model of the structure.
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Affiliation(s)
- B Jakoby
- Delft University of Technology, Electronic Instrumentation Lab./DIMES, Mekelweg 4, 2628 CD Delft, The Netherlands.
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Abstract
Love wave sensors are highly sensitive microacoustic devices, which are well suited for liquid sensing applications thanks to the shear polarization of the wave. The sensing mechanism thereby relies on the mechanical (or acoustic) interaction of the device with the liquid. The successful utilization of Love wave devices for this purpose requires proper shielding to avoid unwanted electric interaction of the liquid with the wave and the transducers. In this work we describe the effects of this electric interaction and the proper design of a shield to prevent it. We present analysis methods, which illustrate the impact of the interaction and which help to obtain an optimized design of the proposed shield. We also present experimental results for devices that have been fabricated according to these design rules.
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Affiliation(s)
- B Jakoby
- Electronic Instrumentation Laboratory/ DIMES, Delft University of Technology, 2628 CD Delft, The Netherlands.
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