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Yuan H, Zhang Q, Cheng Y, Xu R, Li H, Tian M, Ma J, Jiao T. Double-sided microstructured flexible iontronic pressure sensor with wide linear sensing range. J Colloid Interface Sci 2024; 670:41-49. [PMID: 38754330 DOI: 10.1016/j.jcis.2024.05.054] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/05/2024] [Revised: 04/29/2024] [Accepted: 05/08/2024] [Indexed: 05/18/2024]
Abstract
Iontronic pressure sensors have garnered significant attention for their potential in wearable electronic devices. While simple microstructures can enhance sensor sensitivity, the majority of them predominantly amplify sensitivity at lower pressure ranges and fail to enhance sensitivity at higher pressure ranges, leading to nonlinearity. In the absence of linear sensitivity in a pressure sensor, users are unable to derive precise information from its output, necessitating further signal processing. Hence, crafting a linearity flexible pressure sensor through a straightforward approach remains a formidable task. Herein, a double-sided microstructured flexible iontronic pressure sensor is presented with wide linear sensing range. The ionic gel is made by 1-Ethyl-3-methylimidazolium bis(tri-fluoromethylsulfonyl)imide (EMIM:TFSI) into the matrix of poly(vinylidene fluoride-co-hexafluoropropylene) (PVDF-HFP), which acts as active layer, featuring irregular microstructures (IMS) and pyramid microstructures (PMS) on both sides. Unlike previous complex methods, IMS and uniform PMS are easily and achieved through pattern transfer from a sandpaper mold and micro-pyramid template. The iontronic pressure sensor exhibits exceptional signal linearity with R2 values of 0.9975 and 0.9985, in the wide pressure range from 100 to 760 kPa and 760 kPa to 1000 kPa, respectively. This outstanding linearity and wide sensing range stem from a delicate balance between microstructure compression and mechanical alignment at the ionic gel interface. This study provides valuable insights into achieving linear responses by strategically designing microstructures in flexible pressure sensors, with potential applications in intelligent robots and health monitoring.
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Affiliation(s)
- Hao Yuan
- State Key Laboratory of Metastable Materials Science and Technology, Hebei Key Laboratory of Applied Chemistry, Hebei Key Laboratory of Nanobiotechnology, Hebei Key Laboratory of Heavy Metal Deep-Remediation in Water and Resource Reuse, Yanshan University, Qinhuangdao 066004, PR China
| | - Qiran Zhang
- State Key Laboratory of Metastable Materials Science and Technology, Hebei Key Laboratory of Applied Chemistry, Hebei Key Laboratory of Nanobiotechnology, Hebei Key Laboratory of Heavy Metal Deep-Remediation in Water and Resource Reuse, Yanshan University, Qinhuangdao 066004, PR China
| | - Yunqi Cheng
- State Key Laboratory of Metastable Materials Science and Technology, Hebei Key Laboratory of Applied Chemistry, Hebei Key Laboratory of Nanobiotechnology, Hebei Key Laboratory of Heavy Metal Deep-Remediation in Water and Resource Reuse, Yanshan University, Qinhuangdao 066004, PR China
| | - Rongyu Xu
- State Key Laboratory of Metastable Materials Science and Technology, Hebei Key Laboratory of Applied Chemistry, Hebei Key Laboratory of Nanobiotechnology, Hebei Key Laboratory of Heavy Metal Deep-Remediation in Water and Resource Reuse, Yanshan University, Qinhuangdao 066004, PR China
| | - Haoran Li
- State Key Laboratory of Metastable Materials Science and Technology, Hebei Key Laboratory of Applied Chemistry, Hebei Key Laboratory of Nanobiotechnology, Hebei Key Laboratory of Heavy Metal Deep-Remediation in Water and Resource Reuse, Yanshan University, Qinhuangdao 066004, PR China
| | - Mengyao Tian
- State Key Laboratory of Metastable Materials Science and Technology, Hebei Key Laboratory of Applied Chemistry, Hebei Key Laboratory of Nanobiotechnology, Hebei Key Laboratory of Heavy Metal Deep-Remediation in Water and Resource Reuse, Yanshan University, Qinhuangdao 066004, PR China
| | - Jinming Ma
- State Key Laboratory of Metastable Materials Science and Technology, Hebei Key Laboratory of Applied Chemistry, Hebei Key Laboratory of Nanobiotechnology, Hebei Key Laboratory of Heavy Metal Deep-Remediation in Water and Resource Reuse, Yanshan University, Qinhuangdao 066004, PR China.
| | - Tifeng Jiao
- State Key Laboratory of Metastable Materials Science and Technology, Hebei Key Laboratory of Applied Chemistry, Hebei Key Laboratory of Nanobiotechnology, Hebei Key Laboratory of Heavy Metal Deep-Remediation in Water and Resource Reuse, Yanshan University, Qinhuangdao 066004, PR China.
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2
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Li W, Zou K, Guo J, Zhang C, Feng J, You J, Cheng G, Zhou Q, Kong M, Li G, Guo CF, Yang J. Integrated Fibrous Iontronic Pressure Sensors with High Sensitivity and Reliability for Human Plantar Pressure and Gait Analysis. ACS NANO 2024; 18:14672-14684. [PMID: 38760182 DOI: 10.1021/acsnano.4c02919] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/19/2024]
Abstract
Flexible sensing systems (FSSs) designed to measure plantar pressure can deliver instantaneous feedback on human movement and posture. This feedback is crucial not only for preventing and controlling diseases associated with abnormal plantar pressures but also for optimizing athletes' postures to minimize injuries. The development of an optimal plantar pressure sensor hinges on key metrics such as a wide sensing range, high sensitivity, and long-term stability. However, the effectiveness of current flexible sensors is impeded by numerous challenges, including limitations in structural deformability, mechanical incompatibility between multifunctional layers, and instability under complex stress conditions. Addressing these limitations, we have engineered an integrated pressure sensing system with high sensitivity and reliability for human plantar pressure and gait analysis. It features a high-modulus, porous laminated ionic fiber structure with robust self-bonded interfaces, utilizing a unified polyimide material system. This system showcases a high sensitivity (156.6 kPa-1), an extensive sensing range (up to 4000 kPa), and augmented interfacial toughness and durability (over 150,000 cycles). Additionally, our FSS is capable of real-time monitoring of plantar pressure distribution across various sports activities. Leveraging deep learning, the flexible sensing system achieves a high-precision, intelligent recognition of different plantar types with a 99.8% accuracy rate. This approach provides a strategic advancement in the field of flexible pressure sensors, ensuring prolonged stability and accuracy even amidst complex pressure dynamics and providing a feasible solution for long-term gait monitoring and analysis.
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Affiliation(s)
- Wendong Li
- School of Aeronautics and Astronautics, State Key Laboratory of Polymer Materials Engineering of China, Robotic Satellite Key Laboratory of Sichuan Province, Sichuan University, Chengdu, 610065, People's Republic of China
| | - Kangkang Zou
- School of Aeronautics and Astronautics, State Key Laboratory of Polymer Materials Engineering of China, Robotic Satellite Key Laboratory of Sichuan Province, Sichuan University, Chengdu, 610065, People's Republic of China
| | - Junwei Guo
- College of Polymer Science and Engineering, State Key Laboratory of Polymer Materials Engineering of China, Sichuan University, Chengdu, 610065, People's Republic of China
| | - Cancan Zhang
- College of Polymer Science and Engineering, State Key Laboratory of Polymer Materials Engineering of China, Sichuan University, Chengdu, 610065, People's Republic of China
| | - Jiabao Feng
- College of Polymer Science and Engineering, State Key Laboratory of Polymer Materials Engineering of China, Sichuan University, Chengdu, 610065, People's Republic of China
| | - Jia You
- College of Polymer Science and Engineering, State Key Laboratory of Polymer Materials Engineering of China, Sichuan University, Chengdu, 610065, People's Republic of China
| | - Gang Cheng
- Beijing Key Laboratory of Intelligent Space Robotic Systems Technology and Applications, Beijing Institute of Spacecraft System Engineering, Beijing, 100094, People's Republic of China
| | - Qinghua Zhou
- School of Aeronautics and Astronautics, State Key Laboratory of Polymer Materials Engineering of China, Robotic Satellite Key Laboratory of Sichuan Province, Sichuan University, Chengdu, 610065, People's Republic of China
| | - Miqiu Kong
- School of Aeronautics and Astronautics, State Key Laboratory of Polymer Materials Engineering of China, Robotic Satellite Key Laboratory of Sichuan Province, Sichuan University, Chengdu, 610065, People's Republic of China
| | - Guangxian Li
- College of Polymer Science and Engineering, State Key Laboratory of Polymer Materials Engineering of China, Sichuan University, Chengdu, 610065, People's Republic of China
| | - Chuan Fei Guo
- Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, Guangdong 518055, People's Republic of China
| | - Junlong Yang
- College of Polymer Science and Engineering, State Key Laboratory of Polymer Materials Engineering of China, Sichuan University, Chengdu, 610065, People's Republic of China
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3
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Jin Q, Wang C, Wu H, Luo X, Li J, Ma G, Li Y, Luo C, Guo F, Long Y. 3D Printing of Capacitive Pressure Sensors with Tuned Wide Detection Range and High Sensitivity Inspired by Bio-Inspired Kapok Structures. Macromol Rapid Commun 2024; 45:e2300668. [PMID: 38325804 DOI: 10.1002/marc.202300668] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/20/2023] [Revised: 01/09/2024] [Indexed: 02/09/2024]
Abstract
Flexible pressure sensors have drawn considerable attention for their potential applications as electronic skins with both sensitivity and pressure response range. Although the introduction of surface microstructures effectively enhances sensitivity, the confined volume of their compressible structures results in a limited pressure response range. To address this issue, a biomimetic kapok structure is proposed and implemented for constructing the dielectric layer of flexible capacitive pressure sensors employing 3D printing technology. The structure is designed with easily deformable concave and rotational structures, enabling continuous deformation under pressure. This design results in a significant expansion of the pressure response range and improvement in sensitivity. Further, the study purposively analyses crucial parameters of the devised structure that affect its compressibility and stability. These include the concave angle θ, height ratio d1/d2, rotation angle α, and width k. As a result, the ultimate pressure sensors demonstrate remarkable features such as high sensitivity (≈2.38 kPa-1 in the range of 0-10 kPa), broad detection range (734 kPa), fast response time (23 ms), and outstanding pressure resolution (0.4% at 500 kPa). This study confirms the viability of bionic structures for flexible sensors, and their potential to expand the scope of wearable electronic devices.
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Affiliation(s)
- Qingxin Jin
- Institute of Laser Intelligent Manufacturing and Precision Processing, School of Mechanical Engineering, Guangxi University, Nanning, Guangxi, 530004, China
- State Key Laboratory of Featured Metal Materials and Life-cycle Safety for Composite Structures, Guangxi University, Nanning, Guangxi, 530004, China
| | - Chengyun Wang
- College of Mechanical and Electrical Engineering, Central South University, Changsha, Hunan, 410083, China
- State Key Laboratory of Precision Manufacturing for Extreme Service Performance, Central South University, Changsha, Hunan, 410083, China
| | - Han Wu
- Institute of Laser Intelligent Manufacturing and Precision Processing, School of Mechanical Engineering, Guangxi University, Nanning, Guangxi, 530004, China
- State Key Laboratory of Featured Metal Materials and Life-cycle Safety for Composite Structures, Guangxi University, Nanning, Guangxi, 530004, China
| | - Xin Luo
- Institute of Laser Intelligent Manufacturing and Precision Processing, School of Mechanical Engineering, Guangxi University, Nanning, Guangxi, 530004, China
- State Key Laboratory of Featured Metal Materials and Life-cycle Safety for Composite Structures, Guangxi University, Nanning, Guangxi, 530004, China
| | - Jiaqi Li
- Institute of Laser Intelligent Manufacturing and Precision Processing, School of Mechanical Engineering, Guangxi University, Nanning, Guangxi, 530004, China
- State Key Laboratory of Featured Metal Materials and Life-cycle Safety for Composite Structures, Guangxi University, Nanning, Guangxi, 530004, China
| | - Guangmeng Ma
- Institute of Laser Intelligent Manufacturing and Precision Processing, School of Mechanical Engineering, Guangxi University, Nanning, Guangxi, 530004, China
- State Key Laboratory of Featured Metal Materials and Life-cycle Safety for Composite Structures, Guangxi University, Nanning, Guangxi, 530004, China
| | - Yu Li
- Institute of Laser Intelligent Manufacturing and Precision Processing, School of Mechanical Engineering, Guangxi University, Nanning, Guangxi, 530004, China
- State Key Laboratory of Featured Metal Materials and Life-cycle Safety for Composite Structures, Guangxi University, Nanning, Guangxi, 530004, China
| | - Chunyi Luo
- Institute of Laser Intelligent Manufacturing and Precision Processing, School of Mechanical Engineering, Guangxi University, Nanning, Guangxi, 530004, China
- State Key Laboratory of Featured Metal Materials and Life-cycle Safety for Composite Structures, Guangxi University, Nanning, Guangxi, 530004, China
| | - Fawei Guo
- Institute of Laser Intelligent Manufacturing and Precision Processing, School of Mechanical Engineering, Guangxi University, Nanning, Guangxi, 530004, China
- State Key Laboratory of Featured Metal Materials and Life-cycle Safety for Composite Structures, Guangxi University, Nanning, Guangxi, 530004, China
| | - Yu Long
- Institute of Laser Intelligent Manufacturing and Precision Processing, School of Mechanical Engineering, Guangxi University, Nanning, Guangxi, 530004, China
- State Key Laboratory of Featured Metal Materials and Life-cycle Safety for Composite Structures, Guangxi University, Nanning, Guangxi, 530004, China
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4
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Jiang C, Sheng B. Linear Capacitive Pressure Sensor with Gradient Architecture through Laser Ablation on MWCNT/Ecoflex Film. Polymers (Basel) 2024; 16:962. [PMID: 38611220 PMCID: PMC11013779 DOI: 10.3390/polym16070962] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/19/2024] [Revised: 03/27/2024] [Accepted: 03/30/2024] [Indexed: 04/14/2024] Open
Abstract
The practical application of flexible pressure sensors, including electronic skins, wearable devices, human-machine interaction, etc., has attracted widespread attention. However, the linear response range of pressure sensors remains an issue. Ecoflex, as a silicone rubber, is a common material for flexible pressure sensors. Herein, we have innovatively designed and fabricated a pressure sensor with a gradient micro-cone architecture generated by CO2 laser ablation of MWCNT/Ecoflex dielectric layer film. In cooperation with the gradient micro-cone architecture and a dielectric layer of MWCNT/Ecoflex with a variable high dielectric constant under pressure, the pressure sensor exhibits linearity (R2 = 0.990) within the pressure range of 0-60 kPa, boasting a sensitivity of 0.75 kPa-1. Secondly, the sensor exhibits a rapid response time of 95 ms, a recovery time of 129 ms, hysteresis of 6.6%, and stability over 500 cycles. Moreover, the sensor effectively exhibited comprehensive detection of physiological signals, airflow detection, and Morse code communication, thereby demonstrating the potential for various applications.
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Affiliation(s)
- Chenkai Jiang
- School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China;
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
| | - Bin Sheng
- School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China;
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
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Su D, Shen G, Ma K, Li J, Qin B, Wang S, Yang W, He X. Enhanced sensitivity and linear-response in iontronic pressure sensors for non-contact, high-frequency vibration recognition. J Colloid Interface Sci 2024; 659:1042-1051. [PMID: 38195360 DOI: 10.1016/j.jcis.2023.12.181] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/11/2023] [Revised: 12/22/2023] [Accepted: 12/30/2023] [Indexed: 01/11/2024]
Abstract
Monitoring non-contact high-frequency vibrations requires improving the sensitivity and linear response of iontronic pressure sensors (IPSs). In this study, we incorporate composite electrodes comprising silver nanowires (Ag NWs) and MXene into IPSs to enhance electronic conduction and pseudocapacitance. Moreover, we utilize a novel surface-pillar microstructure, along with an internally randomized multi-bubble structure within the dielectric layer, to significantly expand the linear response range of the sensor. The resulting IPS device demonstrates exceptional linear sensitivity, measuring approximately 153.83 kPa-1, across a broad pressure range of up to 260 kPa. Additionally, it exhibits long-term stability, rapid response and recovery characteristics, and remains functional underwater. Notably, these devices exhibit remarkable capabilities in monitoring ultrasonic vibrations and accurately identifying sound wave vibrations. The integration of composite electrodes, microstructure designs, and their compatibility with underwater applications positions these IPSs as highly promising tools for precise measurements and advancements in flexible electronics technology.
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Affiliation(s)
- Daojian Su
- School of Applied Physics and Materials, Wuyi University, Jiangmen 529020, PR China; Jiangmen Key Laboratory of Micro-Nano Functional Materials and Devices, Jiangmen 529020, PR China
| | - Gengzhe Shen
- Zhuhai Institute of Advanced Technology Chinese Academy of Sciences, Zhuhai 519003, PR China
| | - Ke Ma
- School of Applied Physics and Materials, Wuyi University, Jiangmen 529020, PR China; Jiangmen Key Laboratory of Micro-Nano Functional Materials and Devices, Jiangmen 529020, PR China
| | - Junxian Li
- School of Applied Physics and Materials, Wuyi University, Jiangmen 529020, PR China; Jiangmen Key Laboratory of Micro-Nano Functional Materials and Devices, Jiangmen 529020, PR China
| | - Bolong Qin
- School of Applied Physics and Materials, Wuyi University, Jiangmen 529020, PR China; Jiangmen Key Laboratory of Micro-Nano Functional Materials and Devices, Jiangmen 529020, PR China
| | - Shuangpeng Wang
- Joint Key Laboratory of the Ministry of Education, Institute of Applied Physics and Materials Engineering, University of Macau, Avenida da Universidade, Taipa 999078, Macau
| | - Weijia Yang
- School of Applied Physics and Materials, Wuyi University, Jiangmen 529020, PR China; Jiangmen Key Laboratory of Micro-Nano Functional Materials and Devices, Jiangmen 529020, PR China
| | - Xin He
- School of Applied Physics and Materials, Wuyi University, Jiangmen 529020, PR China; Jiangmen Key Laboratory of Micro-Nano Functional Materials and Devices, Jiangmen 529020, PR China.
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He X, Cui Z, Zhang F, Li Y, Tu J, Cao J, Wang J, Qiao Y, Xi P, Xu T, Chen X, Zhang X. Multiscale Heterogeneities-Based Piezoresistive Interfaces with Ultralow Detection Limitation and Adaptively Switchable Pressure Detectability. ACS NANO 2024; 18:8296-8306. [PMID: 38452476 DOI: 10.1021/acsnano.3c12513] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 03/09/2024]
Abstract
Mechanical compliance and electrical enhancement are crucial for pressure sensors to promote performances when perceiving external stimuli. Here we propose a bioinspired multiscale heterogeneity-based interface to adaptively regulate its structure layout and switch to desirable piezoresistive behaviors with ultralow detection limitation. In such a multiscale heterogeneities system, the micro-/nanoscale spiny Ag-MnO2 heterostructure contributes to an ultralow detection limitation of 0.008 Pa and can perceive minor pressure increments under preloads with high resolution (0.0083%). The macroscale heterogeneous orientation of the cellular backbone enables anisotropic deformation, allowing the sensor to switch to rational sensitivity and working range (e.g., 580 kPa-1 for 0-20 kPa/54 kPa-1 for 60-140 kPa) as required. The sensor's stepwise activation progresses from the micro-/nanoscale heterostructure to the macroscale heterogeneous orientation, which can adaptively match diverse sensing tasks in complex applications scenarios. This multiscale heterogeneous and switchable design holds immense potential in the development of intelligent electromechanical devices, including wearable sensors, soft robotics, and smart actuators.
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Affiliation(s)
- Xuecheng He
- The Institute for Advanced Study (IAS), Shenzhen University, Shenzhen 518060, P. R. China
- Research Center for Bioengineering and Sensing Technology, University of Science and Technology Beijing, Beijing 100083, P. R. China
- Innovative Centre for Flexible Devices (iFLEX), School of Materials Science and Engineering, Nanyang Technological University, 50 Nanyang Avenue, 639798, Singapore
| | - Zequn Cui
- Innovative Centre for Flexible Devices (iFLEX), School of Materials Science and Engineering, Nanyang Technological University, 50 Nanyang Avenue, 639798, Singapore
| | - Feilong Zhang
- Innovative Centre for Flexible Devices (iFLEX), School of Materials Science and Engineering, Nanyang Technological University, 50 Nanyang Avenue, 639798, Singapore
| | - Yanzhen Li
- Innovative Centre for Flexible Devices (iFLEX), School of Materials Science and Engineering, Nanyang Technological University, 50 Nanyang Avenue, 639798, Singapore
| | - Jiaqi Tu
- Innovative Centre for Flexible Devices (iFLEX), School of Materials Science and Engineering, Nanyang Technological University, 50 Nanyang Avenue, 639798, Singapore
| | - Jinwei Cao
- Innovative Centre for Flexible Devices (iFLEX), School of Materials Science and Engineering, Nanyang Technological University, 50 Nanyang Avenue, 639798, Singapore
| | - Jianwu Wang
- Innovative Centre for Flexible Devices (iFLEX), School of Materials Science and Engineering, Nanyang Technological University, 50 Nanyang Avenue, 639798, Singapore
| | - Yuchun Qiao
- Research Center for Bioengineering and Sensing Technology, University of Science and Technology Beijing, Beijing 100083, P. R. China
| | - Pengxu Xi
- Research Center for Bioengineering and Sensing Technology, University of Science and Technology Beijing, Beijing 100083, P. R. China
| | - Tailin Xu
- The Institute for Advanced Study (IAS), Shenzhen University, Shenzhen 518060, P. R. China
| | - Xiaodong Chen
- Innovative Centre for Flexible Devices (iFLEX), School of Materials Science and Engineering, Nanyang Technological University, 50 Nanyang Avenue, 639798, Singapore
| | - Xueji Zhang
- The Institute for Advanced Study (IAS), Shenzhen University, Shenzhen 518060, P. R. China
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7
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Chen J, Chen K, Jin J, Wu K, Wang Y, Zhang J, Liu G, Sun J. Outstanding Synergy of Sensitivity and Linear Range Enabled by Multigradient Architectures. NANO LETTERS 2023; 23:11958-11967. [PMID: 38090798 DOI: 10.1021/acs.nanolett.3c04204] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 12/28/2023]
Abstract
Flexible pressure sensors are devices that mimic the sensory capabilities of natural human skin and enable robots to perceive external stimuli. One of the main challenges is maintaining high sensitivity over a broad linear pressure range due to poor structural compressibility. Here, we report a flexible pressure sensor with an ultrahigh sensitivity of 153.3 kPa-1 and linear response over an unprecedentedly broad pressure range from 0.0005 to 1300 kPa based on interdigital-shaped, multigradient architectures, featuring modulus, conductivity, and microstructure gradients. Such multigradient architectures and interdigital-shaped configurations enable effective stress transfer and conductivity regulation, evading the pressure sensitivity-linear range trade-off dilemma. Together with high pressure resolution, high frequency response, and good reproducibility over the ultrabroad linear range, proof-of-concept applications such as acoustic wave detection, high-resolution pressure measurement, and healthcare monitoring in diverse scenarios are demonstrated.
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Affiliation(s)
- Jiaorui Chen
- State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, P.R. China
| | - Kai Chen
- State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, P.R. China
| | - Jiaqi Jin
- State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, P.R. China
| | - Kai Wu
- State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, P.R. China
| | - Yaqiang Wang
- State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, P.R. China
| | - Jinyu Zhang
- State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, P.R. China
| | - Gang Liu
- State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, P.R. China
| | - Jun Sun
- State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, P.R. China
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8
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Lin R, Lei M, Ding S, Cheng Q, Ma Z, Wang L, Tang Z, Zhou B, Zhou Y. Applications of flexible electronics related to cardiocerebral vascular system. Mater Today Bio 2023; 23:100787. [PMID: 37766895 PMCID: PMC10519834 DOI: 10.1016/j.mtbio.2023.100787] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/06/2023] [Revised: 08/14/2023] [Accepted: 08/28/2023] [Indexed: 09/29/2023] Open
Abstract
Ensuring accessible and high-quality healthcare worldwide requires field-deployable and affordable clinical diagnostic tools with high performance. In recent years, flexible electronics with wearable and implantable capabilities have garnered significant attention from researchers, which functioned as vital clinical diagnostic-assisted tools by real-time signal transmission from interested targets in vivo. As the most crucial and complex system of human body, cardiocerebral vascular system together with heart-brain network attracts researchers inputting profuse and indefatigable efforts on proper flexible electronics design and materials selection, trying to overcome the impassable gulf between vivid organisms and rigid inorganic units. This article reviews recent breakthroughs in flexible electronics specifically applied to cardiocerebral vascular system and heart-brain network. Relevant sensor types and working principles, electronics materials selection and treatment methods are expounded. Applications of flexible electronics related to these interested organs and systems are specially highlighted. Through precedent great working studies, we conclude their merits and point out some limitations in this emerging field, thus will help to pave the way for revolutionary flexible electronics and diagnosis assisted tools development.
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Affiliation(s)
- Runxing Lin
- Joint Key Laboratory of the Ministry of Education, Institute of Applied Physics and Materials Engineering, University of Macau, Avenida da Universidade, Taipa, Macau, 999078, China
- Brain Cognition and Brain Disease Institute, Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518055, China
| | - Ming Lei
- Joint Key Laboratory of the Ministry of Education, Institute of Applied Physics and Materials Engineering, University of Macau, Avenida da Universidade, Taipa, Macau, 999078, China
| | - Sen Ding
- Joint Key Laboratory of the Ministry of Education, Institute of Applied Physics and Materials Engineering, University of Macau, Avenida da Universidade, Taipa, Macau, 999078, China
| | - Quansheng Cheng
- Joint Key Laboratory of the Ministry of Education, Institute of Applied Physics and Materials Engineering, University of Macau, Avenida da Universidade, Taipa, Macau, 999078, China
| | - Zhichao Ma
- Institute of Medical Robotics, School of Biomedical Engineering, Shanghai Jiao Tong University, No.800 Dongchuan Road, Shanghai, 200240, China
| | - Liping Wang
- Brain Cognition and Brain Disease Institute, Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518055, China
| | - Zikang Tang
- Joint Key Laboratory of the Ministry of Education, Institute of Applied Physics and Materials Engineering, University of Macau, Avenida da Universidade, Taipa, Macau, 999078, China
| | - Bingpu Zhou
- Joint Key Laboratory of the Ministry of Education, Institute of Applied Physics and Materials Engineering, University of Macau, Avenida da Universidade, Taipa, Macau, 999078, China
| | - Yinning Zhou
- Joint Key Laboratory of the Ministry of Education, Institute of Applied Physics and Materials Engineering, University of Macau, Avenida da Universidade, Taipa, Macau, 999078, China
- Department of Physics and Chemistry, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Taipa, Macau, 999078, China
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9
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Lin J, Chen Z, Zhuang Q, Chen S, Zhu C, Wei Y, Wang S, Wu D. Temperature-Immune, Wide-Range Flexible Robust Pressure Sensors for Harsh Environments. ACS APPLIED MATERIALS & INTERFACES 2023; 15:49642-49652. [PMID: 37831933 DOI: 10.1021/acsami.3c10975] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 10/15/2023]
Abstract
Flexible pressure sensors possess vast potential for various applications such as new energy batteries, aerospace engines, and rescue robots owing to their exceptional flexibility and adaptability. However, the existing sensors face significant challenges in maintaining long-term reliability and environmental resilience when operating in harsh environments with variable temperatures and high pressures (∼MPa), mainly due to possible mechanical mismatch and structural instability. Here, we propose a composite scheme for a flexible piezoresistive pressure sensor to improve its robustness by utilizing material design of near-zero temperature coefficient of resistance (TCR), radial gradient pressure-dividing microstructure, and flexible interface bonding process. The sensing layer comprising multiwalled carbon nanotubes (MWCNTs), graphite (GP), and thermoplastic polyurethane (TPU) was optimized to achieve a near-zero temperature coefficient of resistance over a temperature range of 25-70 °C, while the radial gradient microstructure layout based on pressure division increases the range of pressure up to 2 MPa. Furthermore, a flexible interface bonding process introduces a self-soluble transition layer by direct-writing TPU bonding solution at the bonding interface, which enables the sensor to achieve signal fluctuations as low as 0.6% and a high interface strength of up to 1200 kPa. Moreover, it has been further validated for its capability of monitoring the physiological signals of athletes as well as the long-term reliable environmental resilience of the expansion pressure of the power cell. This work demonstrates that the proposed scheme sheds new light on the design of robust pressure sensors for harsh environments.
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Affiliation(s)
- Jiawei Lin
- Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361101, China
| | - Zhiwen Chen
- Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361101, China
| | - Qibin Zhuang
- Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361101, China
| | - Songyue Chen
- Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361101, China
| | - Cuicui Zhu
- Fujian Science & Technology Innovation Laboratory for Energy Devices of China (21C LAB), Ningde 352100, China
| | - Yimin Wei
- Fujian Science & Technology Innovation Laboratory for Energy Devices of China (21C LAB), Ningde 352100, China
| | - Shaofei Wang
- Fujian Science & Technology Innovation Laboratory for Energy Devices of China (21C LAB), Ningde 352100, China
| | - Dezhi Wu
- Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361101, China
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10
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Hong W, Guo X, Zhang T, Zhang A, Yan Z, Zhang X, Li X, Guan Y, Liao D, Lu H, Liu H, Hu J, Niu Y, Hong Q, Zhao Y. Flexible Capacitive Pressure Sensor with High Sensitivity and Wide Range Based on a Cheetah Leg Structure via 3D Printing. ACS APPLIED MATERIALS & INTERFACES 2023; 15:46347-46356. [PMID: 37733928 DOI: 10.1021/acsami.3c09841] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/23/2023]
Abstract
Flexible pressure sensors can be used in human-computer interaction and wearable electronic devices, but one main challenge is to fabricate capacitive sensors with a wide pressure range and high sensitivity. Here, we designed a capacitive pressure sensor based on a bionic cheetah leg microstructure, validated the benefits of the bionic microstructure design, and optimized the structural feature parameters using 3D printing technology. The pressure sensor inspired by the cheetah leg shape has a high sensitivity (0.75 kPa-1), a wide linear sensing range (0-280 kPa), a fast response time of roughly 80 ms, and outstanding durability (24,000 cycles). Furthermore, the sensor can recognize a finger-operated mouse, monitor human motion, and transmit Morse code information. This work demonstrates that bionic capacitive pressure sensors hold considerable promise for use in wearable devices.
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Affiliation(s)
- Weiqiang Hong
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
- State Key Laboratory of High-Performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, P. R. China
- Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, P. R. China
| | - Xiaohui Guo
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Tianxu Zhang
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Anqi Zhang
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Zihao Yan
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Xinyi Zhang
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Xianghui Li
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Yuxin Guan
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Dongzhi Liao
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Haochen Lu
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Hanyu Liu
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Jiangtao Hu
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Yongzheng Niu
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Qi Hong
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Yunong Zhao
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
- School of Integrated Circuits, Huazhong University of Science and Technology, Wuhan 430074, P. R. China
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11
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Yang N, Yin X, Liu H, Yan X, Zhou X, Wang F, Zhang X, Zhao Y, Cheng T. Dual-Layer All-Textile Flexible Pressure Sensor Coupled by Silver Nanowires with Ti 3C 2-Mxene for Monitoring Athletic Motion during Sports and Transmitting Information. ACS APPLIED MATERIALS & INTERFACES 2023; 15:42992-43002. [PMID: 37647575 DOI: 10.1021/acsami.3c08874] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/01/2023]
Abstract
At present, wearable flexible pressure sensors have broad application prospects in fields such as motion monitoring and information transmission. However, it is still a challenge to design flexible pressure sensors with high sensitivity over a large sensing range and simple fabrication. Here, we use a simple "dipping-drying" method to fabricate a fabric-based flexible pressure sensor by coupling silver nanowires (AgNWs) with Ti3C2-MXene. The interaction between MXene and AgNWs helps realize a dual-layer sensing network, achieving good synergistic effects between pressure sensitivity and sensing range. The effects of the material combination and dip-coating sequence on the sensor's performance are systematically studied. The results show that the sensor was impregnated sequentially with AgNWs solution, and the MXene solution has the highest sensitivity (0.168 kPa-1) over a wide range (190 kPa). Meanwhile, it has the advantages of low response hysteresis and detection limit, as well as good linearity and durability. We further demonstrate the application of this sensor in human physiological signal monitoring and motion pattern recognition. It can also encrypt and transmit information according to different pressing states. In addition, the proposed pressure sensor array exhibits spatial resolution detection capabilities, laying the foundation for applications in the fields of motion monitoring and human-computer interaction.
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Affiliation(s)
- Ning Yang
- State Key Laboratory of Synthetical Automation for Process Industries, the College of Information Science and Engineering, Northeastern University, Shenyang 110819, China
| | - Xiangyu Yin
- State Key Laboratory of Synthetical Automation for Process Industries, the College of Information Science and Engineering, Northeastern University, Shenyang 110819, China
| | - Hailian Liu
- State Key Laboratory of Synthetical Automation for Process Industries, the College of Information Science and Engineering, Northeastern University, Shenyang 110819, China
| | - Xin Yan
- State Key Laboratory of Synthetical Automation for Process Industries, the College of Information Science and Engineering, Northeastern University, Shenyang 110819, China
| | - Xue Zhou
- State Key Laboratory of Synthetical Automation for Process Industries, the College of Information Science and Engineering, Northeastern University, Shenyang 110819, China
| | - Fang Wang
- State Key Laboratory of Synthetical Automation for Process Industries, the College of Information Science and Engineering, Northeastern University, Shenyang 110819, China
| | - Xuenan Zhang
- State Key Laboratory of Synthetical Automation for Process Industries, the College of Information Science and Engineering, Northeastern University, Shenyang 110819, China
| | - Yong Zhao
- Hebei Key Laboratory of Micro-Nano Precision Optical Sensing and Measurement Technology, Qinhuangdao 066004, China
| | - Tonglei Cheng
- State Key Laboratory of Synthetical Automation for Process Industries, the College of Information Science and Engineering, Northeastern University, Shenyang 110819, China
- Hebei Key Laboratory of Micro-Nano Precision Optical Sensing and Measurement Technology, Qinhuangdao 066004, China
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12
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Zhu B, Xu Z, Liu X, Wang Z, Zhang Y, Chen Q, Teh KS, Zheng J, Du X, Wu D. High-Linearity Flexible Pressure Sensor Based on the Gaussian-Curve-Shaped Microstructure for Human Physiological Signal Monitoring. ACS Sens 2023; 8:3127-3135. [PMID: 37471516 DOI: 10.1021/acssensors.3c00818] [Citation(s) in RCA: 3] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 07/22/2023]
Abstract
Flexible pressure sensors with high-performance show broad application prospects in health monitoring, wearable electronic devices, intelligent robot sensing, and other fields. Although flexible pressure sensors have made significant progress in sensitivity and detection range, most of them still exhibit strong nonlinearity, which leads to significant troubles in signal acquisition and thus limits their popularity in practical applications. It remains a serious challenge for the flexible pressure sensor to achieve high linearity while maintaining high sensitivity. Herein, a doped sensing membrane with a uniformly distributed Gaussian-curve-shaped micropattern array was developed using the micro-electromechanical systems (MEMS) process, and a flexible sensor structure with the doped film as the core was designed and constructed. The prototype sensor has a high sensitivity of 1.77 kPa-1 and a linearity of 0.99 in the full detection range of 20 Pa to 30 kPa. In addition, its excellent performance also includes fast response/recovery times (∼25/50 ms) and long-term endurance (>10,000 cycles at 15 kPa). The prototype sensor has been successfully demonstrated in human pulse monitoring, speech recognition, and gesture recognition. The 2 × 6 sensor array can detect the spatial pressure distribution. Thus, such a microstructure shape design will open a new way to fabricate a high-linearity pressure sensor for potential applications in health monitoring, human-machine interaction, etc.
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Affiliation(s)
- Bin Zhu
- Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China
| | - Zhenjin Xu
- Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China
| | - Xin Liu
- Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China
| | - Zhongbao Wang
- Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China
| | - Yang Zhang
- Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China
| | - Qinnan Chen
- Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China
| | - Kwok Siong Teh
- School of Engineering, San Francisco State University, San Francisco, California 94132, United States
| | - Jianyi Zheng
- Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China
| | - Xiaohui Du
- Sensor and network control center, Instrumentation Technology and Economy Institute, Beijing 100055, China
| | - Dezhi Wu
- Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China
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13
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Li J, Chen S, Zhou J, Tang L, Jiang C, Zhang D, Sheng B. Flexible BaTiO 3-PDMS Capacitive Pressure Sensor of High Sensitivity with Gradient Micro-Structure by Laser Engraving and Molding. Polymers (Basel) 2023; 15:3292. [PMID: 37571185 PMCID: PMC10422564 DOI: 10.3390/polym15153292] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/17/2023] [Revised: 07/30/2023] [Accepted: 08/02/2023] [Indexed: 08/13/2023] Open
Abstract
The significant potential of flexible sensors in various fields such as human health, soft robotics, human-machine interaction, and electronic skin has garnered considerable attention. Capacitive pressure sensor is popular given their mechanical flexibility, high sensitivity, and signal stability. Enhancing the performance of capacitive sensors can be achieved through the utilization of gradient structures and high dielectric constant media. This study introduced a novel dielectric layer, employing the BaTiO3-PDMS material with a gradient micro-cones architecture (GMCA). The capacitive sensor was constructed by incorporating a dielectric layer GMCA, which was fabricated using laser engraved acrylic (PMMA) molds and flexible copper-foil/polyimide-tape electrodes. To examine its functionality, the prepared sensor was subjected to a pressure range of 0-50 KPa. Consequently, this sensor exhibited a remarkable sensitivity of up to 1.69 KPa-1 within the pressure range of 0-50 KPa, while maintaining high pressure-resolution across the entire pressure spectrum. Additionally, the pressure sensor demonstrated a rapid response time of 50 ms, low hysteresis of 0.81%, recovery time of 160 ms, and excellent cycling stability over 1000 cycles. The findings indicated that the GMCA pressure sensor, which utilized a gradient structure and BaTiO3-PDMS material, exhibited notable sensitivity and a broad linear pressure range. These results underscore the adaptability and viability of this technology, thereby facilitating enhanced flexibility in pressure sensors and fostering advancements in laser manufacturing and flexible devices for a wider array of potential applications.
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Affiliation(s)
- Jiayi Li
- School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China; (J.L.); (J.Z.); (L.T.); (C.J.); (D.Z.)
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
| | - Shangbi Chen
- Inertial Technology Division, Shanghai Aerospace Control Technology Institute, Shanghai 201109, China;
| | - Jingyu Zhou
- School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China; (J.L.); (J.Z.); (L.T.); (C.J.); (D.Z.)
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
| | - Lei Tang
- School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China; (J.L.); (J.Z.); (L.T.); (C.J.); (D.Z.)
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
| | - Chenkai Jiang
- School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China; (J.L.); (J.Z.); (L.T.); (C.J.); (D.Z.)
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
| | - Dawei Zhang
- School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China; (J.L.); (J.Z.); (L.T.); (C.J.); (D.Z.)
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
| | - Bin Sheng
- School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China; (J.L.); (J.Z.); (L.T.); (C.J.); (D.Z.)
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
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14
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Qu C, Lu M, Zhang Z, Chen S, Liu D, Zhang D, Wang J, Sheng B. Flexible Microstructured Capacitive Pressure Sensors Using Laser Engraving and Graphitization from Natural Wood. Molecules 2023; 28:5339. [PMID: 37513212 PMCID: PMC10385064 DOI: 10.3390/molecules28145339] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/18/2023] [Revised: 06/28/2023] [Accepted: 07/01/2023] [Indexed: 07/30/2023] Open
Abstract
In recent years, laser engraving has received widespread attention as a convenient, efficient, and programmable method which has enabled high-quality porous graphene to be obtained from various precursors. Laser engraving is often used to fabricate the dielectric layer with a microstructure for capacitive pressure sensors; however, the usual choice of electrodes remains poorly flexible metal electrodes, which greatly limit the overall flexibility of the sensors. In this work, we propose a flexible capacitive pressure sensor made entirely of thermoplastic polyurethane (TPU) and laser-induced graphene (LIG) derived from wood. The capacitive pressure sensor consisted of a flexible LIG/TPU electrode (LTE), an LIG/TPU electrode with a microhole array, and a dielectric layer of TPU with microcone array molded from a laser-engraved hole array on wood, which provided high sensitivity (0.11 kPa-1), an ultrawide pressure detection range (20 Pa to 1.4 MPa), a fast response (~300 ms), and good stability (>4000 cycles, at 0-35 kPa). We believe that our research makes a significant contribution to the literature, because the easy availability of the materials derived from wood and the overall consistent flexibility meet the requirements of flexible electronic devices.
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Affiliation(s)
- Chenkai Qu
- School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
| | - Meilan Lu
- School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
| | - Ziyan Zhang
- School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
| | - Shangbi Chen
- Inertial Technology Division, Shanghai Aerospace Control Technology Institute, Shanghai 201109, China
| | - Dewen Liu
- Inertial Technology Division, Shanghai Aerospace Control Technology Institute, Shanghai 201109, China
| | - Dawei Zhang
- School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
| | - Jing Wang
- Department of Ultrasound Medicine, The First Affiliated Hospital, Zhejiang University School of Medicine, Hangzhou 310006, China
| | - Bin Sheng
- School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
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15
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Lian JJ, Guo WT, Sun QJ. Emerging Functional Polymer Composites for Tactile Sensing. MATERIALS (BASEL, SWITZERLAND) 2023; 16:4310. [PMID: 37374494 DOI: 10.3390/ma16124310] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/11/2023] [Revised: 06/01/2023] [Accepted: 06/07/2023] [Indexed: 06/29/2023]
Abstract
In recent years, extensive research has been conducted on the development of high-performance flexible tactile sensors, pursuing the next generation of highly intelligent electronics with diverse potential applications in self-powered wearable sensors, human-machine interactions, electronic skin, and soft robotics. Among the most promising materials that have emerged in this context are functional polymer composites (FPCs), which exhibit exceptional mechanical and electrical properties, enabling them to be excellent candidates for tactile sensors. Herein, this review provides a comprehensive overview of recent advances in FPCs-based tactile sensors, including the fundamental principle, the necessary property parameter, the unique device structure, and the fabrication process of different types of tactile sensors. Examples of FPCs are elaborated with a focus on miniaturization, self-healing, self-cleaning, integration, biodegradation, and neural control. Furthermore, the applications of FPC-based tactile sensors in tactile perception, human-machine interaction, and healthcare are further described. Finally, the existing limitations and technical challenges for FPCs-based tactile sensors are briefly discussed, offering potential avenues for the development of electronic products.
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Affiliation(s)
- Jia-Jin Lian
- School of Physics and Optoelectronic Engineering, Guangdong University of Technology, Guangzhou 510006, China
| | - Wen-Tao Guo
- School of Physics and Optoelectronic Engineering, Guangdong University of Technology, Guangzhou 510006, China
| | - Qi-Jun Sun
- School of Physics and Optoelectronic Engineering, Guangdong University of Technology, Guangzhou 510006, China
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16
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Yang R, Dutta A, Li B, Tiwari N, Zhang W, Niu Z, Gao Y, Erdely D, Xin X, Li T, Cheng H. Iontronic pressure sensor with high sensitivity over ultra-broad linear range enabled by laser-induced gradient micro-pyramids. Nat Commun 2023; 14:2907. [PMID: 37264026 DOI: 10.1038/s41467-023-38274-2] [Citation(s) in RCA: 20] [Impact Index Per Article: 20.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/12/2022] [Accepted: 04/21/2023] [Indexed: 06/03/2023] Open
Abstract
Despite the extensive developments of flexible capacitive pressure sensors, it is still elusive to simultaneously achieve excellent linearity over a broad pressure range, high sensitivity, and ultrahigh pressure resolution under large pressure preloads. Here, we present a programmable fabrication method for microstructures to integrate an ultrathin ionic layer. The resulting optimized sensor exhibits a sensitivity of 33.7 kPa-1 over a linear range of 1700 kPa, a detection limit of 0.36 Pa, and a pressure resolution of 0.00725% under the pressure of 2000 kPa. Taken together with rapid response/recovery and excellent repeatability, the sensor is applied to subtle pulse detection, interactive robotic hand, and ultrahigh-resolution smart weight scale/chair. The proposed fabrication approaches and design toolkit from this work can also be leveraged to easily tune the pressure sensor performance for varying target applications and open up opportunities to create other iontronic sensors.
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Affiliation(s)
- Ruoxi Yang
- School of Mechanical Engineering, Hebei University of Technology, 300401, Tianjin, China
- Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, PA, 16802, USA
| | - Ankan Dutta
- Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, PA, 16802, USA
| | - Bowen Li
- Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, PA, 16802, USA
| | - Naveen Tiwari
- Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, PA, 16802, USA
| | - Wanqing Zhang
- Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, PA, 16802, USA
| | - Zhenyuan Niu
- Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, PA, 16802, USA
| | - Yuyan Gao
- Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, PA, 16802, USA
| | - Daniel Erdely
- Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, PA, 16802, USA
| | - Xin Xin
- Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, PA, 16802, USA
| | - Tiejun Li
- School of Mechanical Engineering, Hebei University of Technology, 300401, Tianjin, China.
- School of Mechanical Engineering, Hebei University of Science & Technology, 050018, Shijiazhuang, China.
| | - Huanyu Cheng
- Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, PA, 16802, USA.
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17
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Lv C, Tian C, Jiang J, Dang Y, Liu Y, Duan X, Li Q, Chen X, Xie M. Ultrasensitive Linear Capacitive Pressure Sensor with Wrinkled Microstructures for Tactile Perception. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2023; 10:e2206807. [PMID: 36922735 DOI: 10.1002/advs.202206807] [Citation(s) in RCA: 15] [Impact Index Per Article: 15.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/20/2022] [Revised: 02/08/2023] [Indexed: 05/18/2023]
Abstract
Ultrasensitive flexible pressure sensors with excellent linearity are essential for achieving tactile perception. Although microstructured dielectrics have endowed capacitive sensors with ultrahigh sensitivity, the compromise of sensitivity with increasing pressure is an issue yet to be resolved. Herein, a spontaneously wrinkled MWCNT/PDMS dielectric layer is proposed to realize the excellent sensitivity and linearity of capacitive sensors for tactile perception. The synergistic effect of a high dielectric constant and wrinkled microstructures enables the sensor to exhibit linearity up to 21 kPa with a sensitivity of 1.448 kPa-1 and a detection limit of 0.2 Pa. Owing to these merits, the sensor monitors subtle physiological signals such as various arterial pulses and respiration. This sensor is further integrated into a fully multimaterial 3D-printed soft pneumatic finger to realize material hardness perception. Eight materials with different hardness values are successfully discriminated, and the capacitance of the sensor varies linearly (R2 > 0.975) with increasing hardness. Moreover, the sensitivity to the material hardness can be tuned by controlling the inflation pressure of the soft finger. As a proof of concept, the finger is used to discriminate pork fats with different hardness, paving the way for hardness discrimination in clinical palpation.
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Affiliation(s)
- Chunyu Lv
- State Key Laboratory of Precision Measuring Technology and Instrument, School of Precision Instrument and Opto-electronics Engineering, Tianjin, 300072, P. R. China
| | - Chengcheng Tian
- State Key Laboratory of Precision Measuring Technology and Instrument, School of Precision Instrument and Opto-electronics Engineering, Tianjin, 300072, P. R. China
| | - Jiashun Jiang
- State Key Laboratory of Precision Measuring Technology and Instrument, School of Precision Instrument and Opto-electronics Engineering, Tianjin, 300072, P. R. China
| | - Yu Dang
- College of Artificial Intelligence, Nankai University, Tianjin, 300350, P. R. China
| | - Yang Liu
- State Key Laboratory of Precision Measuring Technology and Instrument, School of Precision Instrument and Opto-electronics Engineering, Tianjin, 300072, P. R. China
| | - Xuexin Duan
- State Key Laboratory of Precision Measuring Technology and Instrument, School of Precision Instrument and Opto-electronics Engineering, Tianjin, 300072, P. R. China
| | - Quanning Li
- State Key Laboratory of Precision Measuring Technology and Instrument, School of Precision Instrument and Opto-electronics Engineering, Tianjin, 300072, P. R. China
| | - Xuejiao Chen
- State Key Laboratory of Precision Measuring Technology and Instrument, School of Precision Instrument and Opto-electronics Engineering, Tianjin, 300072, P. R. China
| | - Mengying Xie
- State Key Laboratory of Precision Measuring Technology and Instrument, School of Precision Instrument and Opto-electronics Engineering, Tianjin, 300072, P. R. China
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18
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Xu J, Pan J, Cui T, Zhang S, Yang Y, Ren TL. Recent Progress of Tactile and Force Sensors for Human-Machine Interaction. SENSORS (BASEL, SWITZERLAND) 2023; 23:1868. [PMID: 36850470 PMCID: PMC9961639 DOI: 10.3390/s23041868] [Citation(s) in RCA: 5] [Impact Index Per Article: 5.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/29/2022] [Revised: 01/23/2023] [Accepted: 02/01/2023] [Indexed: 06/18/2023]
Abstract
Human-Machine Interface (HMI) plays a key role in the interaction between people and machines, which allows people to easily and intuitively control the machine and immersively experience the virtual world of the meta-universe by virtual reality/augmented reality (VR/AR) technology. Currently, wearable skin-integrated tactile and force sensors are widely used in immersive human-machine interactions due to their ultra-thin, ultra-soft, conformal characteristics. In this paper, the recent progress of tactile and force sensors used in HMI are reviewed, including piezoresistive, capacitive, piezoelectric, triboelectric, and other sensors. Then, this paper discusses how to improve the performance of tactile and force sensors for HMI. Next, this paper summarizes the HMI for dexterous robotic manipulation and VR/AR applications. Finally, this paper summarizes and proposes the future development trend of HMI.
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Affiliation(s)
- Jiandong Xu
- School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
| | - Jiong Pan
- School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
| | - Tianrui Cui
- School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
| | - Sheng Zhang
- Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China
| | - Yi Yang
- School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
| | - Tian-Ling Ren
- School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
- Center for Flexible Electronics Technology, Tsinghua University, Beijing 100084, China
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19
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Feng Z, He Q, Wang X, Lin Y, Qiu J, Wu Y, Yang J. Capacitive Sensors with Hybrid Dielectric Structures and High Sensitivity over a Wide Pressure Range for Monitoring Biosignals. ACS APPLIED MATERIALS & INTERFACES 2023; 15:6217-6227. [PMID: 36691890 DOI: 10.1021/acsami.2c21885] [Citation(s) in RCA: 8] [Impact Index Per Article: 8.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/17/2023]
Abstract
Various dielectrics with porous structures or high dielectric constants have been designed to improve the sensitivity of capacitive pressure sensors (CPSs), but this strategy has only been effective for the low-pressure range. Here, a hierarchical gradient hybrid dielectric, composed of low-permittivity (low-k) polydimethylsiloxane (PDMS) foam with low Young's modulus (low-E) and high-permittivity (high-k) MWCNT/PDMS foam with high Young's modulus (high-E), is designed to develop a CPS for monitoring biosignals over a wide force range. The foam-like structure with hybrid permittivity (low-k + high-k) is facilitated to improve the sensitivity, while the hierarchical structure with gradient Young's modulus (low-E + high-E) contributes to broadening the pressure sensing range. With the hierarchical gradient hybrid structure, the flexible pressure sensor achieves an enhanced sensitivity of 2.155 kPa-1, a wide pressure range (up to 500 kPa), a minimum detection limit (50 Pa), and an excellent durability (>2500 cycles). As a demonstration, a venous thrombosis simulation and smart insole system are established to monitor venous blood clots and plantar pressures, respectively, which reveal potential applications in wearable medicine, sports health prediction, athlete training, and sports equipment design.
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Affiliation(s)
- Zhiping Feng
- Department of Optoelectronic Engineering, Key Laboratory of Optoelectronic Technology and Systems, Ministry of Education, Chongqing University, Chongqing400044, P. R. China
| | - Qiang He
- Department of Optoelectronic Engineering, Key Laboratory of Optoelectronic Technology and Systems, Ministry of Education, Chongqing University, Chongqing400044, P. R. China
| | - Xue Wang
- Department of Optoelectronic Engineering, Key Laboratory of Optoelectronic Technology and Systems, Ministry of Education, Chongqing University, Chongqing400044, P. R. China
| | - Yinggang Lin
- Department of Optoelectronic Engineering, Key Laboratory of Optoelectronic Technology and Systems, Ministry of Education, Chongqing University, Chongqing400044, P. R. China
| | - Jing Qiu
- Department of Optoelectronic Engineering, Key Laboratory of Optoelectronic Technology and Systems, Ministry of Education, Chongqing University, Chongqing400044, P. R. China
| | - Yufen Wu
- College of Physics and Electronic Engineering, Chongqing Normal University, Chongqing400044, P. R. China
| | - Jin Yang
- Department of Optoelectronic Engineering, Key Laboratory of Optoelectronic Technology and Systems, Ministry of Education, Chongqing University, Chongqing400044, P. R. China
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20
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Karmakar RS, Chu CP, Li CL, Hsueh CH, Liao YC, Lu YW. Skin-Inspired Tactile Sensor on Cellulose Fiber Substrates with Interfacial Microstructure for Health Monitoring and Guitar Posture Feedback. BIOSENSORS 2023; 13:174. [PMID: 36831940 PMCID: PMC9953271 DOI: 10.3390/bios13020174] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/30/2022] [Revised: 01/14/2023] [Accepted: 01/20/2023] [Indexed: 06/18/2023]
Abstract
Skin-inspired flexible tactile sensors, with interfacial microstructure, are developed on cellulose fiber substrates for subtle pressure applications. Our device is made of two cellulose fiber substrates with conductive microscale structures, which emulate the randomly distributed spinosum in between the dermis and epidermis layers of the human skin. The microstructures not only permit a higher stress concentration at the tips but also generate electrical contact points and change contact resistance between the top and bottom substrates when the pressure is applied. Meanwhile, cellulose fibers possessing viscoelastic and biocompatible properties are utilized as substrates to mimic the dermis and epidermis layers of the skin. The electrical contact resistances (ECR) are then measured to quantify the tactile information. The microstructures and the substrate properties are studied to enhance the sensors' sensitivity. A very high sensitivity (14.4 kPa-1) and fast recovery time (approx. 2.5 ms) are achieved in the subtle pressure range (approx. 0-0.05 kPa). The device can detect subtle pressures from the human body due to breathing patterns and voice activity showing its potential for healthcare. Further, the guitar strumming and chord progression of the players with different skill levels are assessed to monitor the muscle strain during guitar playing, showing its potential for posture feedback in playing guitar or another musical instrument.
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Affiliation(s)
- Rajat Subhra Karmakar
- Department of Biomechatronics Engineering, National Taiwan University, 10617 Taipei, Taiwan
| | - Chia-Pei Chu
- Department of Chemical Engineering, National Taiwan University, 10617 Taipei, Taiwan
| | - Chia-Lin Li
- Department of Materials Science and Engineering, National Taiwan University, 10617 Taipei, Taiwan
| | - Chun-Hway Hsueh
- Department of Materials Science and Engineering, National Taiwan University, 10617 Taipei, Taiwan
| | - Ying-Chih Liao
- Department of Chemical Engineering, National Taiwan University, 10617 Taipei, Taiwan
| | - Yen-Wen Lu
- Department of Biomechatronics Engineering, National Taiwan University, 10617 Taipei, Taiwan
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21
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Xu Z, Wu D, Chen Z, Wang Z, Cao C, Shao X, Zhou G, Zhang S, Wang L, Sun D. A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model. MICROSYSTEMS & NANOENGINEERING 2023; 9:5. [PMID: 36620391 PMCID: PMC9810721 DOI: 10.1038/s41378-022-00477-w] [Citation(s) in RCA: 10] [Impact Index Per Article: 10.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 08/05/2022] [Revised: 11/01/2022] [Accepted: 12/04/2022] [Indexed: 06/17/2023]
Abstract
The tactile pressure sensor is of great significance in flexible electronics, but sensitivity customization over the required working range with high linearity still remains a critical challenge. Despite numerous efforts to achieve high sensitivity and a wide working range, most sensitive microstructures tend to be obtained only by inverting naturally existing templates without rational design based on fundamental contact principles or models for piezoresistive pressure sensors. Here, a positive design strategy with a hyperelastic model and a Hertzian contact model for comparison was proposed to develop a flexible pressure sensor with highly customizable linear sensitivity and linearity, in which the microstructure distribution was precalculated according to the desired requirement prior to fabrication. As a proof of concept, three flexible pressure sensors exhibited sensitivities of 0.7, 1.0, and 1.3 kPa- 1 over a linear region of up to 200 kPa, with a low sensitivity error (<5%) and high linearity (~0.99), as expected. Based on the superior electromechanical performance of these sensors, potential applications in physiological signal recognition are demonstrated as well, and such a strategy could shed more light on demand-oriented scenarios, including designable working ranges and linear sensitivity for next-generation wearable devices.
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Affiliation(s)
- Zhenjin Xu
- Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen, 361005 China
- Shenzhen Research Institute of Xiamen University, Shenzhen, 518057 China
| | - Dezhi Wu
- Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen, 361005 China
- Shenzhen Research Institute of Xiamen University, Shenzhen, 518057 China
| | - Zhiwen Chen
- Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen, 361005 China
- Shenzhen Research Institute of Xiamen University, Shenzhen, 518057 China
| | - Zhongbao Wang
- Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen, 361005 China
- Shenzhen Research Institute of Xiamen University, Shenzhen, 518057 China
| | - Cong Cao
- Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen, 361005 China
- Shenzhen Research Institute of Xiamen University, Shenzhen, 518057 China
| | - Xiangyu Shao
- Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen, 361005 China
| | - Gang Zhou
- Beijing Key Laboratory of Long-Life Technology of Precise Rotation and Transmission Mechanisms, Beijing Institute of Control Engineering, Beijing, 100094 China
| | - Shaohua Zhang
- Beijing Key Laboratory of Long-Life Technology of Precise Rotation and Transmission Mechanisms, Beijing Institute of Control Engineering, Beijing, 100094 China
| | - Lingyun Wang
- Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen, 361005 China
- Shenzhen Research Institute of Xiamen University, Shenzhen, 518057 China
| | - Daoheng Sun
- Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen, 361005 China
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22
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Li D, Zhou J, Yao K, Liu S, He J, Su J, Qu Q, Gao Y, Song Z, Yiu C, Sha C, Sun Z, Zhang B, Li J, Huang L, Xu C, Wong TH, Huang X, Li J, Ye R, Wei L, Zhang Z, Guo X, Dai Y, Xie Z, Yu X. Touch IoT enabled by wireless self-sensing and haptic-reproducing electronic skin. SCIENCE ADVANCES 2022; 8:eade2450. [PMID: 36563155 PMCID: PMC9788763 DOI: 10.1126/sciadv.ade2450] [Citation(s) in RCA: 17] [Impact Index Per Article: 8.5] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 08/03/2022] [Accepted: 11/29/2022] [Indexed: 06/17/2023]
Abstract
Tactile sensations are mainly transmitted to each other by physical touch. Wireless touch perception could be a revolution for us to interact with the world. Here, we report a wireless self-sensing and haptic-reproducing electronic skin (e-skin) to realize noncontact touch communications. A flexible self-sensing actuator was developed to provide an integrated function in both tactile sensing and haptic feedback. When this e-skin was dynamically pressed, the actuator generated an induced voltage as tactile information. Via wireless communication, another e-skin could receive this tactile data and run a synchronized haptic reproduction. Thus, touch could be wirelessly conveyed in bidirections between two users as a touch intercom. Furthermore, this e-skin could be connected with various smart devices to form a touch internet of things where one-to-one and one-to-multiple touch delivery could be realized. This wireless touch presents huge potentials in remote touch video, medical care/assistance, education, and many other applications.
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Affiliation(s)
- Dengfeng Li
- Department of Biomedical Engineering, City University of Hong Kong, Hong Kong SAR 999077, China
- Hong Kong Centre for Cerebro-Cardiovascular Health Engineering (COCHE), Hong Kong SAR 999077, China
| | - Jingkun Zhou
- Department of Biomedical Engineering, City University of Hong Kong, Hong Kong SAR 999077, China
- Hong Kong Centre for Cerebro-Cardiovascular Health Engineering (COCHE), Hong Kong SAR 999077, China
| | - Kuanming Yao
- Department of Biomedical Engineering, City University of Hong Kong, Hong Kong SAR 999077, China
| | - Sitong Liu
- State Key Laboratory of Structural Analysis for Industrial Equipment, Department of Engineering Mechanics, Dalian University of Technology, Dalian 116024, China
| | - Jiahui He
- Department of Biomedical Engineering, City University of Hong Kong, Hong Kong SAR 999077, China
| | - Jingyou Su
- Department of Biomedical Engineering, City University of Hong Kong, Hong Kong SAR 999077, China
| | - Qing’ao Qu
- Department of Biomedical Engineering, City University of Hong Kong, Hong Kong SAR 999077, China
| | - Yuyu Gao
- Department of Biomedical Engineering, City University of Hong Kong, Hong Kong SAR 999077, China
| | - Zhen Song
- State Key Laboratory of Structural Analysis for Industrial Equipment, Department of Engineering Mechanics, Dalian University of Technology, Dalian 116024, China
| | - Chunki Yiu
- Department of Biomedical Engineering, City University of Hong Kong, Hong Kong SAR 999077, China
- Hong Kong Centre for Cerebro-Cardiovascular Health Engineering (COCHE), Hong Kong SAR 999077, China
| | - Chuanlu Sha
- Department of Biomedical Engineering, City University of Hong Kong, Hong Kong SAR 999077, China
| | - Zhi Sun
- State Key Laboratory of Structural Analysis for Industrial Equipment, Department of Engineering Mechanics, Dalian University of Technology, Dalian 116024, China
- Ningbo Institute of Dalian University of Technology, Ningbo 315016, China
| | - Binbin Zhang
- Department of Biomedical Engineering, City University of Hong Kong, Hong Kong SAR 999077, China
- Hong Kong Centre for Cerebro-Cardiovascular Health Engineering (COCHE), Hong Kong SAR 999077, China
| | - Jian Li
- Department of Biomedical Engineering, City University of Hong Kong, Hong Kong SAR 999077, China
- Hong Kong Centre for Cerebro-Cardiovascular Health Engineering (COCHE), Hong Kong SAR 999077, China
| | - Libei Huang
- Department of Chemistry, City University of Hong Kong, Hong Kong SAR 999077, China
| | - Chenyu Xu
- Department of Biomedical Engineering, City University of Hong Kong, Hong Kong SAR 999077, China
| | - Tsz Hung Wong
- Department of Biomedical Engineering, City University of Hong Kong, Hong Kong SAR 999077, China
| | - Xingcan Huang
- Department of Biomedical Engineering, City University of Hong Kong, Hong Kong SAR 999077, China
| | - Jiyu Li
- Department of Biomedical Engineering, City University of Hong Kong, Hong Kong SAR 999077, China
- Hong Kong Centre for Cerebro-Cardiovascular Health Engineering (COCHE), Hong Kong SAR 999077, China
| | - Ruquan Ye
- Department of Chemistry, City University of Hong Kong, Hong Kong SAR 999077, China
| | - Lei Wei
- Tencent Robotics X, Shenzhen 518054, China
| | | | - Xu Guo
- State Key Laboratory of Structural Analysis for Industrial Equipment, Department of Engineering Mechanics, Dalian University of Technology, Dalian 116024, China
- Ningbo Institute of Dalian University of Technology, Ningbo 315016, China
| | - Yuan Dai
- Tencent Robotics X, Shenzhen 518054, China
| | - Zhaoqian Xie
- State Key Laboratory of Structural Analysis for Industrial Equipment, Department of Engineering Mechanics, Dalian University of Technology, Dalian 116024, China
- Ningbo Institute of Dalian University of Technology, Ningbo 315016, China
| | - Xinge Yu
- Department of Biomedical Engineering, City University of Hong Kong, Hong Kong SAR 999077, China
- Hong Kong Centre for Cerebro-Cardiovascular Health Engineering (COCHE), Hong Kong SAR 999077, China
- City University of Hong Kong Shenzhen Research Institute, Shenzhen 518057, China
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23
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Jing M, Zhou J, Zhang P, Hou D, Shen J, Tian J, Chen W. Porous AgNWs/Poly(vinylidene fluoride) Composite-Based Flexible Piezoresistive Sensor with High Sensitivity and Wide Pressure Ranges. ACS APPLIED MATERIALS & INTERFACES 2022; 14:55119-55129. [PMID: 36451588 DOI: 10.1021/acsami.2c17879] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/17/2023]
Abstract
Flexible piezoresistive sensors are highly desirable for tactile sensing and wearable electronics. However, the reported flexible piezoresistive sensors have the inherent trade-off effect between high sensitivity and wide pressure ranges. Herein, we report a flexible piezoresistive sensor with a three-dimensional (3D) porous microstructured sensing layer composed of silver nanowires (AgNWs) and a poly(vinylidene fluoride) (PVDF) matrix, exhibiting high sensitivity and wide pressure ranges. Benefiting from the conductive networks of AgNWs and the 3D porous structure of PVDF, the porous AgNWs/PVDF composite (PAPC)-based flexible piezoresistive sensor exhibits high sensitivities of 0.014 and 0.009 kPa-1 in the wide pressure ranges of 0-30 and 30-100 kPa, respectively. In addition, the fabricated sensor also shows a fast response time of 64 ms, a low detection limit of 25 Pa, and long-term durability over 10,000 continuous cycles. The PAPC-based flexible piezoresistive sensor can accurately monitor various human physiological activities (ranging from subtle deformations to vigorous body movements) by quantitatively measuring the tactile sensation on human skin. This work indicates that the proposed sensor can be potentially applicable to mobile healthcare monitoring devices as well as next-generation wearable electronics.
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Affiliation(s)
- Mengyuan Jing
- State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, School of Materials Science and Engineering, Wuhan University of Technology, Wuhan, Hubei 430070, P. R. China
| | - Jing Zhou
- State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, School of Materials Science and Engineering, Wuhan University of Technology, Wuhan, Hubei 430070, P. R. China
- Sanya Science and Education Innovation Park, Wuhan University of Technology, Sanya, Hainan 572025, P. R. China
| | - Pengchao Zhang
- State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, School of Materials Science and Engineering, Wuhan University of Technology, Wuhan, Hubei 430070, P. R. China
- Sanya Science and Education Innovation Park, Wuhan University of Technology, Sanya, Hainan 572025, P. R. China
| | - Dajun Hou
- State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, School of Materials Science and Engineering, Wuhan University of Technology, Wuhan, Hubei 430070, P. R. China
| | - Jie Shen
- State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, School of Materials Science and Engineering, Wuhan University of Technology, Wuhan, Hubei 430070, P. R. China
| | - Jing Tian
- State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, School of Materials Science and Engineering, Wuhan University of Technology, Wuhan, Hubei 430070, P. R. China
- Sanya Science and Education Innovation Park, Wuhan University of Technology, Sanya, Hainan 572025, P. R. China
| | - Wen Chen
- State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, School of Materials Science and Engineering, Wuhan University of Technology, Wuhan, Hubei 430070, P. R. China
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24
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Yao S, Yu J, Jiang X, Xu J, Lan K, Yao Z. Fabrication and Experimental Validation of a Sensitive and Robust Tactile Sensing Array with a Micro-Structured Porous Dielectric Layer. MICROMACHINES 2022; 13:mi13101724. [PMID: 36296076 PMCID: PMC9608838 DOI: 10.3390/mi13101724] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/25/2022] [Revised: 10/07/2022] [Accepted: 10/08/2022] [Indexed: 06/02/2023]
Abstract
The development of pressure sensors of high sensitivity and stable robustness over a broad range is indispensable for the future progress of electronic skin applicable to the detection of normal and shear pressures of various dynamic human motions. Herein, we present a flexible capacitive tactile sensing array that incorporates a porous dielectric layer with micro-patterned structures on the surface to enable the sensitive detection of normal and shear pressures. The proposed sensing array showed great pressure-sensing performance in the experiments, with a broad sensing range from several kPa to 150 kPa of normal pressure and 20 kPa of shear pressure. Sensitivities of 0.54%/kPa at 10 kPa and below, 0.45%/kPa between 10 kPa and 80 kPa, and 0.12%/kPa at 80 kPa and above were achieved for normal pressures. Meanwhile, for shear pressures, sensitivities up to 1.14%/kPa and 1.08%/kPa in x and y directions, respectively, and below 10 kPa, 0.73%/kPa, and 0.75%/kPa under shear pressure over 10 kPa were also validated. The performance of the finger-attached sensing array was also demonstrated, demonstrating which was a potential electronic skin to use in all kinds of wearable devices, including prosthetic hands, surgical robots, and other pressure monitoring systems.
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Affiliation(s)
- Shengjie Yao
- Key Laboratory of Air-Driven Equipment of Zhejiang Province, Quzhou University, Quzhou 324000, China
- College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou 310023, China
| | - Jianping Yu
- Key Laboratory of Air-Driven Equipment of Zhejiang Province, Quzhou University, Quzhou 324000, China
- College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou 310023, China
| | - Xiaoliang Jiang
- Key Laboratory of Air-Driven Equipment of Zhejiang Province, Quzhou University, Quzhou 324000, China
| | - Junfei Xu
- Key Laboratory of Air-Driven Equipment of Zhejiang Province, Quzhou University, Quzhou 324000, China
| | - Kun Lan
- Key Laboratory of Air-Driven Equipment of Zhejiang Province, Quzhou University, Quzhou 324000, China
| | - Zhehe Yao
- College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou 310023, China
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25
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Ren M, Sun Z, Zhang M, Yang X, Guo D, Dong S, Dhakal R, Yao Z, Li Y, Kim NY. A high-performance wearable pressure sensor based on an MXene/PVP composite nanofiber membrane for health monitoring. NANOSCALE ADVANCES 2022; 4:3987-3995. [PMID: 36133328 PMCID: PMC9470067 DOI: 10.1039/d2na00339b] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/29/2022] [Accepted: 08/14/2022] [Indexed: 06/16/2023]
Abstract
Flexible and wearable pressure sensors have attracted extensive attention in domains, such as electronic skin, medical monitoring and human-machine interaction. However, developing a pressure sensor with high sensitivity, mechanical stability and a wide detection range remains a huge challenge. In this work, a flexible capacitive pressure sensor, based on a Ti3C2T x (MXene)/polyvinyl pyrrolidone (PVP) composite nanofiber membrane (CNM), prepared via an efficient electrospinning process, is presented. The experimental results show that even a small mass fraction of MXene can effectively decrease the compression modulus of the PVP nanofiber membrane, thus enhancing the sensing performance. Specifically, the sensor based on (0.1 wt% MXene)/PVP CNM has a high sensitivity (0.5 kPa-1 at 0-1.5 kPa), a fast response/recovery time (45/45 ms), a wide pressure detection range (0-200 kPa), a low detection limit (∼9 Pa) and an excellent mechanical stability (8000 cycles). Due to its superior performance, the sensor can monitor subtle changes in human physiology and other signals, such as pulse, respiration, human joint motions and airflow. In addition, a 4 × 4 sensor array is fabricated that can accurately map the shape and position of objects with good resolution. The high-performance flexible pressure sensor, as developed in this work, shows good application prospects in advanced human-computer interface systems.
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Affiliation(s)
- Mengna Ren
- College of Electronic and Information, Qingdao University Qingdao 266071 China
| | - Zhongsen Sun
- College of Electronic and Information, Qingdao University Qingdao 266071 China
| | - Mengqi Zhang
- College of Electronic and Information, Qingdao University Qingdao 266071 China
| | - Xiaojun Yang
- College of Electronic and Information, Qingdao University Qingdao 266071 China
| | - Dedong Guo
- College of Electronic and Information, Qingdao University Qingdao 266071 China
| | - Shuheng Dong
- College of Electronic and Information, Qingdao University Qingdao 266071 China
| | - Rajendra Dhakal
- Department of Computer Science and Engineering, Sejong University Seoul 05006 Korea
| | - Zhao Yao
- College of Electronic and Information, Qingdao University Qingdao 266071 China
| | - Yuanyue Li
- College of Electronic and Information, Qingdao University Qingdao 266071 China
| | - Nam Young Kim
- Department of Electronic Engineering, Kwangwoon University Seoul 01897 Korea
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26
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Research Progresses in Microstructure Designs of Flexible Pressure Sensors. Polymers (Basel) 2022; 14:polym14173670. [PMID: 36080744 PMCID: PMC9460742 DOI: 10.3390/polym14173670] [Citation(s) in RCA: 4] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/03/2022] [Revised: 08/30/2022] [Accepted: 09/01/2022] [Indexed: 02/06/2023] Open
Abstract
Flexible electronic technology is one of the research hotspots, and numerous wearable devices have been widely used in our daily life. As an important part of wearable devices, flexible sensors can effectively detect various stimuli related to specific environments or biological species, having a very bright development prospect. Therefore, there has been lots of studies devoted to developing high-performance flexible pressure sensors. In addition to developing a variety of materials with excellent performances, the microstructure designs of materials can also effectively improve the performances of sensors, which has brought new ideas to scientists and attracted their attention increasingly. This paper will summarize the flexible pressure sensors based on material microstructure designs in recent years. The paper will mainly discuss the processing methods and characteristics of various sensors with different microstructures, and compare the advantages, disadvantages, and application scenarios of them. At the same time, the main application fields of flexible pressure sensors based on microstructure designs will be listed, and their future development and challenges will be discussed.
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27
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Zhang X, Lu L, Wang W, Zhao N, He P, Liu J, Yang B. Flexible Pressure Sensors with Combined Spraying and Self-Diffusion of Carbon Nanotubes. ACS APPLIED MATERIALS & INTERFACES 2022; 14:38409-38420. [PMID: 35950563 DOI: 10.1021/acsami.2c12240] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
High-performance wearable sensors are required for applications in medical health and human-machine interaction, but their application has limited owing to the trade-off between sensitivity, pressure range, and durability. Herein, we propose the combined spraying and self-diffusion process of carbon nanotubes (CNTs) to balance and improve these parameters with the CNTs spontaneously diffusing into the film surface before the film curing. The obtained sensor not only achieves high sensitivity (155.54 kPa-1) and ultrawide pressure detection range (0.1-500 kPa) but also exhibits exceptional durability (over 12,000 pressure cycles at a high pressure of 300 kPa). In addition, the sensor exhibits a fast response (25 ms), good stability, and full flexibility. This process is a general approach that may improve the performance of various types of thin film piezoresistive sensors. Besides, the fabricated sensors can be flexibly scaled into sensor arrays and communicate with smart devices to achieve wireless smart monitoring. At present, the sensor shows broad application prospects in the fields of intelligent medical health and motion sensing.
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Affiliation(s)
- Xin Zhang
- National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China
- Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Lijun Lu
- National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China
- Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Wenduo Wang
- National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China
- Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Ning Zhao
- Department of Orthodontics, Shanghai Ninth People's Hospital, Shanghai Jiao Tong University School of Medicine, College of Stomatology, Shanghai Jiao Tong University, National Center for Stomatology, National Clinical Research Center for Oral Diseases, Shanghai Key Laboratory of Stomatology, Shanghai 200011, China
| | - Peng He
- Science and Technology on Reactor System Design Technology Laboratory, Nuclear Power Institute of China, Chengdu 610213, China
| | - Jingquan Liu
- National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Bin Yang
- National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China
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28
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Chen Z, Zhang Y, Zhu B, Wu Y, Du X, Lin L, Wu D. Laser-Sculptured Hierarchical Spinous Structures for Ultra-High-Sensitivity Iontronic Sensors with a Broad Operation Range. ACS APPLIED MATERIALS & INTERFACES 2022; 14:19672-19682. [PMID: 35442620 DOI: 10.1021/acsami.2c01356] [Citation(s) in RCA: 12] [Impact Index Per Article: 6.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
Tactile pressure sensing over a wide operation range (>1 MPa) is challenging for a variety of applications in fields such as aviation, oceanography, and biomedicine. Recently, innovative strategies have been utilized to improve the performances of tactile sensors using specially designed structures, dielectric layers, and electrodes. Here, a hierarchical structural design based on ionic gel films has been utilized to build iontronic pressure sensors with ultrahigh sensitivities and broad operation ranges. Sculptured patterns made by a controlled CO2 laser scanning process have been produced on polyimide films to achieve two kinds of protrusion structures for high specific surface areas and strength to withstand high pressure. The iontronic sensor has been constructed by adding two screen-printed electrodes of high surface areas to achieve an ultrahigh sensitivity of 2593 kPa-1 and a wide pressure range from 0 Pa to 3.36 MPa. The prototype device also has a fast response and recovery time of 26 and 13 ms, respectively, and an excellent mechanical durability in the endurance test of over 2700 repeated loading and unloading cycles under a pressure of 1 MPa. Several application examples have been demonstrated, including the detection of physiological signals on human volunteers, the feedback control of intelligent robots, the grasping operation of underwater soft grippers, and the environmental wind-speed monitoring. As such, this work demonstrates a versatile and economical methodology to produce high-performance flexible sensors for various potential applications.
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Affiliation(s)
- Zhuo Chen
- Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China
- Shenzhen Research Institute of Xiamen University, Shenzhen 518057, China
| | - Yang Zhang
- Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China
- Shenzhen Research Institute of Xiamen University, Shenzhen 518057, China
| | - Bin Zhu
- Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China
- Shenzhen Research Institute of Xiamen University, Shenzhen 518057, China
| | - Yigen Wu
- Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China
- Shenzhen Research Institute of Xiamen University, Shenzhen 518057, China
| | - Xiaohui Du
- Sensor and Network Control Center, Instrumentation Technology and Economy Institute, Beijing 100055, China
| | - Liwei Lin
- Department of Mechanical Engineering, University of California at Berkeley, Berkeley, California 94720, United States
| | - Dezhi Wu
- Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China
- Shenzhen Research Institute of Xiamen University, Shenzhen 518057, China
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29
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Xu J, Li X, Chang H, Zhao B, Tan X, Yang Y, Tian H, Zhang S, Ren TL. Electrooculography and Tactile Perception Collaborative Interface for 3D Human-Machine Interaction. ACS NANO 2022; 16:6687-6699. [PMID: 35385249 DOI: 10.1021/acsnano.2c01310] [Citation(s) in RCA: 19] [Impact Index Per Article: 9.5] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
The human-machine interface (HMI) previously relied on a single perception interface that cannot realize three-dimensional (3D) interaction and convenient and accurate interaction in multiple scenes. Here, we propose a collaborative interface including electrooculography (EOG) and tactile perception for fast and accurate 3D human-machine interaction. The EOG signals are mainly used for fast, convenient, and contactless 2D (XY-axis) interaction, and the tactile sensing interface is mainly utilized for complex 2D movement control and Z-axis control in the 3D interaction. The honeycomb graphene electrodes for the EOG signal acquisition and tactile sensing array are prepared by a laser-induced process. Two pairs of ultrathin and breathable honeycomb graphene electrodes are attached around the eyes for monitoring nine different eye movements. A machine learning algorithm is designed to train and classify the nine different eye movements with an average prediction accuracy of 92.6%. Furthermore, an ultrathin (90 μm), stretchable (∼1000%), and flexible tactile sensing interface assembled by a pair of 4 × 4 planar electrode arrays is attached to the arm for 2D movement control and Z-axis interaction, which can realize single-point, multipoint and sliding touch functions. Consequently, the tactile sensing interface can achieve eight directions control and even more complex movement trajectory control. Meanwhile, the flexible and ultrathin tactile sensor exhibits an ultrahigh sensitivity of 1.428 kPa-1 in the pressure range 0-300 Pa with long-term response stability and repeatability. Therefore, the collaboration between EOG and the tactile perception interface will play an important role in rapid and accurate 3D human-machine interaction.
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Affiliation(s)
- Jiandong Xu
- School of Integrated Circuits, Tsinghua University, Beijing 100084, China
- Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
| | - Xiaoshi Li
- School of Integrated Circuits, Tsinghua University, Beijing 100084, China
- Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
| | - Hao Chang
- School of Integrated Circuits, Tsinghua University, Beijing 100084, China
- Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
| | - Bingchen Zhao
- School of Integrated Circuits, Tsinghua University, Beijing 100084, China
- Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
| | - Xichao Tan
- School of Integrated Circuits, Tsinghua University, Beijing 100084, China
- Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
| | - Yi Yang
- School of Integrated Circuits, Tsinghua University, Beijing 100084, China
- Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
| | - He Tian
- School of Integrated Circuits, Tsinghua University, Beijing 100084, China
- Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
| | - Sheng Zhang
- Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China
| | - Tian-Ling Ren
- School of Integrated Circuits, Tsinghua University, Beijing 100084, China
- Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
- Center for Flexible Electronics Technology, Tsinghua University, Beijing 100084, China
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30
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Bai N, Wang L, Xue Y, Wang Y, Hou X, Li G, Zhang Y, Cai M, Zhao L, Guan F, Wei X, Guo CF. Graded Interlocks for Iontronic Pressure Sensors with High Sensitivity and High Linearity over a Broad Range. ACS NANO 2022; 16:4338-4347. [PMID: 35234457 DOI: 10.1021/acsnano.1c10535] [Citation(s) in RCA: 52] [Impact Index Per Article: 26.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
Flexible pressure sensors that have high sensitivity, high linearity, and a wide pressure-response range are highly desired in applications of robotic sensation and human health monitoring. The challenge comes from the incompressibility of soft materials and the stiffening of microstructures in the device interfaces that lead to gradually saturated response. Therefore, the signal is nonlinear and pressure-response range is limited. Here, we show an iontronic flexible pressure sensor that can achieve high sensitivity (49.1 kPa-1), linear response (R2 > 0.995) over a broad pressure range (up to 485 kPa) enabled by graded interlocks of an array of hemispheres with fine pillars in the ionic layer. The high linearity comes from the fact that the pillar deformation can compensate for the effect of structural stiffening. The response-relaxation time of the sensor is <5 ms, allowing the device to detect vibration signals with frequencies up to 200 Hz. Our sensor has been used to recognize objects with different weights based on machine learning during the gripper grasping tasks. This work provides a strategy to make flexible pressure sensors that have combined performances of high sensitivity, high linearity, and wide pressure-response range.
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Affiliation(s)
- Ningning Bai
- School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China
- Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China
| | - Liu Wang
- Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China
| | - Yiheng Xue
- Department of Computer Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China
| | - Yan Wang
- Department of Physics, Nanchang University, Nanchang 330031, China
| | - Xingyu Hou
- Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China
| | - Gang Li
- Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China
| | - Yuan Zhang
- Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China
| | - Minkun Cai
- Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China
| | - Lingyu Zhao
- Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China
| | - Fangyi Guan
- Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China
| | - Xueyong Wei
- State key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China
| | - Chuan Fei Guo
- Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China
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31
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Shi Y, Lü X, Zhao J, Wang W, Meng X, Wang P, Li F. Flexible Capacitive Pressure Sensor Based on Microstructured Composite Dielectric Layer for Broad Linear Range Pressure Sensing Applications. MICROMACHINES 2022; 13:mi13020223. [PMID: 35208347 PMCID: PMC8880179 DOI: 10.3390/mi13020223] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 01/15/2022] [Revised: 01/27/2022] [Accepted: 01/28/2022] [Indexed: 12/02/2022]
Abstract
Flexible pressure sensors have attracted a considerable amount of attention in various fields including robotics and healthcare applications, among others. However, it remains significantly challenging to design and fabricate a flexible capacitive pressure sensor with a quite broad linearity detection range due to the nonlinear stress–strain relation of the hyperelastic polymer-based dielectric material. Along these lines, in this work, a novel flexible capacitive pressure sensor with microstructured composite dielectric layer (MCDL) is demonstrated. The MCDL was prepared by enforcing a solvent-free planetary mixing and replica molding method, while the performances of the flexible capacitive pressure sensor were characterized by performing various experimental tests. More specifically, the proposed capacitive pressure sensor with 4.0 wt % cone-type MCDL could perceive external pressure loads with a broad detection range of 0–1.3 MPa, which yielded a high sensitivity value of 3.97 × 10−3 kPa−1 in a relative wide linear range of 0–600 kPa. Moreover, the developed pressure sensor exhibited excellent repeatability during the application of 1000 consecutive cycles and a fast response time of 150 ms. Finally, the developed sensor was utilized for wearable monitoring and spatial pressure distribution sensing applications, which indicates the great perspectives of our approach for potential use in the robotics and healthcare fields.
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Affiliation(s)
- Yaoguang Shi
- School of Aerospace Science and Technology, Xidian University, Xi’an 710071, China; (Y.S.); (J.Z.); (W.W.); (X.M.)
| | - Xiaozhou Lü
- School of Aerospace Science and Technology, Xidian University, Xi’an 710071, China; (Y.S.); (J.Z.); (W.W.); (X.M.)
- Correspondence:
| | - Jihao Zhao
- School of Aerospace Science and Technology, Xidian University, Xi’an 710071, China; (Y.S.); (J.Z.); (W.W.); (X.M.)
| | - Wenran Wang
- School of Aerospace Science and Technology, Xidian University, Xi’an 710071, China; (Y.S.); (J.Z.); (W.W.); (X.M.)
| | - Xiangyu Meng
- School of Aerospace Science and Technology, Xidian University, Xi’an 710071, China; (Y.S.); (J.Z.); (W.W.); (X.M.)
| | - Pengfei Wang
- Qian Xuesen Laboratory of Space Technology, China Academy of Space Technology, Beijing 100094, China;
| | - Fan Li
- Key Laboratory of Flight Techniques and Flight Safety, CAAC, Civil Aviation Flight University of China, Guanghan 618307, China;
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