1
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Zhu Y, Zhang XY, Zhang Y, Zhou GY, Zhao H. Ultrathin zigzag-surface copper nanowire assembled hierarchical microspheres to enhance oxygen reduction catalysis. Chem Commun (Camb) 2024. [PMID: 38853651 DOI: 10.1039/d3cc05617a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 06/11/2024]
Abstract
Ultrathin catalysts predominantly expose surface active atoms to deliver promising applications in oxygen reduction reactions (ORRs). However, they are commonly synthesized at high reaction temperatures, with tedious chemical routes involved. Herein, we report a low temperature (273 K) electric field driven route to synthesize zigzag-surface ultrathin copper nanowires. Interestingly, the ultrathin copper nanowires assemble into three-dimensional microspheres, which exhibit hydrophobic-aerophilic features, eventually resulting in good ORR activities. The aerophilicity and hydrophobicity of copper nanowires are related to their Cu2O active sites and hierarchical protuberances, respectively. Our findings open a new door to grow ultrathin catalysts for new energy storage systems.
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Affiliation(s)
- Yan Zhu
- Department of Materials Science and Engineering, Dalian Jiaotong University, China.
| | - Xue-Ying Zhang
- Department of Environmental and Chemical Engineering, Dalian Jiaotong University, China
| | - Yong Zhang
- Department of Materials Science and Engineering, Dalian Jiaotong University, China.
| | - Guan-Yu Zhou
- Department of Materials Science and Engineering, Dalian Jiaotong University, China.
| | - Hong Zhao
- Department of Materials Science and Engineering, Dalian Jiaotong University, China.
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2
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Liu H, Zhao J, Ly TH. Clean Transfer of Two-Dimensional Materials: A Comprehensive Review. ACS NANO 2024; 18:11573-11597. [PMID: 38655635 DOI: 10.1021/acsnano.4c01000] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/26/2024]
Abstract
The growth of two-dimensional (2D) materials through chemical vapor deposition (CVD) has sparked a growing interest among both the industrial and academic communities. The interest stems from several key advantages associated with CVD, including high yield, high quality, and high tunability. In order to harness the application potentials of 2D materials, it is often necessary to transfer them from their growth substrates to their desired target substrates. However, conventional transfer methods introduce contamination that can adversely affect the quality and properties of the transferred 2D materials, thus limiting their overall application performance. This review presents a comprehensive summary of the current clean transfer methods for 2D materials with a specific focus on the understanding of interaction between supporting layers and 2D materials. The review encompasses various aspects, including clean transfer methods, post-transfer cleaning techniques, and cleanliness assessment. Furthermore, it analyzes and compares the advances and limitations of these clean transfer techniques. Finally, the review highlights the primary challenges associated with current clean transfer methods and provides an outlook on future prospects.
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Affiliation(s)
- Haijun Liu
- Department of Chemistry and Center of Super-Diamond & Advanced Films (COSDAF), City University of Hong Kong, Kowloon, Hong Kong 999077, China
- City University of Hong Kong Shenzhen Research Institute, Shenzhen 518057, China
| | - Jiong Zhao
- Department of Applied Physics, The Hong Kong Polytechnic University, Kowloon, Hong Kong 999077, China
- The Hong Kong Polytechnic University Shenzhen Research Institute, Shenzhen 518057, China
| | - Thuc Hue Ly
- Department of Chemistry and Center of Super-Diamond & Advanced Films (COSDAF), City University of Hong Kong, Kowloon, Hong Kong 999077, China
- City University of Hong Kong Shenzhen Research Institute, Shenzhen 518057, China
- State Key Laboratory of Marine Pollution, City University of Hong Kong, Kowloon, Hong Kong 999077, China
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3
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Zhang K, Zhang T, You J, Zheng X, Zhao M, Zhang L, Kong J, Luo Z, Huang S. Low-Temperature Vapor-Phase Growth of 2D Metal Chalcogenides. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2024; 20:e2307587. [PMID: 38084456 DOI: 10.1002/smll.202307587] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/30/2023] [Revised: 11/07/2023] [Indexed: 05/12/2024]
Abstract
2D metal chalcogenides (MCs) have garnered significant attention from both scientific and industrial communities due to their potential in developing next-generation functional devices. Vapor-phase deposition methods have proven highly effective in fabricating high-quality 2D MCs. Nevertheless, the conventionally high thermal budgets required for synthesizing 2D MCs pose limitations, particularly in the integration of multiple components and in specialized applications (such as flexible electronics). To overcome these challenges, it is desirable to reduce the thermal energy requirements, thus facilitating the growth of various 2D MCs at lower temperatures. Numerous endeavors have been undertaken to develop low-temperature vapor-phase growth techniques for 2D MCs, and this review aims to provide an overview of the latest advances in low-temperature vapor-phase growth of 2D MCs. Initially, the review highlights the latest progress in achieving high-quality 2D MCs through various low-temperature vapor-phase techniques, including chemical vapor deposition (CVD), metal-organic CVD, plasma-enhanced CVD, atomic layer deposition (ALD), etc. The strengths and current limitations of these methods are also evaluated. Subsequently, the review consolidates the diverse applications of 2D MCs grown at low temperatures, covering fields such as electronics, optoelectronics, flexible devices, and catalysis. Finally, current challenges and future research directions are briefly discussed, considering the most recent progress in the field.
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Affiliation(s)
- Kenan Zhang
- Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
- Department of Chemical and Biological Engineering, Guangdong-Hong Kong-Macao Joint Laboratory for Intelligent Micro-Nano Optoelectronic Technology, William Mong Institute of Nano Science and Technology, and Hong Kong Branch of Chinese National Engineering Research Center for Tissue Restoration and Reconstruction, The Hong Kong University of Science and Technology, Kowloon, 999077, China
| | - Tianyi Zhang
- Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
| | - Jiawen You
- Department of Chemical and Biological Engineering, Guangdong-Hong Kong-Macao Joint Laboratory for Intelligent Micro-Nano Optoelectronic Technology, William Mong Institute of Nano Science and Technology, and Hong Kong Branch of Chinese National Engineering Research Center for Tissue Restoration and Reconstruction, The Hong Kong University of Science and Technology, Kowloon, 999077, China
| | - Xudong Zheng
- Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
| | - Mei Zhao
- Key Laboratory of Carbon Materials of Zhejiang Province, College of Chemistry and Materials Engineering, Wenzhou University, Wenzhou, 325035, China
| | - Lijie Zhang
- Key Laboratory of Carbon Materials of Zhejiang Province, College of Chemistry and Materials Engineering, Wenzhou University, Wenzhou, 325035, China
| | - Jing Kong
- Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
| | - Zhengtang Luo
- Department of Chemical and Biological Engineering, Guangdong-Hong Kong-Macao Joint Laboratory for Intelligent Micro-Nano Optoelectronic Technology, William Mong Institute of Nano Science and Technology, and Hong Kong Branch of Chinese National Engineering Research Center for Tissue Restoration and Reconstruction, The Hong Kong University of Science and Technology, Kowloon, 999077, China
- Hong Kong University of Science and Technology-Shenzhen Research Institute, Nanshan, Shenzhen, 518057, China
| | - Shaoming Huang
- Guangzhou Key Laboratory of Low-Dimensional Materials and Energy Storage Devices, School of Materials and Energy, Guangdong University of Technology, Guangzhou, 510006, China
- School of Chemistry and Materials Science, Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou, 310024, China
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4
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Pendharkar M, Tran SJ, Zaborski G, Finney J, Sharpe AL, Kamat RV, Kalantre SS, Hocking M, Bittner NJ, Watanabe K, Taniguchi T, Pittenger B, Newcomb CJ, Kastner MA, Mannix AJ, Goldhaber-Gordon D. Torsional force microscopy of van der Waals moirés and atomic lattices. Proc Natl Acad Sci U S A 2024; 121:e2314083121. [PMID: 38427599 DOI: 10.1073/pnas.2314083121] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/17/2023] [Accepted: 01/11/2024] [Indexed: 03/03/2024] Open
Abstract
In a stack of atomically thin van der Waals layers, introducing interlayer twist creates a moiré superlattice whose period is a function of twist angle. Changes in that twist angle of even hundredths of a degree can dramatically transform the system's electronic properties. Setting a precise and uniform twist angle for a stack remains difficult; hence, determining that twist angle and mapping its spatial variation is very important. Techniques have emerged to do this by imaging the moiré, but most of these require sophisticated infrastructure, time-consuming sample preparation beyond stack synthesis, or both. In this work, we show that torsional force microscopy (TFM), a scanning probe technique sensitive to dynamic friction, can reveal surface and shallow subsurface structure of van der Waals stacks on multiple length scales: the moirés formed between bi-layers of graphene and between graphene and hexagonal boron nitride (hBN) and also the atomic crystal lattices of graphene and hBN. In TFM, torsional motion of an Atomic Force Microscope (AFM) cantilever is monitored as it is actively driven at a torsional resonance while a feedback loop maintains contact at a set force with the sample surface. TFM works at room temperature in air, with no need for an electrical bias between the tip and the sample, making it applicable to a wide array of samples. It should enable determination of precise structural information including twist angles and strain in moiré superlattices and crystallographic orientation of van der Waals flakes to support predictable moiré heterostructure fabrication.
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Affiliation(s)
- Mihir Pendharkar
- Stanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, CA 94025
- Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305
| | - Steven J Tran
- Stanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, CA 94025
- Department of Physics, Stanford University, Stanford, CA 94305
| | - Gregory Zaborski
- Stanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, CA 94025
- Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305
| | - Joe Finney
- Stanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, CA 94025
- Department of Physics, Stanford University, Stanford, CA 94305
| | - Aaron L Sharpe
- Materials Physics Department, Sandia National Laboratories, Livermore, CA 94550
| | - Rupini V Kamat
- Stanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, CA 94025
- Department of Physics, Stanford University, Stanford, CA 94305
| | - Sandesh S Kalantre
- Stanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, CA 94025
- Department of Physics, Stanford University, Stanford, CA 94305
| | - Marisa Hocking
- Stanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, CA 94025
- Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305
| | | | - Kenji Watanabe
- Research Center for Electronic and Optical Materials, National Institute for Materials Science, Tsukuba 305-0044, Japan
| | - Takashi Taniguchi
- Research Center for Materials Nanoarchitectonics, National Institute for Materials Science, Tsukuba 305-0044, Japan
| | | | | | - Marc A Kastner
- Stanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, CA 94025
- Department of Physics, Stanford University, Stanford, CA 94305
- Department of Physics, Massachusetts Institute of Technology, Cambridge, MA 02139
| | - Andrew J Mannix
- Stanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, CA 94025
- Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305
| | - David Goldhaber-Gordon
- Stanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, CA 94025
- Department of Physics, Stanford University, Stanford, CA 94305
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5
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LaGasse SW, Proscia NV, Cress CD, Fonseca JJ, Cunningham PD, Janzen E, Edgar JH, Pennachio DJ, Culbertson J, Zalalutdinov M, Robinson JT. Hexagonal Boron Nitride Slab Waveguides for Enhanced Spectroscopy of Encapsulated 2D Materials. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2309777. [PMID: 37992676 DOI: 10.1002/adma.202309777] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/20/2023] [Revised: 11/08/2023] [Indexed: 11/24/2023]
Abstract
The layered insulator hexagonal boron nitride (hBN) is a critical substrate that brings out the exceptional intrinsic properties of two-dimensional (2D) materials such as graphene and transition metal dichalcogenides (TMDs). In this work, the authors demonstrate how hBN slabs tuned to the correct thickness act as optical waveguides, enabling direct optical coupling of light emission from encapsulated layers into waveguide modes. Molybdenum selenide (MoSe2 ) and tungsten selenide (WSe2 ) are integrated within hBN-based waveguides and demonstrate direct coupling of photoluminescence emitted by in-plane and out-of-plane transition dipoles (bright and dark excitons) to slab waveguide modes. Fourier plane imaging of waveguided photoluminescence from MoSe2 demonstrates that dry etched hBN edges are an effective out-coupler of waveguided light without the need for oil-immersion optics. Gated photoluminescence of WSe2 demonstrates the ability of hBN waveguides to collect light emitted by out-of-plane dark excitons.Numerical simulations explore the parameters of dipole placement and slab thickness, elucidating the critical design parameters and serving as a guide for novel devices implementing hBN slab waveguides. The results provide a direct route for waveguide-based interrogation of layered materials, as well as a way to integrate layered materials into future photonic devices at arbitrary positions whilst maintaining their intrinsic properties.
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Affiliation(s)
- Samuel W LaGasse
- Electronics Science and Technology Division, US Naval Research Laboratory, Washington, DC, 20375, USA
| | - Nicholas V Proscia
- NRC Postdoctoral Fellow residing at the US Naval Research Laboratory, Washington, DC, 20375, USA
| | - Cory D Cress
- Electronics Science and Technology Division, US Naval Research Laboratory, Washington, DC, 20375, USA
| | - Jose J Fonseca
- Electronics Science and Technology Division, US Naval Research Laboratory, Washington, DC, 20375, USA
| | - Paul D Cunningham
- Electronics Science and Technology Division, US Naval Research Laboratory, Washington, DC, 20375, USA
| | - Eli Janzen
- Department of Chemical Engineering, Kansas State University, Manhattan, KS, 66506, USA
| | - James H Edgar
- Department of Chemical Engineering, Kansas State University, Manhattan, KS, 66506, USA
| | - Daniel J Pennachio
- Electronics Science and Technology Division, US Naval Research Laboratory, Washington, DC, 20375, USA
| | - James Culbertson
- Electronics Science and Technology Division, US Naval Research Laboratory, Washington, DC, 20375, USA
| | - Maxim Zalalutdinov
- Acoustics Division, US Naval Research Laboratory, Washington, DC, 20375, USA
| | - Jeremy T Robinson
- Electronics Science and Technology Division, US Naval Research Laboratory, Washington, DC, 20375, USA
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6
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Katiyar AK, Hoang AT, Xu D, Hong J, Kim BJ, Ji S, Ahn JH. 2D Materials in Flexible Electronics: Recent Advances and Future Prospectives. Chem Rev 2024; 124:318-419. [PMID: 38055207 DOI: 10.1021/acs.chemrev.3c00302] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/07/2023]
Abstract
Flexible electronics have recently gained considerable attention due to their potential to provide new and innovative solutions to a wide range of challenges in various electronic fields. These electronics require specific material properties and performance because they need to be integrated into a variety of surfaces or folded and rolled for newly formatted electronics. Two-dimensional (2D) materials have emerged as promising candidates for flexible electronics due to their unique mechanical, electrical, and optical properties, as well as their compatibility with other materials, enabling the creation of various flexible electronic devices. This article provides a comprehensive review of the progress made in developing flexible electronic devices using 2D materials. In addition, it highlights the key aspects of materials, scalable material production, and device fabrication processes for flexible applications, along with important examples of demonstrations that achieved breakthroughs in various flexible and wearable electronic applications. Finally, we discuss the opportunities, current challenges, potential solutions, and future investigative directions about this field.
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Affiliation(s)
- Ajit Kumar Katiyar
- School of Electrical and Electronic Engineering, Yonsei University, Seoul 03722, Republic of Korea
| | - Anh Tuan Hoang
- School of Electrical and Electronic Engineering, Yonsei University, Seoul 03722, Republic of Korea
| | - Duo Xu
- School of Electrical and Electronic Engineering, Yonsei University, Seoul 03722, Republic of Korea
| | - Juyeong Hong
- School of Electrical and Electronic Engineering, Yonsei University, Seoul 03722, Republic of Korea
| | - Beom Jin Kim
- School of Electrical and Electronic Engineering, Yonsei University, Seoul 03722, Republic of Korea
| | - Seunghyeon Ji
- School of Electrical and Electronic Engineering, Yonsei University, Seoul 03722, Republic of Korea
| | - Jong-Hyun Ahn
- School of Electrical and Electronic Engineering, Yonsei University, Seoul 03722, Republic of Korea
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7
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Jayachandran D, Pendurthi R, Sadaf MUK, Sakib NU, Pannone A, Chen C, Han Y, Trainor N, Kumari S, Mc Knight TV, Redwing JM, Yang Y, Das S. Three-dimensional integration of two-dimensional field-effect transistors. Nature 2024; 625:276-281. [PMID: 38200300 DOI: 10.1038/s41586-023-06860-5] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/04/2023] [Accepted: 11/10/2023] [Indexed: 01/12/2024]
Abstract
In the field of semiconductors, three-dimensional (3D) integration not only enables packaging of more devices per unit area, referred to as 'More Moore'1 but also introduces multifunctionalities for 'More than Moore'2 technologies. Although silicon-based 3D integrated circuits are commercially available3-5, there is limited effort on 3D integration of emerging nanomaterials6,7 such as two-dimensional (2D) materials despite their unique functionalities7-10. Here we demonstrate (1) wafer-scale and monolithic two-tier 3D integration based on MoS2 with more than 10,000 field-effect transistors (FETs) in each tier; (2) three-tier 3D integration based on both MoS2 and WSe2 with about 500 FETs in each tier; and (3) two-tier 3D integration based on 200 scaled MoS2 FETs (channel length, LCH = 45 nm) in each tier. We also realize a 3D circuit and demonstrate multifunctional capabilities, including sensing and storage. We believe that our demonstrations will serve as the foundation for more sophisticated, highly dense and functionally divergent integrated circuits with a larger number of tiers integrated monolithically in the third dimension.
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Affiliation(s)
- Darsith Jayachandran
- Engineering Science and Mechanics, Penn State University, University Park, PA, USA.
| | - Rahul Pendurthi
- Engineering Science and Mechanics, Penn State University, University Park, PA, USA.
| | | | - Najam U Sakib
- Engineering Science and Mechanics, Penn State University, University Park, PA, USA
| | - Andrew Pannone
- Engineering Science and Mechanics, Penn State University, University Park, PA, USA
| | - Chen Chen
- 2D Crystal Consortium Materials Innovation Platform, Penn State University, University Park, PA, USA
| | - Ying Han
- Engineering Science and Mechanics, Penn State University, University Park, PA, USA
| | - Nicholas Trainor
- 2D Crystal Consortium Materials Innovation Platform, Penn State University, University Park, PA, USA
- Materials Science and Engineering, Penn State University, University Park, PA, USA
| | - Shalini Kumari
- 2D Crystal Consortium Materials Innovation Platform, Penn State University, University Park, PA, USA
- Materials Science and Engineering, Penn State University, University Park, PA, USA
| | - Thomas V Mc Knight
- 2D Crystal Consortium Materials Innovation Platform, Penn State University, University Park, PA, USA
- Materials Science and Engineering, Penn State University, University Park, PA, USA
| | - Joan M Redwing
- 2D Crystal Consortium Materials Innovation Platform, Penn State University, University Park, PA, USA
- Materials Science and Engineering, Penn State University, University Park, PA, USA
- Materials Research Institute, Penn State University, University Park, PA, USA
| | - Yang Yang
- Engineering Science and Mechanics, Penn State University, University Park, PA, USA
- Materials Research Institute, Penn State University, University Park, PA, USA
- Nuclear Engineering, Penn State University, University Park, PA, USA
| | - Saptarshi Das
- Engineering Science and Mechanics, Penn State University, University Park, PA, USA.
- Materials Science and Engineering, Penn State University, University Park, PA, USA.
- Materials Research Institute, Penn State University, University Park, PA, USA.
- Electrical Engineering, Penn State University, University Park, PA, USA.
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8
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Duleba A, Pugachev M, Blumenau M, Martanov S, Naumov M, Shupletsov A, Kuntsevich A. Inert-Atmosphere Microfabrication Technology for 2D Materials and Heterostructures. MICROMACHINES 2023; 15:94. [PMID: 38258213 PMCID: PMC11154319 DOI: 10.3390/mi15010094] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/30/2023] [Revised: 12/28/2023] [Accepted: 12/29/2023] [Indexed: 01/24/2024]
Abstract
Most 2D materials are unstable under ambient conditions. Assembly of van der Waals heterostructures in the inert atmosphere of the glove box with ex situ lithography partially solves the problem of device fabrication out of unstable materials. In our paper, we demonstrate an approach to the next-generation inert-atmosphere (nitrogen, <20 ppm oxygen content) fabrication setup, including optical contact mask lithography with a 2 μm resolution, metal evaporation, lift-off and placement of the sample to the cryostat for electric measurements in the same inert atmosphere environment. We consider basic construction principles, budget considerations, and showcase the fabrication and subsequent degradation of black-phosphorous-based structures within weeks. The proposed solutions are surprisingly compact and inexpensive, making them feasible for implementation in numerous 2D materials laboratories.
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Affiliation(s)
- Aliaksandr Duleba
- P.N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow 119991, Russia; (A.D.); (M.P.); (M.B.); (S.M.); (A.S.)
| | - Mikhail Pugachev
- P.N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow 119991, Russia; (A.D.); (M.P.); (M.B.); (S.M.); (A.S.)
| | - Mark Blumenau
- P.N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow 119991, Russia; (A.D.); (M.P.); (M.B.); (S.M.); (A.S.)
| | - Sergey Martanov
- P.N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow 119991, Russia; (A.D.); (M.P.); (M.B.); (S.M.); (A.S.)
| | - Mark Naumov
- Dukhov Research Institute of Automatics (VNIIA), Moscow 127055, Russia;
| | - Aleksey Shupletsov
- P.N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow 119991, Russia; (A.D.); (M.P.); (M.B.); (S.M.); (A.S.)
| | - Aleksandr Kuntsevich
- P.N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow 119991, Russia; (A.D.); (M.P.); (M.B.); (S.M.); (A.S.)
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9
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Hoang AT, Hu L, Kim BJ, Van TTN, Park KD, Jeong Y, Lee K, Ji S, Hong J, Katiyar AK, Shong B, Kim K, Im S, Chung WJ, Ahn JH. Low-temperature growth of MoS 2 on polymer and thin glass substrates for flexible electronics. NATURE NANOTECHNOLOGY 2023; 18:1439-1447. [PMID: 37500777 DOI: 10.1038/s41565-023-01460-w] [Citation(s) in RCA: 3] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/20/2022] [Accepted: 06/14/2023] [Indexed: 07/29/2023]
Abstract
Recent advances in two-dimensional semiconductors, particularly molybdenum disulfide (MoS2), have enabled the fabrication of flexible electronic devices with outstanding mechanical flexibility. Previous approaches typically involved the synthesis of MoS2 on a rigid substrate at a high temperature followed by the transfer to a flexible substrate onto which the device is fabricated. A recurring drawback with this methodology is the fact that flexible substrates have a lower melting temperature than the MoS2 growth process, and that the transfer process degrades the electronic properties of MoS2. Here we report a strategy for directly synthesizing high-quality and high-crystallinity MoS2 monolayers on polymers and ultrathin glass substrates (thickness ~30 µm) at ~150 °C using metal-organic chemical vapour deposition. By avoiding the transfer process, the MoS2 quality is preserved. On flexible field-effect transistors, we achieve a mobility of 9.1 cm2 V-1 s-1 and a positive threshold voltage of +5 V, which is essential for reducing device power consumption. Moreover, under bending conditions, our logic circuits exhibit stable operation while phototransistors can detect light over a wide range of wavelengths from 405 nm to 904 nm.
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Affiliation(s)
- Anh Tuan Hoang
- School of Electrical and Electronic Engineering, Yonsei University, Seoul, Republic of Korea
| | - Luhing Hu
- School of Electrical and Electronic Engineering, Yonsei University, Seoul, Republic of Korea
| | - Beom Jin Kim
- School of Electrical and Electronic Engineering, Yonsei University, Seoul, Republic of Korea
| | - Tran Thi Ngoc Van
- Department of Chemical Engineering, Hongik University, Seoul, Republic of Korea
| | - Kyeong Dae Park
- Institute for Rare Metals and Division of Advanced Materials Engineering, Kongju National University, Cheonan, Republic of Korea
| | - Yeonsu Jeong
- Van der Waals Materials Research Center, Department of Physics, Yonsei University, Seoul, Republic of Korea
| | - Kihyun Lee
- Van der Waals Materials Research Center, Department of Physics, Yonsei University, Seoul, Republic of Korea
- Center for Nanomedicine, Institute for Basic Science (IBS), Seoul, Korea
| | - Seunghyeon Ji
- School of Electrical and Electronic Engineering, Yonsei University, Seoul, Republic of Korea
| | - Juyeong Hong
- School of Electrical and Electronic Engineering, Yonsei University, Seoul, Republic of Korea
| | - Ajit Kumar Katiyar
- School of Electrical and Electronic Engineering, Yonsei University, Seoul, Republic of Korea
| | - Bonggeun Shong
- Department of Chemical Engineering, Hongik University, Seoul, Republic of Korea
| | - Kwanpyo Kim
- Van der Waals Materials Research Center, Department of Physics, Yonsei University, Seoul, Republic of Korea
- Center for Nanomedicine, Institute for Basic Science (IBS), Seoul, Korea
| | - Seongil Im
- Van der Waals Materials Research Center, Department of Physics, Yonsei University, Seoul, Republic of Korea
| | - Woon Jin Chung
- Institute for Rare Metals and Division of Advanced Materials Engineering, Kongju National University, Cheonan, Republic of Korea
| | - Jong-Hyun Ahn
- School of Electrical and Electronic Engineering, Yonsei University, Seoul, Republic of Korea.
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10
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Yan X, Zheng Z, Sangwan VK, Qian JH, Wang X, Liu SE, Watanabe K, Taniguchi T, Xu SY, Jarillo-Herrero P, Ma Q, Hersam MC. Moiré synaptic transistor with room-temperature neuromorphic functionality. Nature 2023; 624:551-556. [PMID: 38123805 DOI: 10.1038/s41586-023-06791-1] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/11/2023] [Accepted: 10/26/2023] [Indexed: 12/23/2023]
Abstract
Moiré quantum materials host exotic electronic phenomena through enhanced internal Coulomb interactions in twisted two-dimensional heterostructures1-4. When combined with the exceptionally high electrostatic control in atomically thin materials5-8, moiré heterostructures have the potential to enable next-generation electronic devices with unprecedented functionality. However, despite extensive exploration, moiré electronic phenomena have thus far been limited to impractically low cryogenic temperatures9-14, thus precluding real-world applications of moiré quantum materials. Here we report the experimental realization and room-temperature operation of a low-power (20 pW) moiré synaptic transistor based on an asymmetric bilayer graphene/hexagonal boron nitride moiré heterostructure. The asymmetric moiré potential gives rise to robust electronic ratchet states, which enable hysteretic, non-volatile injection of charge carriers that control the conductance of the device. The asymmetric gating in dual-gated moiré heterostructures realizes diverse biorealistic neuromorphic functionalities, such as reconfigurable synaptic responses, spatiotemporal-based tempotrons and Bienenstock-Cooper-Munro input-specific adaptation. In this manner, the moiré synaptic transistor enables efficient compute-in-memory designs and edge hardware accelerators for artificial intelligence and machine learning.
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Affiliation(s)
- Xiaodong Yan
- Department of Materials Science and Engineering, Northwestern University, Evanston, IL, USA
| | - Zhiren Zheng
- Department of Physics, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Vinod K Sangwan
- Department of Materials Science and Engineering, Northwestern University, Evanston, IL, USA
| | - Justin H Qian
- Department of Materials Science and Engineering, Northwestern University, Evanston, IL, USA
| | - Xueqiao Wang
- Department of Physics, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Stephanie E Liu
- Department of Materials Science and Engineering, Northwestern University, Evanston, IL, USA
| | - Kenji Watanabe
- Research Center for Functional Materials, National Institute for Materials Science, Tsukuba, Japan
| | - Takashi Taniguchi
- International Center for Material Nanoarchitectonics, National Institute for Materials Science, Tsukuba, Japan
| | - Su-Yang Xu
- Department of Chemistry and Chemical Biology, Harvard University, Cambridge, MA, USA
| | | | - Qiong Ma
- Department of Physics, Boston College, Chestnut Hill, MA, USA.
- CIFAR Azrieli Global Scholars Program, CIFAR, Toronto, Ontario, Canada.
| | - Mark C Hersam
- Department of Materials Science and Engineering, Northwestern University, Evanston, IL, USA.
- Department of Electrical and Computer Engineering, Northwestern University, Evanston, IL, USA.
- Department of Chemistry, Northwestern University, Evanston, IL, USA.
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11
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Hong C, Oh S, Dat VK, Pak S, Cha S, Ko KH, Choi GM, Low T, Oh SH, Kim JH. Engineering electrode interfaces for telecom-band photodetection in MoS 2/Au heterostructures via sub-band light absorption. LIGHT, SCIENCE & APPLICATIONS 2023; 12:280. [PMID: 37996413 PMCID: PMC10667329 DOI: 10.1038/s41377-023-01308-x] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/04/2023] [Revised: 09/27/2023] [Accepted: 10/13/2023] [Indexed: 11/25/2023]
Abstract
Transition metal dichalcogenide (TMD) layered semiconductors possess immense potential in the design of photonic, electronic, optoelectronic, and sensor devices. However, the sub-bandgap light absorption of TMD in the range from near-infrared (NIR) to short-wavelength infrared (SWIR) is insufficient for applications beyond the bandgap limit. Herein, we report that the sub-bandgap photoresponse of MoS2/Au heterostructures can be robustly modulated by the electrode fabrication method employed. We observed up to 60% sub-bandgap absorption in the MoS2/Au heterostructure, which includes the hybridized interface, where the Au layer was applied via sputter deposition. The greatly enhanced absorption of sub-bandgap light is due to the planar cavity formed by MoS2 and Au; as such, the absorption spectrum can be tuned by altering the thickness of the MoS2 layer. Photocurrent in the SWIR wavelength range increases due to increased absorption, which means that broad wavelength detection from visible toward SWIR is possible. We also achieved rapid photoresponse (~150 µs) and high responsivity (17 mA W-1) at an excitation wavelength of 1550 nm. Our findings demonstrate a facile method for optical property modulation using metal electrode engineering and for realizing SWIR photodetection in wide-bandgap 2D materials.
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Affiliation(s)
- Chengyun Hong
- Department of Energy Science, Sungkyunkwan University, Suwon, 16419, Republic of Korea
- Center for Integrated Nanostructure Physics (CINAP), Institute for Basic Science (IBS), Sungkyunkwan University, Suwon, 16419, Republic of Korea
| | - Saejin Oh
- Department of Energy Science, Sungkyunkwan University, Suwon, 16419, Republic of Korea
- Center for Integrated Nanostructure Physics (CINAP), Institute for Basic Science (IBS), Sungkyunkwan University, Suwon, 16419, Republic of Korea
| | - Vu Khac Dat
- Department of Energy Science, Sungkyunkwan University, Suwon, 16419, Republic of Korea
- Center for Integrated Nanostructure Physics (CINAP), Institute for Basic Science (IBS), Sungkyunkwan University, Suwon, 16419, Republic of Korea
| | - Sangyeon Pak
- School of Electronic and Electrical Engineering, Hongik University, Seoul, 04066, Republic of Korea
| | - SeungNam Cha
- Department of Physics, Sungkyunkwan University, Suwon, 16419, Republic of Korea
| | - Kyung-Hun Ko
- Department of Energy Science, Sungkyunkwan University, Suwon, 16419, Republic of Korea
- Center for Integrated Nanostructure Physics (CINAP), Institute for Basic Science (IBS), Sungkyunkwan University, Suwon, 16419, Republic of Korea
| | - Gyung-Min Choi
- Department of Energy Science, Sungkyunkwan University, Suwon, 16419, Republic of Korea
- Center for Integrated Nanostructure Physics (CINAP), Institute for Basic Science (IBS), Sungkyunkwan University, Suwon, 16419, Republic of Korea
| | - Tony Low
- Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, MN, 55455, USA.
| | - Sang-Hyun Oh
- Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, MN, 55455, USA.
| | - Ji-Hee Kim
- Department of Energy Science, Sungkyunkwan University, Suwon, 16419, Republic of Korea.
- Center for Integrated Nanostructure Physics (CINAP), Institute for Basic Science (IBS), Sungkyunkwan University, Suwon, 16419, Republic of Korea.
- Department of Physics, Pusan National University, Busan, 46241, Republic of Korea.
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12
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Lien MR, Wang N, Guadagnini S, Wu J, Soibel A, Gunapala SD, Wang H, Povinelli ML. Black Phosphorus Molybdenum Disulfide Midwave Infrared Photodiodes with Broadband Absorption-Increasing Metasurfaces. NANO LETTERS 2023; 23:9980-9987. [PMID: 37883580 PMCID: PMC10636840 DOI: 10.1021/acs.nanolett.3c03076] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/15/2023] [Revised: 10/20/2023] [Accepted: 10/24/2023] [Indexed: 10/28/2023]
Abstract
Black phosphorus (BP) has been established as a promising material for room temperature midwave infrared (MWIR) photodetectors. However, many of its attractive optoelectronic properties are often observable only at smaller film thicknesses, which inhibits photodetector absorption and performance. In this work, we show that metasurface gratings increase the absorption of BP-MoS2 heterojunction photodiodes over a broad range of wavelengths in the MWIR. We designed, fabricated, and characterized metasurface gratings that increase absorption at selected wavelengths or broad spectral ranges. We evaluated the broadband metasurfaces by measuring the room temperature responsivity and specific detectivity of BP-MoS2 photodiodes at multiple MWIR wavelengths. Our results show that broadband metasurface gratings are a scalable approach for boosting the performance of BP photodiodes over large spectral ranges.
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Affiliation(s)
- Max R. Lien
- Ming
Hsieh Department of Electrical and Computer Engineering, University of Southern California, Los Angeles, California 90089, United States
| | - Nan Wang
- Mork
Family Department of Chemical Engineering & Materials Science, University of Southern California, Los Angeles, California 90089, United States
| | - Silvia Guadagnini
- Department
of Physics & Astronomy, University of
Southern California, Los Angeles, California 90089, United States
| | - Jiangbin Wu
- Ming
Hsieh Department of Electrical and Computer Engineering, University of Southern California, Los Angeles, California 90089, United States
| | - Alexander Soibel
- Jet
Propulsion Laboratory, California Institute
of Technology, 4800 Oak
Grove Dr., Pasadena, California 91030, United States
| | - Sarath D. Gunapala
- Jet
Propulsion Laboratory, California Institute
of Technology, 4800 Oak
Grove Dr., Pasadena, California 91030, United States
| | - Han Wang
- Ming
Hsieh Department of Electrical and Computer Engineering, University of Southern California, Los Angeles, California 90089, United States
- Mork
Family Department of Chemical Engineering & Materials Science, University of Southern California, Los Angeles, California 90089, United States
| | - Michelle L. Povinelli
- Ming
Hsieh Department of Electrical and Computer Engineering, University of Southern California, Los Angeles, California 90089, United States
- Department
of Physics & Astronomy, University of
Southern California, Los Angeles, California 90089, United States
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13
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Jiao C, Pei S, Wu S, Wang Z, Xia J. Tuning and exploiting interlayer coupling in two-dimensional van der Waals heterostructures. REPORTS ON PROGRESS IN PHYSICS. PHYSICAL SOCIETY (GREAT BRITAIN) 2023; 86:114503. [PMID: 37774692 DOI: 10.1088/1361-6633/acfe89] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/31/2022] [Accepted: 09/29/2023] [Indexed: 10/01/2023]
Abstract
Two-dimensional (2D) layered materials can stack into new material systems, with van der Waals (vdW) interaction between the adjacent constituent layers. This stacking process of 2D atomic layers creates a new degree of freedom-interlayer interface between two adjacent layers-that can be independently studied and tuned from the intralayer degree of freedom. In such heterostructures (HSs), the physical properties are largely determined by the vdW interaction between the individual layers,i.e.interlayer coupling, which can be effectively tuned by a number of means. In this review, we summarize and discuss a number of such approaches, including stacking order, electric field, intercalation, and pressure, with both their experimental demonstrations and theoretical predictions. A comprehensive overview of the modulation on structural, optical, electrical, and magnetic properties by these four approaches are also presented. We conclude this review by discussing several prospective research directions in 2D HSs field, including fundamental physics study, property tuning techniques, and future applications.
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Affiliation(s)
- Chenyin Jiao
- Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu 610054, People's Republic of China
| | - Shenghai Pei
- Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu 610054, People's Republic of China
| | - Song Wu
- Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu 610054, People's Republic of China
| | - Zenghui Wang
- Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu 610054, People's Republic of China
| | - Juan Xia
- Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu 610054, People's Republic of China
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14
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Chen L, Lin C, Shi D, Huang X, Zheng Q, Nie J, Ma M. Fully automatic transfer and measurement system for structural superlubric materials. Nat Commun 2023; 14:6323. [PMID: 37816725 PMCID: PMC10564961 DOI: 10.1038/s41467-023-41859-6] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/15/2022] [Accepted: 09/18/2023] [Indexed: 10/12/2023] Open
Abstract
Structural superlubricity, a state of nearly zero friction and no wear between two contact surfaces under relative sliding, holds immense potential for research and application prospects in micro-electro-mechanical systems devices, mechanical engineering, and energy resources. A critical step towards the practical application of structural superlubricity is the mass transfer and high throughput performance evaluation. Limited by the yield rate of material preparation, existing automated systems, such as roll printing or massive stamping, are inadequate for this task. In this paper, a machine learning-assisted system is proposed to realize fully automated selective transfer and tribological performance measurement for structural superlubricity materials. Specifically, the system has a judgment accuracy of over 98% for the selection of micro-scale graphite flakes with structural superlubricity properties and complete the 100 graphite flakes assembly array to form various pre-designed patterns within 100 mins, which is 15 times faster than manual operation. Besides, the system is capable of automatically measuring the tribological performance of over 100 selected flakes on Si3N4, delivering statistical results for new interface which is beyond the reach of traditional methods. With its high accuracy, efficiency, and robustness, this machine learning-assisted system promotes the fundamental research and practical application of structural superlubricity.
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Affiliation(s)
- Li Chen
- Department of Engineering Mechanics, Tsinghua University, Beijing, 100084, China
- Center for Nano and Micro Mechanics, Tsinghua University, Beijing, 100084, China
| | - Cong Lin
- Department of Computer Science and Engineering, University of California, San Diego, CA, 92093, USA
| | - Diwei Shi
- Department of Engineering Mechanics, Tsinghua University, Beijing, 100084, China
- Center for Nano and Micro Mechanics, Tsinghua University, Beijing, 100084, China
| | - Xuanyu Huang
- Center for Nano and Micro Mechanics, Tsinghua University, Beijing, 100084, China
- Department of Mechanical Engineering, Tsinghua University, Beijing, 100084, China
| | - Quanshui Zheng
- Department of Engineering Mechanics, Tsinghua University, Beijing, 100084, China
- Center for Nano and Micro Mechanics, Tsinghua University, Beijing, 100084, China
- Research Institute of Tsinghua University in Shenzhen, Shenzhen, 518057, China
- Institute of Materials Research, Shenzhen International Graduate School, Tsinghua University, Shenzhen, 518055, P. R. China
| | - Jinhui Nie
- Research Institute of Tsinghua University in Shenzhen, Shenzhen, 518057, China.
| | - Ming Ma
- Center for Nano and Micro Mechanics, Tsinghua University, Beijing, 100084, China.
- Department of Mechanical Engineering, Tsinghua University, Beijing, 100084, China.
- Research Institute of Tsinghua University in Shenzhen, Shenzhen, 518057, China.
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15
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Meng Y, Zhong H, Xu Z, He T, Kim JS, Han S, Kim S, Park S, Shen Y, Gong M, Xiao Q, Bae SH. Functionalizing nanophotonic structures with 2D van der Waals materials. NANOSCALE HORIZONS 2023; 8:1345-1365. [PMID: 37608742 DOI: 10.1039/d3nh00246b] [Citation(s) in RCA: 4] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/24/2023]
Abstract
The integration of two-dimensional (2D) van der Waals materials with nanostructures has triggered a wide spectrum of optical and optoelectronic applications. Photonic structures of conventional materials typically lack efficient reconfigurability or multifunctionality. Atomically thin 2D materials can thus generate new functionality and reconfigurability for a well-established library of photonic structures such as integrated waveguides, optical fibers, photonic crystals, and metasurfaces, to name a few. Meanwhile, the interaction between light and van der Waals materials can be drastically enhanced as well by leveraging micro-cavities or resonators with high optical confinement. The unique van der Waals surfaces of the 2D materials enable handiness in transfer and mixing with various prefabricated photonic templates with high degrees of freedom, functionalizing as the optical gain, modulation, sensing, or plasmonic media for diverse applications. Here, we review recent advances in synergizing 2D materials to nanophotonic structures for prototyping novel functionality or performance enhancements. Challenges in scalable 2D materials preparations and transfer, as well as emerging opportunities in integrating van der Waals building blocks beyond 2D materials are also discussed.
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Affiliation(s)
- Yuan Meng
- Department of Mechanical Engineering and Materials Science, Washington University in St. Louis, St. Louis, MO, USA.
| | - Hongkun Zhong
- State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing, China.
| | - Zhihao Xu
- Institute of Materials Science and Engineering, Washington University in St. Louis, St. Louis, MO, USA
| | - Tiantian He
- State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing, China.
| | - Justin S Kim
- Institute of Materials Science and Engineering, Washington University in St. Louis, St. Louis, MO, USA
| | - Sangmoon Han
- Department of Mechanical Engineering and Materials Science, Washington University in St. Louis, St. Louis, MO, USA.
| | - Sunok Kim
- Department of Mechanical Engineering and Materials Science, Washington University in St. Louis, St. Louis, MO, USA.
| | - Seoungwoong Park
- Institute of Materials Science and Engineering, Washington University in St. Louis, St. Louis, MO, USA
| | - Yijie Shen
- Division of Physics and Applied Physics, School of Physical and Mathematical Sciences, Nanyang Technological University, Singapore, Singapore
- Optoelectronics Research Centre, University of Southampton, Southampton, UK
| | - Mali Gong
- State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing, China.
| | - Qirong Xiao
- State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing, China.
| | - Sang-Hoon Bae
- Department of Mechanical Engineering and Materials Science, Washington University in St. Louis, St. Louis, MO, USA.
- Institute of Materials Science and Engineering, Washington University in St. Louis, St. Louis, MO, USA
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16
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Naito H, Makino Y, Zhang W, Ogawa T, Endo T, Sannomiya T, Kaneda M, Hashimoto K, Lim HE, Nakanishi Y, Watanabe K, Taniguchi T, Matsuda K, Miyata Y. High-throughput dry transfer and excitonic properties of twisted bilayers based on CVD-grown transition metal dichalcogenides. NANOSCALE ADVANCES 2023; 5:5115-5121. [PMID: 37705802 PMCID: PMC10496764 DOI: 10.1039/d3na00371j] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/30/2023] [Accepted: 08/21/2023] [Indexed: 09/15/2023]
Abstract
van der Waals (vdW) layered materials have attracted much attention because their physical properties can be controlled by varying the twist angle and layer composition. However, such twisted vdW assemblies are often prepared using mechanically exfoliated monolayer flakes with unintended shapes through a time-consuming search for such materials. Here, we report the rapid and dry fabrication of twisted multilayers using chemical vapor deposition (CVD) grown transition metal chalcogenide (TMDC) monolayers. By improving the adhesion of an acrylic resin stamp to the monolayers, the single crystals of various TMDC monolayers with desired grain size and density on a SiO2/Si substrate can be efficiently picked up. The present dry transfer process demonstrates the one-step fabrication of more than 100 twisted bilayers and the sequential stacking of a twisted 10-layer MoS2 single crystal. Furthermore, we also fabricated hBN-encapsulated TMDC monolayers and various twisted bilayers including MoSe2/MoS2, MoSe2/WSe2, and MoSe2/WS2. The interlayer interaction and quality of dry-transferred, CVD-grown TMDCs were characterized by using photoluminescence (PL), cathodoluminescence (CL) spectroscopy, and cross-sectional electron microscopy. The prominent PL peaks of interlayer excitons can be observed for MoSe2/MoS2 and MoSe2/WSe2 with small twist angles at room temperature. We also found that the optical spectra were locally modulated due to nanosized bubbles, which are formed by the presence of interface carbon impurities. The present findings indicate the widely applicable potential of the present method and enable an efficient search of the emergent optical and electrical properties of TMDC-based vdW heterostructures.
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Affiliation(s)
- Hibiki Naito
- Department of Physics, Tokyo Metropolitan University Hachioji 192-0397 Japan
| | - Yasuyuki Makino
- Department of Physics, Tokyo Metropolitan University Hachioji 192-0397 Japan
| | - Wenjin Zhang
- Department of Physics, Tokyo Metropolitan University Hachioji 192-0397 Japan
| | - Tomoya Ogawa
- Department of Physics, Tokyo Metropolitan University Hachioji 192-0397 Japan
| | - Takahiko Endo
- Department of Physics, Tokyo Metropolitan University Hachioji 192-0397 Japan
| | - Takumi Sannomiya
- Department of Materials Science and Engineering, Tokyo Institute of Technology Yokohama 226-8503 Japan
| | - Masahiko Kaneda
- Department of Physics, Tokyo Metropolitan University Hachioji 192-0397 Japan
| | - Kazuki Hashimoto
- Department of Physics, Tokyo Metropolitan University Hachioji 192-0397 Japan
| | - Hong En Lim
- Department of Chemistry, Saitama University Saitama 338-8570 Japan
| | - Yusuke Nakanishi
- Department of Physics, Tokyo Metropolitan University Hachioji 192-0397 Japan
| | - Kenji Watanabe
- Research Center for Electronic and Optical Materials, NIMS Tsukuba 305-0044 Japan
| | - Takashi Taniguchi
- Research Center for Materials Nanoarchitectonics, NIMS Tsukuba 305-0044 Japan
| | - Kazunari Matsuda
- Institute of Advanced Energy, Kyoto University Kyoto 611-0011 Japan
| | - Yasumitsu Miyata
- Department of Physics, Tokyo Metropolitan University Hachioji 192-0397 Japan
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17
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Shi Y, Yamamoto E, Kobayashi M, Osada M. Automated One-Drop Assembly for Facile 2D Film Deposition. ACS APPLIED MATERIALS & INTERFACES 2023; 15:22737-22743. [PMID: 36999230 DOI: 10.1021/acsami.3c02250] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/11/2023]
Abstract
The effective application of 2D materials is strongly dependent on the mass production of high-quality large-area 2D thin films. Here, we demonstrate a strategy for the automated manufacturing of high-quality 2D thin films using a modified drop-casting approach. Our approach is simple; by using an automated pipette, a dilute aqueous suspension is dropped onto a substrate heated on a hotplate, and controlled convection by Marangoni flow and liquid removal causes the nanosheets to come together to form a tile-like monolayer film in 1-2 min. Ti0.87O2 nanosheets are utilized as a model system for investigating the control parameters such as concentrations, suction speeds, and substrate temperatures. We perform the automated one-drop assembly of a range of 2D nanosheets (metal oxides, graphene oxide, and hexagonal boron nitride) and successfully fabricate various functional thin films in multilayered, heterostructured, and sub-micrometer-thick forms. Our deposition method enables on-demand large-size (>2 inchϕ) manufacturing of high-quality 2D thin films while reducing the time and sample consumption.
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Affiliation(s)
- Yue Shi
- Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Nagoya 464-8601, Japan
| | - Eisuke Yamamoto
- Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Nagoya 464-8601, Japan
| | - Makoto Kobayashi
- Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Nagoya 464-8601, Japan
| | - Minoru Osada
- Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Nagoya 464-8601, Japan
- International Center for Materials Nanoarchitectonics (WPI-MANA), National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan
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18
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Yang X, Li J, Song R, Zhao B, Tang J, Kong L, Huang H, Zhang Z, Liao L, Liu Y, Duan X, Duan X. Highly reproducible van der Waals integration of two-dimensional electronics on the wafer scale. NATURE NANOTECHNOLOGY 2023; 18:471-478. [PMID: 36941356 DOI: 10.1038/s41565-023-01342-1] [Citation(s) in RCA: 5] [Impact Index Per Article: 5.0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/13/2022] [Accepted: 02/03/2023] [Indexed: 05/21/2023]
Abstract
Two-dimensional (2D) semiconductors such as molybdenum disulfide (MoS2) have attracted tremendous interest for transistor applications. However, the fabrication of 2D transistors using traditional lithography or deposition processes often causes undesired damage and contamination to the atomically thin lattices, partially degrading the device performance and leading to large variation between devices. Here we demonstrate a highly reproducible van der Waals integration process for wafer-scale fabrication of high-performance transistors and logic circuits from monolayer MoS2 grown by chemical vapour deposition. By designing a quartz/polydimethylsiloxane semirigid stamp and adapting a standard photolithography mask-aligner for the van der Waals integration process, our strategy ensures a uniform mechanical force and a bubble-free wrinkle-free interface during the pickup/release process, which is crucial for robust van der Waals integration over a large area. Our scalable van der Waals integration process allows damage-free integration of high-quality contacts on monolayer MoS2 at the wafer scale and enables high-performance 2D transistors. The van-der-Waals-contacted devices display an atomically clean interface with much smaller threshold variation, higher on-current, smaller off-current, larger on/off ratio and smaller subthreshold swing than those fabricated with conventional lithography. The approach is further used to create various logic gates and circuits, including inverters with a voltage gain of up to 585, and logic OR gates, NAND gates, AND gates and half-adder circuits. This scalable van der Waals integration method may be useful for reliable integration of 2D semiconductors with mature industry technology, facilitating the technological transition of 2D semiconductor electronics.
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Affiliation(s)
- Xiangdong Yang
- Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, Changsha, China
- Institute of Micro/Nano Materials and Devices, Ningbo University of Technology, Ningbo, China
| | - Jia Li
- Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, Changsha, China
| | - Rong Song
- Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, Changsha, China
| | - Bei Zhao
- Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, Changsha, China
| | - Jingmei Tang
- Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, Changsha, China
| | - Lingan Kong
- School of Physics and Electronics, Hunan University, Changsha, China
| | - Hao Huang
- School of Physics and Electronics, Hunan University, Changsha, China
- School of Resources, Environments and Materials, Guangxi University, Nanning, China
| | - Zhengwei Zhang
- Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, Changsha, China
| | - Lei Liao
- School of Physics and Electronics, Hunan University, Changsha, China
| | - Yuan Liu
- School of Physics and Electronics, Hunan University, Changsha, China.
| | - Xiangfeng Duan
- Department of Chemistry and Biochemistry, University of California, Los Angeles, Los Angeles, CA, USA
| | - Xidong Duan
- Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, Changsha, China.
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19
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Burns K, Tan AMZ, Hachtel JA, Aditya A, Baradwaj N, Mishra A, Linker T, Nakano A, Kalia R, Lang EJ, Schoell R, Hennig RG, Hattar K, Aitkaliyeva A. Tailoring the Angular Mismatch in MoS 2 Homobilayers through Deformation Fields. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2023:e2300098. [PMID: 37026674 DOI: 10.1002/smll.202300098] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/04/2023] [Revised: 03/06/2023] [Indexed: 06/19/2023]
Abstract
Ultrathin MoS2 has shown remarkable characteristics at the atomic scale with an immutable disorder to weak external stimuli. Ion beam modification unlocks the potential to selectively tune the size, concentration, and morphology of defects produced at the site of impact in 2D materials. Combining experiments, first-principles calculations, atomistic simulations, and transfer learning, it is shown that irradiation-induced defects can induce a rotation-dependent moiré pattern in vertically stacked homobilayers of MoS2 by deforming the atomically thin material and exciting surface acoustic waves (SAWs). Additionally, the direct correlation between stress and lattice disorder by probing the intrinsic defects and atomic environments are demonstrated. The method introduced in this paper sheds light on how engineering defects in the lattice can be used to tailor the angular mismatch in van der Waals (vdW) solids.
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Affiliation(s)
- Kory Burns
- Department of Materials Science & Engineering, University of Florida, Gainesville, FL, 32611, USA
- Center for Integrated Nanotechnologies, Sandia National Laboratories, Albuquerque, NM, 87545, USA
- Department of Materials Science & Engineering, University of Virginia, Charlottesville, VA, 22904, USA
| | - Anne Marie Z Tan
- Department of Materials Science & Engineering, University of Florida, Gainesville, FL, 32611, USA
| | - Jordan A Hachtel
- Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN, 37830, USA
| | - Anikeya Aditya
- Department of Physics, University of Southern California, Los Angeles, CA, 90089, USA
| | - Nitish Baradwaj
- Department of Physics, University of Southern California, Los Angeles, CA, 90089, USA
| | - Ankit Mishra
- Department of Physics, University of Southern California, Los Angeles, CA, 90089, USA
| | - Thomas Linker
- Department of Physics, University of Southern California, Los Angeles, CA, 90089, USA
| | - Aiichiro Nakano
- Department of Physics, University of Southern California, Los Angeles, CA, 90089, USA
| | - Rajiv Kalia
- Department of Physics, University of Southern California, Los Angeles, CA, 90089, USA
| | - Eric J Lang
- Center for Integrated Nanotechnologies, Sandia National Laboratories, Albuquerque, NM, 87545, USA
- Department of Nuclear Engineering, University of New Mexico, Albuquerque, NM, 87131, USA
| | - Ryan Schoell
- Center for Integrated Nanotechnologies, Sandia National Laboratories, Albuquerque, NM, 87545, USA
| | - Richard G Hennig
- Department of Materials Science & Engineering, University of Florida, Gainesville, FL, 32611, USA
| | - Khalid Hattar
- Center for Integrated Nanotechnologies, Sandia National Laboratories, Albuquerque, NM, 87545, USA
- Department of Nuclear Engineering, University of Tennessee, Knoxville, TN, 37996, USA
| | - Assel Aitkaliyeva
- Department of Materials Science & Engineering, University of Florida, Gainesville, FL, 32611, USA
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20
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Yang SJ, Choi MY, Kim CJ. Engineering Grain Boundaries in Two-Dimensional Electronic Materials. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2023; 35:e2203425. [PMID: 35777352 DOI: 10.1002/adma.202203425] [Citation(s) in RCA: 3] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/15/2022] [Revised: 06/30/2022] [Indexed: 06/15/2023]
Abstract
Engineering the boundary structures in 2D materials provides an unprecedented opportunity to program the physical properties of the materials with extensive tunability and realize innovative devices with advanced functionalities. However, structural engineering technology is still in its infancy, and creating artificial boundary structures with high reproducibility remains difficult. In this review, various emergent properties of 2D materials with different grain boundaries, and the current techniques to control the structures, are introduced. The remaining challenges for scalable and reproducible structure control and the outlook on the future directions of the related techniques are also discussed.
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Affiliation(s)
- Seong-Jun Yang
- Center for Epitaxial van der Waals Quantum Solids, Institute for Basic Science (IBS), Pohang, Gyeongbuk, 37673, Republic of Korea
- Department of Chemical Engineering, Pohang University of Science and Technology, Pohang, Gyeongbuk, 37673, Republic of Korea
| | - Min-Yeong Choi
- Center for Epitaxial van der Waals Quantum Solids, Institute for Basic Science (IBS), Pohang, Gyeongbuk, 37673, Republic of Korea
- Department of Chemical Engineering, Pohang University of Science and Technology, Pohang, Gyeongbuk, 37673, Republic of Korea
| | - Cheol-Joo Kim
- Center for Epitaxial van der Waals Quantum Solids, Institute for Basic Science (IBS), Pohang, Gyeongbuk, 37673, Republic of Korea
- Department of Chemical Engineering, Pohang University of Science and Technology, Pohang, Gyeongbuk, 37673, Republic of Korea
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21
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Guo S, Luo M, Shi G, Tian N, Huang Z, Yang F, Ma L, Wang NZ, Shi Q, Xu K, Xu Z, Watanabe K, Taniguchi T, Chen XH, Shen D, Zhang L, Ruan W, Zhang Y. An ultra-high vacuum system for fabricating clean two-dimensional material devices. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2023; 94:013903. [PMID: 36725600 DOI: 10.1063/5.0110875] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/17/2022] [Accepted: 12/21/2022] [Indexed: 06/18/2023]
Abstract
High mobility electron gases confined at material interfaces have been a venue for major discoveries in condensed matter physics. Ultra-high vacuum (UHV) technologies played a key role in creating such high-quality interfaces. The advent of two-dimensional (2D) materials brought new opportunities to explore exotic physics in flat lands. UHV technologies may once again revolutionize research in low dimensions by facilitating the construction of ultra-clean interfaces with a wide variety of 2D materials. Here, we describe the design and operation of a UHV 2D material device fabrication system, in which the entire fabrication process is performed under pressure lower than 5 × 10-10 mbar. Specifically, the UHV system enables the exfoliation of atomically clean 2D materials. Subsequent in situ assembly of van der Waals heterostructures produces high-quality interfaces that are free of contamination. We demonstrate functionalities of this system through exemplary fabrication of various 2D materials and their heterostructures.
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Affiliation(s)
- Shuaifei Guo
- State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200438, China
| | - Mingyan Luo
- State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200438, China
| | - Gang Shi
- Department of Physics, Southern University of Science and Technology, 518055 Shenzhen, China
| | - Ning Tian
- State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200438, China
| | - Zhe Huang
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology (SIMIT), Chinese Academy of Sciences, Shanghai 200050, China
| | - Fangyuan Yang
- State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200438, China
| | - Liguo Ma
- State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200438, China
| | - Nai Zhou Wang
- Hefei National Laboratory for Physical Science at Microscale and Department of Physics, University of Science and Technology of China, Hefei, Anhui 230026, China
| | - Qinzhen Shi
- Center for Biomedical Engineering, Fudan University, Shanghai 200438, China
| | - Kailiang Xu
- Center for Biomedical Engineering, Fudan University, Shanghai 200438, China
| | - Zihan Xu
- SixCarbon Technology, Youmagang Industry Park, Shenzhen 518106, China
| | - Kenji Watanabe
- Research Center for Functional Materials, National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan
| | - Takashi Taniguchi
- International Center for Materials Nanoarchitectonics, National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan
| | - Xian Hui Chen
- Hefei National Laboratory for Physical Science at Microscale and Department of Physics, University of Science and Technology of China, Hefei, Anhui 230026, China
| | - Dawei Shen
- State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology (SIMIT), Chinese Academy of Sciences, Shanghai 200050, China
| | - Liyuan Zhang
- Department of Physics, Southern University of Science and Technology, 518055 Shenzhen, China
| | - Wei Ruan
- State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200438, China
| | - Yuanbo Zhang
- State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200438, China
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22
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Torsional periodic lattice distortions and diffraction of twisted 2D materials. Nat Commun 2022; 13:7826. [PMID: 36535920 PMCID: PMC9763474 DOI: 10.1038/s41467-022-35477-x] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/28/2022] [Accepted: 12/05/2022] [Indexed: 12/23/2022] Open
Abstract
Twisted 2D materials form complex moiré structures that spontaneously reduce symmetry through picoscale deformation within a mesoscale lattice. We show twisted 2D materials contain a torsional displacement field comprised of three transverse periodic lattice distortions (PLD). The torsional PLD amplitude provides a single order parameter that concisely describes the structural complexity of twisted bilayer moirés. Moreover, the structure and amplitude of a torsional periodic lattice distortion is quantifiable using rudimentary electron diffraction methods sensitive to reciprocal space. In twisted bilayer graphene, the torsional PLD begins to form at angles below 3.89° and the amplitude reaches 8 pm around the magic angle of 1. 1°. At extremely low twist angles (e.g. below 0.25°) the amplitude increases and additional PLD harmonics arise to expand Bernal stacked domains separated by well defined solitonic boundaries. The torsional distortion field in twisted bilayer graphene is analytically described and has an upper bound of 22.6 pm. Similar torsional distortions are observed in twisted WS2, CrI3, and WSe2/MoSe2.
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23
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Xu B, Zhang P, Zhu J, Liu Z, Eichler A, Zheng XQ, Lee J, Dash A, More S, Wu S, Wang Y, Jia H, Naik A, Bachtold A, Yang R, Feng PXL, Wang Z. Nanomechanical Resonators: Toward Atomic Scale. ACS NANO 2022; 16:15545-15585. [PMID: 36054880 PMCID: PMC9620412 DOI: 10.1021/acsnano.2c01673] [Citation(s) in RCA: 20] [Impact Index Per Article: 10.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/11/2022] [Accepted: 08/12/2022] [Indexed: 06/15/2023]
Abstract
The quest for realizing and manipulating ever smaller man-made movable structures and dynamical machines has spurred tremendous endeavors, led to important discoveries, and inspired researchers to venture to previously unexplored grounds. Scientific feats and technological milestones of miniaturization of mechanical structures have been widely accomplished by advances in machining and sculpturing ever shrinking features out of bulk materials such as silicon. With the flourishing multidisciplinary field of low-dimensional nanomaterials, including one-dimensional (1D) nanowires/nanotubes and two-dimensional (2D) atomic layers such as graphene/phosphorene, growing interests and sustained effort have been devoted to creating mechanical devices toward the ultimate limit of miniaturization─genuinely down to the molecular or even atomic scale. These ultrasmall movable structures, particularly nanomechanical resonators that exploit the vibratory motion in these 1D and 2D nano-to-atomic-scale structures, offer exceptional device-level attributes, such as ultralow mass, ultrawide frequency tuning range, broad dynamic range, and ultralow power consumption, thus holding strong promises for both fundamental studies and engineering applications. In this Review, we offer a comprehensive overview and summary of this vibrant field, present the state-of-the-art devices and evaluate their specifications and performance, outline important achievements, and postulate future directions for studying these miniscule yet intriguing molecular-scale machines.
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Affiliation(s)
- Bo Xu
- Institute
of Fundamental and Frontier Sciences, University
of Electronic Science and Technology of China, Chengdu610054, China
| | - Pengcheng Zhang
- University
of Michigan−Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai200240, China
| | - Jiankai Zhu
- Institute
of Fundamental and Frontier Sciences, University
of Electronic Science and Technology of China, Chengdu610054, China
| | - Zuheng Liu
- University
of Michigan−Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai200240, China
| | | | - Xu-Qian Zheng
- Department
of Electrical and Computer Engineering, Herbert Wertheim College of
Engineering, University of Florida, Gainesville, Florida32611, United States
- College
of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing210023, China
| | - Jaesung Lee
- Department
of Electrical and Computer Engineering, Herbert Wertheim College of
Engineering, University of Florida, Gainesville, Florida32611, United States
- Department
of Electrical and Computer Engineering, University of Texas at El Paso, El Paso, Texas79968, United States
| | - Aneesh Dash
- Centre
for
Nano Science and Engineering, Indian Institute
of Science, Bangalore560012, Karnataka, India
| | - Swapnil More
- Centre
for
Nano Science and Engineering, Indian Institute
of Science, Bangalore560012, Karnataka, India
| | - Song Wu
- Institute
of Fundamental and Frontier Sciences, University
of Electronic Science and Technology of China, Chengdu610054, China
| | - Yanan Wang
- Department
of Electrical and Computer Engineering, Herbert Wertheim College of
Engineering, University of Florida, Gainesville, Florida32611, United States
- Department
of Electrical and Computer Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska68588, United States
| | - Hao Jia
- Shanghai
Institute of Microsystem and Information Technology, Chinese Academy
of Sciences, Shanghai200050, China
| | - Akshay Naik
- Centre
for
Nano Science and Engineering, Indian Institute
of Science, Bangalore560012, Karnataka, India
| | - Adrian Bachtold
- ICFO-Institut
de Ciencies Fotoniques, The Barcelona Institute
of Science and Technology, Castelldefels, Barcelona08860, Spain
| | - Rui Yang
- University
of Michigan−Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai200240, China
- School of
Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai200240, China
| | - Philip X.-L. Feng
- Department
of Electrical and Computer Engineering, Herbert Wertheim College of
Engineering, University of Florida, Gainesville, Florida32611, United States
| | - Zenghui Wang
- Institute
of Fundamental and Frontier Sciences, University
of Electronic Science and Technology of China, Chengdu610054, China
- State
Key Laboratory of Electronic Thin Films and Integrated Devices, University
of Electronic Science and Technology of China, Chengdu610054, China
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24
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Integrated wafer-scale ultra-flat graphene by gradient surface energy modulation. Nat Commun 2022; 13:5410. [PMID: 36109519 PMCID: PMC9477858 DOI: 10.1038/s41467-022-33135-w] [Citation(s) in RCA: 10] [Impact Index Per Article: 5.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/05/2022] [Accepted: 09/02/2022] [Indexed: 11/11/2022] Open
Abstract
The integration of large-scale two-dimensional (2D) materials onto semiconductor wafers is highly desirable for advanced electronic devices, but challenges such as transfer-related crack, contamination, wrinkle and doping remain. Here, we developed a generic method by gradient surface energy modulation, leading to a reliable adhesion and release of graphene onto target wafers. The as-obtained wafer-scale graphene exhibited a damage-free, clean, and ultra-flat surface with negligible doping, resulting in uniform sheet resistance with only ~6% deviation. The as-transferred graphene on SiO2/Si exhibited high carrier mobility reaching up ~10,000 cm2 V−1 s−1, with quantum Hall effect (QHE) observed at room temperature. Fractional quantum Hall effect (FQHE) appeared at 1.7 K after encapsulation by h-BN, yielding ultra-high mobility of ~280,000 cm2 V−1 s−1. Integrated wafer-scale graphene thermal emitters exhibited significant broadband emission in near-infrared (NIR) spectrum. Overall, the proposed methodology is promising for future integration of wafer-scale 2D materials in advanced electronics and optoelectronics. Defect-free integration of 2D materials onto semiconductor wafers is desired to implement heterogeneous electronic devices. Here, the authors report a method to transfer high-quality graphene on target wafers via gradient surface energy modulation, leading to improved structural and electronic properties.
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25
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Yu J, Liang C, Lee M, Das S, Ye A, Mujid F, Poddar PK, Cheng B, Abbott NL, Park J. Two-Dimensional Mechanics of Atomically Thin Solids on Water. NANO LETTERS 2022; 22:7180-7186. [PMID: 36047815 PMCID: PMC9479134 DOI: 10.1021/acs.nanolett.2c02499] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
Movement of a three-dimensional solid at an air-water interface is strongly influenced by the extrinsic interactions between the solid and the water. The finite thickness and volume of a moving solid causes capillary interactions and water-induced drag. In this Letter, we report the fabrication and dynamical imaging of freely floating MoS2 solids on water, which minimizes such extrinsic effects. For this, we delaminate a synthesized wafer-scale monolayer MoS2 onto a water surface, which shows negligible height difference across water and MoS2. Subsequently patterning by a laser generates arbitrarily shaped MoS2 with negligible in-plane strain. We introduce photoswitchable surfactants to exert a lateral force to floating MoS2 with a spatiotemporal control. Using this platform, we demonstrate a variety of two-dimensional mechanical systems that show reversible shape changes. Our experiment provides a versatile approach for designing and controlling a large array of atomically thin solids on water for intrinsically two-dimensional dynamics and mechanics.
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Affiliation(s)
- Jaehyung Yu
- Department of Chemistry, University of Chicago, Chicago, Illinois 60637, United States
| | - Ce Liang
- Pritzker School of Molecular Engineering, University of Chicago, Chicago, Illinois 60637, United States
| | - Myungjae Lee
- James Franck Institute, University of Chicago, Chicago, Illinois 60637, United States
| | - Soumik Das
- Department of Chemical and Biomolecular Engineering, Cornell University, Ithaca, New York 14853, United States
| | - Andrew Ye
- Pritzker School of Molecular Engineering, University of Chicago, Chicago, Illinois 60637, United States
| | - Fauzia Mujid
- Department of Chemistry, University of Chicago, Chicago, Illinois 60637, United States
| | - Preeti K Poddar
- Department of Chemistry, University of Chicago, Chicago, Illinois 60637, United States
| | - Baorui Cheng
- Department of Chemistry, University of Chicago, Chicago, Illinois 60637, United States
| | - Nicholas L Abbott
- Department of Chemical and Biomolecular Engineering, Cornell University, Ithaca, New York 14853, United States
| | - Jiwoong Park
- Department of Chemistry, University of Chicago, Chicago, Illinois 60637, United States
- Pritzker School of Molecular Engineering, University of Chicago, Chicago, Illinois 60637, United States
- James Franck Institute, University of Chicago, Chicago, Illinois 60637, United States
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26
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Tuning interfacial chemistry with twistronics. TRENDS IN CHEMISTRY 2022. [DOI: 10.1016/j.trechm.2022.07.003] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/24/2022]
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27
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Ago H, Okada S, Miyata Y, Matsuda K, Koshino M, Ueno K, Nagashio K. Science of 2.5 dimensional materials: paradigm shift of materials science toward future social innovation. SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS 2022; 23:275-299. [PMID: 35557511 PMCID: PMC9090349 DOI: 10.1080/14686996.2022.2062576] [Citation(s) in RCA: 10] [Impact Index Per Article: 5.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/21/2022] [Revised: 03/29/2022] [Accepted: 03/30/2022] [Indexed: 05/22/2023]
Abstract
The past decades of materials science discoveries are the basis of our present society - from the foundation of semiconductor devices to the recent development of internet of things (IoT) technologies. These materials science developments have depended mainly on control of rigid chemical bonds, such as covalent and ionic bonds, in organic molecules and polymers, inorganic crystals and thin films. The recent discovery of graphene and other two-dimensional (2D) materials offers a novel approach to synthesizing materials by controlling their weak out-of-plane van der Waals (vdW) interactions. Artificial stacks of different types of 2D materials are a novel concept in materials synthesis, with the stacks not limited by rigid chemical bonds nor by lattice constants. This offers plenty of opportunities to explore new physics, chemistry, and engineering. An often-overlooked characteristic of vdW stacks is the well-defined 2D nanospace between the layers, which provides unique physical phenomena and a rich field for synthesis of novel materials. Applying the science of intercalation compounds to 2D materials provides new insights and expectations about the use of the vdW nanospace. We call this nascent field of science '2.5 dimensional (2.5D) materials,' to acknowledge the important extra degree of freedom beyond 2D materials. 2.5D materials not only offer a new field of scientific research, but also contribute to the development of practical applications, and will lead to future social innovation. In this paper, we introduce the new scientific concept of this science of '2.5D materials' and review recent research developments based on this new scientific concept.
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Affiliation(s)
- Hiroki Ago
- Global Innovation Center, Kyushu University, Fukuoka, Japan
- CONTACT Hiroki Ago Global Innovation Center, Kyushu University, Fukuoka816-8580, Japan
| | - Susumu Okada
- Graduate School of Pure and Applied Sciences, University of Tsukuba, Ibaraki, Japan
| | - Yasumitsu Miyata
- Department of Physics, Tokyo Metropolitan University, Hachioji, Japan
| | | | | | - Kosei Ueno
- Department of Chemistry, Faculty of Science, Hokkaido University, Hokkaido, Japan
| | - Kosuke Nagashio
- Department of Materials Engineering, University of Tokyo, Tokyo, Japan
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