Emerging applications of atomic layer deposition for lithium-ion battery studies

Progress and Prospect of Bimetallic Oxides for Sodium-Ion Batteries: Synthesis, Mechanism, and Optimization Strategy

Sodium-ion batteries (SIBs) are considered as an alternative to and even replacement of lithium-ion batteries in the near future in order to address the energy crisis and scarcity of lithium resources due to the wide distribution and abundance of sodium resources on the earth. The exploration and development of high-performance anode materials are critical to the practical applications of advanced SIBs. Among various anode materials, bimetallic oxides (BMOs) have attracted special research attention because of their abundance, easy access, rich redox reactions, enhanced capacity and satisfactory cycling stability. Although many BMO anode materials have been reported as anode materials in SIBs, very limited studies summarized the progress and prospect of BMOs in practical applications of SIBs. In this review, recent progress and challenges of BMO anode materials for SIBs have been comprehensively summarized and discussed. First, the preparation methods and sodium storage mechanisms of BMOs are discussed. Then, the challenges, optimization strategies, and sodium storage performance of BMO anode materials have been reviewed and summarized. Finally, the prospects and future research directions of BMOs in SIBs have been proposed. This review aims to provide insight into the efficient design and optimization of BMO anode materials for high-performance SIBs.

Chiral Molecular Coating of a LiNiCoMnO2 Cathode for High-Rate Capability Lithium-Ion Batteries

The growing demand for energy has increased the need for battery storage, with lithium-ion batteries being widely used. Among those, nickel-rich layered lithium transition metal oxides [LiNi1-x-yCoxMnyO2 NCM (1 - x - y > 0.5)] are some of the promising cathode materials due to their high specific capacities and working voltages. In this study, we demonstrate that a thin, simple coating of polyalanine chiral molecules improves the performance of Ni-rich cathodes. The chiral organic coating of the active material enhances the discharge capacity and rate capability. Specifically, NCM811 and NCM622 electrodes coated with chiral molecules exhibit lower voltage hysteresis and better rate performance, with a capacity improvement of >10% at a 4 C discharge rate and an average improvement of 6%. We relate these results to the chirally induced spin selectivity effect that enables us to reduce the resistance of the electrode interface and to reduce dramatically the overpotential needed for the chemical process by aligning the electron spins.

Prolonging the Cycle Stability of Anion Redox P3-Type Na0.6Li0.2Mn0.8O2 through Al2O3 Atomic Layer Deposition Surface Modification

Sodium-ion batteries (SIBs) are becoming an alternative option for large-scale energy storage systems owing to their low cost and abundance. The lattice oxygen redox (LOR), which has the potential to increase the reversible capacity of materials, has promoted the development of high-energy cathode materials in SIBs. However, the utilization of oxygen anion redox reactions usually results in harmful lattice oxygen release, which hastens structural deformation and declines electrochemical performance, severely hindering their practical application. Herein, a ribbon-ordered superstructured P3-type Na0.6Li0.2Mn0.8O2 (NLMO) cathode with a uniform Al2O3 coating through atomic layer deposition (ALD) was synthesized. The cycling stability and rate capability of the materials were improved by a proper thickness of the Al2O3 layer. Differential electrochemical mass spectrometry (DEMS) results clearly suggest that the Al2O3 coating can inhibit the CO2 release caused by the highly active surface of the NLMO material. Moreover, the results of transmission electron microscopy (TEM) and etching X-ray photoelectron spectroscopy (XPS) show that the Al2O3 coating can effectively prevent electrolyte and electrode side reactions and the dissolution of Mn. This surface engineering strategy sheds light on the way to prolong the cycling stability of anionic redox cathode materials.

Interphase Engineering Enhanced Electro-chemical Stability of Prelithiated Anode

Prelithiation is an essential technology to compensate for the initial lithium loss of lithium-ion batteries due to the formation of solid electrolyte interphase (SEI) and irreversible structure change. However, the prelithiated materials/electrodes become more reactive with air and electrolyte resulting in unwanted side reactions and contaminations, which makes it difficult for the practical application of prelithiation technology. To address this problem, herein, interphase engineering through a simple solution treatment after chemical prelithiation is proposed to protect the prelithiated electrode. The used solutions are carefully selected, and the composition and nanostructure of the as-formed artificial SEIs are revealed by cryogenic electron microscopy and X-ray photoelectron spectroscopy. The electrochemical evaluation demonstrates the unique merits of this artificial SEI, especially for the fluorinated interphase, which not only enhances the interfacial ion transport but also increases the tolerance of the prelithiated electrode to the air. The treated graphite electrode shows an initial Coulombic efficiency of 129.4%, a high capacity of 170 mAh g-1 at 3 C, and negligible capacity decay after 200 cycles at 1 C. These findings not only provide a facile, universal, and controllable method to construct an artificial SEI but also enlighten the upgrade of battery fabrication and the alternative use of advanced electrolytes.

Atomic Layer Deposition-A Versatile Toolbox for Designing/Engineering Electrodes for Advanced Supercapacitors

Atomic layer deposition (ALD) has become the most widely used thin-film deposition technique in various fields due to its unique advantages, such as self-terminating growth, precise thickness control, and excellent deposition quality. In the energy storage domain, ALD has shown great potential for supercapacitors (SCs) by enabling the construction and surface engineering of novel electrode materials. This review aims to present a comprehensive outlook on the development, achievements, and design of advanced electrodes involving the application of ALD for realizing high-performance SCs to date, as organized in several sections of this paper. Specifically, this review focuses on understanding the influence of ALD parameters on the electrochemical performance and discusses the ALD of nanostructured electrochemically active electrode materials on various templates for SCs. It examines the influence of ALD parameters on electrochemical performance and highlights ALD's role in passivating electrodes and creating 3D nanoarchitectures. The relationship between synthesis procedures and SC properties is analyzed to guide future research in preparing materials for various applications. Finally, it is concluded by suggesting the directions and scope of future research and development to further leverage the unique advantages of ALD for fabricating new materials and harness the unexplored opportunities in the fabrication of advanced-generation SCs.

Effects of cathode loadings and anode protection on the performance of lithium metal batteries

While lithium-ion batteries (LIBs) are approaching their energy limits, lithium metal batteries (LMBs) are undergoing intensive investigation for higher energy density. Coupling LiNi0.8Mn0.1Co0.1O2(NMC811) cathode with lithium (Li) metal anode, the resultant Li||NMC811 LMBs are among the most promising technologies for future transportation electrification, which have the potential to realize an energy density two times higher than that of state-of-the-art LIBs. To maximize their energy density, the Li||NMC811 LMBs are preferred to have their cathode loading as high as possible while their Li anode as thin as possible. To this end, we investigated the effects of different cathode active material loadings (2-14 mg cm-2) on the performance of the Li||NMC811 LMBs. Our study revealed that the cathode loadings have remarkably affected the cell performance, in terms of capacity retention and sustainable capacity. Cells with high cathode loadings are more liable to fade in capacity, due to more severe formation of the CEI and more sluggish ion transport. In this study, we also verified that the protection of the Li anode is significant for achieving better cell performance. In this regard, our newly developed Li-containing glycerol (LiGL) via molecular layer deposition (MLD) is promising to help boost the cell performance, which was controllably deposited on the Li anode.

Significant Strain Dissipation via Stiff-Tough Solid Electrolyte Interphase Design for Highly Stable Alloying Anodes

The pulverization of alloying anodes significantly restricts their use in lithium-ion batteries (LIBs). This study presents a dual-phase solid electrolyte interphase (SEI) design that incorporates finely dispersed Al nanoparticles within the LiPON matrix. This distinctive dual-phase structure imparts high stiffness and toughness to the integrated SEI film. In comparison to single-phase LiPON film, the optimized Al/LiPON dual-phase SEI film demonstrates a remarkable increase in fracture toughness by 317.8 %, while maintaining stiffness, achieved through the substantial dissipation of strain energy. Application of the dual-phase SEI film on an Al anode leads to a 450 % enhancement in cycling stability for lithium storage in dual-ion batteries. A similar enhancement in cycling stability for silicon anodes, which face severe volume expansion issues, is also observed, demonstrating the broad applicability of the dual-phase SEI design. Specifically, homogeneous Li-Al alloying has been observed in conventional LIBs, even when paired with a high mass loading LiNi0.5 Co0.3 Mn0.2 O2 cathode (7 mg cm-2 ). The dual-phase SEI film design can also accelerate the diffusion kinetics of Li-ions through interface electronic structure regulation. This dual-phase design can integrate stiffness and toughness into a single SEI film, providing a pathway to enhance both the structural stability and rate capability of alloying anodes.

Atomic layer deposition of CoF2, NiF2 and HoF3 thin films

The present study describes atomic layer deposition (ALD) processes and characterization of CoF₂, NiF₂, and HoF₃ thin films. For CoF₂ deposition CoCl₂(TMEDA) (TMEDA = N,N,N',N'-tetramethylethylenediamine) and NH₄F were used as precursors. CoF₂ deposition was studied at 180-275 °C, resulting in a growth per cycle (GPC) of 0.7 to 1.2 Å. All the films consist of tetragonal CoF₂ according to XRD. The impurity contents were measured with ToF-ERDA and less than 1 at% of N and Cl were detected in the films, indicating effective reactions. In addition, the F/Co ratio is close to 2 as measured by the same method. The saturation of the GPC with respect to precursor pulses and purges was verified at 250 °C. The common feature of ALD metal fluoride films - remarkable roughness - is encountered also in this process. However, the films became smoother as the deposition temperature was increased. CoF₂ deposition was also demonstrated on graphite substrates. NiF₂ deposition was studied at 210-250 °C by using Ni(thd)₂ and TaF₅ or a new fluoride source NbF₅ as the precursors. Tetragonal NiF₂ was obtained, but the oxygen and hydrogen contents in the films were remarkable, up to ∼11 at%, as measured by ToF-ERDA. This was observed also when the films were in situ capped with YF₃. NbF₅ was shown to be a potential fluoride precursor by combining it with Ho(thd)₃ to deposit HoF₃ films. Orthorhombic HoF₃ was obtained at deposition temperatures of 200-275 °C. The films deposited at 235-275 °C are pure, and the Nb contents in films deposited at 250 and 275 °C are only 0.21 and 0.15 at%. The main impurity in both films is oxygen, but the contents are only 1.5 and 1.6 at%. The saturation of the GPC with respect to precursor pulses was verified at 250 °C. The GPC is ∼1 Å.

Mass Production of Customizable Core-Shell Active Materials in Seconds by Nano-Vapor Deposition for Advancing Lithium Sulfur Battery

Rational design and scalable production of core-shell sulfur-rich active materials is vital for not only the practical success of future metal-sulfur batteries but also for a deep insight into the core-shell design for sulfur-based electrochemistry. However, this is a big challenge mainly due to the lack of efficient strategy for realizing precisely controlled core-shell structures. Herein, by harnessing the frictional heating and dispersion capability of the nanostorm technology developed in the authors' laboratory, it is surprisingly found that sulfur-rich active particles can be coated with on-demand shell nanomaterials in seconds. To understand the process, a micro-adhesion guided nano-vapor deposition (MAG-NVD) working mechanism is proposed. Enabled by this technology, customizable nano-shell is realized in a super-efficient and solvent-free way. Further, the different roles of shell characteristics in affecting the sulfur-cathode electrochemical performance are discovered and clarified. Last, large-scale production of calendaring-compatible cathode with the optimized core-shell active materials is demonstrated, and a Li-S pouch-cell with 453 Wh kg^-1 @0.65 Ah is also reported. The proposed nano-vapor deposition may provide an attractive alternative to the well-known physical and chemical vapor deposition technologies.

Atomic layer deposition of ZnO on polypropylene nonwovens for photocatalytic antibacterial facemasks

Addressing respiratory infectious diseases remains one of the main priorities due to the increased risk of exposure caused by population growth, increasing international travel and commerce, and most recently, the COVID-19 outbreak. In the war against respiratory diseases, facemasks are powerful tools to obstruct the penetration of microorganisms, thereby protecting the wearer from infections. Nonetheless, the intercepted microorganisms on the surface of facemasks may proliferate and lead to secondary infection. To solve this problem, atomic layer deposition is introduced to deposit uniform and mechanically robust ZnO layers on polypropylene (PP) nonwoven fabrics, a widely used raw material in fabricating facemasks. The loading of ZnO demonstrates no adverse effects on the separation performance of facemasks, and the filtration efficiency of the facemasks towards different types of nanoparticles remains higher than 98.9%. Moreover, the modified PP nonwoven fabrics are granted with excellent antibacterial activity and photocatalytic sterilization ability, which can inactivate both germ-negative and germ-positive bacteria (E. coliandS. aureus) effectively with and without light illumination. Therefore, the modified PP nonwoven fabrics are potential candidates to be used as the outer layer on facemasks and endow them with photocatalytic antibacterial activity.

Facile Deposition of the LiFePO4 Cathode by the Electrophoresis Method

Lithium iron phosphate (LiFePO₄, LFP) is one of the most advanced commercial cathode materials for Li-ion batteries and is widely applied as battery cells for electric vehicles. In this work, a thin and uniform LFP cathode film on a conductive carbon-coated aluminum foil was besieged by the electrophoretic deposition (EPD) technique. Along with the LFP deposition conditions, the impact of two types of binders, poly(vinylidene fluoride) (PVdF) and poly(vinylpyrrolidone) (PVP), on the film quality and electrochemical results has been studied. The results revealed that the LFP_PVP composite cathode had a highly stable electrochemical performance compared with the LFP_PVdF counterpart due to the negligible influence of the PVP on the pore volume and size and retaining high surface area of LFP. The LFP_PVP composite cathode film unveiled a high discharge capacity of 145 mAh g^-1 at 0.1C and performed over 100 cycles with capacity retention and Coulombic efficiency of 95 and 99%, respectively. The C-rate capability test also revealed a more stable performance of LFP_PVP compared to LFP_PVdF.

Emerging Electrochromic Materials and Devices for Future Displays

With the rapid development of optoelectronic fields, electrochromic (EC) materials and devices have received remarkable attention and have shown attractive potential for use in emerging wearable and portable electronics, electronic papers/billboards, see-through displays, and other new-generation displays, due to the advantages of low power consumption, easy viewing, flexibility, stretchability, etc. Despite continuous progress in related fields, determining how to make electrochromics truly meet the requirements of mature displays (e.g., ideal overall performance) has been a long-term problem. Therefore, the commercialization of relevant high-quality products is still in its infancy. In this review, we will focus on the progress in emerging EC materials and devices for potential displays, including two mainstream EC display prototypes (segmented displays and pixel displays) and their commercial applications. Among these topics, the related materials/devices, EC performance, construction approaches, and processing techniques are comprehensively disscussed and reviewed. We also outline the current barriers with possible solutions and discuss the future of this field.

Enabling Long Cycle Life and High Rate Iron Difluoride Based Lithium Batteries by In Situ Cathode Surface Modification

Metals fluorides (MFs) are potential conversion cathodes to replace commercial intercalation cathodes. However, the application of MFs is impeded by their poor electronic/ionic conductivity and severe decomposition of electrolyte. Here, a composite cathode of FeF₂ and polymer-derived carbon (FeF₂ @PDC) with excellent cycling performance is reported. The composite cathode is composed of nanorod-shaped FeF₂ embedded in PDC matrix with excellent mechanical strength and electronic/ionic conductivity. The FeF₂ @PDC enables a reversible capacity of 500 mAh g^-1 with a record long cycle lifetime of 1900 cycles. Remarkably, the FeF₂ @PDC can be cycled at a record rate of 60 C with a reversible capacity of 107 mAh g^-1 after 500 cycles. Advanced electron microscopy reveals that the in situ formation of stable Fe₃ O₄ layers on the surface of FeF₂ prevents the electrolyte decomposition and leaching of iron (Fe), thus enhancing the cyclability. The results provide a new understanding to FeF₂ electrochemistry, and a strategy to radically improve the electrochemical performance of FeF₂ cathode for lithium-ion battery applications.

Atmospheric atomic layer deposition of SnO2 thin films with tin(II) acetylacetonate and water

Due to its unique optical, electrical, and chemical properties, tin dioxide (SnO₂) thin films attract enormous attention as a potential material for gas sensors, catalysis, low-emissivity coatings for smart windows, transparent electrodes for low-cost solar cells, etc. However, the low-cost and high-throughput fabrication of SnO₂ thin films without producing corrosive or toxic by-products remains challenging. One appealing deposition technique, particularly well-adapted to films presenting nanometric thickness is atomic layer deposition (ALD). In this work, several metalorganic tin-based complexes, namely, tin(IV) tert-butoxide, bis[bis(trimethylsilyl)amino] tin(II), dibutyltin diacetate, tin(II) acetylacetonate, tetrakis(dimethylamino) tin(IV), and dibutyltin bis(acetylacetonate), were explored thanks to DFT calculations. Our theoretical calculations suggest that the three last precursors are very appealing for ALD of SnO₂ thin films. The potential use of these precursors for atmospheric-pressure spatial atomic layer deposition (AP-SALD) is also discussed. For the first time, we experimentally demonstrate the AP-SALD growth of SnO₂ thin films using tin(II) acetylacetonate (Sn(acac)₂) and water. We observe that Sn(acac)₂ exhibits efficient ALD activity with a relatively large ALD temperature window (140-200 °C), resulting in a growth rate of 0.85 ± 0.03 Å per cyc. XPS analyses show a single Sn 3d_5/2 characteristic peak for Sn⁴⁺ at 486.8 ± 0.3 eV, indicating that a pure SnO₂ phase is obtained within the ALD temperature window. The as-deposited SnO₂ thin films are in all cases amorphous, and film conductivity increases with the deposition temperature. Hall effect measurements confirm the n-type nature of SnO₂ with a free electron density of about 8 × 10¹⁹ cm^-3, electron mobility up to 11.2 cm² V^-1 s^-1, and resistivity of 7 × 10^-3 Ω cm for samples deposited at 270 °C.

Interface Engineering to Improve the Rate Performance and Stability of the Mn-Cathode Electrode for Aqueous Zinc-Ion Batteries

Aqueous zinc-ion batteries (ZIBs), especially the aqueous zinc-manganese batteries, have received considerable attention due to their low cost, safety, and environmental benignity. However, manganese oxide cathode materials usually suffer from unsatisfactory cycling stability. In this study, we report an interface engineering strategy to improve the performance of the Mn-based cathode electrode for ZIBs. Both the results of experiments and density functional theory confirmed that SnO₂ can act as a "glue" to strengthen the interfacial interaction between the conductive graphene substrate and MnOOH, which plays a vital role during the charging/discharging process of manganese oxide. By this interface engineering strategy, the cycling stability of the in situ deposited Mn-based electrode was significantly improved, and a specific capacity of 271 mA h g^-1 can be retained even after 1500 cycles. This study may provide a thought or establish a framework for the rational design of high-performance cathode materials for ZIBs via interface engineering.

Challenges of layer-structured cathodes for sodium-ion batteries

As the most promising alternative to lithium-ion batteries (LIBs), sodium-ion batteries (SIBs) still face many issues that hinder their large-scale commercialization. Layered transition metal oxide cathodes have attracted widespread attention owing to their large specific capacity, high ionic conductivity, and feasible preparation conditions. However, their electrochemical properties are usually limited by the irreversible phase transition and harsh storage conditions caused by humidity sensitivity. Recently, tremendous efforts have been devoted to solving these issues toward advanced high-performance layered oxide cathodes. Herein, we summarize these remaining challenges of layered oxide cathodes and the corresponding modification strategies such as the variations in chemical compositions, the architecture of (nano)micro-structures, surface engineering, and the regulation of phase compositions. We hope that the understanding presented in this review can provide useful guidance to developing high-performance layer-structured cathode materials for advanced SIBs.

Recent Advances in Theoretical Development of Thermal Atomic Layer Deposition: A Review

Atomic layer deposition (ALD) is a vapor-phase deposition technique that has attracted increasing attention from both experimentalists and theoreticians in the last few decades. ALD is well-known to produce conformal, uniform, and pinhole-free thin films across the surface of substrates. Due to these advantages, ALD has found many engineering and biomedical applications. However, drawbacks of ALD should be considered. For example, the reaction mechanisms cannot be thoroughly understood through experiments. Moreover, ALD conditions such as materials, pulse and purge durations, and temperature should be optimized for every experiment. It is practically impossible to perform many experiments to find materials and deposition conditions that achieve a thin film with desired applications. Additionally, only existing materials can be tested experimentally, which are often expensive and hazardous, and their use should be minimized. To overcome ALD limitations, theoretical methods are beneficial and essential complements to experimental data. Recently, theoretical approaches have been reported to model, predict, and optimize different ALD aspects, such as materials, mechanisms, and deposition characteristics. Those methods can be validated using a different theoretical approach or a few knowledge-based experiments. This review focuses on recent computational advances in thermal ALD and discusses how theoretical methods can make experiments more efficient.

Design of Ordered Mesoporous CeO2-YSZ Nanocomposite Thin Films with Mixed Ionic/Electronic Conductivity via Surface Engineering

Mixed ionic and electronic conductors represent a technologically relevant materials system for electrochemical device applications in the field of energy storage and conversion. Here, we report about the design of mixed-conducting nanocomposites by facile surface modification using atomic layer deposition (ALD). ALD is the method of choice, as it allows coating of even complex surfaces. Thermally stable mesoporous thin films of 8 mol-% yttria-stabilized zirconia (YSZ) with different pore sizes of 17, 24, and 40 nm were prepared through an evaporation-induced self-assembly process. The free surface of the YSZ films was uniformly coated via ALD with a ceria layer of either 3 or 7 nm thickness. Electrochemical impedance spectroscopy was utilized to probe the influence of the coating on the charge-transport properties. Interestingly, the porosity is found to have no effect at all. In contrast, the thickness of the ceria surface layer plays an important role. While the nanocomposites with a 7 nm coating only show ionic conductivity, those with a 3 nm coating exhibit mixed conductivity. The results highlight the possibility of tailoring the electrical transport properties by varying the coating thickness, thereby providing innovative design principles for the next-generation electrochemical devices.

Atomic layer deposition of lithium zirconium oxides for the improved performance of lithium-ion batteries

Recently there has been increasing interest to develop lithium-containing films as solid-state electrolytes or surface coatings for lithium-ion batteries (LIBs) and related systems. In this study, we for the first time investigated the thin film growth of lithium zirconium oxides (Li_xZr_yO or LZOs) through combining two individual atomic layer deposition (ALD) processes of ZrO₂ and LiOH, i.e., sub-ALD of ZrO₂ and LiOH. We revealed that the hygroscopic nature of the LiOH component has a big impact on the growth of LZOs. We found that an increased temperature to 225 °C was more effective than an elongated purge to mitigate the adverse effects of physisorbed H₂O. We further discovered that, during the resultant LZO super-ALD processes, the growth of sub-ALD LiOH has been promoted while the growth of sub-ALD ZrO₂ has been inhibited. In this study, a suite of instruments has been applied to characterize the LZO super-ALD processes and the resultant LZO films, including in situ quartz crystal microbalance (QCM), scanning electron microscopy (SEM), scanning transmission electron microscopy (STEM), atomic force microscopy (AFM), synchrotron-based X-ray diffraction (XRD), and X-ray photoelectron spectroscopy (XPS). Furthermore, we applied the resulting LZO films over LiNi_0.6Mn_0.2Co_0.2O₂ (NMC622) cathodes in LIBs and demonstrated that the LZO coating films could evidently improve the lithium-ion insertion and extraction rates of the NMC622 electrodes up to 3.4 and 2.6 times, respectively. The LZO-coated NMC622 cathodes exhibited much better performance than the uncoated NMC622 ones.

Recent Advanced Development of Artificial Interphase Engineering for Stable Sodium Metal Anodes

A solid electrolyte interphase (SEI) on a sodium (Na) metal anode strongly affects the Na deposition morphology and the cycle life of Na metal batteries (SMBs). SMB applications are hindered by an unstable SEI and dendrite growth on the Na anode surface, which directly cause low coulombic efficiency and can even lead to safety issues. An artificial interface layer can stabilize Na metal anodes, be easily tailored, and is barely affected by electrochemical processes. In this review, recent advances that support the stability of working Na metal anodes are focused via artificial interphase engineering of inorganic materials, organic materials, and organic-inorganic composite materials, with an emphasis on the significance of interface engineering in SMBs. Fundamental investigations of artificial interphase engineering are also discussed on Na metal anodes and some recent research is summarized to enhance the interface between Na metal and electrolytes using an artificial interface layer. The prospects for interphase chemistry for Na metal anodes are provided to open a way to safe, high-energy, next-generation SMBs.

Antiperovskite Electrolytes for Solid-State Batteries

Solid-state batteries have fascinated the research community over the past decade, largely due to their improved safety properties and potential for high-energy density. Searching for fast ion conductors with sufficient electrochemical and chemical stabilities is at the heart of solid-state battery research and applications. Recently, significant progress has been made in solid-state electrolyte development. Sulfide-, oxide-, and halide-based electrolytes have been able to achieve high ionic conductivities of more than 10^-3 S/cm at room temperature, which are comparable to liquid-based electrolytes. However, their stability toward Li metal anodes poses significant challenges for these electrolytes. The existence of non-Li cations that can be reduced by Li metal in these electrolytes hinders the application of Li anode and therefore poses an obstacle toward achieving high-energy density. The finding of antiperovskites as ionic conductors in recent years has demonstrated a new and exciting solution. These materials, mainly constructed from Li (or Na), O, and Cl (or Br), are lightweight and electrochemically stable toward metallic Li and possess promising ionic conductivity. Because of the structural flexibility and tunability, antiperovskite electrolytes are excellent candidates for solid-state battery applications, and researchers are still exploring the relationship between their structure and ion diffusion behavior. Herein, the recent progress of antiperovskites for solid-state batteries is reviewed, and the strategies to tune the ionic conductivity by structural manipulation are summarized. Major challenges and future directions are discussed to facilitate the development of antiperovskite-based solid-state batteries.

First-Principles Study of Amorphous Al2O3 ALD Coating in Li-S Battery Electrode Design

The Li-S battery is exceptionally appealing as an alternative candidate beyond Li-ion battery technology due to its promising high specific energy capacity. However, several obstacles (e.g., polysulfides’ dissolution, shuttle effect, high volume expansion of cathode, etc.) remain and thus hinder the commercialization of the Li-S battery. To overcome these challenges, a fundamental study based on atomistic simulation could be very useful. In this work, a comprehensive investigation of the adsorption of electrolyte (solvent and salt) molecules, lithium sulfide, and polysulfide (Li2Sx with 2 ≤x≤ 8) molecules on the amorphous Al2O3 atomic layer deposition (ALD) surface was performed using first-principles density functional theory (DFT) calculations. The DFT results indicate that the amorphous Al2O3 ALD surface is selective in chemical adsorption towards lithium sulfide and polysulfide molecules compared to electrolytes. Based on this work, it suggests that the Al2O3 ALD is a promising coating material for Li-S battery electrodes to mitigate the shuttling problem of soluble polysulfides.

Plasma Enhanced Atomic Layer Deposition of Nickel and Cobalt Phosphate for Lithium Ion Batteries

A plasma-enhanced ALD process has been developed to deposit nickel phosphate. The process combines a trimethylphosphate (TMP) plasma with an oxygen plasma and nickelocene at a substrate temperature of 300°C....

Novel Li3 VO4 Nanostructures Grown in Highly Efficient Microwave Irradiation Strategy and Their In-Situ Lithium Storage Mechanism

The investigation of novel growth mechanisms for electrodes and the understanding of their in situ energy storage mechanisms remains major challenges in rechargeable lithium-ion batteries. Herein, a novel mechanism for the growth of high-purity diversified Li3 VO4 nanostructures (including hollow nanospheres, uniform nanoflowers, dispersed hollow nanocubes, and ultrafine nanowires) has been developed via a microwave irradiation strategy. In situ synchrotron X-ray diffraction and in situ transmission electron microscope observations are applied to gain deep insight into the intermediate Li3+ x VO4 and Li3+ y VO4 phases during the lithiation/delithiation mechanism. The first-principle calculations show that lithium ions migrate into the nanosphere wall rapidly along the (100) plane. Furthermore, the Li3 VO4 hollow nanospheres deliver an outstanding reversible capacity (299.6 mAh g-1 after 100 cycles) and excellent cycling stability (a capacity retention of 99.0% after 500 cycles) at 200 mA g-1 . The unique nanostructure offers a high specific surface area and short diffusion path, leading to fast thermal/kinetic reaction behavior, and preventing undesirable volume expansion during long-term cycling.

A limitation map of performance for porous electrodes in lithium-ion batteries

Driven by expanding interest in battery storage solutions and the success story of lithium-ion batteries, the research for the discovery and optimization of new battery materials and concepts is at peak. The generation of experimental (dis)charge data using coin cells is fast and feasible and proves to be a favorite practice in the battery research labs. The quantitative interpretation of the data, however, is not trivial and decelerates the process of screening and optimization of electrode materials and recipes. Here, we introduce the concept of polarographic map and demonstrate how it can be leveraged to quantify the contribution of different non-equilibrium phenomena to the performance limitation and total polarization of a lithium-ion cell. We showcase the accuracy and diagnostic power of this approach by preparing and analyzing the electrochemical performance of 54 sets of LiNixMnyCo1-x-yO2 electrodes with different formulations and designs discharged in a range of 0.2C-5C.

Interfacial Engineering of Na3 V2 (PO4 )2 F3 Hollow Spheres through Atomic Layer Deposition of TiO2 : Boosting Capacity and Mitigating Structural Instability

To mitigate the associated challenges of instability and capacity improvement in Na₃ V₂ (PO₄ )₂ F₃  (NVPF), rationally designed uniformly distributed hollow spherical NVPF and coating the surface of NVPF with ultrathin (≈2 nm) amorphous TiO₂  by atomic layer deposition is demonstrated. The coating facilitates higher mobility of the ion through the cathode electrolyte interphase (CEI) and enables higher capacity during cycling. The TiO₂ @NVPF exhibit discharge capacity of >120 mAhg^-1 , even at 1C rates, and show lower irreversible capacity in the first cycle. Further, nearly 100% capacity retention after rate performance in high current densities and 99.9% coulombic efficiency after prolonged cycling in high current density is reported. The improved performance in TiO₂ @NVPF is ascribed to the passivation behavior of TiO₂  coating which protects the surface of NVPF from volume expansion, significantly less formation of carbonates, and decomposition of electrolyte, which is also validated through post cycling analysis. The study shows the importance of ultrathin surface protection artificial CEI for advanced sodium-ion battery cathodes. The protection layer is diminishing parasitic reaction, which eventually enhances the Na ion participation in reaction and stabilizes the cathode structure.

Iterative reverse Monte Carlo and molecular statics for improved atomic structure modeling: a case study of zinc oxide grown by atomic layer deposition

Reverse Monte Carlo (RMC) modeling is a common method to derive atomic structure models of materials from experimental diffraction data. However, conventional RMC modeling does not impose energetic constraints and can produce non-physical local structures within the simulation volume. Although previous strategies have introduced energetic constraints during RMC modeling, these approaches have limitations in computational cost and physical accuracy. In this work, we periodically introduce molecular statics (MS) energy minimizations during RMC modeling in an iterative RMC-MS approach. We test this iterative RMC-MS approach using diffraction data collected by in operando high energy X-ray diffraction during atomic layer deposition of ZnO as a sample case. For MS relaxations we employ ReaxFF pair potentials previously established for ZnO. We find that RMC-MS and RMC provide equivalent agreement with experimental data, but RMC-MS structures are on average 0.6 eV per atom lower in energy and are more consistent with known ZnO atomic structure features. The iterative RMC-MS approach we report can accommodate large systems with minimal additional computational burden beyond a standard RMC simulation and can leverage established pair potentials for immediate application to study a wide range of materials.

Improving the Comprehensive Performance of Na0.7MnO2 for Sodium Ion Batteries by ZrO2 Atomic Layer Deposition

Sodium ion batteries with Na-Mn-O compounds as cathodes have been widely studied as substitutes for lithium ion batteries due to their abundant resources. However, the relatively poor cycling stability and low capacity of Na-Mn-O compounds significantly limit their applications. Different approaches, including element substitution and surface modification, have been applied to improve the electrochemical performance of those cathode materials. Herein, element doping and coating of ZrO₂ on Na_0.7MnO₂ particles have been achieved by atomic layer deposition followed by post-annealing. The rate capability and cycling stability of the modified materials were significantly improved, and the mechanism of performance enhancement was revealed. The ZrO₂ coatings acted as a stable interfacial layer to enhance the cycling stability of Na_0.7MnO₂ by suppressing side reactions between the electrode and electrolyte. The doping of transition metal ions reduced energy barriers for sodium ion insertion and deintercalation during charge/discharge cycling, further improving the charge/discharge capacity and rate performance of Na_0.7MnO₂.

Controllable Heterojunctions with a Semicoherent Phase Boundary Boosting the Potassium Storage of CoSe2 /FeSe2

Heterostructure construction is an efficient method for reinforcing K⁺ storage of transition metal selenides. The spontaneously developed internal electric fields give a strong boost to charge transport and significantly reduce the activation energy. Nevertheless, perfection of the interfacial region based on the energy level gradient and lattice matching degree is still a great challenge. Herein, rich vacancies and ultrafine CoSe₂ -FeSe₂ heterojunctions with semicoherent phase boundary are simultaneously obtained, which possess unique electronic structures and abundant active sites. When employed as anodes for potassium-ion batteries (PIBs), CoSe₂ -FeSe₂ @C composites display a reversible potassium storage of 401.1 mAh g^-1 at 100 mA g^-1 and even 275 mAh g^-1 at 2 A g^-1 . Theoretical calculation also reveals that the potassium-ion diffusion can be dramatically promoted by the controllable CoSe₂ -FeSe₂ heterojunction.

Durable Lithium/Selenium Batteries Enabled by the Integration of MOF-Derived Porous Carbon and Alucone Coating

Lithium-selenium (Li-Se) batteries are a promising energy storage system in electric vehicles due to their high capacity and good kinetics. However, the shuttle effect issue, caused by polyselenide dissolution from the Se cathode, has hampered the development of Li-Se batteries. Herein, we developed a facile preparation of porous carbon from a metal-organic framework (MOF) to confine Se (Se/CZIF) and protect the Se/CZIF composite with an alucone coating by molecular layer deposition (MLD). The optimal alucone coated Se/CZIF cathode prepared exhibits a one-step reversible charge/discharge process in the carbonate electrolytes. The inhibition of polyselenide dissolution is credited with the improved electrochemical performance, formation of thin and stable solid electrolyte interphase (SEI) layers, and a reduction in charge transfer resistance, thus improving the overall performance of Li-Se batteries.

Benzenedisulfonic Acid as an ALD/MLD Building Block for Crystalline Metal-Organic Thin Films*

Two new atomic/molecular layer deposition processes for depositing crystalline metal-organic thin films, built from 1,4-benzenedisulfonate (BDS) as the organic linker and Cu or Li as the metal node, are reported. The processes yield in-situ crystalline but hydrated Cu-BDS and Li-BDS films; in the former case, the crystal structure is of a previously known metal-organic-framework-like structure, while in the latter case not known from previous studies. Both hydrated materials can be readily dried to obtain the crystalline unhydrated phases. The stability and the ionic conductivity of the unhydrated Li-BDS films were characterized to assess their applicability as a thin film solid polymer Li-ion conductor.

Reaction mechanism of atomic layer deposition of aluminum sulfide using trimethylaluminum and hydrogen sulfide

Atomic layer deposition (ALD) is a nanopreparation technique for materials and is widely used in the fields of microelectronics, energy and catalysis. ALD methods for metal sulfides, such as Al2S3 and Li2S, have been developed for lithium-ion batteries and solid-state electrolytes. In this work, using density functional theory calculations, the possible reaction pathways of the ALD of Al2S3 using trimethylaluminum (TMA) and H2S were investigated at the M06-2X/6-311G(d, p) level. Al2S3 ALD can be divided into two consecutive and complementary half-reactions involving TMA and H2S, respectively. In the TMA half-reaction, the methyl group can be eliminated through the reaction with the sulfhydryl group on the surface. This process is a ligand exchange reaction between the methyl and sulfhydryl groups via a four-membered ring transition state. TMA half-reaction with the sulfhydrylated surface is more difficult than that with the hydroxylated surface. When the temperature increases, the reaction requires more energy, owing to the contribution of the entropy. In the H2S half-reaction, the methyl group on the surface can further react with the H2S precursor via a four-membered ring transition state. The orientation of H2S and more molecules have minimal effect on the H2S half-reaction. The reaction involving H2S through a six-membered ring transition state is unfavorable. In addition, the methyl and sulfhydryl groups on the surface can both react with the adjacent sulfhydryl group on the subsurface to form and release CH4 or H2S in the two half-reactions. Furthermore, sulfhydryl elimination occurs more easily than methyl elimination on the surface. These findings for the TMA and H2S half-reactions of Al2S3 ALD may be used for studying precursor chemistry and improvements in the preparation of other metal sulfides for emerging applications.

Ordered mesoporous metal oxides for electrochemical applications: correlation between structure, electrical properties and device performance

Ordered mesoporous metal oxides with a high specific surface area, tailored porosity and engineered interfaces are promising materials for electrochemical applications. In particular, the method of evaporation-induced self-assembly allows the formation of nanocrystalline films of controlled thickness on polar substrates. In general, mesoporous materials have the advantage of benefiting from a unique combination of structural, chemical and physical properties. This Perspective article addresses the structural characteristics and the electrical (charge-transport) properties of mesoporous metal oxides and how these affect their application in energy storage, catalysis and gas sensing.

Cryo-ePDF: Overcoming Electron Beam Damage to Study the Local Atomic Structure of Amorphous ALD Aluminum Oxide Thin Films within a TEM

Atomic layer deposition (ALD) provides uniform and conformal thin films that are of interest for a range of applications. To better understand the properties of amorphous ALD films, we need an improved understanding of their local atomic structure. Previous work demonstrated measurement of how the local atomic structure of ALD-grown aluminum oxide (AlO x ) evolves in operando during growth by employing synchrotron high-energy X-ray diffraction (HE-XRD). In this work, we report on efforts to employ electron diffraction pair distribution function (ePDF) measurements using more broadly available transmission electron microscope (TEM) instrumentation to study the atomic structure of amorphous ALD-AlO x . We observe electron beam damage in the ALD-coated samples during ePDF at ambient temperature and successfully mitigate this beam damage using ePDF at cryogenic temperatures (cryo-ePDF). We employ cryo-ePDF and reverse Monte Carlo (RMC) modeling to obtain structural models of ALD-AlO x coatings formed at a range of deposition temperatures from 150 to 332 °C. From these model structures, we derive structural metrics including stoichiometry, pair distances, and coordination environments in the ALD-AlO x films as a function of deposition temperature. The structural variations we observe with growth temperature are consistent with temperature-dependent changes in the surface hydroxyl density on the growth surface. The sample preparation and cryo-ePDF procedures we report here can be used for the routine measurement of ALD-grown amorphous thin films to improve our understanding of the atomic structure of these materials, establish structure-property relationships, and help accelerate the timescale for the application of ALD to address technological needs.

Surface modification and functionalization of powder materials by atomic layer deposition: a review

Powder materials are a class of industrial materials with many important applications. In some circumstances, surface modification and functionalization of these materials are essential for achieving or enhancing their expected performances. However, effective and precise surface modification of powder materials remains a challenge due to a series of problems such as high surface area, diffusion limitation, and particle agglomeration. Atomic layer deposition (ALD) is a cutting-edge thin film coating technology traditionally used in the semiconductor industry. ALD enables layer by layer thin film growth by alternating saturated surface reactions between the gaseous precursors and the substrate. The self-limiting nature of ALD surface reaction offers angstrom level thickness control as well as exceptional film conformality on complex structures. With these advantages, ALD has become a powerful tool to effectively fabricate powder materials for applications in many areas other than microelectronics. This review focuses on the unique capability of ALD in surface engineering of powder materials, including recent advances in the design of ALD reactors for powder fabrication, and applications of ALD in areas such as stabilization of particles, catalysts, energetic materials, batteries, wave absorbing materials and medicine. We intend to show the versatility and efficacy of ALD in fabricating various kinds of powder materials, and help the readers gain insights into the principles, methods, and unique effects of powder fabrication by ALD.

Atomic-scale constituting stable interface for improved LiNi0.6Mn0.2Co0.2O2 cathodes of lithium-ion batteries

Ascribed to their higher capacity and lower cost compared to conventional LiCoO₂, the Ni-rich layered LiNi_0.6Mn_0.2Co_0.2O₂ (NMC622) is now considered as one promising cathode for lithium-ion batteries (LIBs). However, it still suffers from some evident performance degradation, especially under high cutoff voltages (i.e., >4.3 V versus Li/Li⁺). The performance degradation typically is exhibited as capacity fading and voltage drop, mainly originating from an instable interface between the NMC622 and electrolyte as well as the evolution of the NMC structure. To improve the interfacial and structural stability of NMC cathodes, herein we deposited an ultrathin layer of Al₂O₃ coatings (<5 nm) conformally over NMC622 composite electrodes directly using atomic layer deposition (ALD). It was found that, under different upper cutoff voltages (4.3, 4.5, and 4.7 V), the ALD Al₂O₃ coatings enable enhanced performance of NMC622 cathodes with better cyclability and higher capacity. Particularly, the beneficial effects of the ALD Al₂O₃ coatings are more remarkable at higher upper cutoff voltages (4.5 and 4.7 V). Furthermore, the ALD coatings can significantly improve the rate capability of NMC622. To this end, we utilized a suite of characterization tools and performed a series of electrochemical tests to clarify the effects of the ALD Al₂O₃ coatings. This study revealed that the beneficial effects of the Al₂O₃ ALD coatings are multiple: (i) serving as an artificial layer of solid electrolyte interphase to mitigate undesirable interfacial reactions; (ii) acting as a physical barrier to inhibit metal dissolution of NMC; and (iii) forming a reinforced networked overcoating to boost the mechanical integrity of NMC cathodes. This study is favorable for designing high-performance NMC cathodes.

Toolbox for atomic layer deposition process development on high surface area powders

Atomic layer deposition (ALD) is an industrially applied technique for thin film deposition. The vast majority of processes target flat substrates rather than powders. For ALD on powders, new processes are needed, as different reaction conditions are required. Here, two setups are described in detail, which enhance the ALD process development for powders. The first setup described is capable of directly measuring the vapor pressure of a given precursor by a capacitance diaphragm gauge. Promising precursors can be pre-selected, and suitable precursor saturation temperatures can be determined. The second setup consists of four parallel reactors with individual temperature zones to screen the optimal ALD temperature window in a time efficient way. Identifying the precursor saturation temperature beforehand and subsequently performing the first ALD half cycle in the parallel setup at four different reactor temperatures simultaneously will drastically reduce process development times. Validation of both setups is shown for the well-known ALD precursors, trimethylaluminum to deposit aluminum oxide and diethyl zinc to deposit zinc oxide, both on amorphous silica powder.

Atomic/molecular layer deposition for energy storage and conversion

Energy storage and conversion systems, including batteries, supercapacitors, fuel cells, solar cells, and photoelectrochemical water splitting, have played vital roles in the reduction of fossil fuel usage, addressing environmental issues and the development of electric vehicles. The fabrication and surface/interface engineering of electrode materials with refined structures are indispensable for achieving optimal performances for the different energy-related devices. Atomic layer deposition (ALD) and molecular layer deposition (MLD) techniques, the gas-phase thin film deposition processes with self-limiting and saturated surface reactions, have emerged as powerful techniques for surface and interface engineering in energy-related devices due to their exceptional capability of precise thickness control, excellent uniformity and conformity, tunable composition and relatively low deposition temperature. In the past few decades, ALD and MLD have been intensively studied for energy storage and conversion applications with remarkable progress. In this review, we give a comprehensive summary of the development and achievements of ALD and MLD and their applications for energy storage and conversion, including batteries, supercapacitors, fuel cells, solar cells, and photoelectrochemical water splitting. Moreover, the fundamental understanding of the mechanisms involved in different devices will be deeply reviewed. Furthermore, the large-scale potential of ALD and MLD techniques is discussed and predicted. Finally, we will provide insightful perspectives on future directions for new material design by ALD and MLD and untapped opportunities in energy storage and conversion.

A Hierarchical Anodic Aluminum Oxide Template

Anodic aluminum oxide (AAO) templates are widely used for the development of various functional nanomaterials due to their highly ordered and tunable porous structures. Here, we report a new hierarchical AAO (hAAO) template with the hexagonally ordered unit cells and the radially distributed nanochannels. It is formed by integrating the self-assembled polystyrene microsphere template into the AAO fabrication process and rationalized in terms of mechanical stress and electric-field-induced oxide dissolution. The back side of the hAAO template resembles a moth-eye-like nanoarray, which shows good hydrophobicity. A variety of radial nanopillar arrays and moth-eye-like nanoarrays are fabricated by a series of materials and synthesis techniques employing the hAAO template. These unique nanoarrays demonstrate many physicochemical properties that are distinct from those obtained from the conventional AAO template.

Recent Progress and Challenges in the Optimization of Electrode Materials for Rechargeable Magnesium Batteries

Rechargeable magnesium batteries (RMBs) have been regarded as one of the promising electrochemical energy storage systems to complement Li-ion batteries owing to the low-cost and high safety characteristics. However, the various challenges including the sluggish solid-state diffusion of highly polarizing Mg²⁺ ions in hosts, and the formation of blocking layers on Mg metal surface have seriously impeded the development of high-performance RMBs. In order to solve these problems toward practical applications of RMBs, a tremendous amount of work on electrodes and electrolytes has been conducted in the last few decades. Creative optimization strategies including the modification of cathodes and anodes such as shielding the charges of divalent Mg²⁺ , expanding the layers of host materials, and optimizing the interface of electrode-electrolyte are raised to promote the technology. In this review, the detailed description of innovative approaches, representative examples, and facing challenges for developing high-performance electrodes are presented. Based on the review of these strategies, guidelines are provided for future research directions on improving the overall battery performance, especially on the electrodes.

Molecular layer deposition of Li-ion conducting "Lithicone" solid electrolytes

We demonstrate the fabrication of Li-containing ("lithicone") thin films prepared via molecular layer deposition (MLD) using lithium tert-butoxide and ethylene glycol. X-ray photoelectron spectroscopy reveals that the stoichiometry of the lithicone is Li_1.5C₂O_1.8 (H omitted), with C-O-Li moieties present in the film. The bonding environment of lithicone is distinct from that of lithium carbonate or MLD alucone films. Electrochemical impedance spectroscopy measurements show that annealed lithicone films exhibit room temperature ionic conductivity of 3.6-5 × 10^-8 S cm^-1 with an activation energy of ∼0.6 eV. The lithicone MLD process provides a pathway to further develop hybrid inorganic-organic Li-ion conducting materials for future battery applications.

Atomic layer deposition SiO2 films over dental ZrO2 towards strong adhesive to resin

Atomic layer deposition (ALD) is a self-limiting nanoscale film deposition technology with the advantages of good stability, consistency and conformability. In this study, we proposed to deposit silica (SiO₂) films over dental zirconium-oxide (ZrO₂) by ALD for better SiO₂ films and higher bond strength between ZrO₂ and resin. To investigate the superiority of film deposited by ALD, other surface modification methods such as sol-gel, vapor phase hydrolysis and electrostatic self-assembly were compared in terms of the short-term and long-term bond strength between ZrO₂ and resin, measured by universal testing machine. Meanwhile, the surface morphology and chemical elemental analysis were characterized by scanning electron microscopy (SEM), energy dispersive spectrometer (EDS) and Fourier transform infrared spectroscopy (FTIR). Results showed that the SiO₂ films deposited by ALD or electrostatic self-assembly were uniform and consistent while sol-gel and vapor phase hydrolysis formed SiO₂ films with cracks or pores, changing the morphology of ZrO₂. ALD had the best results among all methods and increased the bond strength to 16.49 ± 1.60 MPa and 13.44 ± 1.63 MPa before and after aging respectively, which is expected to improve the long-term success rate of clinical dental ZrO₂ prostheses.