Polarization-Insensitive Metalenses at Visible Wavelengths

Multidimensional multiplexing metalens for STED microscopy

Stimulated emission depletion (STED) microscopy is a versatile super-resolution imaging technique for life sciences and data storage. Despite continuous breakthroughs, modern STED microscopes are still relatively bulky and limited to laboratory setups. Here, we exploit the multidimensional multiplexing properties of metalenses and experimentally demonstrate the realization of a compact STED lens with a single metasurface. A 635-nm right-handed circularly polarized excitation laser is focused by the metalens into a diffraction-limited Gaussian beam, while a 780-nm depletion beam with opposite chirality is converted into a high-quality donut-shaped focus on the same plane. As a consequence, STED super-resolution imaging based on the metalens has been obtained by recording the unpolarized photoluminescence using the same metalens. The experimentally demonstrated resolution reaches 0.7× of the diffraction limit and can be further improved. This study represents a critical step toward the miniaturization and integration of STED microscope.

Full-Color Quasi-Achromatic Imaging with a Dual-Functional Metasurface

Achieving broadband achromaticity in the visible spectrum is critical for enhancing the imaging performance of metalenses. However, many previous studies remain constrained by small device sizes or small numerical aperture. In this study, we propose a polarization-multiplexed metalens capable of generating zero- and high-order Bessel beams to achieve quasi-achromatic correction without size limitations. An image subtraction method with the two polarization channels is developed to mitigate the Bessel beam sidelobes to improve imaging quality. Our results demonstrate an effective quasi-achromatic focusing and imaging over a continuous wavelength range of 450-700 nm with long focus depth. The image subtraction method significantly enhances the image clarity and contrast, providing new insights for full-color imaging and detection.

Broadband and polarization-independent complex amplitude modulation using a single layer dielectric metasurface

Precise control over amplitude and phase across the entire space is crucial for generating user-defined wavefronts and has significant value for designing flexible optical systems. Metasurfaces have emerged as compact and effective platforms for such control, offering high spatial resolution and continuity. However, traditional methods only work at specific wavelengths or polarization states, and the demonstration of full space complex amplitude control for broadband and unpolarized light remains limited. In this study, we leverage the principle of dual meta-atom interference to simultaneously modulate amplitude and phase using a single layer metasurface. Using a randomly polarized light source, nanoprinting and Fourier holography displays of complex patterns are achieved within the wavelength range of 480-640 nm, and the results are consistent with simulations. This approach presents several key advantages: continuous, precise and robust modulation of complex amplitude as well as polarization-independent and broadband response, which significantly reduce constraints on the light source's property and fabrication and make it well-suited for a variety of practical applications, including holographic displays, high-capacity communications, computational imaging, and laser beam processing.

Dielectric metasurfaces based on a phase singularity in the region of high reflectance

Metasurfaces, two-dimensional planar optical devices based on subwavelength-scale structures, have garnered significant attention for their potential to replace conventional optical components in various fields. These devices can manipulate the amplitude, phase, and polarization of light in versatile ways, offering complex functionalities within a single, space-efficient device. However, enhancing their functionality remains a challenge, requiring an expansion in the design flexibility of the structural elements, known as meta-atoms. In this study, we revealed that by varying the two independent lengths of the cross-shaped structure at a wavelength of 980 nm, a phase singularity exists in the region of high reflection. In addition, we found that the phase of transmitted light can be modulated from 0 to 2π by encircling this singularity. Based on the identified phase singularity, we designed and fabricated a polarization-independent metalens with varying numerical apertures to experimentally validate the feasibility of high-reflectivity transmissive wavefront engineering metasurfaces. The introduced meta-atoms based on a phase singularity are expected to open new avenues for applications, such as those requiring light attenuation and concentration simultaneously or the development of resonant cavity structures capable of beam modulation.

Centimeter-size achromatic metalens in long-wave infrared

Metalens has shown its significantly ultra-light and ultra-thin features. However, large-aperture achromatic metalens is constrained by both maximum dispersion range and computational memory. Here, we propose a fully device optimizing framework that engineers phase dispersion and amplitude transmittance to create centimeter-size achromatic metalens operating in long-wave infrared regime (8-12 μm). Via wrapping group delay within a defined range and optimizing dispersion phase of desired wavelengths, chromatic aberrations can be effectively corrected. We verify our design by characterizing all-silicon 3.18-cm-diameter and 6.36-cm-diameter LWIR achromatic metalenses. Diffraction-limited tight-focusing can be achieved, and the normalized focal length shift is less than 3.3 × 10-4. Thermal imaging performance is verified on targets of holes or letters with a diameter or line width exceeding 2 mm. These findings facilitate the development of large-aperture achromatic metalenses and open up possibilities for lightweight imaging systems in long-wave infrared.

Exploiting the combined dynamic and geometric phases for optical vortex beam generation using metasurfaces

The generation of optical vortex beams is pivotal for a myriad of applications, encompassing optical tweezing, optical communications, and quantum information, among others. The metasurface-based approach has realized significant advancements in vortex production, utilizing either dynamic or geometric phases. The dynamic design exhibits indifference to the polarization state of incident light, while the geometric design is inextricably tied to it. In the study, we put forth the proposition that combining dynamic and geometric phases could unlock the potential of metasurface design in generating optical vortices. A hybrid design that harnesses the combined dynamic and geometric phases can attain the same objective while offering tunable functional control over the polarization of light. We establish a correlation between the structural parameters of metasurface and the topological charge of the resulting vortices. The experimental results fully demonstrate the design's flexibility and its effective control over the polarization constraints of incident light. Our research uncovers the capacity for vortex generation through the manipulation of hybrid phases introduced by metasurfaces, indicating significant potential for the design of optical devices and the future advancement of innovative optical applications.

An achromatic metasurface waveguide for augmented reality displays

Augmented reality (AR) displays are emerging as the next generation of interactive platform, providing deeper human-digital interactions and immersive experiences beyond traditional flat-panel displays. Diffractive waveguide is a promising optical combiner technology for AR owing to its potential for the slimmest geometry and lightest weight. However, severe chromatic aberration of diffractive coupler has constrained widespread adoption of diffractive waveguide. Wavelength-dependent light deflection, caused by dispersion in both in-coupling and out-coupling processes, results in limited full-color field of view (FOV) and nonuniform optical responses in color and angular domains. Here we introduce an innovative full-color AR system that overcomes this long-standing challenge of chromatic aberration using a combination of inverse-designed metasurface couplers and a high refractive index waveguide. The optimized metasurface couplers demonstrate true achromatic behavior across the maximum FOV supported by the waveguide (exceeding 45°). Our AR prototype based on the designed metasurface waveguide, exhibits superior color accuracy and uniformity. This unique achromatic metasurface waveguide technology is expected to advance the development of visually compelling experience in compact AR display systems.

Bird's eye inspired hyperuniform disordered TiO2 meta-atom based high-efficiency metalens

We proposed an ingenious, highly efficient TiO2 meta-atom (MA)-based near-infrared disordered metalens structure harnessing bird's eye-inspired hyperuniform distribution and analyzed its optical and imaging properties employing the finite-difference time-domain (FDTD) method. The hyperuniform disordered MAs constructed an image at a focal length by engineering the phase shift of transmittance. We obtained a high focusing efficiency of 84.39% at a wavelength of 820 nm for disordered metalens structures. Amazingly, our proposed disordered metalens structures can mimic the optical properties of ordered metalens structures. Similar focusing efficiencies of disordered and ordered metalens structures were found in a wavelength range from 850 to 890 nm due to the long-range periodic properties of hyperuniform disordered structures. The focal length shifts and NAs of disordered metalens structures were comparable to the focal length shifts and NAs of periodic metalens structures in the entire operating region from 770 to 970 nm with a constant FWHM of 1.503 μm. Our proposed structure paves the way for designing new and innovative imaging, sensing, and spectroscopic technologies, such as lidar, medical devices, IR and machine vision cameras, display systems, and holography.

Optical Metasurfaces for Biomedical Imaging and Sensing

Optical metasurfaces, arrays of nanostructures engineered to manipulate light, have emerged as a transformative technology in both research and industry due to their compact design and exceptional light control capabilities. Their strong light-matter interactions enable precise wavefront modulation, polarization control, and significant near-field enhancements. These unique properties have recently driven their application in biomedical fields. In particular, metasurfaces have led to breakthroughs in biomedical imaging technologies, such as achromatic imaging, phase imaging, and extended depth-of-focus imaging. They have also advanced cutting-edge biosensing technologies, featuring high-quality factor resonators and near-field enhancements. As the demand for device miniaturization and system integration increases, metasurfaces are expected to play a pivotal role in the development of next-generation biomedical devices. In this review, we explore the latest advancements in the use of metasurfaces for biomedical applications, with a particular focus on imaging and sensing. Additionally, we discuss future directions aimed at transforming the biomedical field by leveraging the full potential of metasurfaces to provide compact, high-performance solutions for a wide range of applications.

Optical Fresnel zone plate flat lenses made entirely of colored photoresist through an i-line stepper

Light manipulation and control are essential in various contemporary technologies, and as these technologies evolve, the demand for miniaturized optical components increases. Planar-lens technologies, such as metasurfaces and diffractive optical elements, have gained attention in recent years for their potential to dramatically reduce the thickness of traditional refractive optical systems. However, their fabrication, particularly for visible wavelengths, involves complex and costly processes, such as high-resolution lithography and dry-etching, which has limited their availability. In this study, we present a simplified method for fabricating visible Fresnel zone plate (FZP) planar lenses, a type of diffractive optical element, using an i-line stepper and a special photoresist (color resist) that only necessitates coating, exposure, and development, eliminating the need for etching or other post-processing steps. We fabricated visible FZP lens patterns using conventional photolithography equipment on 8-inch silica glass wafers, and demonstrated focusing of 550 nm light to a diameter of 1.1 μm with a focusing efficiency of 7.2%. Numerical simulations showed excellent agreement with experimental results, confirming the high precision and designability of our method. Our lenses were also able to image objects with features down to 1.1 μm, showcasing their potential for practical applications in imaging. Our method is a cost-effective, simple, and scalable solution for mass production of planar lenses and other optical components operating in the visible region. It enables the development of advanced, miniaturized optical systems to meet modern technology demand, making it a valuable contribution to optical component manufacturing.

Dynamic 3D metasurface holography via cascaded polymer dispersed liquid crystal

Metasurface with natural static structure limits the development of dynamic metasurface holographic display with rapid response and broadband. Currently, liquid crystal (LC) was integrated onto the metasurface to convert the passive metasuface into an active one. But, majority of LC-assisted active metasurfaces often exhibit trade-offs among degree of freedom (DoF, typically less than 2), information capacity, response speed, and crosstalk. Herein, at first time, we experimentally demonstrate a cascaded device with polymer dispersed liquid crystal (PDLC) and broadband metasurface, enabling dynamic three-dimensional (3D) holographic display with ultra-high contrast, rapid response and continuous regulation. The PDLC droplets enable modulation of scattering state of incident light by high-speed dynamic control system for electric scanning. Based on self-addressing, rapid response and multi-channel PDLC-metasurface device, the dynamic holographic effect of monochrome holographic images switching and color-changing holographic display with broadband, low-crosstalk and high contrast, has been achieved. Our approach offers a novel perspective on dynamic metasurface.

Wide-field large-angle beam splitters based on polarization-insensitive coding metasurfaces

Metasurfaces have been used to make various optical devices such as beam splitters because of their excellent capability to control light. The most recent work on metasurface beam splitters focused on realizing one-dimensional beam splitting. Based on generalized Snell's law, we designed the beam splitters using a coding strategy by phase gradient metasurfaces, which can divide vertically incident light into two-dimensional space. Meanwhile, the beam splitters are polarization-insensitive because highly rotationally symmetric nanorods are used as structure units. Using different code groups, especially applying 0 and π binary phases, the proposed beam splitters have various functions such as beam deflection, two-beam splitting, and multi-beam splitting. The flexible design of the coding maps allows the light transmission to cover a full-view field. The maximum splitting angles in two-beam and multi-beam splitters are 35.7° and 28.3°, respectively. All the designed beam splitters have a power efficiency of over 80%. The beam splitters have the advantages of small size, easy integration, large beam splitting angle, wide beam splitting area, and high efficiency. They could be applied to many optical systems, such as multiplexers and interferometers in integrated optical circuits.

Single 5-centimeter-aperture metalens enabled intelligent lightweight mid-infrared thermographic camera

Existing mid-infrared thermographic cameras rely on a stack of refractive lenses, resulting in bulky and heavy imaging systems that restrict their broader utility. Here, we demonstrate a lightweight metalens-based thermographic camera (MTC) enabled by a single 0.5-mm-thick, 3.7-g-weight, flat, and mass-producible metalens. The large aperture size (5 cm) of our metalens, when combined with an uncooled focal plane array, enables thermal imaging at distances of tens of meters. By computationally removing the veiling glare, our MTC realizes the temperature mapping with an inaccuracy of less than ±0.7% within the range of 35° to 700°C and shows exceptional environmental adaptability. Furthermore, by using intelligent algorithms and spectral filtering, our uncooled MTC enables visualization and quantification of the SF6 gas leakage at a long distance of 5 m, with a remarkable minimum detectable leak rate of 0.2 sccm. Our work opens the door to the lightweight and multifunctional intelligent thermal imaging systems.

Optical trapping and manipulating with a transmissive and polarization-insensitive metalens

Trapping and manipulating micro-objects and achieving high-precision measurements of tiny forces and displacements are of paramount importance in both physical and biological research. While conventional optical tweezers rely on tightly focused beams generated by bulky microscope systems, the emergence of flat lenses, particularly metalenses, has revolutionized miniature optical tweezers applications. In contrast to traditional objectives, the metalenses can be seamlessly integrated into sample chambers, facilitating flat-optics-based light manipulation. In this study, we propose an experimentally realized transmissive and polarization-insensitive water-immersion metalens, constructed using adaptive nano-antennas. This metalens boasts an ultra-high numerical aperture of 1.28 and achieves a remarkable focusing efficiency of approximately 50 % at a wavelength of 532 nm. Employing this metalens, we successfully demonstrate stable optical trapping, achieving lateral trapping stiffness exceeding 500 pN/(μm W). This stiffness magnitude aligns with that of conventional objectives and surpasses the performance of previously reported flat lenses. Furthermore, our bead steering experiment showcases a lateral manipulation range exceeding 2 μm, including a region of around 0.5 μm exhibiting minimal changes in stiffness for smoothly optical manipulation. We believe that this metalens paves the way for flat-optics-based optical tweezers, simplifying and enhancing optical trapping and manipulation processes, attributing ease of use, reliability, high performance, and compatibility with prevalent optical tweezers applications, including single-molecule and single-cell experiments.

Metasurface optical trap array for single atoms

Metasurfaces made of subwavelength silicon nanopillars provide unparalleled capacity to manipulate light, and have emerged as one of the leading platforms for developing integrated photonic devices. In this study, we report on a compact, passive approach based on planar metasurface optics to generate large optical trap arrays. The unique configuration is achieved with a meta-hologram to convert a single incident laser beam into an array of individual beams, followed up with a metalens to form multiple laser foci for single rubidium atom trapping. We experimentally demonstrate two-dimensional arrays of 5 × 5 and 25 × 25 at the wavelength of 830 nm, validating the capability and scalability of our metasurface design. Beam waists ∼1.5 µm, spacings (about 15 µm), and low trap depth variations (8%) of relevance to quantum control for an atomic array are achieved in a robust and efficient fashion. The presented work highlights a compact, stable, and scalable trap array platform well-suitable for Rydberg-state mediated quantum gate operations, which will further facilitate advances in neutral atom quantum computing.

Multichannel focused higher-order Poincaré sphere beam generation based on a dielectric geometric metasurface

Focused vector beams (VBs) are important topic in the areas of light field manipulation. Geometric metasurfaces provide a convenient platform to facilitate the generation of focused VBs. In this study, we propose a dielectric geometric metasurface to generate multichannel focused higher-order Poincaré sphere (HOP) beams. With identical meta-atoms of half-wave plate, the metasurface comprises two sub-metasurfaces, and each of them includes two sets of rings related to Fresnel zones. For meta-atoms on each set of rings, the hyperbolic geometric phase profile is configured so that the mirror-symmetrical position-flip of the off-axis focal point is enabled under the chirality switch of the illuminating circular polarization. With the design of helical geometric phase profiles for the two sets of rings, a sub-metasurface generate two HOP beams at the symmetrical two focal points. The performance of the two sub-metasurfaces enables the metasurface with four sets of rings to generate the array of four HOP beams. The proposed method was validated by theoretical analyses, numerical simulation and experimental conduction. This research would be significant in miniaturizing and integrating optical systems involving applications of VB generations and applications.

Nanoantenna induced liquid crystal alignment for high performance tunable metasurface

Liquid crystal (LC) based spatial light modulators (SLMs) are a type of versatile device capable of arbitrarily reconfiguring the wavefront of light. For current commercial LC-SLM devices, the large pixel size limits their application to diffractive optics and 3D holographic displays. Pixel miniaturization of these devices is challenging due to emerging inter-pixel crosstalk, ultimately linked to the thick LC layer necessary for full phase (or amplitude) control. Integration of metasurfaces, i.e., 2D arrangements of resonant nanoantennas, with thin LC has emerged as a promising platform to boost light modulation, enabling realization of sub-wavelength pixel size SLMs with full phase (or amplitude) control. In most devices realized so far, however, the presence of an alignment layer, necessary to induce a preferential initial LC orientation, increases the voltage requirement for resonance tuning and reduces the efficiency of light modulation, something that accentuates for an ultra-thin (e.g., submicron) metasurface-LC cell. Here, we present an alternative strategy by which the LC molecular alignment is purely controlled by the periodicity and geometry of the nanoantenna without any additional alignment layer. The nanoantennas are specifically designed for the double purpose of sustaining optical resonances that are used for light modulation and to, simultaneously, induce the required LC pre-alignment. The proposed device structure allows lower voltage and reduced switching times (sub-millisecond) compared to devices including the alignment layer. This novel strategy thus helps to improve the performance of these miniaturized-pixel devices, which have emerged as one of the potential candidates for the next generation of products in a wide range of applications, from virtual/augmented reality (VR/AR) and solid-state light detection and ranging (LiDAR), to 3D holographic displays and beyond.

A Multi-foci Sparse-Aperture Metalens

Multi-foci lenses are essential components for optical communications, virtual reality display and microscopy, yet the bulkiness of conventional counterparts has significantly hindered their widespread applications. Benefiting from the unprecedented capability of metasurfaces in light modulation, metalenses are able to provide multi-foci functionality with a more compact footprint. However, achieving imaging quality comparable to that of corresponding single-foci metalenses at each focal point poses a challenge for existing multi-foci metalenses. Here, a polarization-independent all-dielectric multi-foci metalens is proposed and experimentally demonstrated by spatially integrating single-foci optical sparse-aperture sub-metalenses. Such design enables the metalens to generate multiple focal points, while maintaining the ability to capture target information comparable to that of a single-foci metalens. The proposed multi-foci metalens is composed of square-nanohole units array fabricated by two-photon polymerization. The focusing characteristic and imaging capability are demonstrated upon the illumination of an unpolarized light beam. This work finds a novel route toward multi-foci metalenses and may open a new avenue for dealing with the trade-off between multi-foci functionality and high-quality imaging performance.

Broadband achromatic and wide field of view metalens-doublet by inverse design

Metalenses, composed of patterned meta-atoms in various dimensions, offer tailored modulation of phase, amplitude, and polarization for diverse imaging applications across the visible and near-infrared spectra. However, simultaneously achieving achromatic and wide field of view (WFOV) imaging remains a significant challenge. In this paper, we propose a general inverse design framework for metalens-doublets that simultaneously enables broadband achromatic and WFOV imaging. The broadband achromatic and WFOV (BA&WFOV) metalens-doublet comprises a propagation phase metalens and a geometric phase metalens positioned on opposite sides of the substrate. This framework requires only once polarization conversion and mitigates aperture size constraints imposed by the limited group delay (GD) range of meta-atoms. We present a BA&WFOV metalens-doublet with an f-number of 3.9, a full field of view (FOV) of 68°, and a wavelength range from 640nm to 820nm. This metalens-doublet exhibits diffraction-limited focusing with an average absolute focusing efficiency of 16% and an average relative focusing efficiency of 60%. This innovative framework holds significant promise for applications in fields such as phone cameras, VR/AR, and endoscopes.

Photodetector with a metalens packaging module for visible light communication based on RGBY illumination LED light source

A novel, to the best of our knowledge, photodetector with a metalens packaging module used as the visible light communication (VLC) receiver is proposed and designed. An LED consisting of red, green, blue, and yellow chips (RGBY-LED) is adopted as the transmitter for intensity modulation direct detection VLC systems. A metalens array with a numerical aperture (NA) of 0.707 used as a polarization-insensitive planar lens of the VLC system receiver is designed at wavelengths of 457, 523, 592, and 623 nm corresponding to blue, green, yellow, and red for high efficiency. Compared with a traditional Fresnel lens positive-intrinsic-negative (PIN) photodetector module as the VLC receiver, the introduction of a metalens module can decrease the form factor of the VLC receiver module and, in particular, it is much thinner. The combination of the multi-color LED transmitter and photodetector metalens packaging module receiver can increase the modulation bandwidth due to four different wavelengths used for the VLC system. Finite-difference time domain (FDTD) simulations are performed to validate the performance of the photodetector with a metalens module. It is revealed that the corresponding efficiencies of 57.5%, 55.4%, 57%, and 56.3% were achieved at wavelengths of 623, 592, 523, and 457 nm, respectively, based on a metalens array with a 0.707 NA and 2.5 µm radius of the active area of the photodetector. It is a promising technology for indoor VLC systems such as those for smart phones and other Internet of Things devices due to the need for compact packaging for the receiver.

Unveiling Invariant Optical Properties of Dielectric Meta-Atoms

The phase-shift, transmittance, and polarization properties of meta-atoms are investigated, motivated by their use as building blocks of metasurfaces used in metalenses, holograms, and beam shaping. We studied dielectric nanorod meta-atoms of several geometries, which included cylinders, triangles, squares, hexagons, octagons, and truncated cones. By analyzing light propagation through these meta-atoms for three different wavelengths (632.8, 545, and 50 nm), we show that the phase-shift introduced is independent of their cross-section shape, contrary to the expected behavior. Additionally, we show that the polarization response is independent of the shape and that the transmittance is partially shape-independent. We identify a novel dependence of phase-shift on the effective cross-sectional area of meta-atoms. These meta-atom optical properties are independent of its shape if its geometry has a C3 or larger rotational symmetry. This optical invariance has significant implications for the topological optimization of flat optics.

Unleashing the potential: AI empowered advanced metasurface research

In recent years, metasurface, as a representative of micro- and nano-optics, have demonstrated a powerful ability to manipulate light, which can modulate a variety of physical parameters, such as wavelength, phase, and amplitude, to achieve various functions and substantially improve the performance of conventional optical components and systems. Artificial Intelligence (AI) is an emerging strong and effective computational tool that has been rapidly integrated into the study of physical sciences over the decades and has played an important role in the study of metasurface. This review starts with a brief introduction to the basics and then describes cases where AI and metasurface research have converged: from AI-assisted design of metasurface elements up to advanced optical systems based on metasurface. We demonstrate the advanced computational power of AI, as well as its ability to extract and analyze a wide range of optical information, and analyze the limitations of the available research resources. Finally conclude by presenting the challenges posed by the convergence of disciplines.

A metasurface color router facilitating RGB-NIR sensing for an image sensor application

CMOS image sensor (CIS) plays a crucial role in diverse optical applications by facilitating the capture of images in the visible and near-infrared spectra. The enhancement of image resolution in CIS by an increase in pixel density is becoming more significant and realizable with the recent progress of nanofabrication. However, as pixel size decreases towards the diffraction limit, there is an inevitable trade-off between the scale-down of pixel size and the enhancement of optical sensitivity. Recently, to overcome this, an entirely new concept of spectral sensing using a nanophotonic-based color router has been proposed. In this work, we present a metasurface-based spectral router to effectively split the spectrum from visible to near-infrared and redirect through the four optical channels to the targeted pixel surfaces. We optimize the metasurface that simultaneously controls the phases of the transmitted light of targeted spectra, i.e. red (R), green (G), blue (B), and near-infrared (NIR), which is the largest number of channels reported based on a single layered metasurface and has an optical efficiency that surpasses the efficiency of conventional color filter systems.

Off-axis bifocal metalens for displacement measurement

Metasurface is a new type of micro-optical element developed in recent years. It can intelligently modulate electromagnetic waves by adjusting the geometrical parameters and arrangement of dielectric structures. In this paper, a bifocal metalens based on modulation of propagation phase was designed for the potential application in displacement measurement. The phase of the bifocal lens is designed by the optical holography-like method, which is verified by the scalar diffraction theory. We designed a square aperture lens with a side length of 200μm to realize two focal spots with focal lengths of 900 and 1100μm. The two focal spots aren't on one optical axis. The polarization insensitive TiO2cylinders are chosen as structure units. Four structures with different radius were selected to achieve the four phase steps. We fabricated the designed bifocal metalens using electron beam lithography and atomic layer deposition techniques, and measured the light intensity in the areas near the two foci in the direction of the longitudinal axis. The differential signal was calculated, from which we obtained a linear interval. It demonstrates the ability of bifocal differential measurement to be applied to displacement measurement. Because the metasurfaces production process is semiconductor compatible, the bifocal lens is easy to integrate and can be used for miniaturized displacement measurements, micro-resonators, acceleration measurements, and so on.

Design and simulation of an extreme ultraviolet metalens based on the Pancharatnam-Berry phase

Extreme ultraviolet (EUV) radiation plays a key role in the fields of material science, attosecond metrology, and lithography. However, the reflective optical components typically used in EUV systems contribute to their bulky size, weight, and increased costs for fabrication. In this paper, we theoretically investigate transmissive metalens designs capable of focusing the EUV light based on the Pancharatnam-Berry phase. The designed metalens is composed of nanoscale elliptical holes, which can guide and manipulate EUV light due to the higher refractive index of the vacuum holes compared to that of the surrounding material. We designed an EUV metalens with a diameter of 10 µm, which supports a focal length of 24 µm and a numerical aperture of up to 0.2. It can focus 55-nm EUV incident light to a diffraction-limited spot, and the focusing efficiency is calculated to be as high as about 7% over a broad EUV frequency range (50-65 nm). This study reveals the possibility of applying a dielectric metalens in the EUV region without a transmissive optical material.

Longitudinal polarization manipulation based on all-dielectric terahertz metasurfaces

Polarization modulation of electromagnetic waves plays an important role in the field of optics and optoelectronics. Current polarization optics are typically limited to the modulation in a single transverse plane. However, manipulating polarization along the longitudinal direction is also important for full-space polarization modulation. Here, we propose two kinds of all-dielectric terahertz metasurfaces for longitudinally spatial polarization manipulation. The metasurfaces are capable of controlling polarization along the propagation path, namely: i) a longitudinal bifocal metalens with different polarization states at each focal point, and ii) a versatile metalens can simultaneously generate a uniformly polarized focused beam and a vector beam with varying polarization along the propagation path. Furthermore, the measurement of the dielectric thickness is demonstrated based on the polarization modulation feature of the metalens. The proposed metasurfaces allow for effective polarization state alteration along the propagation path, exhibiting significant potential for applications in versatile light-matter interactions, optical communications, and quantum optics.

Diffractive optical computing in free space

Structured optical materials create new computing paradigms using photons, with transformative impact on various fields, including machine learning, computer vision, imaging, telecommunications, and sensing. This Perspective sheds light on the potential of free-space optical systems based on engineered surfaces for advancing optical computing. Manipulating light in unprecedented ways, emerging structured surfaces enable all-optical implementation of various mathematical functions and machine learning tasks. Diffractive networks, in particular, bring deep-learning principles into the design and operation of free-space optical systems to create new functionalities. Metasurfaces consisting of deeply subwavelength units are achieving exotic optical responses that provide independent control over different properties of light and can bring major advances in computational throughput and data-transfer bandwidth of free-space optical processors. Unlike integrated photonics-based optoelectronic systems that demand preprocessed inputs, free-space optical processors have direct access to all the optical degrees of freedom that carry information about an input scene/object without needing digital recovery or preprocessing of information. To realize the full potential of free-space optical computing architectures, diffractive surfaces and metasurfaces need to advance symbiotically and co-evolve in their designs, 3D fabrication/integration, cascadability, and computing accuracy to serve the needs of next-generation machine vision, computational imaging, mathematical computing, and telecommunication technologies.

Gallium nitride-based geometric and propagation metasurfaces for vortex beam emissions

This work experimentally demonstrates the highly-efficient geometric and propagation metasurfaces for vortex beam emissions. These metasurfaces are respectively composed of high-aspect-ratio fin-like and cylindrical gallium nitride (GaN) meta-atoms. Remarkably, the optimized configuration of the fin-like GaN meta-atoms achieves a cross-polarization transmission efficiency of up to 99 %. Similarly, the cylindrical GaN meta-atoms exhibit an average co-polarization transmission efficiency of 97 %. Both metasurfaces, designed for vortex beam emission, exhibit annular intensity converging capabilities at distinct wavelengths in the visible. Notably, the geometric metasurface shows achromatic annular intensity distributions over a continuous wavelength range up to 100 nm, in sharp contrast to the propagation metasurface, which is subject to inherent wavelength dispersion limitations.

Multi-wavelength structured light based on metasurfaces for 3D imaging

Structured light projection provides a promising approach to achieving fast and non-contact three-dimensional (3D) imaging. The resolution is a crucial index that represents security and accuracy in applications such as face recognition and robot vision. It depends on the density of dots in the projection. However, further improving the density of dots in the current system must be at the cost of speed or volume. Here, an all-dielectric ultra-thin metasurface is designed and fabricated to project a multi-wavelength dot array. The density of dots is improved because projected dots with different wavelengths fill the gaps with each other. The experimental results demonstrate that the multi-wavelength projection improves the resolution of 3D imaging. Furthermore, the multi-wavelength system is beneficial to measuring a surface with varying colors. The approach has the potential to achieve a new generation of high-resolution systems for tiny fluctuations and colorful 3D imaging in dark environments.

Spin-Selective Angular Dispersion Control in Dielectric Metasurfaces for Multichannel Meta-Holographic Displays

Angle-dependent next-generation displays have potential applications in 3D stereoscopic and head-mounted displays, image combiners, and encryption for augmented reality (AR) and security. Metasurfaces enable such exceptional functionalities with groundbreaking achievements in efficient displays over the past decades. However, limitations in angular dispersion control make them unfit for numerous nanophotonic applications. Here, we propose a spin-selective angle-dependent all-dielectric metasurface with a unique design strategy to manifest distinct phase information at different incident angles of light. As a proof of concept, the phase masks of two images are encoded into the metasurface and projected at the desired focal plane under different angles of left circularly polarized (LCP) light. Specifically, the proposed multifunctional metasurface generates two distinct holographic images under LCP illumination at angles of +35 and -35°. The presented holographic displays may provide a feasible route toward multifunctional meta-devices for potential AR displays, encrypted imaging, and information storage applications.

High-Resolution Metalens Imaging with Sequential Artificial Intelligence Models

An analysis of the optical response of a GaN-based metalens was conducted alongside the utilization of two sequential artificial intelligence (AI) models in addressing the occasional issues of blurriness and color cast in captured images. The optical loss of the metalens in the blue spectral range was found to have resulted in the color cast of images. Autoencoder and CodeFormer sequential models were employed in order to correct the color cast and reconstruct image details, respectively. Said sequential models successfully addressed the color cast and reconstructed details for all of the allocated face image categories. Subsequently, the CIE 1931 chromaticity diagrams and peak signal-to-noise ratio analysis provided numerical evidence of the AI models' effectiveness in image reconstruction. Furthermore, the AI models can still repair the image without blue information. Overall, the integration of metalens and artificial intelligence models marks a breakthrough in enhancing the performance of full-color metalens-based imaging systems.

All-silicon polarization-independent broadband achromatic metalens designed for the mid-wave and long-wave infrared

Metasurfaces demonstrate excellent capabilities in manipulating the phase, amplitude and polarization of light. Metalens, as a typical kind of metasurface devices, shows great prospect in simplifying imaging systems. However, like diffractive optical elements, intrinsic dispersion of metasurfaces is high. Thus, significant chromatic aberration is present in common metalenses, deteriorating imaging quality under broadband illumination condition and limiting their applications. To tackle this problem, broadband achromatic metalenses have been proposed and demonstrated in the visible and near-infrared wavelength regions so far. However, broadband achromatic metalens working in the mid-wave and long-wave infrared is still rare. In this paper, thanks to the ingenious design of meta-units that provide the required local phase and phase dispersion, several all-silicon broadband achromatic metalenses working in the mid-wave infrared (3-5 µm) or long-wave infrared (8-14 µm) wavelengths are proposed. Numerical simulation results demonstrate that the designed broadband achromatic metalenses can provide a near-constant focal length with small deviations and an average focusing efficiency of about 70% over the whole operation bandwidths. In addition, these metalenses hold near diffraction-limited focusing capability and polarization-independent focusing features. The achromatic metalenses proposed here are beneficial for improving imaging quality under broadband illumination and increasing detection efficiency of mid-wave and long-wave infrared detection systems.

GaN vortex metasurface for interference and broadband characteristics

We experimentally demonstrate a highly efficient metasurface-based optical vortex beam (OVB) composed of high-aspect-ratio gallium nitride (GaN) meta-structures with an exceptional simulated absolute polarization conversion efficiency (APCE) of up to 98%. A flower-like interference pattern emerges at the converging distance of the device with the helicity switching in spiral and dislocation interference patterns beyond this point, as confirmed through meticulous Mach-Zehnder interferometer analysis. The device also performs broadband capabilities across visible wavelengths. Experimentally demonstrated, the annular shape adeptly expands its diameter with increasing incident wavelengths. This phenomenon is rooted in the fascinating anomalous refractive and reflective characteristics inherent to subwavelength-period metasurfaces.

Generating Angular-Varying Time Delays of THz Pulses via Direct Space-to-Time Mapping of Metasurface Structures

We experimentally demonstrate the generation of double terahertz (THz) pulses with tailored angular-dependent time delays from a nonlinear metasurface excited by a near-infrared femtosecond pulse. The tailored temporal properties of the generated pulses emerge from a direct mapping of the nonlinear spatial response of the metasurface to the emitted THz temporal profile. We utilize the Pancharatnam-Berry phase to implement symmetric and antisymmetric metasurface configurations and show that the emitted patterns present spatiotemporal "X-shaped" profiles after collimation by a parabolic mirror, with angular-dependent pulse delays corresponding to the intended design. In addition, we show that the addition of polarization multiplexing presents the opportunity to achieve a full range of elliptical THz polarizations. Double pulse generation and spatiotemporal shaping of THz waves in general show potential for THz spectroscopy and molecular dynamics applications, particularly in pump-probe experiments.

Theory and Fundamental Limit of Quasiachromatic Metalens by Phase Delay Extension

The periodic extension of phase difference is commonly applied in device design to obtain phase compensation beyond the system's original phase modulation capabilities. Based on this extension approach, we propose the application of quasiphase delay matching to extend the range of dispersion compensation for meta-atoms with limited height. Our theory expands the limit of frequency bandwidth coverage and relaxes the constraints of aperture, NA, and bandwidth for metalenses. By applying the uncertainty principle, we explain the fundamental limit of this achromatic bandwidth and obtain the achromatic spectrum using perturbation analysis. To demonstrate the effectiveness of this extended limit, we simulate a quasiachromatic metalens with a diameter of 2 mm and a NA of 0.55 in the range of 400-1500 nm. Our findings provide a novel theory for correcting chromatic aberration in large-diameter ultrawide bandwidth devices.

All dielectric reflective metalens based on multilayer meta-atoms

While transmission-mode metalenses have been extensively studied, reflection-mode metalenses remain almost unexplored, presenting advantages in terms of improved efficiency and reduced complexity. In this Letter, we investigate a multilayer dielectric metalens operating in reflection mode at visible wavelengths without a metallic layer. Simulations and analysis demonstrate the performance of the metalens, with an 84% reflectivity the metalens proves its efficacy in reflection mode. At a numerical aperture of 0.15, the metalens achieves a 33% focusing efficiency, which is approximately twice that of similar reflective metalenses, facilitating efficient light manipulation and subwavelength resolution. Additionally, the metalens exhibits a well-defined focal spot with a full width at half maximum of 2.03 µm, approaching the diffraction limit.

Asymptotic dispersion engineering for ultra-broadband meta-optics

Dispersion decomposes compound light into its monochromatic components, which is detrimental to broadband imaging but advantageous for spectroscopic applications. Metasurfaces provide a unique path to modulate the dispersion by adjusting structural parameters on a two-dimensional plane. However, conventional linear phase compensation does not adequately match the meta-unit's dispersion characteristics with required complex dispersion, hindering at-will dispersion engineering over a very wide bandwidth particularly. Here, we propose an asymptotic phase compensation strategy for ultra-broadband dispersion-controlled metalenses. Metasurfaces with extraordinarily high aspect ratio nanostructures have been fabricated for arbitrary dispersion control in ultra-broad bandwidth, and we experimentally demonstrate the single-layer achromatic metalenses in the visible to infrared spectrum (400 nm~1000 nm, NA = 0.164). Our proposed scheme provides a comprehensive theoretical framework for single-layer meta-optics, allowing for arbitrary dispersion manipulation without bandwidth restrictions. This development is expected to have significant applications in ultra-broadband imaging and chromatography detection, among others.

Research and design of a metasurface with an extended depth of focus in the near field

A metasurface with an extended depth of focus has broad application prospects in security detection. However, in the near field, the simulation results obtained by using traditional methods to achieve an extended depth of focus have a significant deviation from the preset value. This paper discusses the relationship between the depth of focus and focusing position, and the reason why the simulation results deviate from the preset focus position in the radial modulation method.  The angle modulation method is found by a simulation. A more accurate method for an extended depth of focus was proposed by combining the radial modulation method with the quasi-optical path principle. Finally, a polarization-insensitive reflective metasurface element was designed, and elements were arranged to form a polarization-insensitive focus between 150 and 400 mm based on the focusing effect settings. The simulation results indicate that the metasurface achieves the same focusing effect between 175 and 425 mm when different linear-polarization waves are incident. This focus is greater and more accurate than the radial modulation method under the same conditions, which indicates that the method is superior to the radial modulation method in the near-field region. The simulation verifies the accuracy of the method and shows potential application prospects in fields such as microwave imaging.

Wide-Angle Optical Metasurface for Vortex Beam Generation

In this work, we have achieved an advancement by integrating wide-angle capacity into vortex beams with an impressive topological charge (TC) of 12. This accomplishment was realized through the meticulous engineering of a propagation-phase-designed metasurface. Comprising gallium nitride (GaN), meta-structures characterized by their high-aspect ratio, this metasurface exhibits an average co-polarization transmission efficiency, reaching a remarkable simulated value of up to 97%. The intricate spiral patterns, along with their respective quantification, have been meticulously investigated through tilt-view scanning electron microscopy (SEM) and were further analyzed through the Mach-Zehnder interferometer. A captivating revelation emerged, a distinctive petal-like interference pattern manifests prior to the metasurface's designed focal distance. The occurrence of this petal-like pattern at a specific z-axis position prompts a deliberate manipulation of the helicity of the spiral branches. This strategic helicity alteration is intrinsically tied to the achievement of a minimized donut diameter at the designed focal length. In regard to the angular capability of the device, the captured images continuously showcase prominent attributes within incident angles spanning up to 30 degrees. However, as incident angles surpass the 30-degree threshold, the measured values diverge from their corresponding theoretical projections, resulting in a progressive reduction in the completeness of the donut-shaped structure.

Miniature Two-Photon Microscopic Imaging Using Dielectric Metalens

Miniature two-photon microscopy has emerged as a powerful technique for investigating brain activity in freely moving animals. Ongoing research objectives include reducing probe weight and minimizing animal behavior constraints caused by probe attachment. Employing dielectric metalenses, which enable the use of sizable optical components in flat device structures while maintaining imaging resolution, is a promising solution for addressing these challenges. In this study, we designed and fabricated a titanium dioxide metalens with a wavelength of 920 nm and a high aspect ratio. Furthermore, a meta-optic two-photon microscope weighing 1.36 g was developed. This meta-optic probe has a lateral resolution of 0.92 μm and an axial resolution of 18.08 μm. Experimentally, two-photon imaging of mouse brain structures in vivo was also demonstrated. The flat dielectric metalens technique holds promising opportunities for high-performance integrated miniature nonlinear microscopy and endomicroscopy platforms in the biomedical field.

Learning flat optics for extended depth of field microscopy imaging

Conventional microscopy systems have limited depth of field, which often necessitates depth scanning techniques hindered by light scattering. Various techniques have been developed to address this challenge, but they have limited extended depth of field (EDOF) capabilities. To overcome this challenge, this study proposes an end-to-end optimization framework for building a computational EDOF microscope that combines a 4f microscopy optical setup incorporating learned optics at the Fourier plane and a post-processing deblurring neural network. Utilizing the end-to-end differentiable model, we present a systematic design methodology for computational EDOF microscopy based on the specific visualization requirements of the sample under examination. In particular, we demonstrate that the metasurface optics provides key advantages for extreme EDOF imaging conditions, where the extended DOF range is well beyond what is demonstrated in state of the art, achieving superior EDOF performance.

Dual channel transformation of scalar and vector terahertz beams along the optical path based on dielectric metasurface

The research on terahertz wave manipulation based on metasurfaces has gradually deepened, and the number of functions or electromagnetic control dimensions in a single device is constantly increasing. For the spatial dimension of terahertz field regulation, its design degrees of freedom have been expanded from a single transverse plane to the propagation path. In this paper, we propose a novel circularly polarization multiplexed metasurface for dual channel terahertz wave transmission control. Based on the spatial integration of two heterogeneous meta-atoms, which are spin-decoupled and isotropic, respectively, there are four phase channels that can be used at the same time, thus achieving different switching between vector and scalar beams in different circularly polarization channels along the optical path. For linearly polarized wave incidence, the device exhibits conversion between different vector beams longitudinally. To control more electric field components, we combine focused wavefront design with vector or scalar fields and utilize the focusing induced spin-orbit coupling effect, then complex amplitude switching of longitudinal electric field components is obtained. This article extends the manipulation of terahertz waves along the propagation trajectory based on metasurface from single to dual channel for the first time, providing a reference for the design of multifunctional meta-device in terahertz band.

Compact meta-optics infrared camera based on a polarization-insensitive metalens with a large field of view

Metasurfaces have recently emerged as a crucial tool because they achieve spherical-aberration-free focusing when exposed to normal incident light. Nevertheless, these metasurfaces often exhibit considerable coma when subjected to oblique incident light, thereby limiting their imaging field of view. In light of this, our study presents the design and an experimental demonstration of a polarization-insensitive, large-field-of-view metalens that uses a silicon metasurface. The metalens is specifically tailored to the long-wavelength infrared region and possesses a numerical aperture of 0.81, which is capable of focusing light at incident angles up to ±80°. Moreover, we successfully build a meta-optics camera by integrating the large field-of-view metalens on top of an image sensor, thus enabling wide-angle thermal imaging of practical scenes. This research provides new, to the best of our knowledge, insights for designing and realizing large-field-of-view optical systems and holds promise for applications in night vision imaging and security monitoring.

Dual-wavelength UV-visible metalens for multispectral photoacoustic microscopy: A simulation study

Photoacoustic microscopy is advancing with research on utilizing ultraviolet and visible light. Dual-wavelength approaches are sought for observing DNA/RNA- and vascular-related disorders. However, the availability of high numerical aperture lenses covering both ultraviolet and visible wavelengths is severely limited due to challenges such as chromatic aberration in the optics. Herein, we present a groundbreaking proposal as a pioneering simulation study for incorporating multilayer metalenses into ultraviolet-visible photoacoustic microscopy. The proposed metalens has a thickness of 1.4 µm and high numerical aperture of 0.8. By arranging cylindrical hafnium oxide nanopillars, we design an achromatic transmissive lens for 266 and 532 nm wavelengths. The metalens achieves a diffraction-limited focal spot, surpassing commercially available objective lenses. Through three-dimensional photoacoustic simulation, we demonstrate high-resolution imaging with superior endogenous contrast of targets with ultraviolet and visible optical absorption bands. This metalens will open new possibilities for downsized multispectral photoacoustic microscopy in clinical and preclinical applications.

Long-infrared dual-wavelength linear-polarization-multiplexed confocal metalens based on an all-silicon dielectric

The metalens has vast applications in biomedicine and industrial manufacturing due to their ultrathin structure and vital ability to manipulate the properties of light waves for long-infrared systems. However, it is difficult for metalens to achieve the confocal function with high focusing efficiency, wide wavelength bandwidth, and low structural complexity. Here, we propose and experimentally demonstrate an all-silicon dielectric metalens composed of arrays of minimalist meta-atoms with a single rectangular nanopillar arranged on a periodic square lattice substrate, which realizes the confocal function of the orthogonal-linear-polarized light with wavelengths of 10.6 µm and 9.3 µm, with focusing efficiencies of 64.94% and 60.03%, respectively. Also, it reveals nearly the diffraction-limited focusing performance. In addition, the metalens can realize precise long-infrared thermal imaging. Moreover, the proposed metalens is compatible with the standard complementary metal oxide semiconductor processes, which can effectively reduce the manufacturing cost and provide a feasible solution for developing planar integrated multifunctional micro-nanophotonic devices in the long-infrared field.

Diffractive Achromat with Freeform Slope for Broadband Imaging over a Long Focal Depth

We propose a method for designing a long-focal-depth diffractive achromat (LFDA). By applying rotational symmetric parameterization, an LFDA with a diameter of 10.89 mm is designed over three wavelengths at six focal planes. The smoothly changed slope designed by the binary variable slope search (BVSS) algorithm greatly reduces the discontinuity in depth, thus it is a fabrication-friendly process for grayscale laser direct writing lithography, involving less fabrication error and cost. The deviation between the designed and fabricated profiles amounts to 9.68%. The LFDA operates at multiple wavelengths (654 nm, 545 nm, and 467 nm) with a DOF of 500 mm~7.65λ × 10⁵ (λ = 654 nm). The simulated and measured full-width at half-maximum (FWHM) of the focused beam is close to the diffraction limit. Experimental studies suggest that the LFDA possesses a superior capability to form high-quality chromatic images in a wide range of depths of field. The LFDA opens a new avenue to achieve compact achromatic systems for imaging, sensing, and 3D display.

Broadband Mechanically Tunable Metasurface Reflectivity Modulator in the Visible Spectrum

Reflectivity modulation is a critical feature for applications in telecommunications, 3D imaging and printing, advanced laser machining, or portable displays. Tunable metasurfaces have recently emerged as a promising implementation for miniaturized and high-performance tunable optical components. Commonly, metasurface response tuning is achieved by electro-optical effects. In this work, we demonstrate reflectivity modulation based on a nanostructured, mechanically tunable, metasurface, consisting of an amorphous silicon nanopillar array and a suspended amorphous silicon membrane with integrated electrostatic actuators. With a membrane displacement of only 150 nm, we demonstrate reflectivity modulation by Mie resonance enhanced absorption in the pillar array, leading to a reflectivity contrast ratio of 1:3 over the spectral range from 400-530 nm. With fast, low-power electrostatic actuation and a broadband response in the visible spectrum, this mechanically tunable metasurface reflectivity modulator could enable high frame rate dynamic reflective displays.

Inverse design of high-NA metalens for maskless lithography

We demonstrate an axisymmetric inverse-designed metalens to improve the performance of zone-plate-array lithography (ZPAL), one of the maskless lithography approaches, that offer a new paradigm for nanoscale research and industry. First, we derive a computational upper bound for a unit-cell-based axisymmetric metalens. Then, we demonstrate a fabrication-compatible inverse-designed metalens with 85.50% transmission normalized focusing efficiency at 0.6 numerical aperture at 405 nm wavelength; a higher efficiency than a theoretical gradient index lens design (79.98%). We also demonstrate experimental validation for our axisymmetric inverse-designed metalens via electron beam lithography. Metalens-based maskless lithography may open a new way of achieving low-cost, large-area nanofabrication.

Dispersion-engineered metasurfaces reaching broadband 90% relative diffraction efficiency

Dispersion results from the variation of index of refraction as well as electric field confinement in sub-wavelength structures. It usually results in efficiency decrease in metasurface components leading to troublesome scattering into unwanted directions. In this letter, by dispersion engineering, we report a set of eight nanostructures whose dispersion properties are nearly identical to each other while being capable of providing 0 to 2π full-phase coverage. Our nanostructure set enables broadband and polarization-insensitive metasurface components reaching 90% relative diffraction efficiency (normalized to the power of transmitted light) from 450 nm to 700 nm in wavelength. Relative diffraction efficiency is important at a system level - in addition to diffraction efficiency (normalized to the power of incident light) - as it considers only the transmitted optical power that can affect the signal to noise ratio. We first illustrate our design principle by a chromatic dispersion-engineered metasurface grating, then show that other metasurface components such as chromatic metalenses can also be implemented by the same set of nanostructures with significantly improved relative diffraction efficiency.

Scannable Dual-Focus Metalens with Hybrid Phase

Metalenses with two foci in the longitudinal or transverse direction, called bifocal or dual-focus metalenses, are promising building blocks in tomography techniques, data storage, and optical tweezers. For practical applications, relative movement between the beam and specimen is required, and beam scanning is highly desirable for high-speed operation without vibration. However, dual-focus metalenses employ a hyperbolic phase that experiences off-axis aberrations, which is not suitable for beam scanning. Here, we demonstrated a scannable dual-focus metalens by employing a new phase called "hybrid phase". The hybrid phase consists of a hyperbolic phase inside and a quadratic phase outside to reduce off-axis aberrations while maintaining a high numerical aperture. We show that the two foci of the scannable dual-focus metalens move together without severe distortion for incident angles of up to 2.5°. Our design easily extends to the case of multifocusing, which is essential for various applications ranging from imaging to manipulation.