A cantilever array-based artificial nose

Measurement of Mechanical Properties of Cantilever Shaped Materials

Microcantilevers were first introduced as imaging probes in Atomic Force Microscopy (AFM) due to their extremely high sensitivity in measuring surface forces. The versatility of these probes, however, allows the sensing and measurement of a host of mechanical properties of various materials. Sensor parameters such as resonance frequency, quality factor, amplitude of vibration and bending due to a differential stress can all be simultaneously determined for a cantilever. When measuring the mechanical properties of materials, identifying and discerning the most influential parameters responsible for the observed changes in the cantilever response are important. We will, therefore, discuss the effects of various force fields such as those induced by mass loading, residual stress, internal friction of the material, and other changes in the mechanical properties of the microcantilevers. Methods to measure variations in temperature, pressure, or molecular adsorption of water molecules are also discussed. Often these effects occur simultaneously, increasing the number of parameters that need to be concurrently measured to ensure the reliability of the sensors. We therefore systematically investigate the geometric and environmental effects on cantilever measurements including the chemical nature of the underlying interactions. To address the geometric effects we have considered cantilevers with a rectangular or circular cross section. The chemical nature is addressed by using cantilevers fabricated with metals and/or dielectrics. Selective chemical etching, swelling or changes in Young's modulus of the surface were investigated by means of polymeric and inorganic coatings. Finally to address the effect of the environment in which the cantilever operates, the Knudsen number was determined to characterize the molecule-cantilever collisions. Also bimaterial cantilevers with high thermal sensitivity were used to discern the effect of temperature variations. When appropriate, we use continuum mechanics, which is justified according to the ratio between the cantilever thickness and the grain size of the materials. We will also address other potential applications such as the ageing process of nuclear materials, building materials, and optical fibers, which can be investigated by monitoring their mechanical changes with time. In summary, by virtue of the dynamic response of a miniaturized cantilever shaped material, we present useful measurements of the associated elastic properties.

Surface stress, thickness, and mass of the first few layers of polyelectrolyte

The effects of surface stress and mass loading upon the adsorption of polyelectrolytes onto flexible silicon micromechanical cantilever sensors (MCSs) were studied in situ. A self-assembled monolayer of 2-mercaptoethylamine chloride (2-MEA) on gold was used to achieve single-side adsorption on the MCS. Such a preparation gave a positive surface potential, whereas a bare SiOx surface gave a negative surface potential. Wide scan X-ray photoelectron spectroscopy confirmed that the adsorption of polystyrenesulfonate (PSS) and polyallylamine hydrochloride (PAH) followed the general rule expected from the electrostatic interaction between the substrate and the polyelectrolyte, whereas the adsorption polyethyleneimine (PEI) did not. The adsorption of PAH on SiO(x) from a 3 mM water solution containing 1 M NaCl was associated with a deflection of the MCS toward the polyelectrolyte monolayer (tensile surface stress) owing to the hydrogen bonding between neighboring amino groups. Here, a surface stress change of 1.4 +/- 0.1 N/m was estimated. The adsorption of PSS from a 3 mM water solution containing 1 M NaCl on a 2-MEA surface induced a deflection of the MCS away from the polyelectrolyte layer (compressive stress), toward the SiO(x) side. Here, a surface stress change of 3.1 +/- 0.3 N/m was determined. The formation of a PAH layer on top of the PSS layer resulted in a deflection of the MCS toward the PAH layer. This indicated that the adjacent PSS layer was deswelling, corresponding to a surface stress change of 0.5 +/- 0.1 N/m.

Microcantilever sensors

Microfabricated cantilevers have been used in atomic force microscopy for the topography imagingof non-conductive surfaces for more than 20 years. Cantilever beams without tips have proved theirapplicability in recent years as miniaturized, ultrasensitive, and fast-responding sensors for applicationsin chemistry, physics, biochemistry, and medicine. Microcantilever sensors respond by bending dueto the absorption of molecules. A shift in resonance frequency also occurs. They can be operatedin different environments such as gaseous environment, liquids, or vacuum. In gas, microcantileversensors can be operated as an artificial nose, whereby the bending pattern of a microfabricatedarray of eight polymer-coated silicon cantilevers is characteristic of the different vapors from solvents,flavors, and beverages. When operated in a liquid, microcantilever sensors are able to detectbiochemical reactions. Each cantilever is functionalized with a specific biochemical probe receptor,sensitive for detection of the corresponding target molecule. Applications lie in the fields of label-and amplification-free detection of DNA hybridization, the detection of proteins as well as antigen-antibodyreactions, and the detection of larger entities, such as bacteria and fungi.

Use of spatiotemporal response information from sorption-based sensor arrays to identify and quantify the composition of analyte mixtures

Linear sensor arrays made from small molecule/carbon black composite chemiresistors placed in a low-headspace volume chamber, with vapor delivered at low flow rates, allowed for the extraction of new chemical information that significantly increased the ability of the sensor arrays to identify vapor mixture components and to quantify their concentrations. Each sensor sorbed vapors from the gas stream and, thereby, as in gas chromatography, separated species having high vapor pressures from species having low vapor pressures. Instead of producing only equilibrium-based sensor responses that were representative of the thermodynamic equilibrium partitioning of analyte between each sensor and the initial vapor phase, the sensor responses varied depending on the position of the sensor in the chamber and the time since the beginning of the analyte exposure. The concomitant spatiotemporal (ST) sensor array response therefore provided information that was a function of time, as well as of the position of the sensor in the chamber. The responses to pure analytes and to multicomponent analyte mixtures comprised of hexane, decane, ethyl acetate, chlorobenzene, ethanol, and/or butanol were recorded along each of the sensor arrays. Use of a non-negative least-squares (NNLS) method for analysis of the ST data enabled the correct identification and quantification of the composition of two-, three-, four-, and five-component mixtures from arrays using only four chemically different sorbent films. In contrast, when traditional time- and position-independent sensor response information was used, these same mixtures could not be identified or quantified robustly. The work has also demonstrated that, for ST data, NNLS yielded significantly better results than analyses using extended disjoint principal components modeling. The ability to correctly identify and quantify constituent components of vapor mixtures through the use of such ST information significantly expands the capabilities of such broadly cross-reactive arrays of sensors.

Micro- and nanomechanical sensors for environmental, chemical, and biological detection

Micro- and nanoelectromechanical systems, including cantilevers and other small scale structures, have been studied for sensor applications. Accurate sensing of gaseous or aqueous environments, chemical vapors, and biomolecules have been demonstrated using a variety of these devices that undergo static deflections or shifts in resonant frequency upon analyte binding. In particular, biological detection of viruses, antigens, DNA, and other proteins is of great interest. While the majority of currently used detection schemes are reliant on biomarkers, such as fluorescent labels, time, effort, and chemical activity could be saved by developing an ultrasensitive method of label-free mass detection. Micro- and nanoscale sensors have been effectively applied as label-free detectors. In the following, we review the technologies and recent developments in the field of micro- and nanoelectromechanical sensors with particular emphasis on their application as biological sensors and recent work towards integrating these sensors in microfluidic systems.

Mass and position determination of attached particles on cantilever based mass sensors

An analytical expression relating mass and position of a particle attached on a cantilever to the resulting change in cantilever resonant frequency is derived. Theoretically, the position and mass of the attached particle can be deduced by combining measured resonant frequencies of several bending modes. This finding is verified experimentally using a microscale cantilever with and without an attached gold bead. The resonant frequencies of several bending modes are measured as a function of the bead position. The bead mass and position calculated from the measured resonant frequencies are in good agreement with the expected mass and the position measured.

Uncooled IR imaging using optomechanical detectors

In this study, we present an uncooled infrared imaging detector using knife-edge filter optical readout method. The tilt angle change of each cantilever in a focal plane array (FPA) can be simultaneously detected with a resolution of 10(-5) degrees. A deformation magnifying substrate-free microcantilever unit is specially designed. The multi-fold legs of microcantilever are interval metal coated to form a thermal deformation magnifying structure. Thermal and thermomechanical performance of this microcantilever unit are modeled and analyzed. An FPA with 100 x 100 pixels is fabricated and thermal images of human body are obtained by this detector.

DNA nanomachines

We are learning to build synthetic molecular machinery from DNA. This research is inspired by biological systems in which individual molecules act, singly and in concert, as specialized machines: our ambition is to create new technologies to perform tasks that are currently beyond our reach. DNA nanomachines are made by self-assembly, using techniques that rely on the sequence-specific interactions that bind complementary oligonucleotides together in a double helix. They can be activated by interactions with specific signalling molecules or by changes in their environment. Devices that change state in response to an external trigger might be used for molecular sensing, intelligent drug delivery or programmable chemical synthesis. Biological molecular motors that carry cargoes within cells have inspired the construction of rudimentary DNA walkers that run along self-assembled tracks. It has even proved possible to create DNA motors that move autonomously, obtaining energy by catalysing the reaction of DNA or RNA fuels.

Investigation of biotin–streptavidin binding interactions using microcantilever sensors

We report the investigation of biotin-streptavidin binding interactions using microcantilever sensors. A symmetric cantilever construction is employed to minimize the effects of thermal drift and the control of surface chemistry on the backside of the cantilever is demonstrated to reduce the effects of non-specific binding interactions on the cantilever. Three structurally different biotin modified cantilever surfaces are used as a model system to study the binding interaction with streptavidin. The cantilever response to the binding of streptavidin on these biotin sensing monolayers is compared. The lowest detection limit of streptavidin using biotin-HPDP is found to be between 1 and 10nM limited by the optical measurement setup. Surface characterization using quartz crystal microbalance (QCM) and high-resolution atomic force microscope (AFM) is used to benchmark the cantilever sensor response. In addition, the QCM and AFM studies reveal that the surface density of bound streptavidin on biotin modified surfaces was low, thereby implying that effects other than steric hindrance are responsible for defining cantilever response.

Design of acoustic wave biochemical sensors using micro-electro-mechanical systems

Acoustic wave biochemical sensors work by detecting the frequency shifts resulting from the binding of target molecules to a functionalized resonator. Resonator types currently in use or under development include macroscopic quartz crystal microbalances (QCMs) as well as a number of different integrated Micro-electro-mechanical Systems (MEMS) structures. Due to an increased resonator surface area to mass ratio, we believe that membrane-based MEMS systems are particularly promising with regard to sensitivity. Prototypes have been developed [S. Hauan et al., U.S. Patent Application (filed 6 Nov. 2003)] and preliminary calculations [M. J. Bartkovsky et al., paper 385e presented at the AIChE Annual Meeting, Nov. 2003; J. E. Valentine et al., paper 197h presented at the AICHE Annual Meeting, Nov. 2003] indicate significant improvements over other methods, both macroscopic and MEMS based. In this article we describe our work on a MEMS-based acoustic wave biochemical sensor using a membrane resonator. We demonstrate the effects of spatial distributions of mass on the membrane on sensitivity and show how to use this spatial sensitivity to detect multiple targets simultaneously. To do so we derive a function approximating the membrane response surface to spatial mass loadings under the applicable range of conditions. We verify the agreement using finite element methods, and present our initial sensitivity calculations demonstrating the advantages of variable mass loadings.

An antibody-sensitized microfabricated cantilever for the growth detection of Aspergillus niger spores

We demonstrate a new sensitive biosensor for detection of vital fungal spores of Aspergillus niger. The biosensor is based on silicon microfabricated cantilever arrays operated in dynamic mode. The change in resonance frequency of the sensor is a function of mass binding to the cantilever surface. For specific A. niger spore immobilization on the cantilever, each cantilever was individually coated with anti-Aspergillus niger polyclonal antibodies. We demonstrate the detection of single A. niger spores and their subsequent growth on the functionalized cantilever surface by online measurements of resonance frequency shifts. The new biosensor operating in humid air allows quantitative and qualitative detection of A. niger spores as well as detection of vital, functional spores in situ within approximately 4 h. The detection limit of the sensor is 103 CFU mL-1. Mass sensitivity of the cantilever sensor is approximately 53 pg Hz-1.

Sensing lipid bilayer formation and expansion with a microfabricated cantilever array

We show that cantilever array sensors can sense the formation of supported phospholipid bilayers on their surface and that they can monitor changes in mechanical properties of lipid bilayers. Supported lipid bilayers were formed on top of microfabricated cantilevers by vesicle fusion. The formation of bilayers led to a bending of the cantilevers of 70-590 nm comparable to a surface stress of 27-224 mN/m. Physisorption of bilayers of DOPC and other bilayers on the silicon oxide surface of cantilevers led to a tensile bending of about 70 nm whereas formation of chemisorbed bilayers of mixed thiolated (DPPTE) and non-thiolated lipids (DOPC) on the gold side of cantilevers led to a compressive bending of nearly 600 nm which depended on the ratio of DPPTE to DOPC. First results on bending of bilayer-covered cantilevers due to their interaction with the pore-forming peptide melittin are shown. The results demonstrate that cantilever sensors with immobilized bilayers can be used as model systems to investigate mechanical properties of cellular membranes and may be used for screening of membrane processes involving modification, lateral expansion, or contraction of membranes.

Mechano-transduction of DNA hybridization and dopamine oxidation through electrodeposited chitosan network

While microcantilevers offer exciting opportunities for mechano-detection, they often suffer from limitations in either sensitivity or selectivity. To address these limitations, we electrodeposited a chitosan film onto a cantilever surface and mechano-transduced detection events through the chitosan network. Our first demonstration was the detection of nucleic acid hybridization. In this instance, we electrodeposited the chitosan film onto the cantilever, biofunctionalized the film with oligonucleotide probe, and detected target DNA hybridization by cantilever bending in solution (static mode) or resonant frequency shifts in air (dynamic mode). In both detection modes, we observed a two-order of magnitude increase in sensitivity compared to values reported in literature for DNA immobilized on self-assembled monolayers. In our second demonstration, we coupled electrochemical and mechanical modes to selectively detect the neurotransmitter dopamine. A chitosan-coated cantilever was biased to electrochemically oxidize dopamine solution. Dopamine's oxidation products react with the chitosan film and create a tensile stress of approximately 1.7 MPa, causing substantial cantilever bending. A control experiment was performed with ascorbic acid solution. It was shown that the electrochemical oxidation of ascorbic acid does not lead to reactions with chitosan and does not change cantilever bending. These results suggest that chitosan can confer increased sensitivity and selectivity to microcantilever sensors.

Detection ofBacillussubtilisSpores Using Peptide-Functionalized Cantilever Arrays

We move beyond antibody-antigen binding systems and demonstrate that short peptide ligands can be used to efficiently capture Bacillus subtilis (a simulant of Bacillus anthracis) spores in liquids. On an eight-cantilever array chip, four cantilevers were coated with binding peptide (NHFLPKV-GGGC) and the other four were coated with control peptide (LFNKHVP-GGGC) for reagentless detection of whole B. subtilis spores in liquids. The peptide-ligand-functionalized microcantilever chip was mounted onto a fluid cell filled with a B. subtilis spore suspension for approximately 40 min; a 40 nm net differential deflection was observed. Fifth-mode resonant frequency measurements were also performed before and after dipping microcantilever arrays into a static B. subtilis solution showing a substantial decrease in frequency for binding-peptide-coated microcantilevers as compared to that for control peptide cantilevers. Further confirmation was obtained by subsequent examination of the microcantilever arrays under a dark-field microscope. Applications of this technology will serve as a platform for the detection of pathogenic organisms including biowarfare agents.

Development of biosensors for cancer clinical testing

Biosensors are devices that combine a biochemical recognition/binding element (ligand) with a signal conversion unit (transducer). Biosensors are already used for several clinical applications, for example for electrochemical measurement of blood glucose concentrations. Application of biosensors in cancer clinical testing has several potential advantages over other clinical analysis methods including increased assay speed and flexibility, capability for multi-target analyses, automation, reduced costs of diagnostic testing and a potential to bring molecular diagnostic assays to community health care systems and to underserved populations. They have the potential for facilitating Point of Care Testing (POCT), where state-of-the-art molecular analysis is carried out without requiring a state-of-the-art laboratory. However, not many biosensors have been developed for cancer-related testing. One major challenge in harnessing the potential of biosensors is that cancer is a very complex set of diseases. Tumors vary widely in etiology and pathogenesis. Oncologists rely heavily on histological characterization of tumors and a few biomarkers that have demonstrated clinical utility to aid in patient management decisions. New genomic and proteomic molecular tools are being used to profile tumors and produce "molecular signatures." These signatures include genetic and epigenetic signatures, changes in gene expression, protein profiles and post-translational modifications of proteins. These molecular signatures provide new opportunities for utilizing biosensors. Biosensors have enormous potential to deliver the promise of new molecular diagnostic strategies to patients. This article describes some of the basic elements of cancer biology and cancer biomarkers relevant for the development of biosensors for cancer clinical testing, along with the challenges in using this approach.

A new method of biosensing with 1 microl of Escherichia coli suspension using atomic force microscopy

We developed a new method for detecting bacterial cells from 1-mul samples with atomic force microscopy (AFM). The use of a parafilm surface as a sample palette was effective for reacting small amounts of samples with an AFM probe. This was due to the parafilm's hydrophobic, semitransparent, and nonadhesive surface. In this way, all processes, such as the surface functionalization of a cantilever and the adhesion of Escherichia coli cells to a cantilever, were easily completed. In addition, we succeeded in detecting cell adsorption on the same AFM cantilever by both the drive mode and the thermal mode. The resonance frequency shift caused by cell adhesion was clearly detected by the two modes for the first time. Our data indicated the potential of applying AFM nanobiosensing to extremely small amounts of samples.

Micromechanical cantilever array sensors for selective fungal immobilization and fast growth detection

We demonstrate the use of micromechanical cantilever arrays for selective immobilization and fast quantitative detection of vital fungal spores. Micro-fabricated uncoated as well as gold-coated silicon cantilevers were functionalized with concanavalin A, fibronectin or immunoglobulin G. In our experiments two major morphological fungal forms were used--the mycelial form Aspergillus niger and the unicellular yeast form Saccharomyces cerevisiae, as models to explore a new method for growth detection of eukaryotic organisms using cantilever arrays. We exploited the specific biomolecular interactions of surface grafted proteins with the molecular structures on the fungal cell surface. It was found that these proteins have different affinities and efficiencies to bind the spores. Maximum spore immobilization, germination and mycelium growth was observed on the immunoglobulin G functionalized cantilever surfaces. We show that spore immobilization and germination of the mycelial fungus A. niger and yeast S. cerevisiae led to shifts in resonance frequency within a few hours as measured by dynamically operated cantilever arrays, whereas conventional techniques would require several days. The biosensor could detect the target fungi in a range of 10(3) - 10(6) CFUml(-1). The measured shift is proportional to the mass of single fungal spores and can be used to evaluate spore contamination levels. Applications lie in the field of medical and agricultural diagnostics, food- and water-quality monitoring.

Characterization of Ligand-Functionalized Microcantilevers for Metal Ion Sensing

A sensor for metal cations is demonstrated using single and binary mixtures of different thiolated ligands as self-assembled monolayers (SAMs) functionalized on silicon microcantilevers (MCs) with gold nanostructured surfaces. Binding of charged metal ions to the active surface of a cantilever induces an apparent surface stress, thereby causing static bending of the MC that is detected in this work by a beam-bending technique. A MC response mechanism based on changes in surface charge is discussed. The monodentated ligands arranged as SAMs on the MC surface are not expected to fully satisfy the coordination sphere of the detected metals. This leads to lower binding constants than would be expected for chelating ligands, but reversible responses. The modest binding constants are compensated in terms of the magnitudes of responses by the inherent higher sensitivity of the nanostructured approach as opposed to more traditional smooth surface MCs. Response characteristics are optimized in terms of SAM formation time, concentration of ligand solution, and pH of working buffer solution. Limits of detection for the tested mono-, di-, and trivalent metal ions are in low to submicromolar range. The results indicated that shapes and magnitudes of response profiles are characteristics of the metal ions and type of SAM. The response factors for a given SAM with the tested metal ions, or for a given metal with the tested SAMs, varied by roughly 1 order of magnitude. While the observed selectivity is not large, it is anticipated that sufficient ionic recognition contrast is available for selective metal ion identification when differentially functionalized arrays of MCs (different ligands on different cantilevers in the array) are used in conjunction with pattern recognition techniques.

Micromechanical oscillators as rapid biosensor for the detection of active growth of Escherichia coli

A rapid biosensor for the detection of bacterial growth was developed using micromechanical oscillators coated by common nutritive layers. The change in resonance frequency as a function of the increasing mass on a cantilever array forms the basis of the detection scheme. The sensor is able to detect active growth of Escherichia coli cells within 1 h which is significantly faster than any conventional plating method which requires at least 24 h. The growth of E. coli was confirmed by scanning electron microscopy. This new sensing method for the detection of active bacterial growth allows future applications in, e.g., rapid antibiotic susceptibility testing by adding antibiotics to the nutritive layer.

Linear Artificial Molecular Muscles

Two switchable, palindromically constituted bistable [3]rotaxanes have been designed and synthesized with a pair of mechanically mobile rings encircling a single dumbbell. These designs are reminiscent of a "molecular muscle" for the purposes of amplifying and harnessing molecular mechanical motions. The location of the two cyclobis(paraquat-p-phenylene) (CBPQT(4+)) rings can be controlled to be on either tetrathiafulvalene (TTF) or naphthalene (NP) stations, either chemically ((1)H NMR spectroscopy) or electrochemically (cyclic voltammetry), such that switching of inter-ring distances from 4.2 to 1.4 nm mimics the contraction and extension of skeletal muscle, albeit on a shorter length scale. Fast scan-rate cyclic voltammetry at low temperatures reveals stepwise oxidations and movements of one-half of the [3]rotaxane and then of the other, a process that appears to be concerted at room temperature. The active form of the bistable [3]rotaxane bears disulfide tethers attached covalently to both of the CBPQT(4+) ring components for the purpose of its self-assembly onto a gold surface. An array of flexible microcantilever beams, each coated on one side with a monolayer of 6 billion of the active bistable [3]rotaxane molecules, undergoes controllable and reversible bending up and down when it is exposed to the synchronous addition of aqueous chemical oxidants and reductants. The beam bending is correlated with flexing of the surface-bound molecular muscles, whereas a monolayer of the dumbbell alone is inactive under the same conditions. This observation supports the hypothesis that the cumulative nanoscale movements within surface-bound "molecular muscles" can be harnessed to perform larger-scale mechanical work.

Rapid biosensor for detection of antibiotic-selective growth of Escherichia coli

A rapid biosensor for the detection of bacterial growth was developed using micromechanical oscillators coated in common nutritive layers. The change in resonance frequency as a function of the increasing mass on a cantilever array forms the basis of the detection scheme. The calculated mass sensitivity according to the mechanical properties of the cantilever sensor is approximately 50 pg/Hz; this mass corresponds to an approximate sensitivity of approximately 100 Escherichia coli cells. The sensor is able to detect active growth of E. coli cells within 1 h. The starting number of E. coli cells initially attached to the sensor cantilever was, on average, approximately 1,000 cells. Furthermore, this method allows the detection of selective growth of E. coli within only 2 h by adding antibiotics to the nutritive layers. The growth of E. coli was confirmed by scanning electron microscopy. This new sensing method for the detection of selective bacterial growth allows future applications in, e.g., rapid antibiotic susceptibility testing.

Creating nanoscopic collagen matrices using atomic force microscopy

The atomic force microscope (AFM) is introduced as a biomolecular manipulation machine capable of assembling biological molecules into well-defined molecular structures. Native collagen molecules were mechanically directed into well-defined, two-dimensional templates exhibiting patterns with feature sizes ranging from a few nanometers to several hundreds of micrometers. The resulting nanostructured collagen matrices were only approximately 3-nm thick, exhibited an extreme mechanical stability, and maintained their properties over the time range of several months. Our results directly demonstrate the plasticity of biological assemblies and provide insight into the physical mechanisms by which biological structures may be organized by cells in vivo. These nanoscopic templates may serve as platforms on non-biological surfaces to direct molecular and cellular processes.

Impact of Nano- and Mesoscale Particles on the Performance of Microcantilever-Based Sensors

Microcantilever-based sensors comprise an emerging class of chemomechanical sensors. The crucial challenge for every new and promising sensing platform lies in its performance in complex mixtures. Since most biofluids are rich in particulates, we assessed the impact of particles in the liquid stream on the performance of microcantilever sensors operated in both deflection and resonance modes. For both detection modes, sensor response depends on the particle diameter, concentration, and velocity as well as the composition of a thin-film coating. The presence of particles in the fluid stream produce substantial scattering of the laser beam used to measure cantilever deflection. Thus, prior removal of particulate matter from biofluids is required for optimal performance of microcantilever-based biosensors.

BioMEMS: state-of-the-art in detection, opportunities and prospects

In recent years, the biological and biomedical applications of micro- and nanotechnology (commonly referred to as Biomedical or Biological Micro-Electro-Mechanical Systems [BioMEMS]) have become increasingly prevalent and have found widespread use in a wide variety of applications such as diagnostics, therapeutics, and tissue engineering. While research and development activity in this field stays intense, some applications have also been commercialized. This article reviews the recent advances in this very exciting and important field and presents a summary of the state of the art in the area of BioMEMS focusing on diagnostics, sensing, and detection. The areas of therapeutics and hybrid bio/artificial devices will be presented in more detail elsewhere [Biomedical Nanotechnology, Vol. I-IV, Maruo Ferrari (Ed.), Kluwer Academic Publishers, 2004, in press.] and here are discussed briefly in terms of future directions and prospects.

Volatile metabolic monitoring of glycemic status in diabetes using electronic olfaction

The increased incidence of Type I and Type II diabetes among adults and adolescents is a growing public health concern worldwide. The primary objective of diabetes mellitus management involves keeping glycemia levels within the euglycemic range to prevent a variety of serious health complications. Unfortunately, daily self-monitoring is both a requirement and a problem for many patients with diabetes, particularly children and adolescents. Studies have shown that as many as 43% of adolescents and 30% of children (<14 years old) regularly forget to use glycemic tests and are significantly poorer at recognizing and reporting symptoms and signs of hypoglycemia/hyperglycemia. For this reason, methods for noninvasive, continuous monitoring that can signal glycemic status to a parent, teacher, or other caregiver would improve the care and management of symptoms of diabetes among these individuals. The goal of this review is to describe and evaluate electronic olfaction technology ("electronic nose") for monitoring the presence and levels of volatile chemicals from human body and breath that can be used to evaluate status of diabetes. The review is organized in four sections. The first section reviews the chemistry of the volatile signals that are produced by the body that are indicative of metabolic status. The second section provides an overview of novel sensor technology, e.g., "electronic olfaction," that mimics the biological olfactory system and can be used to monitor and identify complex plumes of volatiles that are signatures of metabolic states. The third section reviews studies that have employed electronic "nose" technology for diagnosis and monitoring of diabetes via urine and breath, and the final section discusses needed future directions for the development of olfactory-based metabolic monitoring, particularly among noncompliant populations.

A microcantilever-based pathogen detector

The ability to detect small amounts of materials, especially bacterial organisms, is important for medical diagnostics and national security issues. Engineered micromechanical systems provide one approach for constructing multifunctional, highly sensitive, real-time, immunospecific biological detectors. We present qualitative detection of specific Salmonella enterica strains using a functionalized silicon nitride microcantilever. Detection is achieved due to a change in the surface stress on the cantilever surface in situ upon binding of a small number of bacteria. Scanning electron micrographs indicate that less than 25 adsorbed bacteria are required for detection.

Enhancing chemi-mechanical transduction in microcantilever chemical sensing by surface modification

The use of chemically selective thin-film coatings has been shown to enhance both the chemical selectivity and sensitivity of microcantilever (MC) chemical sensors. As an analyte absorbs into the coating, the coating can swell or contract causing an in-plane stress at the associated MC surface. However, much of the stress upon absorption of an analyte may be lost through slippage of the chemical coatings on the MC surface, or through relaxation of the coating in a manner that minimizes stress to the cantilever. Structural modification of MC chemical sensors can improve the stress transduction between the chemical coating and the MC. Surfaces of silicon MC were modified with focused ion beam milling. Sub-micron channels were milled across the width of the MC. Responses of the nanostructured, coated MCs to 2,3-dihydroxynaphthalene and a series of volatile organic compounds (VOCs) were compared to smooth, coated MCs. The analytical figures of merit for the nanostructured, coated MCs in the sensing of VOCs were found to be better than the unstructured MCs. A comparison is made with a previously reported method of creating disordered nanostructured MC surfaces.

Flexoelectric origin of nanomechanic deflection in DNA-microcantilever system

The membrane theory is used to study the recently observed nanomechanical bending of cantilevers, which have processed biomolecular adsorption or biochemical reactions. To be different from entropy-controlling bending mechanism discussed before, we propose that the flexoelectric effect induces cantilever bending. With the introduction of flexoelectric spontaneous curvature, the relation between the bending and biopolymer character is constructed by a simple analytical formula. The cantilever motion induced by adsorption of single-strand DNA and DNA hybridization reaction is quantified analytically and our results show good agreement with experiments.

Nanostructured microcantilevers with functionalized cyclodextrin receptor phases: self-assembled monolayers and vapor-deposited films

It is shown that the performance of microcantilver-based chemical sensors in a liquid environment is affected by altering cantilever surface morphology and receptor phase type and thickness. Self-assembled monolayers of thiolated beta-cyclodextrin (HM-beta-CD) and thin films of vapor-deposited heptakis (2,3-O-diacetyl-6-O-tertbutyl-dimethylsilyl)-beta-cyclodextrin (HDATB-beta-CD) were studied on smooth and nanostructured (dealloyed) gold-coated microcantilever surfaces. The dealloyed surface contains nanometer-sized features that enhance the transduction of molecular recognition events into cantilever response, as well as increase film stability for thicker films. Improvements in the limits of detection of the compound 2,3-dihydroxynaphthalene as great as 2 orders of magnitude have been achieved by manipulating surface morphology and film thickness. The observed response factors for the analytes studied varied from 0.02-604 nm/ppm, as determined by cantilever deflection. In general, calibration plots for the analytes were linear up to several hundred nanometers in cantilever deflections.

Complementary metal oxide semiconductor cantilever arrays on a single chip: mass-sensitive detection of volatile organic compounds

The sensing behavior of polymer-coated resonant cantilevers for mass-sensitive detection of volatile organic compounds was investigated. Industrial complementary metal oxide semiconductor (CMOS) technology combined with subsequent CMOS-compatible micromachining was used to fabricate a single-chip system comprising the transducers and all necessary driving and signal-conditioning circuitry. An analytical model was developed to describe the mass-sensing mechanism of polymer-coated resonant cantilevers. The model was validated by measurements of various gaseous analytes. As an exemplary application, the quantitative analysis of a binary mixture using an array of four cantilevers is described. Experimental results are given for the concentration prediction of a mixture of n-octane and toluene. Finally, it was established that the limit of detection achieved with cantilever sensors is comparable to that of other acoustic wave-based gas sensors.

Scanning force microscopy in the applied biological sciences

Fifteen years after its invention, the scanning force microscope (SFM) is rooted deep in the biological sciences. Here we discuss the use of SFM in biotechnology and biomedical research. The spectrum of applications reviewed includes imaging, force spectroscopy and mapping, as well as sensor applications. It is our hope that this review will be useful for researchers considering the use of SFM in their studies but are uncertain about its scope of capabilities. For the benefit of readers unfamiliar with SFM technology, the fundamentals of SFM imaging and force measurement are also briefly introduced.